TW365586B - Transposition unit for object carrier - Google Patents

Transposition unit for object carrier

Info

Publication number
TW365586B
TW365586B TW086102445A TW86102445A TW365586B TW 365586 B TW365586 B TW 365586B TW 086102445 A TW086102445 A TW 086102445A TW 86102445 A TW86102445 A TW 86102445A TW 365586 B TW365586 B TW 365586B
Authority
TW
Taiwan
Prior art keywords
plate
fitted
object carrier
transposition unit
transposition
Prior art date
Application number
TW086102445A
Other languages
English (en)
Chinese (zh)
Inventor
Kenichi Oi
Original Assignee
Tabai Espec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabai Espec Corp filed Critical Tabai Espec Corp
Application granted granted Critical
Publication of TW365586B publication Critical patent/TW365586B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3214—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicle
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW086102445A 1996-09-20 1997-02-27 Transposition unit for object carrier TW365586B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8271830A JP3062101B2 (ja) 1996-09-20 1996-09-20 物品積載容器移載装置

Publications (1)

Publication Number Publication Date
TW365586B true TW365586B (en) 1999-08-01

Family

ID=17505462

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086102445A TW365586B (en) 1996-09-20 1997-02-27 Transposition unit for object carrier

Country Status (3)

Country Link
JP (1) JP3062101B2 (ja)
KR (1) KR100246507B1 (ja)
TW (1) TW365586B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5179041B2 (ja) * 2006-10-24 2013-04-10 日本エンジニアリング株式会社 対象物移動装置
JP5864382B2 (ja) * 2012-08-21 2016-02-17 ルネサスエレクトロニクス株式会社 半導体装置のテスト方法
CN104375508B (zh) * 2014-12-05 2017-05-24 国家电网公司 可升降agv接驳台
CN109969720A (zh) * 2017-12-28 2019-07-05 研祥智能科技股份有限公司 一种基于移载装置的自动化生产线
CN109303506A (zh) * 2018-04-09 2019-02-05 南通佳景休闲洁具有限公司 一种智能洗浴理疗康体装置
KR101974788B1 (ko) * 2018-10-01 2019-09-05 박종배 번인 테스트 장치
CN109968322B (zh) * 2019-04-24 2021-05-28 苏州云骐智能科技有限公司 一种数据服务器自动运送机器人及其应用系统控制方法
CN110282361B (zh) * 2019-05-05 2020-09-18 南京麒麟科学仪器集团有限公司 一种自动引导小车的可变式装夹装置及物品定位装夹方法
CN112158578B (zh) * 2020-10-12 2024-08-13 东莞阿李自动化股份有限公司 老化测试传输系统
KR102742964B1 (ko) * 2020-12-30 2024-12-16 엠에스브이 시스템즈 앤 서비시즈 피티이 리미티드 반도체 번인 공정을 위한 장치, 이송 방법, 챔버 및 프레임
CN114683017B (zh) * 2020-12-31 2023-08-22 华为技术有限公司 一种设备装配系统及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829805B2 (ja) * 1988-01-21 1996-03-27 村田機械株式会社 自動倉庫
JPH047509A (ja) * 1990-04-25 1992-01-10 Nec Corp 半導体光導波路
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム
JPH0878497A (ja) * 1994-08-31 1996-03-22 Ando Electric Co Ltd 移載装置

Also Published As

Publication number Publication date
JP3062101B2 (ja) 2000-07-10
JPH1095507A (ja) 1998-04-14
KR19980023976A (ko) 1998-07-06
KR100246507B1 (ko) 2000-04-01

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent