TW202509353A - 真空泵 - Google Patents

真空泵 Download PDF

Info

Publication number
TW202509353A
TW202509353A TW113129162A TW113129162A TW202509353A TW 202509353 A TW202509353 A TW 202509353A TW 113129162 A TW113129162 A TW 113129162A TW 113129162 A TW113129162 A TW 113129162A TW 202509353 A TW202509353 A TW 202509353A
Authority
TW
Taiwan
Prior art keywords
flow path
gas
pump
mentioned
vacuum pump
Prior art date
Application number
TW113129162A
Other languages
English (en)
Chinese (zh)
Inventor
中辻重義
鈴木春樹
Original Assignee
日商埃地沃茲日本有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商埃地沃茲日本有限公司 filed Critical 日商埃地沃茲日本有限公司
Publication of TW202509353A publication Critical patent/TW202509353A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW113129162A 2023-08-21 2024-08-05 真空泵 TW202509353A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023-134192 2023-08-21
JP2023134192A JP7764434B2 (ja) 2023-08-21 2023-08-21 真空ポンプ

Publications (1)

Publication Number Publication Date
TW202509353A true TW202509353A (zh) 2025-03-01

Family

ID=94731905

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113129162A TW202509353A (zh) 2023-08-21 2024-08-05 真空泵

Country Status (4)

Country Link
JP (1) JP7764434B2 (fr)
CN (1) CN121794477A (fr)
TW (1) TW202509353A (fr)
WO (1) WO2025041797A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4585807A1 (fr) * 2025-05-15 2025-07-16 Pfeiffer Vacuum Technology AG Système à vide et procédé de fonctionnement d'un tel système à vide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5785494B2 (ja) 2009-08-28 2015-09-30 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
JP7224168B2 (ja) * 2017-12-27 2023-02-17 エドワーズ株式会社 真空ポンプおよびこれに用いられる固定部品、排気ポート、制御手段
JP2022135716A (ja) * 2021-03-05 2022-09-15 エドワーズ株式会社 真空ポンプ、及び、真空排気装置

Also Published As

Publication number Publication date
JP2025029487A (ja) 2025-03-06
CN121794477A (zh) 2026-04-03
JP7764434B2 (ja) 2025-11-05
WO2025041797A1 (fr) 2025-02-27

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