US6103545A - Process for making a magnetoresistive magnetic sensor and sensor obtained using this process - Google Patents

Process for making a magnetoresistive magnetic sensor and sensor obtained using this process Download PDF

Info

Publication number
US6103545A
US6103545A US08/948,091 US94809197A US6103545A US 6103545 A US6103545 A US 6103545A US 94809197 A US94809197 A US 94809197A US 6103545 A US6103545 A US 6103545A
Authority
US
United States
Prior art keywords
magnetoresistance
magnetic
substrate
sensor
flux guides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US08/948,091
Other languages
English (en)
Inventor
Jean-Marc Fedeli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE reassignment COMMISSARIAT A L'ENERGIE ATOMIQUE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FEDELI, JEAN-MARC
Application granted granted Critical
Publication of US6103545A publication Critical patent/US6103545A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Definitions

  • the purpose of this invention is a process for making a magnetoresistive sensor and a sensor obtained using this process. It has applications particularly in magnetometry.
  • Magnetic sensors composed of a magnetoresistive element placed between two magnetic flux guides designed to concentrate the field to be measured, are known.
  • the flux guides are in the form of a stack of layers, this stack being etched to present an inclined flank.
  • Document U.S. Pat. No. 5,260,653 describes this type of sensor. The essential steps in its manufacturing process are illustrated on FIGS. 1A and 1B in the appendix.
  • FIG. 1A shows a magnetoresistive strip 10 and two flux guides 12 and 14 composed of a stack of magnetic layers. This figure corresponds to a first manufacturing step in which guides 12 and 14 have been etched obliquely.
  • FIG. 1B shows a second step in which a magnetic layer has been deposited on the assembly and then etched so that all that remains are parts 16 and 18 above stacks 12 and 14. Layers 16 and 18 provide intimate coupling with the thick parts of the guides, and with the magnetoresistance that they cover.
  • This manufacturing process has a disadvantage, in that it is difficult to make this type of inclined flank by etching. In any case, this etching is not very reproducible. Furthermore, this technique requires an additional magnetic layer to form the coupling (layers 16, 18) and this layer must be etched above the magnetoresistance, which is not very easy.
  • the purpose of this invention is to overcome these disadvantages.
  • the invention recommends that a crystalline substrate with crystallographic planes should be used, and that these planes should be used to make the oblique flanks necessary for flux concentration. These flanks may be obtained very simply by etching the crystalline substrate with excellent reproducibility.
  • the flux guides are embedded in the compartments with inclined flanks formed in the substrate. The magnetoresistive layer is then formed on the assembly. There is no longer any need for an additional magnetic coupling layer.
  • the purpose of this invention is a manufacturing process for a magnetoresistive magnetic sensor, characterized in that it includes the following operations:
  • a magnetoresistance is formed on the substrate and within the central area.
  • a magnetoresistance is formed that overlaps the flux guides.
  • a magnetic layer is formed on the two magnetic flux guides that is etched in two parts before the magnetoresistance is formed, and the magnetoresistance which overlaps these two magnetic parts is formed afterwards.
  • a magnetic layer which overlaps the magnetoresistance is deposited after forming the magnetoresistance.
  • the substrate is a semiconductor substrate, for example silicon.
  • Another purpose of the invention is a magnetoresistive magnetic sensor obtained by the process and comprising a magnetoresistance placed between two magnetic flux guides with inclined flanks, characterized in that these flux guides are embedded in a substrate with crystallographic planes, the flux guides fill two compartments formed in this substrate on each side of a central area, these compartments having inclined flanks corresponding to a crystallographic plane of the substrate, the magnetoresistance being placed on the substrate in the central area.
  • FIGS. 1A and 1B show two steps in a known process for making a sensor
  • FIG. 2 shows a first step in the process according to the invention
  • FIG. 3 shows another step in this process after formation of the compartments
  • FIG. 4 shows another step in this process, with filling of the compartments
  • FIG. 5 shows another step in this process, in which two flux guides are obtained
  • FIG. 6 shows the magnetoresistance formation step
  • FIG. 7 illustrates a variant using an additional magnetic layer
  • FIG. 8 illustrates another variant with double overlap
  • FIG. 9 shows the compared variations of the measurement signal for a sensor using prior art and for a sensor according to the invention.
  • FIG. 10 is an enlargement of FIG. 9;
  • FIG. 11 shows a top view of a sensor according to the invention with a magnetoresistance working in transverse mode
  • FIG. 12 is another top view showing another variant with a meandering magnetoresistance operating in longitudinal mode.
  • FIGS. 2 to 8 illustrate some of the steps in a process for making a sensor in accordance with the invention.
  • a substrate 20 for example oriented silicon ⁇ 100>, on which a resin mask 22 (FIG. 2A) is deposited.
  • the substrate is then chemically etched, for example using a solution of KOH, to obtain two compartments 24 and 26 with inclined flanks, denoted 25, 27 respectively (FIG. 3).
  • the etching depth is between 1 ⁇ m and 100 ⁇ m; for example it may be about 10 ⁇ m.
  • the flanks obtained are inclined at 55° from the horizontal.
  • the mask 22 is then eliminated to expose the central area 23 located between the two compartments.
  • This layer is made of Si0 2 , in the case of silicon. Its thickness may be 0.5 ⁇ m.
  • a magnetic layer 30 is then deposited in the compartments and on the central area. This deposit may be done electrolytically.
  • a conducting sub-layer is deposited firstly (for example made of Cr or Au), and a layer 30, for example of Ni or Fe--Ni, is grown on the assembly, with a thickness exceeding the depth of the compartments (FIG. 4).
  • the excess magnetic material is removed by polishing the assembly to make the two magnetic parts 32, 34 forming the flux guides flush with each other, and to show the oxidized surface of the substrate in the central area 36 (FIG. 5).
  • One or several layers of a magnetoresistive material with a total thickness of less than 100 nm are then deposited, for example by cathodic spraying, and this layer is etched (for example by ionic machining) to leave only a strip 40 (FIG. 6). This strip slightly overlaps the threaded end of flux guides 32 and 34.
  • an additional magnetic layer is deposited (for example 0.2 ⁇ m thick) that is etched to provide two layers 36, 38 covering guides 32, 34 and slightly overlapping them.
  • the magnetoresistance 40 is not formed until afterwards, and overlaps layers 36, 38.
  • a magnetic layer 42, 44 is deposited which overlaps the magnetoresistance 40. Therefore it is doubly overlapped on its edges by layers 42, 44 and guides 32, 34.
  • layers 42, 44 may or may not be in contact with guides 32, 34.
  • FIGS. 9 and 10 compare the sensitivity of a sensor conform with the invention, and the sensitivity of a sensor using prior art.
  • the curves show the variations in the measurement signal S applicable to a same unit, as a function of the applied magnetic field H.
  • Curve 50 applies to prior art, and curve 52 to the invention in the case of the double overlapping variant (FIG. 8). These curves show that the sensors according to the invention are more sensitive than sensors using prior art.
  • the magnetoresistance used in the invention may be of any known type: anisotropic or GMR (for example with spins valve, etc.). It may have any shape.
  • GMR spins valve, etc.
  • FIG. 11 it is a strip 60 connected to two electrical connections 61 and 63. This type of magnetoresistance operates in transverse mode.
  • the magnetic field H is actually perpendicular to the large sides of the strip, these large sides partially covering the two flux guides 62 and 64.
  • the magnetoresistance 70 is a meandering pattern. Its ends are still connected to two electrical connections 71, 73 and flux guides 72, 74 are covered by horizontal branches of the magnetoresistance. Therefore this magnetoresistance works in longitudinal mode, in its branches going from one guide to the other.

