WO1999044280A1 - Moteur a ultrasons - Google Patents

Moteur a ultrasons Download PDF

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Publication number
WO1999044280A1
WO1999044280A1 PCT/JP1999/000887 JP9900887W WO9944280A1 WO 1999044280 A1 WO1999044280 A1 WO 1999044280A1 JP 9900887 W JP9900887 W JP 9900887W WO 9944280 A1 WO9944280 A1 WO 9944280A1
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WO
WIPO (PCT)
Prior art keywords
frequency
signal
phase
output
ultrasonic motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1999/000887
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English (en)
Japanese (ja)
Inventor
Makoto Masuda
Yoshiyo Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Star Micronics Co Ltd
Original Assignee
Star Micronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10047945A external-priority patent/JP3090903B2/ja
Priority claimed from JP10048149A external-priority patent/JP3069074B2/ja
Application filed by Star Micronics Co Ltd filed Critical Star Micronics Co Ltd
Publication of WO1999044280A1 publication Critical patent/WO1999044280A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits

Definitions

  • the present invention relates to an ultrasonic motor.
  • a conventional ultrasonic motor is described in Japanese Patent Application Laid-Open No. 7-154,981.
  • a vibrator is provided on both the moving element and the stator, and a rotor as the moving element rotates according to the vibration state of the vibrating element. Disclosure of the invention
  • the conventional ultrasonic motor described above has insufficient rotation control.
  • the present invention has been made to solve such a problem, and an object of the present invention is to provide an ultrasonic motor capable of performing sufficient rotation control.
  • An ultrasonic motor applies a first drive signal to one of vibrators provided on a stator and a mover opposed to each other, and vibrates the vibrator by applying a second drive signal to the other.
  • a shift phase signal generation that shifts the phase of the second drive signal relatively to the phase of the first drive signal in accordance with the speed instruction information It is characterized by having a part. This phase may be shifted by a predetermined amount per unit time, or may be shifted continuously over time. When a continuous phase shift occurs, a frequency difference occurs between the first and second drive signals.
  • the traveling waves generated by the stator and the moving element are combined with each other.
  • Each traveling wave is generated by applying the first and second drive signals to each transducer.
  • the shift phase signal generation unit converts the phase of the second drive signal The phase is shifted relatively to the phase of the first drive signal. Therefore, the combined position of the traveling wave is moved by the phase difference between these drive signals, and the movable element is moved, so that the movable element can be sufficiently controlled.
  • the ultrasonic motor functions as a rotary motion type ultrasonic motor with the mover as a mouth
  • the ultrasonic motor functions as a linear motion ultrasonic motor using a slider as a slider.
  • the ultrasonic motor further includes a first frequency divider that divides a high-frequency pulse signal from an oscillator to generate a first drive signal.
  • the shift phase signal generation section divides an appropriate number of pulses from the high-frequency pulse signal or adds an appropriate number of pulses to the high-frequency pulse signal, and separates the output signal of the pulse number adjustment section. It is preferable that a second frequency divider that generates a signal having a cycle of every predetermined number of pulses as a second drive signal is provided.
  • the pulse number adjusting unit thins out an appropriate number of pulses from the high frequency pulse signal or adds an appropriate number of pulses to the high frequency pulse signal.
  • the second frequency divider divides the frequency of the output signal of the pulse number adjusting unit and generates a signal having a cycle of a predetermined number of pulses as a second drive signal. Therefore, the rising or falling timing of the second driving signal, which is the output signal of the second frequency divider, is shifted by the number of pulses increased or decreased by the pulse number adjusting unit, and the phase difference between the first and second driving signals is shifted. Occurs. If the pulse number adjusting unit increases or decreases the number of pulses continuously in time, the rising or falling edge of the second driving signal shifts continuously, so that the position between the first and second driving signals is changed. The phase difference increases continuously, and the mover moves continuously.
  • the ultrasonic motor according to the present invention further includes a phase shift amount instructing unit that instructs the shift phase signal generating unit the amount of phase shift of the second drive signal per unit time.
