US4764767A - Absolute rotational position detection device - Google Patents

Absolute rotational position detection device Download PDF

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Publication number
US4764767A
US4764767A US06/899,517 US89951786A US4764767A US 4764767 A US4764767 A US 4764767A US 89951786 A US89951786 A US 89951786A US 4764767 A US4764767 A US 4764767A
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Prior art keywords
patterns
rotational position
rotor section
pattern
base member
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US06/899,517
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Wataru Ichikawa
Yuji Matsuki
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SG A CORP OF JAPAN KK
SG KK
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SG KK
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Assigned to KABUSHIKI KAISHA SG, A CORP OF JAPAN reassignment KABUSHIKI KAISHA SG, A CORP OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ICHIKAWA, WATARU, MATSUKI, YUJI
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/48Servo-type converters
    • H03M1/485Servo-type converters for position encoding, e.g. using resolvers or synchros
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/22Analogue/digital converters pattern-reading type
    • H03M1/24Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/30Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental
    • H03M1/308Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental with additional pattern means for determining the absolute position, e.g. reference marks

Definitions

  • This invention relates to an absolute rotational position detection device capable of detecting an absolute value of a rotational position of a motor or other rotating elements in a high resolution of detection.
  • an induction type rotational position detector of a type in which primary and secondary windings are provided on a stator side and no winding is provided on a rotor side known in the art, on one hand, is a rotational type differential transformer of a type which produces an output signal having a voltage level corresponding to a rotational position and, on the other hand, there is a device as disclosed in U.S. Pat. No. 4,604,575 which produces an AC signal having an electrical phase angle corresponding to the rotational position.
  • an absolute value of rotational position can be detected with a high resolution by combining an absolute rotational position for each teeth with a relative rotational angle within one pitch of the teeth.
  • This is disclosed in the above mentioned U.S. Pat. No. 4,604,575. It is apparently expensive, however, to separately construct the toothed detection device of a high resolution and the second detection device of a low resolution and merely arrange these two devices in parallel. There also arises an inconvenience that centering of rotor sections of the two devices must be conducted in high precision. For facilitating this centering, it has been proposed in Japanese Preliminary Utility Model Publication No.
  • an object of the invention to provide an absolute rotational position detection device capable of detecting an absolute rotational position over the entire circumference of one rotation with a high resolution and yet with a simple construcion.
  • the absolute rotational position detection device is characterized in that it comprises a rotor section having a first pattern which repeats change in the circumferential direction with a predetermined pitch and a second pattern which has a change of one cycle with respect to one circumference, these patterns being formed with a predetermined material and disposed in parallel on a circumferential side surface of a single cylindrical member, and a detection head section provided in proximity to this rotor section whose relation of correspondence to the respective patterns changes in accordance with its positional relation with respect to the rotor section and which produces output signals corresponding to the relation of correspondence with respect the respective patterns.
  • a rotational angle range corresponding to one pitch of the repetition of the first pattern is made one cycle and an absolute rotational position detection within this range can be performed cyclically.
  • an absolute rotational position detection can be performed within one rotation.
  • the two types of patterns are provided by a predetermined material (e.g., a conductor such as copper or aluminum or a magnetic substance such as iron) and are disposed in parallel on the circumferential side surface of one cylindrical member, the construction is very simple and requires little skill in the manufacture.
  • a predetermined material e.g., a conductor such as copper or aluminum or a magnetic substance such as iron
  • FIG. 1 is a partly sectional side view showing an embodiment of the absolute rotational position detection device according to the invention
  • FIG. 2 is a sectional view taken along lines II--II in FIG. 1;
  • FIG. 3 is a graph showing an example of position detection data obtained on the basis of outputs of first and second detection heads in the embodiment shown in FIG. 1;
  • FIG. 4 is an electrical block diagram showing an example of a circuit for supplying an exciting AC signal to the detection head section and an example of a circuit for detecting an electrical phase of the output signals of the head section to obtain the position detection data;
  • FIG. 5 is a side view showing a spiral pattern of a double thread type as another example of the second pattern disposed on the rotor section;
  • FIG. 6 is a cross sectional view showing an eight-pole type detection head as another example of the second detection head used for detecting the pattern of FIG. 5;
  • FIG. 7 is a side view showing another example of the spiral pattern disposed on the rotor section which pattern changes stepwise;
  • FIG. 8 is a developed view showing another example of the first and second patterns disposed on the rotor section
  • FIG. 9 is a cross sectional view of a six head type detection head which is another example of the detection head.
  • FIGS. 10 through 14 are respectively sectional views showing specific examples of process for forming the patterns on the rotor section.
  • the rotational position detection device shown in FIGS. 1 and 2 comprises first and second detection heads 1 and 2 which are disposed in a fixed relationship to each other in predetermined positions and a rotor section 3 which is inserted in these detection heads 1 and 2 and is rotated in accordance with the rotation imparted to a rotation shaft 4.
  • the rotor section 3 is shown in side elevation and the detection heads 1 and 2 in section.
  • the main body of the rotor section 3 consists of a single cylindrical member and on the circumferential side surface of this cylindrical member are disposed a first pattern which repeats change in the circumferential direction with a predetermined pitch and a second pattern which has one cycle of change with respect to one circumference. These patterns are disposed in parallel with each other and are formed with a predetermined material (i.e., a material which responds to magnetism in some way).
  • the first pattern in the rotor section 3 consists of N oblong pieces 3a made of a predetermined material arranged about the cylindrical member with an equal interval therebetween.
  • the pitch of repetition of this first pattern is 360/N degrees (in the illustrated example, N being 9).
  • the second pattern consists of a spiral strip 3b of a predetermined width disposed in a spiral form for one pitch about the cylindrical member of the rotor section 3.
  • the first detection head 1 is disposed in correspondence to the first pattern 3a and the second detection head 2 is disposed in correspondence to the second pattern 3b.
  • FIG. 2 shows the first detection head 1 and a part of the rotor section 3 on which the first pattern 3a is disposed in a section taken along lines II--II in FIG. 1.
  • the detection head 1 consists of four poles 1A-1D which are disposed in the circumferential direction with an interval of 90 degrees therebetween.
  • a primary coil W1 and a secondary coil W2 are wound on each of these poles 1A-1D.
  • the respective poles 1A-1D have a C-shaped magnetic substance core and a flux coming out of one end of each core enters the other end thereof through the rotor section 3.
  • the second detection head 2 likewise respectively have four poles 2A-2D and may have a similar construction to the first detection head 1.