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
US08/948,091 1996-10-22 1997-10-09 Process for making a magnetoresistive magnetic sensor and sensor obtained using this process Expired - Fee Related US6103545A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9612812A FR2754905B1 (fr) 1996-10-22 1996-10-22 Procede de realisation d'un capteur magnetique magnetoresistif et capteur obtenu par ce procede
FR9612812 1996-10-22

Publications (1)

Publication Number Publication Date
US6103545A true US6103545A (en) 2000-08-15

Family

ID=9496862

Family Applications (1)

Application Number Title Priority Date Filing Date
US08/948,091 Expired - Fee Related US6103545A (en) 1996-10-22 1997-10-09 Process for making a magnetoresistive magnetic sensor and sensor obtained using this process

Country Status (4)

Country Link
US (1) US6103545A (fr)
EP (1) EP0838690A1 (fr)
JP (1) JPH10125975A (fr)
FR (1) FR2754905B1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475821B2 (en) * 1997-04-03 2002-11-05 Yamatake Corporation Circuit substrate, detector, and method of manufacturing the same
US6873499B2 (en) * 1998-12-04 2005-03-29 International Business Machines Corporation Read head having high resistance soft magnetic flux guide layer for enhancing read sensor efficiency
US20060092543A1 (en) * 2004-10-29 2006-05-04 Hitachi Global Storage Technologies Netherlands B.V. System, method, and apparatus for in-situ stray magnetic field measurement

