TW200629358A - Gate valve device, treatment system and seal member replacing method - Google Patents

Gate valve device, treatment system and seal member replacing method

Info

Publication number
TW200629358A
TW200629358A TW094144854A TW94144854A TW200629358A TW 200629358 A TW200629358 A TW 200629358A TW 094144854 A TW094144854 A TW 094144854A TW 94144854 A TW94144854 A TW 94144854A TW 200629358 A TW200629358 A TW 200629358A
Authority
TW
Taiwan
Prior art keywords
seal member
opening
carriage
valve element
maintenance
Prior art date
Application number
TW094144854A
Other languages
English (en)
Chinese (zh)
Other versions
TWI362056B (de
Inventor
Tsutomu Hiroki
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200629358A publication Critical patent/TW200629358A/zh
Application granted granted Critical
Publication of TWI362056B publication Critical patent/TWI362056B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0441—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3406—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door or cover
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/28—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with resilient valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)
  • Physical Vapour Deposition (AREA)
TW094144854A 2004-12-17 2005-12-16 Gate valve device, treatment system and seal member replacing method TW200629358A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004366470A JP4010314B2 (ja) 2004-12-17 2004-12-17 ゲートバルブ装置、処理システム及びシール部材の交換方法

Publications (2)

Publication Number Publication Date
TW200629358A true TW200629358A (en) 2006-08-16
TWI362056B TWI362056B (de) 2012-04-11

Family

ID=36671343

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094144854A TW200629358A (en) 2004-12-17 2005-12-16 Gate valve device, treatment system and seal member replacing method

Country Status (5)

Country Link
JP (1) JP4010314B2 (de)
KR (1) KR100756110B1 (de)
CN (1) CN100383918C (de)
CH (1) CH698528B1 (de)
TW (1) TW200629358A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514502B (zh) * 2006-08-23 2015-12-21 周星工程股份有限公司 方便維護用之基板對準裝置

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4763786B2 (ja) * 2006-06-19 2011-08-31 日本バルカー工業株式会社 弁体部及びゲートバルブ装置
WO2008018405A1 (fr) 2006-08-11 2008-02-14 Nippon Valqua Industries, Ltd. Vanne
JP4435799B2 (ja) 2007-03-19 2010-03-24 東京エレクトロン株式会社 開閉バルブ及び該開閉バルブを備えた処理装置
TWI381470B (zh) 2007-05-08 2013-01-01 Tokyo Electron Ltd And a treatment device provided with the valve
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
DE102010053411B4 (de) 2009-12-15 2023-07-06 Vat Holding Ag Vakuumventil
JP5389684B2 (ja) * 2010-01-29 2014-01-15 東京エレクトロン株式会社 ゲートバルブ及びそれを用いた基板処理装置
KR101175266B1 (ko) * 2010-04-19 2012-08-21 주성엔지니어링(주) 기판 처리장치
CN103206552A (zh) * 2012-01-16 2013-07-17 中国科学院微电子研究所 真空隔离阀装置
JP5898523B2 (ja) * 2012-02-20 2016-04-06 スタンレー電気株式会社 真空処理装置および真空処理装置を用いた物品の製造方法
CN104109847A (zh) * 2013-04-16 2014-10-22 北京北方微电子基地设备工艺研究中心有限责任公司 一种反应腔室及等离子体加工设备
JP5578382B2 (ja) * 2013-07-31 2014-08-27 株式会社村田製作所 開閉バルブ
KR101725249B1 (ko) * 2014-11-25 2017-04-27 프리시스 주식회사 진공밸브
CN105369207B (zh) * 2015-12-02 2018-03-30 武汉华星光电技术有限公司 快速更换真空腔体内消耗件的装置与方法
JP2019012670A (ja) * 2017-07-03 2019-01-24 日新イオン機器株式会社 弁体装置、弁体装置モジュール
WO2019101318A1 (en) * 2017-11-23 2019-05-31 Applied Materials, Inc. Lock valve for vacuum sealing, vacuum chamber and vacuum processing system
CN110242758B (zh) * 2018-03-09 2021-02-26 (株）Np控股 密封构件更换型闸阀系统、密封板及密封板用料盒
KR102538656B1 (ko) * 2018-03-09 2023-06-01 (주) 엔피홀딩스 실링 부재 교체형 게이트 밸브 시스템과, 실링 플레이트 및 실링 플레이트용 매거진
KR102121057B1 (ko) * 2018-06-11 2020-06-16 (주) 엔피홀딩스 실링 부재 교체형 게이트 밸브 시스템과, 실링 플레이트 및 실링 플레이트용 매거진
EP3779256A1 (de) * 2018-04-02 2021-02-17 Shimadzu Corporation Vakuumvorrichtung und analysevorrichtung
JP6412670B1 (ja) * 2018-04-13 2018-10-24 株式会社ブイテックス ゲートバルブ
KR102278560B1 (ko) * 2019-06-13 2021-07-19 (주) 엔피홀딩스 게이트 밸브 시스템 및 이의 제어 방법
KR102131284B1 (ko) * 2018-06-20 2020-07-07 (주) 엔피홀딩스 도어 교체형 게이트 밸브 시스템
WO2019240516A2 (ko) * 2018-06-15 2019-12-19 (주) 엔피홀딩스 게이트 밸브 시스템 및 이의 제어 방법
KR102127189B1 (ko) * 2018-06-20 2020-06-29 (주) 엔피홀딩스 도어 교체형 게이트 밸브 시스템
KR102131285B1 (ko) * 2018-06-15 2020-07-07 (주) 엔피홀딩스 게이트밸브
KR102150064B1 (ko) * 2018-07-04 2020-08-31 주식회사 에이씨엔 도어 순환 교체형 게이트 밸브 시스템
KR102224594B1 (ko) * 2019-06-20 2021-03-08 (주) 엔피홀딩스 게이트 밸브 시스템
KR102741487B1 (ko) * 2019-11-01 2024-12-11 주식회사 원익아이피에스 가스밸브조립체, 그를 가지는 기판처리장치 및 기판처리시스템
CN113130345B (zh) * 2019-12-31 2023-12-08 中微半导体设备(上海)股份有限公司 基片处理系统及其维护方法
JP7548671B2 (ja) 2021-03-17 2024-09-10 東京エレクトロン株式会社 開閉装置及び搬送室
US11933416B2 (en) 2021-07-16 2024-03-19 Changxin Memory Technologies, Inc. Gate valve device, cleaning method and mechanical apparatus
CN119419141B (zh) * 2024-11-07 2025-11-14 拓荆创益(沈阳)半导体设备有限公司 一种真空传输阀门、控制方法及半导体薄膜设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
JP3335010B2 (ja) * 1994-08-19 2002-10-15 東京エレクトロン株式会社 処理装置
CN1035566C (zh) * 1994-12-28 1997-08-06 浙江大学 双向真空阀
US6267545B1 (en) * 1999-03-29 2001-07-31 Lam Research Corporation Semiconductor processing platform architecture having processing module isolation capabilities
JP2000346238A (ja) * 1999-06-02 2000-12-15 Tokyo Electron Ltd バルブ
TWI290589B (en) * 2000-10-02 2007-12-01 Tokyo Electron Ltd Vacuum processing device
JP3554847B2 (ja) * 2001-07-30 2004-08-18 東京エレクトロン株式会社 熱処理装置
KR100439036B1 (ko) * 2002-08-05 2004-07-03 삼성전자주식회사 반도체 제조설비
KR20040043932A (ko) * 2002-11-20 2004-05-27 삼성전자주식회사 게이트 밸브