  • the relation of correspondence between respective poles 2A-2D of the second detection head 2 and the spiral strip 3b of the second pattern of the rotor section 3 is also such that the strip 3b is shifted by 1/4 pitch between adjacent poles.
  • one pitch of the pattern change corresponds to one rotation (360 degrees). Owing to such shifting in the corresponding relationship between the poles and the patterns, reluctance of magnetic paths passing through the respective poles 1A-1D and 2A-2D changes with different phases. Description will now be made on the assumption that the poles 1A and 2A have phase A, the poles 1B and 2B have phase B, the poles 1C and 2C have phase C and the poles 1D and 2D have phase D.
  • the material constituting the patterns of the rotor section 3 is one which causes reluctance change to be varied depending upon extent of entering of this material in the magnetic field of the detection heads.
  • a material which is a better conductor than other portion 3c of the rotor section 3 or magnetic substance can preferably be employed.
  • the patterns 3a and 3b of the rotor section 3 are constructed of a good conductor such as copper and the other portion 3c of a material which is less conductive than this good conductor (e.g., iron).
  • a good conductor such as copper
  • the other portion 3c of a material which is less conductive than this good conductor e.g., iron.
  • the larger the area of the oblong piece 3a opposing the poles 1A-1D e.g., a state in which the oblong piece 3a opposes the pole 1A for the phase A in FIG. 2 at the maximum
  • the larger is the eddy current which flows.
  • a state in which the oblong piece 3a does not oppose the end portion of the poles 1A-1D e.g., a state in which the oblong piece 3a opposes the pole 1C for the phase C
  • little eddy current flows through the oblong piece 3a In a state in which the oblong piece 3a does not oppose the end portion of the poles 1A-1D (e.g., a state in which the oblong piece 3a opposes the pole 1C for the phase C), little eddy current flows through the oblong piece 3a.
  • the reluctance change in the respective poles 1A-1D is shifted by 1/4 cycle between the adjacent poles, one cycle consisting of an angle of one pitch of repetition of the oblong pieces 3a. If, for example, the phase A is a cosine phase, the phase B is a sine phase, the phase C is a minus cosine phase and the phase D is a minus sine phase.
  • a relative rotational position of the rotor section 3 with respect to the first detection head 1 can be detected in an absolute value within the angular range of one pitch of the first pattern.
  • this detection is made by employing the phase system, the primary windings for the phases A and C are excited by the sine signal sin ⁇ t and the primary windings for the phases B and D are excited by the cosine signal cos ⁇ .
  • a detection head output signal Y1 which is a composite signal of induced voltages of the secondary windings for the respective phases, an AC signal
  • the phase shift amount ⁇ with respect to the reference AC signal sin ⁇ t of the first detection head output signal Y1 represents the rotational position of the rotor section 3 within the angular range of one pitch of the first pattern.
  • This phase shift amount ⁇ can be measured digitally or in analog by a suitable measuring means.
  • the reluctance change is such that if the pole 2A for the phase A is a cosine phase, the pole 2B is a sine phase, the pole 2C is a minus cosine phase and the pole 2D is a minus sine phase.
  • the rotational position of the rotor section 3 with respect to the second head 2 can be detected in an absolute value within one cycle of the change of the second pattern (i.e., one rotation).
  • this detection is made by employing the phase system, the primary windings for the phases A and C are excited by the sine signal sin ⁇ t and the primary windings for the phases B and D by the cosine signal cos ⁇ t in the same manner as described above.
  • a detection head output signal Y2 which is a composite signal of induced voltages of the secondary windings of the respective poles, an AC signal
  • represents a phase angle corresponding to the rotational position of the rotor section 3 within the angular range of one cycle of the second pattern.
  • the phase shift amount ⁇ with respect to the reference AC signal sin ⁇ t of the second head output signal Y2 represents the rotational position of the rotor section 3.
  • This phase shift amount ⁇ can also be measured digitally or in analog by a suitable measuring means.
  • Rotational position detection data D ⁇ derived from the first head output signal Y1 and rotational position detection data D ⁇ derived from the second head output signal Y2 are shown in FIG. 3.
  • the first rotational position detection data D ⁇ represents an absolute rotational position within the relatively narrow angular range (360/N degrees).
  • the data D ⁇ corresponds to vernier measured data in the vernier principle and is capable of accurate position detection with a high resolution.
  • the second rotational position detection data D ⁇ represents an absolute rotational position within the complete circumference of one rotation.
  • the data D ⁇ may be data of a rough resolution because accuracy of detection within the angular range of 360/N degrees can be expected from the first rotational position detection data D ⁇ .
  • the second rotational position detection data D ⁇ may be of a rough resolution of such a degree as to be able to obtain an absolute value with a minimum unit of 360/N degrees.
  • This data corresponds to main-scale measured data in the vernier principle.
  • FIG. 4 An example of an electrical circuit for producing the detection head output signals Y1 and Y2 in accordance with the above described phase system and measuring the phase shift amounts ⁇ and ⁇ in these output signals is shown in FIG. 4.
  • an oscillator section 10 is a circuit for generating the reference sine signal sin ⁇ t and cosine signal cos ⁇ t and a phase difference detection circuit 11 is a circuit for measuring the phase shift amounts ⁇ and ⁇ .
  • a clock pulse CP generated by a clock oscillator 12 is counted by a counter 13.
  • the counter 13 is of a suitable modulo M (M being any integer) and its count value is supplied to registers 14 and 15. From a 4/M frequency divided output of the counter 13 is taken out a pulse Pc which is a 4/M frequency divided signal of the clock pulse CP and supplied to a C input of a flip-flop 16 which functions as a two divider.
  • a pulse Pb provided from a Q output of the flip-flop 16 is applied to a flip-flop 17 and a pulse Pa provided from a Q output of the flip-flop 16 is applied to a flip-flop 18.
  • Outputs of these flip-flops 17 and 18 are supplied to low-pass filters 19 and 20 and a cosine signal cos ⁇ t and a sine signal sin ⁇ t are derived from these outputs through amplifiers 21 and 22 and applied to the primary windings W1 for the respective phases A through D of the first and second heads 1 and 2.
  • M count in the counter 13 corresponds to a phase angle of 2 ⁇ radian of these reference signals cos ⁇ t and sin ⁇ t. That is to say, one count of the counter 13 represents 2 ⁇ /M radian.
