TWI589848B - 快速響應感測器殼體 - Google Patents

快速響應感測器殼體 Download PDF

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Publication number
TWI589848B
TWI589848B TW104134934A TW104134934A TWI589848B TW I589848 B TWI589848 B TW I589848B TW 104134934 A TW104134934 A TW 104134934A TW 104134934 A TW104134934 A TW 104134934A TW I589848 B TWI589848 B TW I589848B
Authority
TW
Taiwan
Prior art keywords
inner cavity
rtd
sensor assembly
thin film
housing
Prior art date
Application number
TW104134934A
Other languages
English (en)
Chinese (zh)
Other versions
TW201623928A (zh
Inventor
傑瑞米 奧西
葛拉漢 費雪
瑞恩 阿法拉
Original Assignee
瓦特洛威電子製造公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 瓦特洛威電子製造公司 filed Critical 瓦特洛威電子製造公司
Publication of TW201623928A publication Critical patent/TW201623928A/zh
Application granted granted Critical
Publication of TWI589848B publication Critical patent/TWI589848B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measuring Volume Flow (AREA)
TW104134934A 2014-10-24 2015-10-23 快速響應感測器殼體 TWI589848B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462068596P 2014-10-24 2014-10-24

Publications (2)

Publication Number Publication Date
TW201623928A TW201623928A (zh) 2016-07-01
TWI589848B true TWI589848B (zh) 2017-07-01

Family

ID=54477321

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104134934A TWI589848B (zh) 2014-10-24 2015-10-23 快速響應感測器殼體

Country Status (7)

Country Link
US (2) US10571343B2 (fr)
EP (1) EP3209985B1 (fr)
JP (1) JP6804439B2 (fr)
KR (1) KR102376169B1 (fr)
CN (1) CN107076619B (fr)
TW (1) TWI589848B (fr)
WO (1) WO2016065344A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016114963B3 (de) * 2016-08-11 2018-01-11 Endress+Hauser Flowtec Ag Sensor für ein thermisches Durchflussmessgerät, ein thermisches Durchflussmessgerät und ein Verfahren zum Herstellen eines Sensors eines thermischen Durchflussmessgeräts
KR102276278B1 (ko) * 2019-11-05 2021-07-12 주식회사 이큐셀 반도체 공정 진단을 위한 플라즈마 센서 장치 및 이의 제조 방법
US11650106B2 (en) * 2020-12-30 2023-05-16 Rosemount Inc. Temperature probe with improved response time

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Also Published As

Publication number Publication date
JP6804439B2 (ja) 2020-12-23
US20200149977A1 (en) 2020-05-14
KR20170072252A (ko) 2017-06-26
EP3209985A1 (fr) 2017-08-30
JP2017532566A (ja) 2017-11-02
KR102376169B1 (ko) 2022-03-18
TW201623928A (zh) 2016-07-01
US11029217B2 (en) 2021-06-08
CN107076619B (zh) 2021-01-22
EP3209985B1 (fr) 2020-04-29
US20160116347A1 (en) 2016-04-28
US10571343B2 (en) 2020-02-25
CN107076619A (zh) 2017-08-18
WO2016065344A1 (fr) 2016-04-28

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