TWI498547B - 光學檢測裝置 - Google Patents

光學檢測裝置 Download PDF

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Publication number
TWI498547B
TWI498547B TW101137140A TW101137140A TWI498547B TW I498547 B TWI498547 B TW I498547B TW 101137140 A TW101137140 A TW 101137140A TW 101137140 A TW101137140 A TW 101137140A TW I498547 B TWI498547 B TW I498547B
Authority
TW
Taiwan
Prior art keywords
detecting
substrate
compressed air
adjusting
detection
Prior art date
Application number
TW101137140A
Other languages
English (en)
Chinese (zh)
Other versions
TW201344181A (zh
Inventor
Jae-Seung Lee
Duk-Woo Kim
Original Assignee
Gigavis Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gigavis Co Ltd filed Critical Gigavis Co Ltd
Publication of TW201344181A publication Critical patent/TW201344181A/zh
Application granted granted Critical
Publication of TWI498547B publication Critical patent/TWI498547B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Nonlinear Science (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Quality & Reliability (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
TW101137140A 2012-04-26 2012-10-08 光學檢測裝置 TWI498547B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120044005A KR101325761B1 (ko) 2012-04-26 2012-04-26 광학 검사장치

Publications (2)

Publication Number Publication Date
TW201344181A TW201344181A (zh) 2013-11-01
TWI498547B true TWI498547B (zh) 2015-09-01

Family

ID=49461708

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101137140A TWI498547B (zh) 2012-04-26 2012-10-08 光學檢測裝置

Country Status (4)

Country Link
JP (1) JP5650708B2 (ja)
KR (1) KR101325761B1 (ja)
CN (1) CN103376262B (ja)
TW (1) TWI498547B (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104729433A (zh) * 2013-12-23 2015-06-24 珠海格力电器股份有限公司 产品端面平整度的检验装置及方法
US9908158B2 (en) * 2014-03-10 2018-03-06 Ametek, Inc. Air flow mechanism for image capture and vision systems
JP6040197B2 (ja) * 2014-05-26 2016-12-07 Ckd株式会社 検査装置及びｐｔｐ包装機
KR101659048B1 (ko) * 2014-07-28 2016-09-23 한국기계연구원 플렉시블 디바이스 와피지 패널 표면 검사 장치 및 방법
JP2018037311A (ja) 2016-08-31 2018-03-08 住友化学株式会社 非水電解液二次電池用セパレータの製造方法
KR101961707B1 (ko) * 2017-03-15 2019-03-25 주식회사 태루 바이오 메디컬용 인식칩의 포장각도 검사장치
CN107328359B (zh) * 2017-07-03 2021-12-03 京东方科技集团股份有限公司 用于检测墨滴的装置和方法
CN108982547B (zh) * 2018-05-02 2020-12-29 芜湖立普德机械科技有限公司 一种用于检测玻璃基板凹陷的装置
CN108982362A (zh) * 2018-06-27 2018-12-11 南京中电熊猫液晶显示科技有限公司 一种基板检测支撑装置及其检测方法
WO2020208747A1 (ja) * 2019-04-10 2020-10-15 堺ディスプレイプロダクト株式会社 フレキシブルディスプレイの色ムラ検査装置
GB202004933D0 (en) * 2020-04-03 2020-05-20 Renishaw Plc Measuring device and method
JP7495282B2 (ja) * 2020-06-23 2024-06-04 Juki株式会社 検査装置及び検査方法
CN113156057B (zh) * 2021-03-05 2024-07-30 北京元亨利业科技有限公司 一种烟感探测器标定装置
CN113433134A (zh) * 2021-06-24 2021-09-24 深圳中科飞测科技股份有限公司 检测方法、检测设备及计算机可读存储介质
CN114113120A (zh) * 2021-11-29 2022-03-01 博众精工科技股份有限公司 一种电池包底部损伤的检测方法、系统、设备和介质
CN114324058A (zh) * 2021-12-31 2022-04-12 山东旭日石墨新材料科技有限公司 一种石墨电极生制品称重检测装置
KR102435450B1 (ko) * 2022-02-14 2022-08-24 (주)넥스캠 포장지를 위한 ocr 검사장치
KR102439071B1 (ko) 2022-04-06 2022-09-01 주식회사 니코메디칼 드레싱 밴드의 불량품 선별 장치
KR102443758B1 (ko) 2022-04-06 2022-09-16 주식회사 니코메디칼 드레싱 밴드 검사 장치
CN120942891B (zh) * 2025-10-20 2026-02-10 泰山石膏(四川)有限公司 一种石膏板在线检测输送控制方法、系统、设备及介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060244907A1 (en) * 2004-12-06 2006-11-02 Simmons John C Specially coherent optics
TWM319415U (en) * 2007-04-10 2007-09-21 Gainner Technological Co Ltd Testing system for optical thin film
US7505561B1 (en) * 2006-11-20 2009-03-17 Michael Keith Fuller Schlieren-type radiography using a line source and focusing optics
TW201137410A (en) * 2010-03-16 2011-11-01 Sumitomo Chemical Co Method for manufacturing optical sheet