  • the amount of phase shift per unit time corresponds to the moving speed of the moving element. Therefore, when the phase shift amount instructing unit instructs the shift phase signal generating unit on the phase shift amount of the second drive signal per unit time, the moving speed of the movable element can be controlled.
  • FIG. 1 is a configuration diagram showing an ultrasonic module according to an embodiment.
  • FIG. 2 is a plan view of one side of the piezoelectric vibrator 5 V or 6 V.
  • FIG. 3 is a plan view of the other side of the piezoelectric vibrator 5 V or 6 V.
  • Fig. 4 is a cross-sectional view taken along the circumferential direction of the stay / mouth / mouth contact area when a traveling wave is generated.
  • FIG. 5 is a system configuration diagram of the electric control unit 2.
  • FIG. 6 is a circuit diagram of the pulse thinning and additional circuits 16 D11 and 16 D12 .
  • FIG. 8 is a system configuration diagram of the electric control unit 2 according to another embodiment.
  • FIG. 9 is a system configuration diagram of the electric control unit 2.
  • FIG. 10 is a circuit diagram of the frequency conversion unit 116D .
  • FIG. 11 is a circuit diagram of the frequency conversion unit 116 D ′.
  • FIG. 12 is a circuit diagram of the frequency conversion unit 116 D ′.
  • FIG. 13 is a circuit diagram of the frequency conversion unit 116 D ′.
  • Figure 14 is an input signal frequency to the frequency converter 1 16 D ': fin and, in the setting of the voltage controlled oscillator 1 1 6 D9, indicated value nl the relationship between the output signal frequency f out of, n2, n3, n4 It is a table shown in association.
  • FIG. 15 is a table showing calculated values of ⁇ f of the output frequency f out corresponding to setting 2, setting 3, and setting 1 shown in FIG. 14 when n is varied.
  • FIG. 1 is a configuration diagram showing an ultrasonic motor according to the present embodiment.
  • This ultrasonic module —Evening is composed of an ultrasonic motor body 1 consisting of a mechanical drive mechanism and an electric control unit 2 for controlling the drive of the ultrasonic motor body 1.
  • the ultrasonic motor main body 1 includes a circular outer edge stay 5 and a rotor 6 provided on a rotating shaft 4 penetrating a center portion of the fixing base 3 so as to face each other.
  • the rotor 6 rotates by displacing the phase of one traveling wave from the other in a state where traveling waves traveling in the circumferential direction of the opposing contact surfaces of the stay 5 and the mouth 6 are combined.
  • the fixing base 3 is for fixing the ultrasonic motor to a fixed side of a main device such as a camera to which the ultrasonic motor is applied.
  • a through hole 3h is formed in the center of the fixing base 3 so as to penetrate the fixing base 3 in the vertical direction.
  • Station 5 consists of an annular vibrator 5 V made of a ceramic piezoelectric element and a vibrator 5
  • V includes an annular elastic body 5e made of metal and adhered to the outer periphery of the back surface.
  • the inner peripheral portion 5 i of the elastic body 5 e is fixed to the fixing base 3 by, for example, screwing, and the annular intermediate portion 5 m between the outer peripheral portion 5 o and the inner peripheral portion 5 i is thin,
  • the intermediate portion 5 m facilitates vibration of the outer peripheral portion, and suppresses transmission of vibration between the inner peripheral portion 5 i and the outer peripheral portion 5 o.
  • a through hole 5 h is formed in the center of the station 5 in the vertical direction.
  • the rotor 6 has the same structure as the stay 5 and has an annular vibrator 6 V made of a ceramic piezoelectric element and an annular elastic body made of a metal with the vibrator 6 V adhered to the outer peripheral portion of the upper surface. With body 6e.
  • the inner peripheral portion 6i of the elastic body 6e is fixed to the rotating shaft 4, and the elastic body 6e has an annular thin intermediate portion 6m between the outer peripheral portion 6o and the inner peripheral portion 6i.
  • the rotating shaft 4 penetrates through the fixing base 3 and the through holes 3 h and 5 h of the stay 5.
  • the rotating shaft 4 is rotatably supported by a bearing 7 fitted and fixed in the through hole 3 h of the fixing base 3.
