WO1991019352A1 - Element de filtre en cristal de quartz ultra mince a fonctionnement en mode multiple - Google Patents

Element de filtre en cristal de quartz ultra mince a fonctionnement en mode multiple Download PDF

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Publication number
WO1991019352A1
WO1991019352A1 PCT/JP1990/001528 JP9001528W WO9119352A1 WO 1991019352 A1 WO1991019352 A1 WO 1991019352A1 JP 9001528 W JP9001528 W JP 9001528W WO 9119352 A1 WO9119352 A1 WO 9119352A1
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WO
WIPO (PCT)
Prior art keywords
filter element
electrodes
ultra
quartz crystal
ultra thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1990/001528
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English (en)
Japanese (ja)
Inventor
Takao Morita
Osamu Ishii
Takebumi Kurosaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to EP91900352A priority Critical patent/EP0483358B1/fr
Priority to DE69022996T priority patent/DE69022996T2/de
Priority to US07/809,511 priority patent/US5307034A/en
Priority to KR1019910700195A priority patent/KR940009397B1/ko
Publication of WO1991019352A1 publication Critical patent/WO1991019352A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device

Definitions

  • the present invention relates to a multi-mode quartz filter element using an ultra-thin AT cut quartz element plate capable of exciting a high frequency of about several 10 to about 10 O MH ⁇ ⁇ with fundamental wave vibration.
  • the fundamental wave frequency of a practical resonator is limited to about 4 OMHz from the viewpoint of manufacturing technology and mechanical strength.
  • so-called over-tooth oscillating means for extracting harmonic components of the AT-cut quartz resonator to obtain a frequency which is an odd multiple of the fundamental frequency is widely used.
  • the use of such a coil is inconvenient in integrating the oscillation circuit, and that the oscillation is difficult due to a large capacitance ratio and a high impedance level.
  • an ultra-thin piezoelectric resonator that obtains a frequency of several 10 to several 10 OMHz by fundamental wave vibration has been proposed and studied. If a multi-mode filter element is manufactured using such an ultra-thin piezoelectric element, a filter having a center frequency of several tens to ten tens of ohms can be easily formed without using overtone technology. I can do it.
  • the multi-mode piezoelectric filter element that has been generally used in the past, for example, if the center frequency of the filter element is 10 MHz, sets the degree of confinement of vibration energy to an appropriate value and sets the It has been considered that the thickness of the electrode formed by vapor deposition on the piezoelectric element plate is preferably about 300 A in order to keep the loss low.
  • the electrode film thickness should be 30 OA at 1 Z 10 if it is based on the "similarity principle". In this case, the ohmic loss increases because the electrode film thickness is too thin, and the filter It is clear that sufficient attenuation cannot be obtained.
  • the electrode film thickness is set to about 100 A to keep the ohmic loss at a sufficiently low value, the electrode film thickness becomes excessively large compared to the thickness of the piezoelectric element plate (about 17 im). As a result, the amount of vibration energy confined becomes excessive, and sufficient acoustic coupling cannot be obtained unless the gap between the split electrodes is extremely reduced.Therefore, the pass bandwidth of the filter must be extremely small. If the gap between the electrodes is set small enough to produce the desired acoustic coupling in order to avoid the problem, a high-precision mask is required when depositing and forming the electrodes, which increases the possibility of short-circuits between the electrodes.
  • the pass band characteristics of the filter element are determined by selecting the arrangement direction. Note that it is possible to obtain the desired acoustic coupling while arranging the gaps between the electrodes as close as possible without short-circuiting, that is, an ultrathin enough to withstand practical use
  • the present invention aims to provide a multimode quartz filter element. No '''
  • an ultra-thin multi-mode crystal filter element is one in which dividing electrodes are arranged along the X-axis crystal direction of an AT-cut crystal block constituting the element.
  • FIGS. 1 (a) and (b) are plan views showing different embodiments of an ultra-thin multi-mode quartz filter element according to the present invention
  • FIGS. 2 (a) and (b) are quartz blanks, respectively.
  • 3 (a) and 3 (b) show the relationship between the crystallographic axis and the arrangement direction of the split electrodes and the experimental results showing the degree of acoustic coupling when the relationship between the two was changed. It is the top view and sectional drawing which show the structure of an ultra-thin piezoelectric resonator.
  • FIGS. 3 (a) and (b) are a perspective view showing the structure of an ultra-thin plate piezoelectric resonator generally studied in the past, and a cross-sectional view showing a state in which this is housed and fixed in a case.