  • the composite outputs signals Y1 and Y2 of the secondary windings W2 of the respective phases of the first and second heads 1 and 2 are applied to comparators 25 and 26 through amplifiers 23 and 24 and square wave signals corresponding to positive and negative polarities of the signals Y1 and Y2 are respectively provided by the comparators 25 and 26.
  • pulses T1 and T2 are produced by rise detection circuits 27 and 28.
  • the count of the counter 13 is loaded in the registers 14 and 15.
  • the digital value D ⁇ corresponding to the phase shift ⁇ in the first head output signal Y1 is loaded in the register 14 and the digital value D ⁇ corresponding to the phase shift ⁇ in the second head output signal Y2 is loaded in the register 15.
  • the data D ⁇ representing a rotational position within the predetermined angular range (360/N degrees) in an absolute value and the data D ⁇ representing a rotational position within the wider range (360 degrees) in an absolute value can be obtained.
  • the configuration of the first pattern or the second pattern disposed on the rotor section 3 is not limited to the above described one but any suitable configuration may be utilized.
  • the second pattern may be formed by two strips 3b1 and 3b2 in the form of a double-threaded screw as shown in FIG. 5.
  • the strips 3b1 and 3b2 are disposed in diametrically opposed positions as viewed in the cross section of the rotor section 3 so that the second detection head 2 should preferably consist of an eight-pole type core as shown in FIG. 6.
  • the eight-pole type core includes a pair of poles for each of the phases A, B, C and D and poles for the same phase are disposed in diametrically opposed positions.
  • the spiral pattern need not consist of a smooth spiral strip such as strips 3b, 3b1 and 3b2 but may consist of a stepwisely disposed pattern 3s as shown in FIG. 7. In short, it will suffice if the pattern exhibits change which more or less resembles a spiral.
  • FIG. 8 shows another example of the patterns disposed on the rotor section 3 in a developed view.
  • the first pattern consists of rhombic pieces 3a' which are disposed N per one circumference and the second pattern consists of a rhombic piece 3b' which is disposed one per one circumference.
  • the areas of the respective patterns 3a' and 3b' opposing to the detection heads 1 and 2 change in accordance with the rotational position and performs the same function as described above.
  • the detection head is not limited to the above described four-pole type or eight-pole type one but a detection head of other pole type such as a three-pole type, six-pole type or twelve-pole type may also be employed.
  • a head of a six-pole type is shown in FIG. 9.
  • the primary coil exciting AC signals used for the phase detection system are not signals such as a sine signal and a cosine signal which are out of phase by 90 degrees but AC signals such as sin t on one hand and sin ( ⁇ t-60) or sin ( ⁇ t-120) or sin ( ⁇ t-240) on the other, which are out of phase by 60 degrees or its multiples or AC signals which are out of phase by a suitable phase angle.
  • the magnetic substance core material of the detection head either material consisting of separate pieces for the respective poles as shown in FIG. 2 or one by which the respective poles become continuous by a common core material as shown in FIG. 6 may be employed.
  • the position detection data is obtained according to the phase difference measuring system.
  • position detection data having a voltage level corresponding to the position may be obtained in accordance with a voltage measuring system as is well known by a conventional differential transformer. In that case, the provision of the phase difference in the AC signals for exciting the primary coils is unnecessary. Further, an arrangement may be made so that the position detection data D ⁇ which requires a high degree of accuracy is obtained by the phase difference measuring system and the other position detection data is obtained by the voltage measuring system.
  • Material of a good conductor or magnetic substance for constituting the patterns 3a, 3b, 3b1 and 3b2 may be deposited or formed on the rod section 3 by utilizing a suitable surface treatment technique (such as electroplating, flame spraying, baking, coating, solvent welding, vapor deposition, electroforming and photoetching).
  • a suitable surface treatment technique such as electroplating, flame spraying, baking, coating, solvent welding, vapor deposition, electroforming and photoetching.
  • FIG. 10 shows an example in which a base member 3d of the rod section 3 is formed thereabout with the patterns 3a and 3b made of a good conductor such as copper and is provided thereon with a surface coating 3e by means of, e.g., plating with chromium.
  • the base member 3d is plated on its entire circumferential surface with copper and thereafter an unnecessary portion is removed by a removing technique such as etching to form the desired patterns 3a and 3b with the remaining plated portion.
  • the surface coating 3e such as plating with chromium is applied for finishing the surface.
  • Magnetic substance such as iron is a suitable material for the base member 3d because it facilitates passing of flux therethrough.
  • Resins such as plastics and other materials may also be used as the base member 3d.
  • the surface of the preformed plastic base member 3d may be plated with metal, e.g., copper, or a metal film such as a copper film may be preformed on a metal cavity by means of electroforming and thereafter plastic may be injection molded to be integrated with the metal film.
  • the surface coating is made in such a manner that the recesses between the patterns 3a are filled with the surface coating 3e as shown in FIG. 10, the coating 3e tends to sink with resulting difficulty in obtaining a smooth surface finishing. Therefore, as shown in FIG. 11, the recesses between the patterns 3a are preferably filled with suitable pads 3f and the surface coating 3e is applied thereon.
  • the pads 3f may be formed by, e.g., plating with nickel.
  • the base member 3d is plated with a metal such as copper and thereafter etching is applied in a desired pattern, there is a likelihood that the surface of the base member 3d is corroded by the etching agent used. Particularly so if the base member 3d is made of a metal such as iron.
  • a thin film of a predetemined material 3g e.g., resin
  • plating with copper is applied thereon and thereafter etching is applied to form the patterns 3a.
  • a composite pattern of the two patterns may be formed at once or, alternatively, one pattern may be formed first and the other pattern may be formed thereon in an overlapping fashion.
  • the material constituting the patterns is not limited to a good conductor such as copper or aluminum or a mixture or a compound thereof which produces reluctance change by the eddy current loss but may be magnetic substance (e.g., iron or a compound or mixture thereof) which produces reluctance change due to the change in permeability.
  • the patterns can be formed by selectively empolying the various surface treatment techniques described above.
  • a desired pattern may be formed by constituting the base member 3d of the rotor section 3 of magnetic substance such as iron, forming recesses corresponding to the desired pattern on the base member 3d by machining it and filling these recesses with a good conductor 3a.
  • the projecting portions of the base member 3d consisting of magnetic substance enter the intervals between the patterns of the good conductors 3a and, in these portions, reluctance change which is small due to relatively small eddy current loss becomes further smaller due to projection of the magnetic substance whereby accuracy in response of the sensor output signal to the displacement of the rotor section is improved in a synergistic manner.