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* Cited by examiner, † Cited by third party
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JPS60180569A (ja) * 1984-02-27 1985-09-14 Koasa Shoji Kk 海苔の品質連続判定仕分け装置
JP3377628B2 (ja) * 1994-11-18 2003-02-17 三菱重工業株式会社 印刷品質検査装置の照明装置
JP3110707B2 (ja) * 1997-08-25 2000-11-20 株式会社日本マクシス 水晶基板用載置台及び水晶基板の傷検査装置
JP2000304515A (ja) * 1999-04-16 2000-11-02 Rengo Co Ltd 加工シートの検査装置
JP2004294739A (ja) 2003-03-27 2004-10-21 Pentax Corp 光学処理装置、基板固定装置および基板固定方法
JP2005308636A (ja) * 2004-04-23 2005-11-04 Dainippon Screen Mfg Co Ltd 光学式外観検査方法および光学式外観検査装置
JP2008058004A (ja) 2006-08-29 2008-03-13 Dainippon Printing Co Ltd 印刷物検査装置及び印刷物検査方法、印刷物押さえ装置及び印刷物押さえ方法
KR100804033B1 (ko) * 2007-10-04 2008-02-18 주식회사 쓰리비 시스템 광학 필름 검사장치
JP2009229081A (ja) * 2008-03-19 2009-10-08 Olympus Corp ミクロ検査装置及びミクロ検査方法
JP2009229301A (ja) * 2008-03-24 2009-10-08 Olympus Corp 基板検査装置
JP5396660B2 (ja) 2009-01-08 2014-01-22 独立行政法人 国立印刷局 印刷物の品質検査装置
JP2011073421A (ja) * 2009-10-02 2011-04-14 Futec Inc 印刷検査装置
CN102032883B (zh) * 2011-01-24 2012-02-01 三一重工股份有限公司 臂架碰撞检测系统及检测臂架与障碍物碰撞的方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060244907A1 (en) * 2004-12-06 2006-11-02 Simmons John C Specially coherent optics
US7505561B1 (en) * 2006-11-20 2009-03-17 Michael Keith Fuller Schlieren-type radiography using a line source and focusing optics
TWM319415U (en) * 2007-04-10 2007-09-21 Gainner Technological Co Ltd Testing system for optical thin film
TW201137410A (en) * 2010-03-16 2011-11-01 Sumitomo Chemical Co Method for manufacturing optical sheet

Also Published As

Publication number Publication date
JP2013228358A (ja) 2013-11-07
CN103376262B (zh) 2016-04-27
KR20130120831A (ko) 2013-11-05
CN103376262A (zh) 2013-10-30
KR101325761B1 (ko) 2013-11-08
TW201344181A (zh) 2013-11-01
JP5650708B2 (ja) 2015-01-07

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