  • a concave portion 2 is formed by mechanical polishing or etching substantially in the center of one principal plane of a piezoelectric block 1 such as quartz, and the bottom surface thereof is formed into an extremely thin vibrating portion 3.
  • the vibrating portion is formed.
  • the ultra-thin vibrating portion 3 is supported by a thick annular surrounding portion 4 formed integrally with the peripheral edge of 3.
  • a conductive film is deposited on the entire surface of the annular surrounding portion 4, the inner wall surface of the concave portion, and the surface of the vibrating portion 3 on the surface of the piezoelectric block 1 on which the concave portion 2 is formed as described above, and the entire surface electrode 5 is formed.
  • a pair of divided electrodes 7a and 7b and electrode lead portions 8a and 8b extending from these to the block end are provided on the flat surface 6 opposed thereto, and the ultra-thin multi-mode piezoelectric filter element 9 is provided.
  • the concave portion 2 faces the bottom of a so-called flat type case 10 in which an insulator is formed in a dish shape as shown in FIG. That is, a part of the surface of the annular surrounding portion 4 to which the electrode is attached and the conductive film 11 provided on the bottom surface of the case 10 are electrically conductive adhesive 12.
  • the electrode leads 8a, 8b extending from the divided electrodes 7a, 7b on the flat surface opposed to the surface by bonding and fixing are connected to the conductor film 13 provided on the stepped surface of the inner wall of the case 10 and the bonding wire 1
  • the connection at 4 minimizes the constraint of the resonator 9 on the case 10 and minimizes the strain applied to the filter element due to the difference in the thermal expansion coefficient between the two. It is common.
  • the conductor films 11 and 13 on the case bottom and the step on the inner wall of the case are electrically connected to the external lead terminals 15 and 16 that are airtightly penetrated through the case wall and exposed on the outer wall of the case. . Further, the opening of the case 10 is sealed with an appropriate (generally metal) lid 17 after the above-mentioned storage and fixing of the resonator is completed, thereby completing the piezoelectric device.
  • the pair of split electrodes 7a In a filter element of the type described above, the pair of split electrodes 7a. There is no significant difference in the degree of acoustic coupling between the divided electrodes depending on the selection of the arrangement direction with respect to the crystal axis of the crystal plate in FIG. 7b.
  • Figs. 2 (a) and (b) show the results of examining the relationship between the array orientation of the divided electrodes with respect to the X-axis of the AT-cut quartz crystal plate and the degree of acoustic coupling, that is, the bandwidth of the filter.
  • FIG. 2 (a) and (b) show the results of examining the relationship between the array orientation of the divided electrodes with respect to the X-axis of the AT-cut quartz crystal plate and the degree of acoustic coupling, that is, the bandwidth of the filter.
  • the ratio of the bandwidth that the crystal filter element can take is approximately. It is clear that there is a difference of 1.26 times. ⁇
  • conventional general multi-mode piezoelectric filter elements only use a quartz crystal plate having a fundamental frequency of about 3 OMHz, and at most about 5 OMHz.Therefore, a configuration that can produce acoustic coupling in the X direction is used. No need to recruit.
  • a multi-mode crystal filter element of the type shown in Figs. 1 (a) and 1 (b) uses a base plate with a fundamental frequency near 100 OMHz, and therefore uses conventional Z-direction coupling. As described above, if a filter element having a sufficient bandwidth is to be obtained, a very difficult problem arises in forming a divided electrode.
  • the split electrodes are arranged in the X-axis direction, and the X-direction coupling that can obtain an essentially wide bandwidth is used.
  • the multi-mode crystal filter element shown in FIG. 1 (a) has the entire surface of the concave portion 2 side covered with a conductive film and the divided electrodes 7a, 7b on the other surface of the ultra-thin vibrating portion 3. Are arranged along the x-axis direction.
  • the split electrodes 7a and 7b are arranged along the X-axis direction on the bottom surface of The whole surface electrode is formed on the back surface on the side.
  • a crystal multiplex having an extremely high center frequency which has an electrode film thickness sufficient for ensuring conductivity and an electrode gap which does not cause any particular difficulty in manufacturing, and which can provide a sufficient bandwidth.
  • Mode-fill devices can be easily mass-produced.
  • the crystal block 1 may have a disk shape, and the divided electrodes 7a and 7b may be formed by vapor deposition along the X axis on the flat surface 6.
  • the present invention is configured as described above, it is possible to generate desired acoustic coupling even if the gap between the splitters is set as short as possible without causing a short circuit, so a sufficiently wide band width Can satisfy the characteristics of a multi-mode crystal filter using a quartz substrate whose fundamental frequency exceeds 5 OMHz, and has a remarkable effect on improving the production yield. .