  • a boss 8 having a larger diameter than the rotating shaft 4 is provided above the bearing position of the bearing 7 on the rotating shaft 4.
  • the inner peripheral portion 6i of the mouth-side elastic body 6e is located between the boss 8 and the stay-side elastic body 5e, and is press-fitted and fixed to the boss 8.
  • a snap ring 9 such as a C-ring is attached to a lower portion of the rotating shaft 4.
  • a compression panel is provided between the snap ring 9 and the bearing 7 through a spacer 10. 1 1 is inserted. By this compression panel 11, the rotating shaft 4 and Boss 8 is constantly biased downward.
  • annular mass body pair having the pair of elastic bodies 5 e and 6 e positioned therebetween is fixed to the rotation axis 4 so that the center axis thereof coincides with the rotation axis 4, and the elastic bodies 5 e and 6 e May be suppressed.
  • the stay side elastic body 5 e has a narrow annular convex part 5 p on the upper surface of the outer peripheral part 5 o, and the mouth—the evening elastic body 6 e has a narrow annular convex part on the outer peripheral part 6 o back side.
  • the part has 6 p.
  • the cushioning friction member 12 is fixed to one of the protrusions 5p and the protrusions 6p with, for example, an adhesive or the like.
  • the vibration on the stay side elastic body 5e and the rotor side elastic body 6 In addition to preventing mutual interference of the vibrations on the e side, a normal traveling wave is generated for both, while avoiding direct contact between the metals (convex portions 5p, 6p) to prevent abnormal noise, Improve the durability of the part.
  • the cushioning friction member 12 acts as a kind of vibration low-pass filter that makes it difficult to transmit the displacement wave generated in the convex portion 5p or the convex portion 6p to the other side. Therefore, the displacement wave on the stay side elastic body 5 e side and the displacement wave on the row side elastic body 6 e side are prevented from each other, and a normal displacement wave is generated in both. That is, when the oscillator is oscillated at, for example, 50 kHz to generate a displacement wave for both,
  • the vibration of 500 kHz is hard to be transmitted to the other party, and the vibration of 100 Hz, which is the frequency of the rotation of the displacement wave, is transmitted to the other party. Further, the cushioning friction member 12 prevents direct contact between the metals (convex portions 5p, 6p), thereby preventing generation of abnormal noise and further improving the durability of the pressed portion.
  • the cushioning friction member 12 is not fixed to any of the projections 5 p and 6 p, A configuration interposed between 99 / 4280p and 6p may be used.
  • a slip ring 13 composed of three rings 13a, 13b, and 13c, which interrupt each other, is fixed to the upper portion of the rotating shaft 4.
  • energizing brushes 15a, 15b, 15c for the mouth provided at the top of the fixing base 1 are arranged so as to be in contact with each other. ing.
  • the energizing brushes 15a and 15b are brushes for supplying a sine wave signal and a brush for supplying a cos wave signal, respectively.
  • the energizing brush 13c is a brush for grounding.
  • the phase of one traveling wave is shifted from the other. It is displaced, and the mouth-side elastic body 6 e and the rotating shaft 4 are rotated.
  • FIG. 2 is a plan view of one surface of the piezoelectric vibrator 5 V or 6 V described above.
  • the vibrators 5 V and 6 v include an annular piezoelectric ceramic plate CM and four sin-side electrode portions S 1 to S 4 and a cos-side electrode portion C 1 to 4 formed on one surface of the piezoelectric ceramic plate CM, respectively. With C4.
  • the sin-side electrodes S1 to S4 and the cos-side electrodes C1 to C4 have a mechanical angle of 36 ° so that the vibrator can generate standing waves of 5 wavelengths (5 persons) in the entire circumferential direction. Are evenly distributed.
  • the sin-side electrode portions S1 to S4 and the cos-side electrode portions C1 to C4 are preliminarily polarized so that the polarization directions in the thickness direction are opposite to each other in adjacent regions (see FIG. 11). ing.
  • FIG. 3 is a plan view of the other surface of the transducer 5 V or 6 V.
  • a sin-side electrode portion SS on one surface of the piezoelectric ceramic plate CM, which faces the entire formation region of the sin-side electrode portions S1 to S4, and a cos-side electrode portion.