  • projecting portions 3a corresponding to a desired pattern may be formed by machining on the surface of the base member 3d consisting of magnetic substance of the rotor section 3 and these projections 3a may be used as the patterns consisting of magnetic substance. In this case, reluctance change corresponding not to eddy current loss but to permeability change can be produced.
  • the patterns disposed on a pattern provided member need not be visibly distinguishable but have only to be distinguished from the rest of portion in its magnetic characteristic.
  • the base member of the rotor section 3 with stainless steel and heating this base member of stainless steel locally by suitable means such as laser beam in accordance with a desired pattern, the heated portion is converted to magnetic substance.
  • the portion of the pattern can be made a magnetic substance portion while the rest of portion remains a non-magnetic substance portion notwithstanding that the pattern and the base member are both made of stainless steel.
  • the primary windings and secondary windings for the respective phases in the detection heads need not be separate windings but may be common ones as those described in Japanese Preliminary Utility Model Publication No. 2621/1983 or No. 35907/1983.
  • the detection heads need not be provided separately for the first and second patterns but a common detection head may be used for disposing the first and second patterns thereon. In that case, an arrangement should be made by a suitable electrical processing so that output signals responding separately to the first and second patterns can be obtained.
  • the first and second patterns may be disposed in the same area, with one pattern overlapping the other, instead of being disposed in different areas.
  • the device according to the invention is suitable for a compact design of the rotor section and enables detection of an absolute rotational position over the complete circumference of one rotation with a high resolution.

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
US06/899,517 1985-08-27 1986-08-22 Absolute rotational position detection device Expired - Lifetime US4764767A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60187901A JPH0665967B2 (ja) 1985-08-27 1985-08-27 アブソリュート回転位置検出装置
JP60-187901 1985-08-27

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EP (1) EP0212662B1 (fr)
JP (1) JPH0665967B2 (fr)
DE (1) DE3681376D1 (fr)

Cited By (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4833405A (en) * 1987-03-24 1989-05-23 Schlumberger Electronics (Uk) Limited Shaft failure monitoring system using angled rotating teeth and phase detection
US4855734A (en) * 1988-03-29 1989-08-08 International Machine & Tool Corporation Relative position indication system
US4870358A (en) * 1986-07-02 1989-09-26 Commissariat A L'energie Atomique Angular position sensor and angular position determination means equipped with several of these sensors
US4897647A (en) * 1987-02-21 1990-01-30 Fanuc Ltd. Method for absolute position detection and an apparatus therefore
US4897603A (en) * 1988-02-29 1990-01-30 Siemens Aktiengesellschaft Arrangement for determining the speed and rotor position of an electric machine
US4951300A (en) * 1988-12-01 1990-08-21 Tamagawa Seiki Kabushiki Kaisha Precision position detection device
WO1990012278A1 (fr) * 1989-04-06 1990-10-18 Elin Energieanwendung Gesellschaft M.B.H. Procede pour mesurer sans detecteur l'ecart angulaire de machines synchrones sans amortisseur, de preference a activation par aimant permanent
US4987040A (en) * 1987-09-16 1991-01-22 Yamaha Corporation Magnetic recording medium for displacement detectors
US4991301A (en) * 1987-02-27 1991-02-12 Radiodetection Limited Inductive displacement sensors
US5083084A (en) * 1986-12-13 1992-01-21 Robert Bosch Gmbh Device for contactless measuring of rotational angle or rotational speed
US5107212A (en) * 1989-01-20 1992-04-21 Robert Bosch Gmbh Measuring arrangement having axially and radially offset sensor coils for contactless determination of rotation angle
US5115239A (en) * 1988-08-31 1992-05-19 Fanuc Ltd. Magnetic absolute position encoder with an undulating track
US5126665A (en) * 1988-07-20 1992-06-30 Robert Bosch Gmbh Device for measuring an angle of rotation of a rotatable structural element
US5160886A (en) * 1991-02-14 1992-11-03 Carlen Controls, Inc. Permanent magnet resolver for producing a resolver-to-digital converter compatible output
US5198763A (en) * 1990-02-20 1993-03-30 Nikkiso Co., Ltd. Apparatus for monitoring the axial and radial wear on a bearing of a rotary shaft
US5200698A (en) * 1989-01-17 1993-04-06 Gec Alsthom Sa System for sensing the position of a rotating steel shaft including a track formed by a strip having discontinuous electrical properties, and a method of manufacturing such a track
US5265480A (en) * 1990-08-23 1993-11-30 Mazda Motor Corporation Torque detector
US5280238A (en) * 1988-10-20 1994-01-18 Kayaba Kogyo Kabushiki Kaisha System for processing position signals that are reponsive to displacement of an object
US5456123A (en) * 1994-01-26 1995-10-10 Simmonds Precision Products, Inc. Static torque measurement for rotatable shaft
US5481188A (en) * 1992-03-02 1996-01-02 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for detecting the movement of an object with a micro machine that responds to a change in magnetic flux associated with the object
US5508609A (en) * 1993-06-30 1996-04-16 Simmonds Precision Product Inc. Monitoring apparatus for detecting axial position and axial alignment of a rotating shaft
US5514952A (en) * 1993-06-30 1996-05-07 Simmonds Precision Products Inc. Monitoring apparatus for rotating equipment dynamics for slow checking of alignment using plural angled elements