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

L'invention se rapporte à un élément de filtre en cristal de quartz ultra mince à fonctionnement en mode multiple, qui comprend une plaque élémentaire de cristal de quartz à coupe AT formée dans un corps par une partie vibrante ultra mince et par une partie annulaire épaisse entourant la partie vibrante. Des électrodes fendues sont disposées sur la partie vibrante le long de l'axe des X de la plaque élémentaire, à une proximité telle les unes des autres qu'elles ne subissent aucun court-circuit. Le couplage accoustique désiré peut être obtenu en dépit de la proximité de disposition des électrodes. Ainai, un élément de filtre ayant une fréquence centrale comprise entre plusieurs dizaines et plusieurs centaines de MHz et ayant une bande passante suffisante peut être obtenu avec un bon rendement.
PCT/JP1990/001528 1990-05-25 1990-11-22 Element de filtre en cristal de quartz ultra mince a fonctionnement en mode multiple Ceased WO1991019352A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP91900352A EP0483358B1 (fr) 1990-05-25 1990-11-22 Element de filtre en cristal de quartz ultra mince a fonctionnement en mode multiple
DE69022996T DE69022996T2 (de) 1990-05-25 1990-11-22 Ultradünne quartzkristallfiltereinheit mit mehreren moden.
US07/809,511 US5307034A (en) 1990-05-25 1990-11-22 Ultrathin multimode quartz crystal filter element
KR1019910700195A KR940009397B1 (ko) 1990-05-25 1991-11-20 초박판 다중모드 수정필터소자

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2/136135 1990-05-25
JP2136135A JPH0435108A (ja) 1990-05-25 1990-05-25 超薄板多重モード水晶フィルタ素子

Publications (1)

Publication Number Publication Date
WO1991019352A1 true WO1991019352A1 (fr) 1991-12-12

Family

ID=15168127

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1990/001528 Ceased WO1991019352A1 (fr) 1990-05-25 1990-11-22 Element de filtre en cristal de quartz ultra mince a fonctionnement en mode multiple

Country Status (5)

Country Link
US (1) US5307034A (fr)
EP (1) EP0483358B1 (fr)
JP (1) JPH0435108A (fr)
DE (1) DE69022996T2 (fr)
WO (1) WO1991019352A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298216B1 (en) 1999-09-21 2001-10-02 Ten Cate Enbi, Inc. Image transfer device incorporating a fuser roller having a thick wearable silicone rubber surface
CN104079255A (zh) * 2013-03-29 2014-10-01 精工爱普生株式会社 振动元件、振子、振荡器、电子设备以及移动体

