TWI615550B - 真空泵系統 - Google Patents

真空泵系統 Download PDF

Info

Publication number
TWI615550B
TWI615550B TW103114377A TW103114377A TWI615550B TW I615550 B TWI615550 B TW I615550B TW 103114377 A TW103114377 A TW 103114377A TW 103114377 A TW103114377 A TW 103114377A TW I615550 B TWI615550 B TW I615550B
Authority
TW
Taiwan
Prior art keywords
vacuum pump
filter
pump system
connection
channel
Prior art date
Application number
TW103114377A
Other languages
English (en)
Chinese (zh)
Other versions
TW201502379A (zh
Inventor
Hakim BOUHADID
海肯 波哈迪德
Serge Prieur-Blanc
薩齊 普瑞爾布蘭克
Original Assignee
Leybold Gmbh
藍伯德股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Gmbh, 藍伯德股份有限公司 filed Critical Leybold Gmbh
Publication of TW201502379A publication Critical patent/TW201502379A/zh
Application granted granted Critical
Publication of TWI615550B publication Critical patent/TWI615550B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/806—Pipes for fluids; Fittings therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
TW103114377A 2013-04-24 2014-04-21 真空泵系統 TWI615550B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013003819.5U DE202013003819U1 (de) 2013-04-24 2013-04-24 Vakuumpumpen-System
DE202013003819.5 2013-04-24

Publications (2)

Publication Number Publication Date
TW201502379A TW201502379A (zh) 2015-01-16
TWI615550B true TWI615550B (zh) 2018-02-21

Family

ID=50513901

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103114377A TWI615550B (zh) 2013-04-24 2014-04-21 真空泵系統

Country Status (5)

Country Link
EP (1) EP2989295B1 (fr)
CN (1) CN105164375B (fr)
DE (1) DE202013003819U1 (fr)
TW (1) TWI615550B (fr)
WO (1) WO2014173692A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201109529A (en) * 2009-08-11 2011-03-16 Oerlikon Leybold Vacuum Gmbh Vacuum pump system
TW201126068A (en) * 2009-11-11 2011-08-01 Edwards Ltd Vacuum pump
US20120034066A1 (en) * 2010-07-07 2012-02-09 Shimadzu Corporation Vacuum pump

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB661522A (en) * 1949-03-31 1951-11-21 Eureka Williams Corp Improvements in or relating to oil burners
JPS60256584A (ja) * 1984-05-30 1985-12-18 Honjiyou Chem Kk 高真空装置
DE8905452U1 (de) * 1989-04-29 1989-08-10 Leybold AG, Zweigniederlassung Köln, 5000 Köln Filter für den Einsatz bei Vakuumanlagen
DE59010310D1 (de) * 1990-03-27 1996-06-05 Leybold Ag Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
NL9200076A (nl) * 1992-01-16 1993-08-16 Leybold B V Werkwijze, droge meertrapspomp en plasmascrubber voor het omvormen van reactieve gassen.
GB9615859D0 (en) * 1996-07-29 1996-09-11 Boc Group Plc Processes and apparatus for the scrubbing of exhaust gas streams
SG97943A1 (en) * 1999-10-04 2003-08-20 Ebara Corp Vacuum exhaust system
US6325932B1 (en) * 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置
CN200987786Y (zh) * 2006-12-29 2007-12-12 河南核工程空气净化技术有限责任公司 箱室进风净化装置
JP2010138725A (ja) * 2008-12-09 2010-06-24 Toyota Industries Corp 真空ポンプ装置
GB201005273D0 (en) * 2010-03-30 2010-05-12 Edwards Ltd Scroll compressor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201109529A (en) * 2009-08-11 2011-03-16 Oerlikon Leybold Vacuum Gmbh Vacuum pump system
TW201126068A (en) * 2009-11-11 2011-08-01 Edwards Ltd Vacuum pump
US20120034066A1 (en) * 2010-07-07 2012-02-09 Shimadzu Corporation Vacuum pump

Also Published As

Publication number Publication date
CN105164375A (zh) 2015-12-16
TW201502379A (zh) 2015-01-16
WO2014173692A1 (fr) 2014-10-30
EP2989295B1 (fr) 2019-08-28
CN105164375B (zh) 2018-10-16
DE202013003819U1 (de) 2014-07-25
EP2989295A1 (fr) 2016-03-02

Similar Documents

Publication Publication Date Title
AU2012319198A8 (en) Dust collector with a constant suction force
CN104729166B (zh) 立式油分离器及空调系统
MX375101B (es) Sistema de filtración convertible.
KR20240055892A (ko) 여과 요소를 구비한 진공 펌프
EP4159252A3 (fr) Appareil de filtration
EP4450106A3 (fr) Appareil de filtration de particules liquides à partir d'un flux de gaz inspiratoire d'un circuit respiratoire de patient affilié à un ventilateur et/ou un système d'administration d'oxyde nitrique
CN205199104U (zh) 一种液体管道用过滤器
CN105764586A (zh) 具有旁通过滤件的过滤元件和过滤系统
TWI615550B (zh) 真空泵系統
KR101573682B1 (ko) 스트레이너장치
JP2016519238A5 (fr)
CN103721474B (zh) 过滤装置，尤其燃料过滤器或油过滤器
JP2013128894A (ja) 気液分離器
CN107002609A (zh) 具有卡口连接件的清洁侧水分离过滤元件和具有此种过滤元件的燃料过滤器
JP6032943B2 (ja) 気液分離器
CN103867438A (zh) 泵
JP2011143364A (ja) 気液分離器
CN205055588U (zh) 一种管道过滤器
JP2010162480A (ja) 気液分離器
CN110180249A (zh) 软水控制阀带前置过滤的快接接头
CN212881309U (zh) 一种高压水精细过滤结构
KR101593810B1 (ko) 개폐가 용이한 필터하우징
CN202762223U (zh) 一种旋风分离式过滤器
EP2757072A1 (fr) Système de dérivation de fluide
CN106390583A (zh) 过滤器

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees