UST959005I4 - Method of determining yield loss due to a combination of defects in manufacturing method utilizing same - Google Patents

Method of determining yield loss due to a combination of defects in manufacturing method utilizing same Download PDF

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Publication number
UST959005I4
UST959005I4 US05/732,565 US73256576A UST959005I4 US T959005 I4 UST959005 I4 US T959005I4 US 73256576 A US73256576 A US 73256576A US T959005 I4 UST959005 I4 US T959005I4
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United States
Prior art keywords
categories
defect
selected combination
defects
units
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Pending
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US05/732,565
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Howard A. Froot
Vijendra P. Singh
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Priority to US05/732,565 priority Critical patent/UST959005I4/en
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Publication of UST959005I4 publication Critical patent/UST959005I4/en
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    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/14—Quality control systems

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  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A method of inspecting defective manufactured units and determining for any selected combination of defect categories the respective probable number of units having only a defect in each category of the selected combination of categories, and also the yield loss due to the selected combination of categories. The defect categories are arranged in an ordered sequence. Each unit of a sample of the manufactured units is inspected for the presence of a defect in each successive one of the ordered sequence of defect categories. As soon as it is determined that an inspected unit has a defect in a particular category, all further inspection of the unit is omitted and the unit is not inspected for the presence of defects in the subsequent categories of the sequence. From the resulting data there is determined for the selected combination of defect categories the respective probable number of units having only a defect in each category of the selected combination of categories and no defect in other categories. There is also determined for the selected combination of categories of defects the yield increase that may be expected by a change in the manufacturing process to eliminate the manufacture of any units having defects in the selected combination of categories. A manufacturing method utilizing this inspection method and the yield determinations is also disclosed.
US05/732,565 1974-02-11 1976-10-15 Method of determining yield loss due to a combination of defects in manufacturing method utilizing same Pending UST959005I4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/732,565 UST959005I4 (en) 1974-02-11 1976-10-15 Method of determining yield loss due to a combination of defects in manufacturing method utilizing same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44172874A 1974-02-11 1974-02-11
US05/732,565 UST959005I4 (en) 1974-02-11 1976-10-15 Method of determining yield loss due to a combination of defects in manufacturing method utilizing same

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US44172874A Continuation 1974-02-11 1974-02-11

Publications (1)

Publication Number Publication Date
UST959005I4 true UST959005I4 (en) 1977-06-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
US05/732,565 Pending UST959005I4 (en) 1974-02-11 1976-10-15 Method of determining yield loss due to a combination of defects in manufacturing method utilizing same

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118783A (en) * 1990-09-12 1992-06-02 Reichhold Chemicals, Inc. Chain-stopped unsaturated polyester resins
US5793650A (en) * 1995-10-19 1998-08-11 Analog Devices, Inc. System and method of identifying the number of chip failures on a wafer attributed to cluster failures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118783A (en) * 1990-09-12 1992-06-02 Reichhold Chemicals, Inc. Chain-stopped unsaturated polyester resins
US5793650A (en) * 1995-10-19 1998-08-11 Analog Devices, Inc. System and method of identifying the number of chip failures on a wafer attributed to cluster failures

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