TWI706084B - 幫浦系統 - Google Patents

幫浦系統 Download PDF

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Publication number
TWI706084B
TWI706084B TW105122375A TW105122375A TWI706084B TW I706084 B TWI706084 B TW I706084B TW 105122375 A TW105122375 A TW 105122375A TW 105122375 A TW105122375 A TW 105122375A TW I706084 B TWI706084 B TW I706084B
Authority
TW
Taiwan
Prior art keywords
coolant
vacuum pump
pump
outlet
heat
Prior art date
Application number
TW105122375A
Other languages
English (en)
Chinese (zh)
Other versions
TW201708705A (zh
Inventor
托瑪斯 德萊斐特
羅蘭 穆勒
馬克斯 裴利康
丹尼爾 施奈登巴赫
克里斯堤安 拜耳
Original Assignee
德商萊博爾德有限責任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 德商萊博爾德有限責任公司 filed Critical 德商萊博爾德有限責任公司
Publication of TW201708705A publication Critical patent/TW201708705A/zh
Application granted granted Critical
Publication of TWI706084B publication Critical patent/TWI706084B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
TW105122375A 2015-07-17 2016-07-15 幫浦系統 TWI706084B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015213527.6A DE102015213527A1 (de) 2015-07-17 2015-07-17 Pumpensystem
DE102015213527.6 2015-07-17

Publications (2)

Publication Number Publication Date
TW201708705A TW201708705A (zh) 2017-03-01
TWI706084B true TWI706084B (zh) 2020-10-01

Family

ID=56413664

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105122375A TWI706084B (zh) 2015-07-17 2016-07-15 幫浦系統

Country Status (7)

Country Link
US (1) US20180202445A1 (de)
EP (1) EP3325806A2 (de)
JP (1) JP2018520304A (de)
CN (1) CN107850064B (de)
DE (1) DE102015213527A1 (de)
TW (1) TWI706084B (de)
WO (1) WO2017012988A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6929601B2 (ja) * 2018-02-21 2021-09-01 住友重機械工業株式会社 クライオポンプ
CN114375382B (zh) * 2019-09-18 2023-10-24 株式会社日立产机系统 热回收装置
GB2597051A (en) * 2020-06-09 2022-01-19 Edwards Ltd Vacuum system apparatus and method
JP7502217B2 (ja) * 2021-02-26 2024-06-18 株式会社荏原製作所 真空排気方法および真空排気システム
CN115419586A (zh) * 2022-09-23 2022-12-02 浙江博亚精密机械有限公司 真空泵检测系统
CN115788830A (zh) * 2022-11-28 2023-03-14 中国船舶集团有限公司第七一一研究所 Bog压缩机的热力系统
CN116428157B (zh) * 2023-04-13 2024-08-30 北京通嘉宏瑞科技有限公司 气体加热控制系统及气体加热控制方法
CN116131511B (zh) * 2023-04-13 2023-06-30 四川富生汽车零部件有限公司 一种鼓风机电机冷却散热结构
CN117090774B (zh) * 2023-10-17 2024-01-02 广东鸿浩半导体设备有限公司 一种用于干泵的冷却水及氮气协同调流方法
CN118167587B (zh) * 2024-02-21 2025-02-18 郭海涛 一种真空泵工作群仪表自动化控制系统及控制方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060269424A1 (en) * 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
CN104074717A (zh) * 2013-03-28 2014-10-01 株式会社荏原制作所 带除害功能的真空泵

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05149287A (ja) * 1991-11-26 1993-06-15 Hitachi Ltd パツケージ形スクリユー圧縮機
DE19963172A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
DE10046902B4 (de) * 2000-09-21 2006-04-27 Nash_Elmo Industries Gmbh Pumpenanlage und Verfahren zum Pumpen eines Gases
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2004200364A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 排ガス処理装置および排ガス処理方法
JP5068477B2 (ja) * 2006-05-16 2012-11-07 三菱電機株式会社 圧縮機及びヒートポンプ式給湯機
CN201144817Y (zh) * 2007-12-28 2008-11-05 蒲志晖 一种循环冷却旋片真空泵
GB0808024D0 (en) * 2008-05-02 2008-06-11 Edwards Ltd Vacuum pump
CN201330708Y (zh) * 2009-01-15 2009-10-21 上海沪冈真空泵制造有限公司 罗茨真空泵前后盖及端盖的冷却结构
EP2532895B1 (de) * 2011-06-06 2014-02-26 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren
DE102013203577A1 (de) * 2013-03-01 2014-09-04 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060269424A1 (en) * 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
CN104074717A (zh) * 2013-03-28 2014-10-01 株式会社荏原制作所 带除害功能的真空泵

Also Published As

Publication number Publication date
DE102015213527A1 (de) 2017-01-19
CN107850064B (zh) 2019-07-23
CN107850064A (zh) 2018-03-27
TW201708705A (zh) 2017-03-01
WO2017012988A2 (de) 2017-01-26
EP3325806A2 (de) 2018-05-30
JP2018520304A (ja) 2018-07-26
US20180202445A1 (en) 2018-07-19
WO2017012988A3 (de) 2017-04-06

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