TW200714116A - Silicon microphone - Google Patents
Silicon microphoneInfo
- Publication number
- TW200714116A TW200714116A TW095117331A TW95117331A TW200714116A TW 200714116 A TW200714116 A TW 200714116A TW 095117331 A TW095117331 A TW 095117331A TW 95117331 A TW95117331 A TW 95117331A TW 200714116 A TW200714116 A TW 200714116A
- Authority
- TW
- Taiwan
- Prior art keywords
- backplate
- diaphragm
- surrounding area
- area
- surrounding
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052710 silicon Inorganic materials 0.000 title abstract 2
- 239000010703 silicon Substances 0.000 title abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 abstract 1
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG2005003110 | 2005-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200714116A true TW200714116A (en) | 2007-04-01 |
Family
ID=57911463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095117331A TW200714116A (en) | 2005-05-16 | 2006-05-16 | Silicon microphone |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200714116A (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI469912B (zh) * | 2008-09-25 | 2015-01-21 | United Microelectronics Corp | 微機電式電聲換能器結構及其製造方法 |
| TWI472235B (zh) * | 2009-05-29 | 2015-02-01 | Neomems Technologies Inc Wuxi | 矽麥克風封裝體 |
| US9783408B2 (en) | 2008-09-19 | 2017-10-10 | United Microelectronics Corp. | Structure of MEMS electroacoustic transducer |
-
2006
- 2006-05-16 TW TW095117331A patent/TW200714116A/zh unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9783408B2 (en) | 2008-09-19 | 2017-10-10 | United Microelectronics Corp. | Structure of MEMS electroacoustic transducer |
| TWI469912B (zh) * | 2008-09-25 | 2015-01-21 | United Microelectronics Corp | 微機電式電聲換能器結構及其製造方法 |
| TWI472235B (zh) * | 2009-05-29 | 2015-02-01 | Neomems Technologies Inc Wuxi | 矽麥克風封裝體 |
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