  • a cos-side electrode portion CC is provided so as to face the entire formation region of the electrode portions C1 to C4. s; Between the 111-side electrode section 33 and the (03-side electrode section ((is between 18 ° mechanical angle and electrical angle Feedback electrode sections FB and FB 'opposing each other at 90 ° are provided.
  • the one surface of the stay-side vibrator 5 V is entirely bonded to the lower surface of the metal elastic body 5 e with an adhesive or a conductive adhesive.
  • the metal elastic body 5 e is electrically connected to the fixing base 3, and the electrodes S 1 to S 4, FB and C 1 to C 4 formed on one surface of the stay side vibrator 5 V are: Connected to ground.
  • the first side electrode portion S S and the second side electrode portion CC of the stay side vibrator 5 V are connected to the drive circuit 16.
  • the drive circuit 16 applies a sinusoidal voltage signal (sine wave voltage signal) between the ground and the sinusoidal electrode SS of the 5 V side oscillator 5 V, and applies a voltage between the ground and the cos side electrode CC.
  • a sinusoidal voltage signal (cos-wave voltage signal) having a phase difference of 90 ° with this is applied, and a traveling wave is generated in the circumferential direction of the stay side vibrator 5 V and the elastic body 5 e attached thereto. generate.
  • the driving circuit 16 receives a piezoelectric voltage signal generated between the feedback electrode sections FB and FB 'in response to the vibration of the transducer 5 V, and based on the inputted piezoelectric voltage signal, the driving side transducer Maintain a constant frequency and phase of the sinusoidal voltage signal supplied to 5 V.
  • the entire surface of the one surface of the rotor-side vibrator 6V is adhered to the upper surface of the metal elastic body 6e using a bonding agent.
  • the metal elastic body 6 e is electrically connected to the fixing base 3 via the internal wiring 14 c, the ring 13 c, and the energizing brush 15 c which are electrically connected to the rotor elastic body 6 e.
  • the electrodes S1 to S4, FB, and C1 to C4 formed on one surface of V are connected to the ground.
  • the sine-side electrode portion SS of the rotor-side vibrator 6 V is connected to the drive circuit 16 via an internal wiring 14 a, a ring 13 a, and a current-carrying brush 15 a which are electrically connected to the sine-side electrode portion SS.
  • the cos-side electrode portion C C of the rotor-side vibrator 6 V is connected to the drive circuit 16 via an internal wiring 14 b, a ring 13 b, and a current-carrying brush 15 b which are electrically connected to this.
  • the drive circuit 16 is connected between the ground and the rotor side oscillator 6 V sin-side electrode section SS.
  • a sinusoidal voltage signal (sinusoidal voltage signal) is applied to the, and a sinusoidal voltage signal (cos-wave voltage signal) having a phase difference of 90 ° from this is applied between the ground and the cos side electrode part CC.
  • Overnight vibrator 6 V and elastic body 6 e adhered to it generate traveling waves in the circumferential direction.
  • the feedback piezoelectric voltage signal from the stay side oscillator 5 V is used to adjust the frequency and phase of the drive signal to the stay side oscillator 5 V to the mouth side oscillator 6 V.
  • the frequency and phase of the drive signal to the motor are monitored, but the piezoelectric voltage signal generated between the feedback electrodes FB, FB, in response to the vibration of the transducer 6 V can be used instead.
  • FIG. 4 is a cross-sectional view taken along the circumferential direction of a portion where the stay / night contact occurs when such a traveling wave is generated.
  • One phase of the two-phase drive signal (sine wave, cos wave) supplied from the drive circuit 16 to the stay side vibrator 5 V is supplied to the rotor side vibrator 6 V
  • the control circuit 17 controls the driving circuit 16 so that the driving signal between the stay and the mouth does not have a phase difference by matching one of the phases, the convex portion 5 of the stay-side elastic body 5 e Since the traveling wave A generated at p and the traveling wave B generated at the convex portion 6 p of the low-side elastic body 6 e match and lock as if the gears meshed, the rotor 6 is stopped.