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US6081164A (en) * 1997-01-09 2000-06-27 Seiko Epson Corporation PLL oscillator package and production method thereof
US7098574B2 (en) * 2002-11-08 2006-08-29 Toyo Communication Equipment Co., Ltd. Piezoelectric resonator and method for manufacturing the same
US8460561B2 (en) * 2007-09-13 2013-06-11 Citizen Holdings Co., Ltd. Crystal oscillator piece and method for manufacturing the same
CN102498666B (zh) * 2009-09-18 2015-10-14 株式会社大真空 压电振动片以及压电振动片的制造方法
JP5720152B2 (ja) * 2010-09-06 2015-05-20 富士通株式会社 振動子の作製方法、振動子および発振器
TW201251157A (en) 2011-06-03 2012-12-16 Seiko Epson Corp Piezoelectric vibration element, manufacturing method for piezoelectric vibration element, piezoelectric vibrator, electronic device, and electronic apparatus
CN102957394B (zh) * 2011-08-18 2016-12-21 精工爱普生株式会社 振动元件、振子、电子装置、电子设备、移动体及振动元件的制造方法
US8970316B2 (en) 2011-08-19 2015-03-03 Seiko Epson Corporation Resonating element, resonator, electronic device, electronic apparatus, and mobile object
JP2014007538A (ja) * 2012-06-25 2014-01-16 Daishinku Corp 水晶振動デバイス
JP6390104B2 (ja) * 2013-03-05 2018-09-19 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6498379B2 (ja) * 2013-03-29 2019-04-10 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6107330B2 (ja) * 2013-03-29 2017-04-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
USD760230S1 (en) * 2014-09-16 2016-06-28 Daishinku Corporation Piezoelectric vibration device

Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH05135297A (ja) * 1991-11-14 1993-06-01 Meidensha Corp 交通規制情報取得システム
JPH05197394A (ja) * 1991-09-14 1993-08-06 Philips Gloeilampenfab:Nv 音声信号のワードシーケンス認識方法および装置

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FR2279261A1 (fr) * 1974-07-19 1976-02-13 Thomson Csf Dispositif electromecanique a resonance et son application au filtrage des signaux de television
US3951098A (en) * 1975-02-12 1976-04-20 Enviro-Gro, Inc. House plant water content indicator
DE2823540C2 (de) * 1977-06-08 1985-04-18 Kinseki Ltd., Tokio/Tokyo Piezoelektrischer Mehrfachresonator
JPH03243008A (ja) * 1990-02-21 1991-10-30 Toyo Commun Equip Co Ltd 超薄板水晶共振子の固定方法
DE69032666T2 (de) * 1990-02-09 1999-03-11 Toyo Communication Equipment Co., Ltd., Kanagawa Eingekapselter piezoelektrischer Resonator
US5075651A (en) * 1990-02-15 1991-12-24 Motorola, Inc. VHF wide-bandwidth low impedance monolithic crystal filter having bridged electrodes

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH05197394A (ja) * 1991-09-14 1993-08-06 Philips Gloeilampenfab:Nv 音声信号のワードシーケンス認識方法および装置
JPH05135297A (ja) * 1991-11-14 1993-06-01 Meidensha Corp 交通規制情報取得システム

Non-Patent Citations (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298216B1 (en) 1999-09-21 2001-10-02 Ten Cate Enbi, Inc. Image transfer device incorporating a fuser roller having a thick wearable silicone rubber surface
CN104079255A (zh) * 2013-03-29 2014-10-01 精工爱普生株式会社 振动元件、振子、振荡器、电子设备以及移动体
CN104079255B (zh) * 2013-03-29 2018-06-12 精工爱普生株式会社 振动元件、振子、振荡器、电子设备以及移动体

Also Published As

Publication number Publication date
EP0483358B1 (fr) 1995-10-11
US5307034A (en) 1994-04-26
DE69022996T2 (de) 1996-03-14
EP0483358A1 (fr) 1992-05-06
DE69022996D1 (de) 1995-11-16
EP0483358A4 (en) 1992-09-09
JPH0435108A (ja) 1992-02-05

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