EP0723136A1 (fr) * 1995-01-20 1996-07-24 MAX STEGMANN Gmbh ANTRIEBSTECHNIK - ELEKTRONIK Dispositif de mesure de l'angle de rotation
US5696444A (en) * 1994-03-04 1997-12-09 Crane Co. Monitoring system for detecting axial and radial movement of a rotating body independent of rotational position
US5925951A (en) * 1998-06-19 1999-07-20 Sundstrand Fluid Handling Corporation Electromagnetic shield for an electric motor
US5955880A (en) * 1996-12-05 1999-09-21 Beam; Palmer H. Sealless pump rotor position and bearing monitor
US6111402A (en) * 1996-11-29 2000-08-29 Dr. Johannes Heidenhain Gmbh Position measuring instrument having a scanning element with multiple scanning tracks
WO2000062031A1 (fr) * 1999-04-07 2000-10-19 Koyo Seiko Co., Ltd. Detecteur d'angle de rotation, detecteur de couple et dispositif de direction
US6178821B1 (en) * 1999-01-25 2001-01-30 General Electric Company Vibration sensing device
US6243023B1 (en) * 1997-12-09 2001-06-05 Sankyo Seiki Mfg. Co., Ltd. Encoder and parameter establishing device therefor
WO2002068911A1 (fr) * 2001-02-22 2002-09-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Capteur d'angle de rotation
US20020124663A1 (en) * 1999-04-07 2002-09-12 Yoshitomo Tokumoto Rotational angle detecting device, torque detecting device and steering apparatus
US6518752B1 (en) * 1991-03-22 2003-02-11 Walter Wyss Resolver for measuring and determining angular positions or revolutions of a shaft
US20030074799A1 (en) * 2001-10-16 2003-04-24 Mitsubishi Denki Kabushiki Kaisha Rotation angle detection device
US6600310B2 (en) * 2000-03-08 2003-07-29 Mts Systems Corporation Linear and rotary magnetic sensor
US20030227286A1 (en) * 2002-04-29 2003-12-11 Siemens Aktiengesellschaft Rotary motion detector
DE10225011A1 (de) * 2002-06-06 2003-12-18 Hella Kg Hueck & Co Gestanzter Rotor für Induktivsensoren
DE10225019A1 (de) * 2002-06-06 2003-12-18 Hella Kg Hueck & Co Läufer für Induktivsensor
DE10233132A1 (de) * 2002-07-20 2004-02-12 Hella Kg Hueck & Co. Koppelelement, insbesondere Rotor für einen induktiven Sensor
US20040168524A1 (en) * 2003-02-28 2004-09-02 Naoki Maeda Rotational angle detecting apparatus and torque detecting apparatus
US20050122097A1 (en) * 2003-12-04 2005-06-09 Kanji Kitazawa Rotation angle detector
US20050193583A1 (en) * 2004-03-03 2005-09-08 Benno Schmied Angle-measurement device
US20050257625A1 (en) * 2004-02-28 2005-11-24 Silvester Roessner Angle of rotation sensor
US20060137482A1 (en) * 2004-11-12 2006-06-29 Voith Paper Patent Gmbh Method for measuring properties of a rotational body
EP1801545A1 (fr) * 2005-12-24 2007-06-27 Zf Friedrichshafen Ag Codeur rotatif pour un dispositif de détection à courants de foucaults
DE202006007778U1 (de) * 2006-05-16 2007-09-20 Hella Kgaa Hueck & Co. Rotor für einen induktiven Winkelsensor
US20070289395A1 (en) * 2006-06-20 2007-12-20 Trw Automotive Safety Systems Gmbh Device to determine an absolute rotation angle of a rotary shaft
US20080134727A1 (en) * 2005-02-01 2008-06-12 Lutz May Position Sensor and Washing Machine
US20080223942A1 (en) * 2007-03-07 2008-09-18 Mitsubishi Heavy Industries, Ltd. Absolute value scale and absolute value calculating method
US20080287865A1 (en) * 2005-05-10 2008-11-20 Novo Nordisk A/S Injection Device Comprising An Optical Sensor
US20090076460A1 (en) * 2005-09-22 2009-03-19 Novo Nordisk A/S Device And Method For Contact Free Absolute Position Determination
US20090102467A1 (en) * 2007-10-22 2009-04-23 Johnson Controls Inc. Method and apparatus for sensing shaft rotation
US20100156402A1 (en) * 2006-06-07 2010-06-24 Vogt Electronic Components Gmbh Position encoder and a method for detecting the position of a movable part of a machine
US20100301843A1 (en) * 2007-11-09 2010-12-02 SUMIDA Components & Modules GmbH Position encoder comprising a plastic element
DE102009048612A1 (de) * 2009-10-08 2011-04-14 Elster Meßtechnik GmbH Messvorrichtung zur Erfassung von Drehsignalen
US20110140422A1 (en) * 2010-06-29 2011-06-16 Detlef Menke Method for controlling a proximity sensor of a wind turbine
DE102010054931A1 (de) * 2010-12-17 2012-06-21 Daimler Ag Rotoroberfläche mit Signalgeberstruktur und Herstellungsverfahren für selbige sowie Sensorsystem zur Lagebestimmung für einen Rotor
US20150025772A1 (en) * 2013-07-02 2015-01-22 Gill Corporate Limited Position Indicator Device
US20150022193A1 (en) * 2013-07-19 2015-01-22 Allegro Microsystems, Llc Methods and Apparatus for Magnetic Sensor Having an Integrated Coil or Magnet to Detect a Non-Ferromagnetic Target
WO2016045816A1 (fr) * 2014-09-22 2016-03-31 Robert Bosch Gmbh Ensemble formant capteur pour mesurer un déplacement et/ou un angle
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US20170317560A1 (en) * 2016-04-29 2017-11-02 Lock Antriebstechnik Gmbh Switching device for switching an electric motor
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
EP3194821A4 (fr) * 2014-09-15 2018-02-28 Flowserve Management Company Capteurs destinés à des systèmes de soupape et ensembles, systèmes et procédés associés
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US10830571B2 (en) 2017-04-19 2020-11-10 Analog Devices International Unlimited Company Techniques for magnetic field direction based position sensor
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US12188768B2 (en) * 2021-09-16 2025-01-07 Mitutoyo Corporation Angle detector and position measuring device
US12523717B2 (en) 2024-02-15 2026-01-13 Allegro Microsystems, Llc Closed loop magnetic field sensor with current control

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2188159B (en) * 1986-03-19 1990-05-30 Honda Motor Co Ltd Angle-of-rotation sensor
JP2550085B2 (ja) * 1987-07-29 1996-10-30 株式会社日立製作所 絶対位置検出装置
DE3809569A1 (de) * 1988-03-22 1989-10-05 Frankl & Kirchner Positionsgeber
JPH0226491U (fr) * 1988-08-09 1990-02-21