  • One of the phases of the two-phase drive signal supplied from the drive circuit 16 to the stay-side vibrator 5 v is one phase of the two-phase drive signal supplied to the rotor-side vibrator 6 V.
  • the control circuit 17 controls the drive circuit 16 so as to move forward, the traveling wave A of the stay side oscillator 5 V of the traveling waves A and B, In order to move relatively forward with respect to traveling wave B, the stationary lock position of traveling waves A and B advances in the traveling direction of traveling wave while stationary, and rotor 6 rotates forward.
  • One of the phases of the two-phase drive signal supplied from the drive circuit 16 to the stay-side vibrator 5 V is one phase of the two-phase drive signal supplied to the rotor-side vibrator 6 V.
  • the control circuit 17 controls the drive circuit 16 so as to be relatively delayed, the traveling wave A of the staying-side vibrator 5 V out of the traveling waves A and B, In order to relatively delay with respect to the traveling wave B of the vibrator 6 V, the meshing lock position of the traveling waves A and B is set in the direction opposite to the traveling direction of the traveling wave while the stage is stationary. Proceeds and rotor 6 reverses.
  • the rotation speed of the mouth 6 is increased or decreased.
  • FIG. 5 is a system configuration diagram of an electric control unit 2 including a driving circuit 16 connected to the stay 5 and the rotor 6 and a control circuit 17 for controlling the driving circuit 16.
  • the drive circuit 16 applies a drive voltage signal to the stay side vibrator 5 V to generate the traveling wave A on the facing surface of the stay side elastic body 5 e, and generates the drive voltage signal from the rotor side vibrator 5 e.
  • the traveling wave B is applied to the rotor 6 V to generate the traveling wave B on the opposing surface of the rotor-side elastic body 6 e, and the rotor 6 is rotated by continuously expanding the phase difference between the two drive voltage signals. .
  • the drive circuit 16 includes an oscillator section 16 A for generating a signal of the first frequency f, and a first drive signal of the first frequency output from the oscillator section 16 A to the stationary side oscillator 5 V. and stearyl Isseki side driving signal generation unit 1 6 B vibrating the stearyl Isseki 5 with indicia pressurized, the first frequency is applied and a feedback piezoelectric voltage signal generated stearyl Isseki side transducer 5 V: the f And a phase difference monitoring unit 16 c for monitoring the frequency difference between the first driving signal.
  • the drive circuit 16 generates a shift phase for generating a second drive signal whose phase is shifted by a predetermined phase shift amount per unit time with respect to the first drive signal applied to the stay side oscillator 5 V.
  • a signal generator 1 6 D, the phase shifted signal generating section 16 and the second driving signal of the rotor-side drive motion signal generating unit 1 6 E vibrating the rotor 6 is applied to the rotor side transducer 6 V output from the D includes a phase shift amount instruction section 16 F for instructing the position phase shift amount per unit time by the phase shifted signal generating unit 16 D, the.
  • the oscillator section 16 A is cascaded to a voltage-controlled oscillator (VCO) 16 A1 that outputs a signal of frequency N ⁇ f (N is a natural number) and a voltage-controlled oscillator 16 A1 to divide the frequency N ⁇ f.
  • VCO voltage-controlled oscillator
  • a 1 / N frequency divider 16 A2 that divides the frequency by a 1 / N ratio.
  • the frequency is the natural frequency of the stay 5 in the circumferential direction, and the frequency at which the stay 5 resonates most.
  • Signal of a frequency f output from the oscillator section 16 A is input to the drive signal generating unit 16 B.
  • Drive signal generating unit 1 6 B includes an amplifier 16 B1 for amplifying the sin wave voltage signal is applied between the sin side electrode portion SS and the ground stearyl Isseki side transducer 5 V, the phase of the sin wave voltage No. signal A phase shift circuit 16 B2 that generates a cos-wave voltage signal by shifting by 90 °, and a cos-wave voltage signal output from the phase-shift circuit 16 B2 is extended to a cos And an amplifier 16 B3 applied between the grounds.
  • the phase difference monitoring unit 16 includes a phase comparator or phase detector (PD) 16 C1 and a phase ratio It has a low-pass filter 16 C2 cascaded to the comparator 16 C1 and a limiter circuit 16 C3 composed of a pair of diodes.