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514502B (zh) * 2006-08-23 2015-12-21 周星工程股份有限公司 方便維護用之基板對準裝置

Also Published As

Publication number Publication date
CN100383918C (zh) 2008-04-23
KR100756110B1 (ko) 2007-09-05
CH698528B1 (de) 2009-08-31
JP2006170373A (ja) 2006-06-29
JP4010314B2 (ja) 2007-11-21
CN1790617A (zh) 2006-06-21
KR20060069287A (ko) 2006-06-21
TWI362056B (de) 2012-04-11

Similar Documents

Publication Publication Date Title
TW200629358A (en) Gate valve device, treatment system and seal member replacing method
DK1201264T3 (da) Engangskassette med tætningsmembran og ventilaktuator
WO2008139937A1 (ja) バルブおよび該バルブを備えた処理装置
EP1464529A3 (de) Kraftstoffbehälterverschluss
PL1577592T3 (pl) Zawór suwakowy
DE602008005598D1 (de) Verschlussvorrichtung für Kraftstofftank
PT1604138E (pt) Válvula de descompressão
KR20150027953A (ko) 커버부재 연동 안전 수처리장치
SG137731A1 (en) Process apparatuses
NO20062462L (no) Ventil, saerlig en gassikkerhetsventil
KR101106039B1 (ko) 수문 개폐장치
TW200604457A (en) Gate valve and vacuum gate valve
AR034412A1 (es) Un miembro de purga que se proporciona en un montaje para valvula de purga, un metodo para operar un montaje para valvula de purga y un miembro de camara de aire
US20180195624A1 (en) Vacuum valve
TW200506182A (en) Thermostat mounting structure
EP1845292A3 (de) Schieberanordnung
ATE313744T1 (de) Vorrichtung zur abdichtung
EP1413733A3 (de) Abdichtvorrichtung
PT1320699E (pt) Dispositivo de limpeza para um sistema de selagem e metodo para a utilizacao do mesmo
CN116146088B (zh) 一种半导体工艺自密封开关门结构
KR101758802B1 (ko) 게이트 밸브의 프로텍션 장치
ATE457436T1 (de) Ventil
CN106678848B (zh) 锅炉节能安全自控装置
EP1632701A4 (de) Flachventilvorrichtung
ES2065207B1 (es) Valvula de compuerta para el cierre hermetico de una tuberia.

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees