WO1995002814B1 - Spectrometre d'analyse sous angles multiples - Google Patents

Spectrometre d'analyse sous angles multiples

Info

Publication number
WO1995002814B1
WO1995002814B1 PCT/US1994/006679 US9406679W WO9502814B1 WO 1995002814 B1 WO1995002814 B1 WO 1995002814B1 US 9406679 W US9406679 W US 9406679W WO 9502814 B1 WO9502814 B1 WO 9502814B1
Authority
WO
WIPO (PCT)
Prior art keywords
recited
sample
probe beam
light source
incidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1994/006679
Other languages
English (en)
Other versions
WO1995002814A1 (fr
Filing date
Publication date
Priority claimed from US08/093,178 external-priority patent/US5412473A/en
Application filed filed Critical
Priority to EP94921955A priority Critical patent/EP0708918B1/fr
Priority to JP7504543A priority patent/JPH09504861A/ja
Priority to DE69416838T priority patent/DE69416838T2/de
Publication of WO1995002814A1 publication Critical patent/WO1995002814A1/fr
Publication of WO1995002814B1 publication Critical patent/WO1995002814B1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Abstract

Dispositif optique de mesure des caractéristiques d'un échantillon comportant une source de lumière polychrome produisant un faisceau d'essai qu'on focalise à la surface de l'échantillon. Les raies du faisceau subissent une analyse simultanée quant à leur position dans le faisceau et aux différentes longueurs d'onde correspondantes. En utilisant un filtre, un élément dispersif et un réseau bidimentionnel de photocapteurs, on peut effectuer simultanément l'analyse du faisceau sous plusieurs angles d'incidence et pour plusieurs longueurs d'ondes. Est également présenté un filtre à image variable permettant de sélectionner la taille de la zone d'analyse de l'échantillon.
PCT/US1994/006679 1993-07-16 1994-06-14 Spectrometre d'analyse sous angles multiples Ceased WO1995002814A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP94921955A EP0708918B1 (fr) 1993-07-16 1994-06-14 Spectrometre d'analyse sous angles multiples
JP7504543A JPH09504861A (ja) 1993-07-16 1994-06-14 多数角度分光分析器
DE69416838T DE69416838T2 (de) 1993-07-16 1994-06-14 Vorrichtung zur spektralanalyse unter einer mehrzahl von winkeln

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/093,178 1993-07-16
US08/093,178 US5412473A (en) 1993-07-16 1993-07-16 Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices

Publications (2)

Publication Number Publication Date
WO1995002814A1 WO1995002814A1 (fr) 1995-01-26
WO1995002814B1 true WO1995002814B1 (fr) 1995-02-23

Family

ID=22237587

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1994/006679 Ceased WO1995002814A1 (fr) 1993-07-16 1994-06-14 Spectrometre d'analyse sous angles multiples

Country Status (5)

Country Link
US (2) US5412473A (fr)
EP (2) EP0708918B1 (fr)
JP (1) JPH09504861A (fr)
DE (1) DE69416838T2 (fr)
WO (1) WO1995002814A1 (fr)

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