JPH02287116A (ja) * 1989-04-27 1990-11-27 Smc Corp 初期位置検出装置
JPH0833307B2 (ja) * 1989-09-28 1996-03-29 株式会社小松製作所 位置センサ軸
JPH03205907A (ja) * 1990-01-08 1991-09-09 Hitachi Ltd 多電極型弾性表面波装置
JPH0391909U (fr) * 1990-01-09 1991-09-19
WO1992006539A1 (fr) * 1990-10-02 1992-04-16 Spetsialnoe Konstruktorskoe Bjuro Radioelektronnoi Apparatury Instituta Radiofiziki I Elektroniki Akademii Nauk Armyanskoi Ssr Procede et dispositif de conversion des mouvements d'un objet en un code
JPH0566102A (ja) * 1991-09-06 1993-03-19 Komatsu Ltd 位置検出装置
JPH05187803A (ja) * 1992-01-14 1993-07-27 Kanbayashi Seisakusho:Kk センサ
JP3534484B2 (ja) * 1995-04-27 2004-06-07 株式会社ミクニ 磁気式位置センサ
JP3920113B2 (ja) * 2002-03-05 2007-05-30 アルプス電気株式会社 回転角検出装置
JP4247822B2 (ja) * 2003-04-22 2009-04-02 株式会社アミテック シリンダ位置検出装置
US7579829B1 (en) * 2008-07-06 2009-08-25 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Inductive multi-turn encoder
JP2010181192A (ja) * 2009-02-03 2010-08-19 Honda Motor Co Ltd 磁歪式トルク・回転角検出装置
JP6052038B2 (ja) * 2013-04-17 2016-12-27 日本精工株式会社 電動パワーステアリング装置
US9267819B2 (en) * 2014-06-12 2016-02-23 Mitutoyo Corporation Absolute position encoder scale having plates alternating with varying recesses
US9650066B2 (en) 2014-09-02 2017-05-16 Nsk Ltd. Electric power steering apparatus
DE102016206768A1 (de) * 2016-04-21 2017-10-26 Robert Bosch Gmbh Bürstenloser Gleichstrommotor und Verfahren zur Bereitstellung eines Winkelsignals
FR3056355B1 (fr) * 2016-09-22 2018-09-07 Valeo Systemes D'essuyage Moteur electrique a courant continu sans balais pour systeme d'essuyage de vehicule automobile
FR3056354B1 (fr) * 2016-09-22 2018-09-07 Valeo Systemes D'essuyage Moteur electrique a courant continu sans balais pour systeme d'essuyage de vehicule automobile
JP6824764B2 (ja) * 2017-01-27 2021-02-03 キヤノン株式会社 センサ、ロボット装置及び物品の製造方法
WO2019166258A1 (fr) * 2018-03-02 2019-09-06 Admotec Precision Ag Anneau de rotor
EP3623767A1 (fr) * 2018-09-17 2020-03-18 Siemens Aktiengesellschaft Arbre et procédé de fabrication d'un arbre, rotor et machine électrique
JP2021051098A (ja) * 2021-01-13 2021-04-01 キヤノン株式会社 駆動装置、ロボット及びロボット装置
DE112023006250T5 (de) * 2023-04-28 2026-04-09 Minebea Mitsumi Inc. Winkelsensor und rotationsmaschine

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3132337A (en) * 1960-09-12 1964-05-05 Ibm Variable reluctance slotted drum position indicating device
DE1473854A1 (de) * 1964-01-11 1969-02-06 Siemens Ag Verfahren zur kontinuierlichen Abstandsueberwachung rotierender Antriebswellen
US3810136A (en) * 1973-02-15 1974-05-07 Singer Co Digital position sensor
US4274053A (en) * 1978-03-06 1981-06-16 Nippon Electric Co., Ltd. Magnetic rotary encoder for detection of absolute values of angular displacement
US4604575A (en) * 1980-10-21 1986-08-05 Kabushiki Kaisha Sg Multiple output rotational position detection device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1274363B (de) * 1965-01-14 1968-08-01 Zeiss Carl Fa Einrichtung zum absolut-digitalen Messen
US3641467A (en) * 1969-05-13 1972-02-08 Allis Chalmers Mfg Co Rotary inductor
US4320293A (en) * 1978-08-30 1982-03-16 Harold Guretzky Angle-position transducer
DE2945895C2 (de) * 1979-11-14 1986-06-05 Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen Magnetischer Stellungsgeber für hydrauliche oder pneumatische Arbeitszylinder
JPS5788317A (en) * 1980-11-25 1982-06-02 S G:Kk Rotation angle detecting device
GB2096421A (en) * 1981-04-07 1982-10-13 Secretary Industry Brit Position transducer for fluid actuated ram
JPS5923610U (ja) * 1982-08-06 1984-02-14 株式会社エスジ− シリンダ位置検出装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3132337A (en) * 1960-09-12 1964-05-05 Ibm Variable reluctance slotted drum position indicating device
DE1473854A1 (de) * 1964-01-11 1969-02-06 Siemens Ag Verfahren zur kontinuierlichen Abstandsueberwachung rotierender Antriebswellen
US3810136A (en) * 1973-02-15 1974-05-07 Singer Co Digital position sensor
US4274053A (en) * 1978-03-06 1981-06-16 Nippon Electric Co., Ltd. Magnetic rotary encoder for detection of absolute values of angular displacement
US4604575A (en) * 1980-10-21 1986-08-05 Kabushiki Kaisha Sg Multiple output rotational position detection device

Cited By (127)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4870358A (en) * 1986-07-02 1989-09-26 Commissariat A L'energie Atomique Angular position sensor and angular position determination means equipped with several of these sensors
US5083084A (en) * 1986-12-13 1992-01-21 Robert Bosch Gmbh Device for contactless measuring of rotational angle or rotational speed
US4897647A (en) * 1987-02-21 1990-01-30 Fanuc Ltd. Method for absolute position detection and an apparatus therefore
US4991301A (en) * 1987-02-27 1991-02-12 Radiodetection Limited Inductive displacement sensors
US4833405A (en) * 1987-03-24 1989-05-23 Schlumberger Electronics (Uk) Limited Shaft failure monitoring system using angled rotating teeth and phase detection
US4987040A (en) * 1987-09-16 1991-01-22 Yamaha Corporation Magnetic recording medium for displacement detectors
US4897603A (en) * 1988-02-29 1990-01-30 Siemens Aktiengesellschaft Arrangement for determining the speed and rotor position of an electric machine
US4855734A (en) * 1988-03-29 1989-08-08 International Machine & Tool Corporation Relative position indication system
US5126665A (en) * 1988-07-20 1992-06-30 Robert Bosch Gmbh Device for measuring an angle of rotation of a rotatable structural element
EP0422225A4 (en) * 1988-08-31 1993-02-24 Fanuc Ltd. Magnetic absolute position encoder
US5115239A (en) * 1988-08-31 1992-05-19 Fanuc Ltd. Magnetic absolute position encoder with an undulating track
US5280238A (en) * 1988-10-20 1994-01-18 Kayaba Kogyo Kabushiki Kaisha System for processing position signals that are reponsive to displacement of an object
US4951300A (en) * 1988-12-01 1990-08-21 Tamagawa Seiki Kabushiki Kaisha Precision position detection device
