TWI342967B - Coordinates detection apparatus and subject inspection apparatus - Google Patents

Coordinates detection apparatus and subject inspection apparatus Download PDF

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Publication number
TWI342967B
TWI342967B TW095100331A TW95100331A TWI342967B TW I342967 B TWI342967 B TW I342967B TW 095100331 A TW095100331 A TW 095100331A TW 95100331 A TW95100331 A TW 95100331A TW I342967 B TWI342967 B TW I342967B
Authority
TW
Taiwan
Prior art keywords
subject
coordinates detection
guiding member
subject inspection
inspection apparatus
Prior art date
Application number
TW095100331A
Other languages
English (en)
Chinese (zh)
Other versions
TW200628902A (en
Inventor
Hiroshi Kato
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200628902A publication Critical patent/TW200628902A/zh
Application granted granted Critical
Publication of TWI342967B publication Critical patent/TWI342967B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/417—Imaging recording with co-ordinate markings

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW095100331A 2005-01-18 2006-01-04 Coordinates detection apparatus and subject inspection apparatus TWI342967B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005010239A JP4653500B2 (ja) 2005-01-18 2005-01-18 座標検出装置及び被検体検査装置

Publications (2)

Publication Number Publication Date
TW200628902A TW200628902A (en) 2006-08-16
TWI342967B true TWI342967B (en) 2011-06-01

Family

ID=36840076

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095100331A TWI342967B (en) 2005-01-18 2006-01-04 Coordinates detection apparatus and subject inspection apparatus

Country Status (4)

Country Link
JP (1) JP4653500B2 (2)
KR (1) KR100827342B1 (2)
CN (1) CN100516771C (2)
TW (1) TWI342967B (2)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4517354B2 (ja) * 2004-11-08 2010-08-04 株式会社ニコン 露光装置及びデバイス製造方法
CN101446699B (zh) * 2008-12-30 2010-06-02 友达光电股份有限公司 检测装置与用于此检测装置的检测方法
TWI474068B (zh) * 2010-05-05 2015-02-21 Hon Hai Prec Ind Co Ltd 位移量測裝置
CN102253506B (zh) * 2010-05-21 2019-05-14 京东方科技集团股份有限公司 液晶显示基板的制造方法及检测修补设备
US8854616B2 (en) 2011-08-03 2014-10-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof
CN102393576A (zh) * 2011-08-03 2012-03-28 深圳市华星光电技术有限公司 液晶显示器中玻璃基板的目视检查机及检查方法
CN102927928B (zh) * 2012-10-30 2016-08-17 三峡大学 固形物上端面扫描仪及扫描方法
CN103075970B (zh) * 2012-12-27 2015-07-01 深圳市华星光电技术有限公司 测长装置直交度补偿方法及使用该方法的测长装置
US9080865B2 (en) 2012-12-27 2015-07-14 Shenzhen China Star Optoelectronics Technology Co., Ltd Orthogonality compensation method for length measurement device and length measurement device using same
KR101751801B1 (ko) * 2016-05-18 2017-06-29 한국기계연구원 기판 결함 검사 장치 및 이를 이용한 검사 방법
JP2018059830A (ja) * 2016-10-06 2018-04-12 川崎重工業株式会社 外観検査方法
CN106770355A (zh) * 2016-12-09 2017-05-31 武汉华星光电技术有限公司 一种cf涂布机的异物检测装置及方法、cf涂布机
CN106773189A (zh) * 2017-03-27 2017-05-31 武汉华星光电技术有限公司 宏观自动检查机及提升显示异常区域量测效率的方法
CN107014826A (zh) * 2017-04-12 2017-08-04 武汉华星光电技术有限公司 Cf基板微观检查机
CN108613990A (zh) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 一种微观和宏观复合检查机
CN109141303B (zh) * 2018-08-14 2020-06-19 哈尔滨工业大学 一种构件几何缺陷检测系统及检测方法
CN114858821A (zh) * 2022-04-11 2022-08-05 彩虹（合肥）液晶玻璃有限公司 一种玻璃的检修方法及设备
CN116223376A (zh) * 2023-02-20 2023-06-06 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板复检装置
CN116448371B (zh) * 2023-06-16 2023-08-25 苗疆(武汉)机器人科技有限公司 一种工业机器人多角度检测装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201144A (ja) * 1988-02-05 1989-08-14 Nikon Corp 散乱光検出装置
JP3190406B2 (ja) * 1992-02-18 2001-07-23 オリンパス光学工業株式会社 欠陥検査装置
JPH10206121A (ja) 1997-01-23 1998-08-07 Laser Tec Kk Ｘｙステージの回動検出装置
JPH1134299A (ja) * 1997-07-18 1999-02-09 Shinohara Tekkosho:Kk 見当マークの検出方法
JP2000266511A (ja) * 1999-03-19 2000-09-29 Olympus Optical Co Ltd 検査装置
JP2002082067A (ja) * 2000-09-05 2002-03-22 Olympus Optical Co Ltd 基板検査装置
JP2002267620A (ja) * 2001-03-09 2002-09-18 Hitachi Kokusai Electric Inc 板状物体目視検査装置
JP4690584B2 (ja) * 2001-06-06 2011-06-01 有限会社ユナテック 表面評価装置及び表面評価方法
JP2003002934A (ja) * 2001-06-25 2003-01-08 Toagosei Co Ltd 水性樹脂分散体及びその製造方法並びに用途
JP4347028B2 (ja) * 2003-12-01 2009-10-21 株式会社日立国際電気 目視検査装置

Also Published As

Publication number Publication date
CN100516771C (zh) 2009-07-22
KR20060083890A (ko) 2006-07-21
JP2006200917A (ja) 2006-08-03
KR100827342B1 (ko) 2008-05-06
TW200628902A (en) 2006-08-16
CN1808055A (zh) 2006-07-26
JP4653500B2 (ja) 2011-03-16

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MM4A Annulment or lapse of patent due to non-payment of fees