WO2017012988A3 - Pumpensystem - Google Patents

Pumpensystem Download PDF

Info

Publication number
WO2017012988A3
WO2017012988A3 PCT/EP2016/066786 EP2016066786W WO2017012988A3 WO 2017012988 A3 WO2017012988 A3 WO 2017012988A3 EP 2016066786 W EP2016066786 W EP 2016066786W WO 2017012988 A3 WO2017012988 A3 WO 2017012988A3
Authority
WO
WIPO (PCT)
Prior art keywords
coolant
pump system
vacuum pump
feed
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2016/066786
Other languages
English (en)
French (fr)
Other versions
WO2017012988A2 (de
Inventor
Thomas Dreifert
Roland MÜLLER.
Max PELIKAN
Daniel SCHNEIDENBACH
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to US15/743,912 priority Critical patent/US20180202445A1/en
Priority to EP16739121.8A priority patent/EP3325806A2/de
Priority to CN201680037682.0A priority patent/CN107850064B/zh
Priority to JP2018502208A priority patent/JP2018520304A/ja
Publication of WO2017012988A2 publication Critical patent/WO2017012988A2/de
Publication of WO2017012988A3 publication Critical patent/WO2017012988A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)

Abstract

Pumpensystem mit einer Vakuumpumpe (12) und einem mit der Vakuumpumpe (12) verbundenen Kühlelement (18). Mit dem Kühlelement (18) ist ein Kühlmittelzulauf (20) und ein Kühlmittelablauf (22) verbunden zur Kühlung der Vakuumpumpe durch Aufnahme und Abführen von Wärme durch ein Kühlmittel. Dabei ist der Kühlmittelzulauf (20) und der Kühlmittelablauf (22) mit einem Wärmetauscher (24) verbunden, so das Wärme vom Kühlmittelablauf (22) auf den Kühlmittelzulauf (20) übertragen wird.
PCT/EP2016/066786 2015-07-17 2016-07-14 Pumpensystem Ceased WO2017012988A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US15/743,912 US20180202445A1 (en) 2015-07-17 2016-07-14 Pump system
EP16739121.8A EP3325806A2 (de) 2015-07-17 2016-07-14 Pumpensystem
CN201680037682.0A CN107850064B (zh) 2015-07-17 2016-07-14 泵系统
JP2018502208A JP2018520304A (ja) 2015-07-17 2016-07-14 ポンプシステム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015213527.6A DE102015213527A1 (de) 2015-07-17 2015-07-17 Pumpensystem
DE102015213527.6 2015-07-17

Publications (2)

Publication Number Publication Date
WO2017012988A2 WO2017012988A2 (de) 2017-01-26
WO2017012988A3 true WO2017012988A3 (de) 2017-04-06

Family

ID=56413664

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/066786 Ceased WO2017012988A2 (de) 2015-07-17 2016-07-14 Pumpensystem

Country Status (7)

Country Link
US (1) US20180202445A1 (de)
EP (1) EP3325806A2 (de)
JP (1) JP2018520304A (de)
CN (1) CN107850064B (de)
DE (1) DE102015213527A1 (de)
TW (1) TWI706084B (de)
WO (1) WO2017012988A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6929601B2 (ja) * 2018-02-21 2021-09-01 住友重機械工業株式会社 クライオポンプ
CN114375382B (zh) * 2019-09-18 2023-10-24 株式会社日立产机系统 热回收装置
GB2597051A (en) * 2020-06-09 2022-01-19 Edwards Ltd Vacuum system apparatus and method
JP7502217B2 (ja) * 2021-02-26 2024-06-18 株式会社荏原製作所 真空排気方法および真空排気システム
CN115419586A (zh) * 2022-09-23 2022-12-02 浙江博亚精密机械有限公司 真空泵检测系统
CN115788830A (zh) * 2022-11-28 2023-03-14 中国船舶集团有限公司第七一一研究所 Bog压缩机的热力系统
CN116428157B (zh) * 2023-04-13 2024-08-30 北京通嘉宏瑞科技有限公司 气体加热控制系统及气体加热控制方法
CN116131511B (zh) * 2023-04-13 2023-06-30 四川富生汽车零部件有限公司 一种鼓风机电机冷却散热结构
CN117090774B (zh) * 2023-10-17 2024-01-02 广东鸿浩半导体设备有限公司 一种用于干泵的冷却水及氮气协同调流方法
CN118167587B (zh) * 2024-02-21 2025-02-18 郭海涛 一种真空泵工作群仪表自动化控制系统及控制方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05149287A (ja) * 1991-11-26 1993-06-15 Hitachi Ltd パツケージ形スクリユー圧縮機
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2004200364A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 排ガス処理装置および排ガス処理方法
US20060269424A1 (en) * 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
EP2532895A1 (de) * 2011-06-06 2012-12-12 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren
EP2808421A1 (de) * 2013-03-28 2014-12-03 Ebara Corporation Vakuumpumpe mit Beseitungsfunktion

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963172A1 (de) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
DE10046902B4 (de) * 2000-09-21 2006-04-27 Nash_Elmo Industries Gmbh Pumpenanlage und Verfahren zum Pumpen eines Gases
JP5068477B2 (ja) * 2006-05-16 2012-11-07 三菱電機株式会社 圧縮機及びヒートポンプ式給湯機
CN201144817Y (zh) * 2007-12-28 2008-11-05 蒲志晖 一种循环冷却旋片真空泵
GB0808024D0 (en) * 2008-05-02 2008-06-11 Edwards Ltd Vacuum pump
CN201330708Y (zh) * 2009-01-15 2009-10-21 上海沪冈真空泵制造有限公司 罗茨真空泵前后盖及端盖的冷却结构
DE102013203577A1 (de) * 2013-03-01 2014-09-04 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05149287A (ja) * 1991-11-26 1993-06-15 Hitachi Ltd パツケージ形スクリユー圧縮機
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2004200364A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 排ガス処理装置および排ガス処理方法
US20060269424A1 (en) * 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
EP2532895A1 (de) * 2011-06-06 2012-12-12 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren
EP2808421A1 (de) * 2013-03-28 2014-12-03 Ebara Corporation Vakuumpumpe mit Beseitungsfunktion

Also Published As

Publication number Publication date
DE102015213527A1 (de) 2017-01-19
CN107850064B (zh) 2019-07-23
TWI706084B (zh) 2020-10-01
CN107850064A (zh) 2018-03-27
TW201708705A (zh) 2017-03-01
WO2017012988A2 (de) 2017-01-26
EP3325806A2 (de) 2018-05-30
JP2018520304A (ja) 2018-07-26
US20180202445A1 (en) 2018-07-19

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