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363157A (ja) * 2003-06-02 2004-12-24 Res Inst Electric Magnetic Alloys 薄膜磁気センサ及びその製造方法
JP7014159B2 (ja) * 2016-05-24 2022-02-01 Tdk株式会社 磁気センサ
JP2019219182A (ja) * 2018-06-15 2019-12-26 Tdk株式会社 磁気センサ
JP7414703B2 (ja) * 2020-12-14 2024-01-16 株式会社東芝 磁気センサ及び検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260653A (en) * 1992-06-03 1993-11-09 Eastman Kodak Company Thin film very high sensitivity magnetoresistive magnetometer having temperature compensation and simple domain stability
EP0600549A2 (fr) * 1992-12-01 1994-06-08 Koninklijke Philips Electronics N.V. Tête magnétique à films minces et procédé de fabrication
US5483735A (en) * 1993-03-22 1996-01-16 U.S. Philips Corporation Method of manufacturing a thin-film magnetic head

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260653A (en) * 1992-06-03 1993-11-09 Eastman Kodak Company Thin film very high sensitivity magnetoresistive magnetometer having temperature compensation and simple domain stability
EP0600549A2 (fr) * 1992-12-01 1994-06-08 Koninklijke Philips Electronics N.V. Tête magnétique à films minces et procédé de fabrication
US5483735A (en) * 1993-03-22 1996-01-16 U.S. Philips Corporation Method of manufacturing a thin-film magnetic head

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475821B2 (en) * 1997-04-03 2002-11-05 Yamatake Corporation Circuit substrate, detector, and method of manufacturing the same
US6873499B2 (en) * 1998-12-04 2005-03-29 International Business Machines Corporation Read head having high resistance soft magnetic flux guide layer for enhancing read sensor efficiency
US20060092543A1 (en) * 2004-10-29 2006-05-04 Hitachi Global Storage Technologies Netherlands B.V. System, method, and apparatus for in-situ stray magnetic field measurement
US7227711B2 (en) 2004-10-29 2007-06-05 Hitachi Global Storage Technologies Netherlands B.V. System, method, and apparatus for in-situ stray magnetic field measurement

Also Published As

Publication number Publication date
JPH10125975A (ja) 1998-05-15
FR2754905A1 (fr) 1998-04-24
FR2754905B1 (fr) 1998-11-20
EP0838690A1 (fr) 1998-04-29

Similar Documents

Publication Publication Date Title
JP4630544B2 (ja) ブリッジ構造を構成する複数の磁気素子のうち選択された磁気素子の磁性層の磁化方向を他の磁気素子の磁性層の磁化方向と反対方向に配向する方法
US7589528B2 (en) Magnetic sensor formed of magnetoresistance effect elements
US6426620B1 (en) Magnetic field sensing element and device having magnetoresistance element and integrated circuit formed on the same substrate
EP1484617B1 (fr) Capteur magnétique à couche mince et son procédé de fabrication
US6191581B1 (en) Planar thin-film magnetic field sensor for determining directional magnetic fields
US7602178B2 (en) Magnetoresistive sensor for measuring the strength of a magnetic field
US20160202329A1 (en) Amr-type integrated magnetoresistive sensor for detecting magnetic fields perpendicular to the chip
US20050035761A1 (en) Fluxgate sensor integrated in a semiconductor substrate and method for manufacturing the same
WO2001035112A1 (fr) Detecteur de champ magnetique a condition de detection uniforme
US20110089941A1 (en) Magnetic sensor and magnetic sensor module
US6850057B2 (en) Barber pole structure for magnetoresistive sensors and method of forming same
US6103545A (en) Process for making a magnetoresistive magnetic sensor and sensor obtained using this process
US7564238B2 (en) Magnetic detection device connecting element and detection circuit and method of manufacturing the same
JPH09129944A (ja) 磁電変換素子
WO1998020357A1 (fr) Capteur de champs magnetiques
JP2000269567A (ja) 半導体磁気抵抗素子
JPH07209100A (ja) ひずみ検出器
JPH0668430A (ja) 磁気抵抗効果型読み取り変換器
JP4518462B2 (ja) Ｇｍｒ構造体を製造する方法
EP2098879A1 (fr) Dispositif de détection magnétique et son procédé de fabrication
WO2022190854A1 (fr) Capteur magnétique et son procédé de fabrication
JPH07191118A (ja) 磁気センサ
JP4133758B2 (ja) 磁気検出素子および磁気検出装置
JPS6135976Y2 (fr)
JP2591429B2 (ja) 磁気抵抗素子

Legal Events

Date Code Title Description
AS Assignment

Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE, FRANCE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:FEDELI, JEAN-MARC;REEL/FRAME:009131/0444

Effective date: 19971006

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 20040815

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362