  • the phase comparator 16 C1 feedback signal frequency f ' is a feedback signal from the drive signal and the transducers 5 V of a frequency f is a voltage applied to the vibrator 5 V is inputted. That is, the sinusoidal piezoelectric voltage signal of frequency f ', which is a feedback signal output from the stage 5 in response to the vibration of the transducer 5 V, is converted into a square wave voltage signal of frequency f' by the limiter circuit 16C3 .
  • the signal is input to the phase detector 16 C1 with square-wave voltage signal of frequency f as a drive signal, an AC signal corresponding to the retardation is output.
  • This AC signal is integrated by mouth one pass filter 16 C2, to be directly Ryuka, the phase difference monitoring unit 16 C outputs a dc voltage signal corresponding to the frequency difference of these input signals.
  • This DC voltage signal is fed back to the voltage controlled oscillator 16 A1.
  • the voltage controlled oscillator 16A1 varies the output frequency according to the input voltage.
  • the voltage-controlled oscillator 16A1 determines the output signal frequency N ⁇ f according to the phase difference between the frequency f, which is the reference signal, and the feedback signal f ,.
  • the output signal frequency N ⁇ f is increased to increase the frequency f of the drive signal, and conversely, the output signal frequency N ⁇ f is decreased.
  • the frequency f of the driving signal is reduced.
  • higher than the level of the reference value of the direct current voltage signal output from the low-pass filter 16 C2 in the former case and is set to a low Kunar so in the latter case.
  • the circuit 16 A ⁇ 16 C constitute a phase-locked loop, the input frequency f, f 'controls the output frequency N ⁇ f so as to have a predetermined phase difference, the drive signal frequency f ⁇ beauty phase To lock.
  • Phase shifted signal generating unit 16 D the high frequency pulse signal of a frequency N ⁇ f generated by the oscillator 16 A1 is input, the pulse number adjustment unit 16 D1 for adjusting the number of pulses per unit of input signal time , Pulse number adjustment unit 16 Divides the signal output from D1 And a second frequency divider 16 D2 that generates a square wave voltage signal having a period of every predetermined number of pulses (for example, 256 pulses).
  • the output of the phase shifted signal generating section 16 D is input to the drive signal generator 1 6 E via the inverter one evening I.
  • the pulse number adjustment unit 16 D1 is a pulse thinning circuit 16 D11 that thins out an appropriate number of pulses from the input signal pulse train per unit time, and a pulse that adds an appropriate number of pulses to the input signal pulse train per unit time.
  • Add circuit 16 D12 it is a selector circuit 1 6 D13 Prefecture for outputting selection pulses thinning circuit 16 D11 and the pulse add circuit 16 D12.
  • Drive signal generating unit 1 6 E is - an amplifier 16 E1 for amplifying a sin wave voltage signal is applied between the cos-side electrode unit CC and the ground mouth Isseki side transducer 6 V, the -sin wave voltage signal phase the 90 ° staggered - a phase-shift circuit 1 6 E2 to produce a cos wave voltage signal, sin side electrode of amplifying an cos wave voltage signal output from the phase-shift circuit 16 E2 low evening side transducer 6 V
  • the amplifier 16 E3 is applied between the section SS and the ground.
  • the vibrator 6 V vibrates at substantially its natural frequency, and the elastic body 6 adhered integrally to the vibrator 6 V
  • the traveling wave B is generated in e.
  • the --sin signal and one cos signal are input because the rotor generates a displacement just 180 ° out of phase with the traveling wave generated on the stay side, and the peak of the traveling wave This is to combine the valleys.
  • Pulse number adjuster 16 When the number of pulses of the output signal of D1 increases or decreases due to thinning or addition of pulses, the rising or falling timing of the pulse signal output from the second frequency divider 16D2 changes. , the phase of the second drive signal applied to the mouth Isseki side transducer 6 V through the drive signal generation unit 16 E is shifted relative to the phase of the first drive signal. That is, the pulse rise or fall evening timing of the second driving signal is an amount corresponding output signal of the second frequency divider 16 D2 of the number of increased or decreased pulse by the pulse number adjustment unit 16 D1 is shifted, the first and A phase difference occurs between the second drive signals.
