TW202500541A - 半導體液體藥劑及半導體液體藥劑的製造方法 - Google Patents
半導體液體藥劑及半導體液體藥劑的製造方法 Download PDFInfo
- Publication number
- TW202500541A TW202500541A TW113117119A TW113117119A TW202500541A TW 202500541 A TW202500541 A TW 202500541A TW 113117119 A TW113117119 A TW 113117119A TW 113117119 A TW113117119 A TW 113117119A TW 202500541 A TW202500541 A TW 202500541A
- Authority
- TW
- Taiwan
- Prior art keywords
- less
- continuous reactor
- gas
- content
- semiconductor liquid
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07B—GENERAL METHODS OF ORGANIC CHEMISTRY; APPARATUS THEREFOR
- C07B61/00—Other general methods
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/03—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2
- C07C29/04—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2 by hydration of carbon-to-carbon double bonds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C31/00—Saturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
- C07C31/02—Monohydroxylic acyclic alcohols
- C07C31/10—Monohydroxylic acyclic alcohols containing three carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023-096884 | 2023-06-13 | ||
| JP2023096884 | 2023-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202500541A true TW202500541A (zh) | 2025-01-01 |
Family
ID=93851967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW113117119A TW202500541A (zh) | 2023-06-13 | 2024-05-09 | 半導體液體藥劑及半導體液體藥劑的製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7634139B1 (ar) |
| KR (1) | KR20260021637A (ar) |
| CN (1) | CN121039789A (ar) |
| TW (1) | TW202500541A (ar) |
| WO (1) | WO2024257504A1 (ar) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4754058B2 (ja) * | 2000-10-16 | 2011-08-24 | 三井化学株式会社 | イソプロピルアルコールの製造方法 |
| KR102313108B1 (ko) * | 2016-06-17 | 2021-10-15 | 가부시키가이샤 도쿠야마 | 이소프로필 알코올의 제조 방법 및 불순물이 저감된 이소프로필 알코올 |
| JP6980952B1 (ja) * | 2020-04-02 | 2021-12-15 | 株式会社トクヤマ | 半導体処理液及びその製造方法 |
| US20250171718A1 (en) * | 2022-03-16 | 2025-05-29 | Tokuyama Corporation | Semiconductor cleaning liquid and method for producing semiconductor cleaning liquid |
-
2024
- 2024-05-07 KR KR1020257041758A patent/KR20260021637A/ko active Pending
- 2024-05-07 CN CN202480027193.1A patent/CN121039789A/zh active Pending
- 2024-05-07 JP JP2024551616A patent/JP7634139B1/ja active Active
- 2024-05-07 WO PCT/JP2024/016925 patent/WO2024257504A1/ja not_active Ceased
- 2024-05-09 TW TW113117119A patent/TW202500541A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP7634139B1 (ja) | 2025-02-20 |
| KR20260021637A (ko) | 2026-02-13 |
| CN121039789A (zh) | 2025-11-28 |
| WO2024257504A1 (ja) | 2024-12-19 |
| JPWO2024257504A1 (ar) | 2024-12-19 |
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