US5200698A (en) * 1989-01-17 1993-04-06 Gec Alsthom Sa System for sensing the position of a rotating steel shaft including a track formed by a strip having discontinuous electrical properties, and a method of manufacturing such a track
US5107212A (en) * 1989-01-20 1992-04-21 Robert Bosch Gmbh Measuring arrangement having axially and radially offset sensor coils for contactless determination of rotation angle
WO1990012278A1 (fr) * 1989-04-06 1990-10-18 Elin Energieanwendung Gesellschaft M.B.H. Procede pour mesurer sans detecteur l'ecart angulaire de machines synchrones sans amortisseur, de preference a activation par aimant permanent
US5198763A (en) * 1990-02-20 1993-03-30 Nikkiso Co., Ltd. Apparatus for monitoring the axial and radial wear on a bearing of a rotary shaft
US5265480A (en) * 1990-08-23 1993-11-30 Mazda Motor Corporation Torque detector
US5160886A (en) * 1991-02-14 1992-11-03 Carlen Controls, Inc. Permanent magnet resolver for producing a resolver-to-digital converter compatible output
US6518752B1 (en) * 1991-03-22 2003-02-11 Walter Wyss Resolver for measuring and determining angular positions or revolutions of a shaft
US5481188A (en) * 1992-03-02 1996-01-02 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for detecting the movement of an object with a micro machine that responds to a change in magnetic flux associated with the object
US5514952A (en) * 1993-06-30 1996-05-07 Simmonds Precision Products Inc. Monitoring apparatus for rotating equipment dynamics for slow checking of alignment using plural angled elements
US5508609A (en) * 1993-06-30 1996-04-16 Simmonds Precision Product Inc. Monitoring apparatus for detecting axial position and axial alignment of a rotating shaft
US5456123A (en) * 1994-01-26 1995-10-10 Simmonds Precision Products, Inc. Static torque measurement for rotatable shaft
US5696444A (en) * 1994-03-04 1997-12-09 Crane Co. Monitoring system for detecting axial and radial movement of a rotating body independent of rotational position
US6107794A (en) * 1994-03-04 2000-08-22 Crane Co. Monitoring system for detecting axial and radial movement of a rotating body independent of rotational position
EP0723136A1 (fr) * 1995-01-20 1996-07-24 MAX STEGMANN Gmbh ANTRIEBSTECHNIK - ELEKTRONIK Dispositif de mesure de l'angle de rotation
US6111402A (en) * 1996-11-29 2000-08-29 Dr. Johannes Heidenhain Gmbh Position measuring instrument having a scanning element with multiple scanning tracks
US5955880A (en) * 1996-12-05 1999-09-21 Beam; Palmer H. Sealless pump rotor position and bearing monitor
US6243023B1 (en) * 1997-12-09 2001-06-05 Sankyo Seiki Mfg. Co., Ltd. Encoder and parameter establishing device therefor
US5925951A (en) * 1998-06-19 1999-07-20 Sundstrand Fluid Handling Corporation Electromagnetic shield for an electric motor
US6178821B1 (en) * 1999-01-25 2001-01-30 General Electric Company Vibration sensing device
US20020124663A1 (en) * 1999-04-07 2002-09-12 Yoshitomo Tokumoto Rotational angle detecting device, torque detecting device and steering apparatus
WO2000062031A1 (fr) * 1999-04-07 2000-10-19 Koyo Seiko Co., Ltd. Detecteur d'angle de rotation, detecteur de couple et dispositif de direction
US6600310B2 (en) * 2000-03-08 2003-07-29 Mts Systems Corporation Linear and rotary magnetic sensor
US20040130316A1 (en) * 2001-02-22 2004-07-08 Heinrich Grueger Rotation angle sensor
WO2002068911A1 (fr) * 2001-02-22 2002-09-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Capteur d'angle de rotation
US20030074799A1 (en) * 2001-10-16 2003-04-24 Mitsubishi Denki Kabushiki Kaisha Rotation angle detection device
US20050168217A1 (en) * 2001-10-16 2005-08-04 Mitsubishi Denki Kabushiki Kaisha Rotation angle detection device
US6891365B2 (en) * 2001-10-16 2005-05-10 Mitsubishi Denki Kabushiki Kaisha Rotation angle detection device
US7009389B2 (en) 2001-10-16 2006-03-07 Mitsubishi Denki Kabushiki Kaisha Rotation angle detection device
US20030227286A1 (en) * 2002-04-29 2003-12-11 Siemens Aktiengesellschaft Rotary motion detector
US6906513B2 (en) * 2002-04-29 2005-06-14 Siemens Aktiengesellschaft Rotary motion detector
DE10225011A1 (de) * 2002-06-06 2003-12-18 Hella Kg Hueck & Co Gestanzter Rotor für Induktivsensoren
DE10225019A1 (de) * 2002-06-06 2003-12-18 Hella Kg Hueck & Co Läufer für Induktivsensor
DE10233132A1 (de) * 2002-07-20 2004-02-12 Hella Kg Hueck & Co. Koppelelement, insbesondere Rotor für einen induktiven Sensor
US6957590B2 (en) * 2003-02-28 2005-10-25 Koyo Seiko Co., Ltd. Rotational angle detecting apparatus and torque detecting apparatus
US20040168524A1 (en) * 2003-02-28 2004-09-02 Naoki Maeda Rotational angle detecting apparatus and torque detecting apparatus
US6930423B2 (en) * 2003-12-04 2005-08-16 Tamagawa Seiki Kabushiki Kaisha Rotation angle detector
US20050122097A1 (en) * 2003-12-04 2005-06-09 Kanji Kitazawa Rotation angle detector
US20050257625A1 (en) * 2004-02-28 2005-11-24 Silvester Roessner Angle of rotation sensor
US20050193583A1 (en) * 2004-03-03 2005-09-08 Benno Schmied Angle-measurement device
US7096593B2 (en) * 2004-03-03 2006-08-29 Carl Freudenberg Kg Angle-measurement device
US20060137482A1 (en) * 2004-11-12 2006-06-29 Voith Paper Patent Gmbh Method for measuring properties of a rotational body
US7398679B2 (en) * 2004-11-12 2008-07-15 Voith Paper Patent Gmbh Method for measuring properties of a rotational body
US20080134727A1 (en) * 2005-02-01 2008-06-12 Lutz May Position Sensor and Washing Machine
US9522238B2 (en) 2005-05-10 2016-12-20 Novo Nordisk A/S Injection device comprising an optical sensor
US20080287865A1 (en) * 2005-05-10 2008-11-20 Novo Nordisk A/S Injection Device Comprising An Optical Sensor
US8771238B2 (en) 2005-05-10 2014-07-08 Novo Nordisk A/S Injection device comprising an optical sensor