  • Pulse number adjuster 16 Since D1 thins out or increases or decreases the number of additional pulses continuously in time, the second The rise or fall timing of the drive signal is continuously shifted, the phase difference between the first and second drive signals is continuously increased, and the rotor 6 is continuously rotated.
  • Phase shift Bok amount instruction section 16 F the phase shift amount per unit time those have enough by the shift phase signal generating unit 16 D, i.e., instructs the pulse thinning or adding timing, controls the rotational speed of the mouth one evening 6.
  • Phase shift amount instruction section 16 F is the output signal of the oscillator 16 A1 divider (dividing ratio: 1 / N) 16 divider for low-speed rotation instruction to divide the output signal divided by G ( Dividing ratio: l / n A ) 16 F1 and divider for instructing high-speed rotation to divide the output signal of divider 16 G (dividing ratio: l / n B , where n A > n B ) 16 F2 and a selector circuit 16 F3 for selecting the output of the frequency dividers 16 F1 and 16 F2 .
  • phase shift amount per unit time of the output signal increases.
  • the amount of phase shift is proportional to the rotation speed of the rotor 6.
  • Divider for low-speed rotation instruction output pulse signal of the (dividing ratio l / n A) 16 FI because the period of their long, which is input to the pulse thinning circuit 16 D11 or pulse adding circuit 16 D12
  • the frequency divider (division ratio: l / n B ) for high-speed rotation instruction 16 F2 output pulse signal has a short cycle, so this is input to the pulse thinning circuit 16 D11 or the pulse addition circuit 16 D12 .
  • the amount of phase shift per unit time increases and the mouth 6 rotates at high speed.
  • the low evening rotational speed is controlled by switching the output of the selector circuit 16 F3 by the control circuit 17.
  • Various configurations are being considered in the interpulse circumventive path 16 D11 and pulse adding circuit 16 D12 which operates in this way.
  • Figure 6 is a circuit diagram showing a preferred circuit configuration of the pulse thinning circuit 16 D11 and the pulse add circuit 16 D12, these circuits D- flip-flop D 1 to D 8 and various logic circuits OR L ⁇ OR3, AND1 to AND3, NAND1, and XNOR1 to XNOR2 are connected as shown in the figure.
  • the pulse decimating circuit 16 D11 and the pulse adding circuit 16 D12 of this example the output pulse signal of the oscillator 16 A1 shown in FIG. An appropriate number of pulses are decimated or added from the source signal.
  • the dividing ratio of the subsequent divider 16 D2 is set to 2 / N, and as a result, the oscillator 5
  • the frequencies of the drive signals applied to V and 6v are made substantially equal.
  • Figures 7A, 7B, 7C, 7D, 7E, and 7G show the timings of the voltage waveforms at points a, b, c, d, e, f, and g of the circuit shown in Figure 6, respectively. The chart is shown.
  • the pulse thinning circuit 16 D11 uses the reference pulse signal a output from the oscillator 16 A1 (fig.
  • Pulse Add circuit 1 6 D12 is configured to generate a master pulse signal b from the reference pulse signal a, the L-level for a predetermined period in accordance with the period of the speed instruction pulse signal c inputted from the phase shift amount instruction section 1 6 F Generates a mask signal: (Fig. 7F) and calculates the unit time by taking the logical sum of the logical product of the mask signal f and the master signal b, the negation of the mask signal f, and the logical product of the reference pulse signal a. An additional pulse signal g (Fig. 7G) with an increased number of pulses per hit is output.
  • the control circuit 17 inputs the H-level enable signal to the terminals X and Y when stopping the rotation of the mouth 6 and outputs the pulse in the pulse thinning circuit 16 D11 and the pulse adding circuit 16 D12 . Avoid thinning and adding.
  • the present invention is not limited to the embodiment described above, in the ultrasonic motor according to the former embodiment, minute instead remove the divider 1 6 G divider 16
  • the output of A2 may be used.
  • the rotor 6 rotates. Can be done.