US8197449B2 (en) 2005-05-10 2012-06-12 Novo Nordisk A/S Injection device comprising an optical sensor
US20090076460A1 (en) * 2005-09-22 2009-03-19 Novo Nordisk A/S Device And Method For Contact Free Absolute Position Determination
US8638108B2 (en) * 2005-09-22 2014-01-28 Novo Nordisk A/S Device and method for contact free absolute position determination
EP1801545A1 (fr) * 2005-12-24 2007-06-27 Zf Friedrichshafen Ag Codeur rotatif pour un dispositif de détection à courants de foucaults
DE202006007778U1 (de) * 2006-05-16 2007-09-20 Hella Kgaa Hueck & Co. Rotor für einen induktiven Winkelsensor
US20100156402A1 (en) * 2006-06-07 2010-06-24 Vogt Electronic Components Gmbh Position encoder and a method for detecting the position of a movable part of a machine
US8421446B2 (en) 2006-06-07 2013-04-16 Vogt Electronic Components Gmbh Position encoder and a method for detecting the position of a movable part of a machine
US20070289395A1 (en) * 2006-06-20 2007-12-20 Trw Automotive Safety Systems Gmbh Device to determine an absolute rotation angle of a rotary shaft
US7654009B2 (en) * 2007-03-07 2010-02-02 Mitsubishi Heavy Industries Absolute value scale and absolute value calculating method
US20080223942A1 (en) * 2007-03-07 2008-09-18 Mitsubishi Heavy Industries, Ltd. Absolute value scale and absolute value calculating method
US20090102467A1 (en) * 2007-10-22 2009-04-23 Johnson Controls Inc. Method and apparatus for sensing shaft rotation
US8629676B2 (en) 2007-11-09 2014-01-14 SUMIDA Components & Modules GmbH Position encoder comprising a plastic element
US20100301843A1 (en) * 2007-11-09 2010-12-02 SUMIDA Components & Modules GmbH Position encoder comprising a plastic element
DE102009048612B4 (de) * 2009-10-08 2016-03-24 Elster Meßtechnik GmbH Flügelradwasserzähler mit einer Messvorrichtung zur Erfassung von Drehsignalen
DE102009048612A1 (de) * 2009-10-08 2011-04-14 Elster Meßtechnik GmbH Messvorrichtung zur Erfassung von Drehsignalen
US20110140422A1 (en) * 2010-06-29 2011-06-16 Detlef Menke Method for controlling a proximity sensor of a wind turbine
US8222760B2 (en) * 2010-06-29 2012-07-17 General Electric Company Method for controlling a proximity sensor of a wind turbine
CN102312779A (zh) * 2010-06-29 2012-01-11 通用电气公司 用于控制风力涡轮机的近程传感器的方法
CN102312779B (zh) * 2010-06-29 2016-03-09 通用电气公司 用于控制风力涡轮机的近程传感器的方法
DE102010054931A1 (de) * 2010-12-17 2012-06-21 Daimler Ag Rotoroberfläche mit Signalgeberstruktur und Herstellungsverfahren für selbige sowie Sensorsystem zur Lagebestimmung für einen Rotor
DE102010054931B4 (de) * 2010-12-17 2013-10-17 Daimler Ag Rotoroberfläche mit Signalgeberstruktur und Herstellungsverfahren für selbige sowie Sensorsystem zur Lagebestimmung für einen Rotor
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US11680996B2 (en) 2012-05-10 2023-06-20 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having integrated coil
US20150025772A1 (en) * 2013-07-02 2015-01-22 Gill Corporate Limited Position Indicator Device
US12061246B2 (en) 2013-07-19 2024-08-13 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US20150022193A1 (en) * 2013-07-19 2015-01-22 Allegro Microsystems, Llc Methods and Apparatus for Magnetic Sensor Having an Integrated Coil or Magnet to Detect a Non-Ferromagnetic Target
US11313924B2 (en) 2013-07-19 2022-04-26 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10670672B2 (en) 2013-07-19 2020-06-02 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10495699B2 (en) * 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US11054057B2 (en) 2014-09-15 2021-07-06 Flowserve Management Company Sensors for valve systems and related assemblies, systems and methods
EP3194821A4 (fr) * 2014-09-15 2018-02-28 Flowserve Management Company Capteurs destinés à des systèmes de soupape et ensembles, systèmes et procédés associés
WO2016045816A1 (fr) * 2014-09-22 2016-03-31 Robert Bosch Gmbh Ensemble formant capteur pour mesurer un déplacement et/ou un angle
US10753769B2 (en) 2014-10-31 2020-08-25 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US10753768B2 (en) 2014-10-31 2020-08-25 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US11307054B2 (en) 2014-10-31 2022-04-19 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US11715998B2 (en) 2016-04-29 2023-08-01 Lock Antriebstechnik Gmbh Switching device for switching an electric motor
US20170317560A1 (en) * 2016-04-29 2017-11-02 Lock Antriebstechnik Gmbh Switching device for switching an electric motor
US11387715B2 (en) * 2016-04-29 2022-07-12 Lock Antriebstechnik Gmbh Switching device for switching an electric motor
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10830571B2 (en) 2017-04-19 2020-11-10 Analog Devices International Unlimited Company Techniques for magnetic field direction based position sensor
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US11073573B2 (en) 2017-05-26 2021-07-27 Allegro Microsystems, Llc Packages for coil actuated position sensors
US11768256B2 (en) 2017-05-26 2023-09-26 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10649042B2 (en) 2017-05-26 2020-05-12 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US11320496B2 (en) 2017-05-26 2022-05-03 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US11686599B2 (en) 2018-08-06 2023-06-27 Allegro Microsystems, Llc Magnetic field sensor
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US12188768B2 (en) * 2021-09-16 2025-01-07 Mitutoyo Corporation Angle detector and position measuring device
US12523717B2 (en) 2024-02-15 2026-01-13 Allegro Microsystems, Llc Closed loop magnetic field sensor with current control

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JPH0665967B2 (ja) 1994-08-24
DE3681376D1 (de) 1991-10-17
EP0212662B1 (fr) 1991-09-11
EP0212662A3 (en) 1989-04-19
EP0212662A2 (fr) 1987-03-04
JPS6247501A (ja) 1987-03-02

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