  • FIG. 8 is a system configuration diagram of an electric control unit 2 including a drive circuit 16 and a control circuit 17 connected to a stage 5 and a row 6 of an ultrasonic motor according to another embodiment.
  • the present ultrasonic motor only the configuration of the drive circuit 16 and the control circuit 17 is different, and the other configuration is the same as that of the ultrasonic motor according to the above-described embodiment.
  • controllable oscillator such position phase shift amount in the phase shift amount instruction section 1 6 F consists, namely, providing the speed instruction information. Since the period of the phase shift amount indicating pulse can take an arbitrary value, it is possible to set an arbitrary rotation speed. Number of pulses per unit time of the signal output from the phase shift amount instruction section 1 6 F determines the number of pulses thinning per unit time in Bruno Le scan thinning circuit 1 6 D11.
  • the voltage-controlled oscillator 16A1 outputs a pulse signal having a frequency of N ⁇ f.
  • Inter-pulse circumventive path 16 D11 in response to the speed instruction information input from the phase shift amount instruction section 16 F, a pulse signal of a frequency N ⁇ f, and outputs the thinned out the number of pulses indicated.
  • Pulse thinning circuit 16 is output from the D11 was the decimated signal N ⁇ f ' ⁇ or non-decimated signal N ⁇ f output from the voltage controlled oscillator 16 A1 is, and via the switching Suitsuchi S 1 or S 2 min Input to the dividers 16 D2 and 16 D2 .
  • the changeover switches S 1 and S 2 are controlled by the control circuit 17.
  • the non-decimated signal N ⁇ f is input to both the dividers 16 D2 and 16 D9 ′.
  • the control circuit 17 controls the switches S 1 and S 2
  • the frequencies of the drive signals supplied to the station 5 and the mouth 6 are both: and their phases match. In this case, since there is no phase difference between both drive signals, the rotor 6 stops.
  • the control circuit 17 controls the switches S l and S 2 so that the decimated signal N ⁇ f ′′ is input to both the frequency dividers 16 D2 and 16 D2 .
  • the shift phase signal generation unit 16 D ′ is configured without using the pulse addition circuit, and the pulse thinning circuit 16 G is configured to generate the pulse number described above. It constitutes an adjustment unit.
  • the circuit scale is reduced by not using a pulse addition circuit.
  • a reference signal generation circuit is provided between the input of the phase detector 16 C 1 and the output of the frequency divider 16 D 2 ′ to adjust the phase and level of the output signal as necessary. Is also good.
  • the resonance drive frequency between 6 and 5 is 50 kHz.
  • the oscillation frequency N 'f of the signal output from VCO 16 A1 is set to 12.8 kHz. This oscillation frequency is related to the minimum resolution of rotation.However, if the frequency is increased too much, it cannot be handled by the analog PLL, and since the number of divider stages increases and the circuit scale increases, the oscillation frequency is set to 12.8 MHz. .
  • the PLL used was 74HC4046. Of course, the output frequency can be further increased by using a digital PLL or the like.
  • the ultrasonic motor according to the present embodiment has such high-precision rotation control performance
  • the ultrasonic motor according to the present invention is restricted by the accuracy of the ultrasonic motor according to the present embodiment. Not something.
  • the SPEED signal causes a two-step phase delay in one cycle compared to the circuit in Fig. 6. When a 640 Hz signal is output from this variable oscillator, the mouth 6 rotates one revolution per second, that is, at a rotation speed of 60 rpm. If the output of the variable oscillator is 1 Hz, the mouth 6 turns once in about 10 minutes.
  • the ultrasonic motor applies the first drive signal to one of the transducers 5 V and 6 V provided on the stator 5 and the mover 6 facing each other.
  • the second drive signal is applied to vibrate the vibrators 5 V and 6 V, and in the ultrasonic motor where the mover 6 moves according to the vibrations of the vibrators 5 V and 6 V, the speed instruction information comprising a shift Bok phase signal generator 16 D for relatively shifting a phase of the second drive signal to the phase of the first drive signal in response to.
  • the present ultrasonic motor further includes a first frequency divider 16A2 that divides a high-frequency pulse signal from the oscillator 16A1 to generate a first drive signal.
  • the shift phase signal generating unit 16 D includes a pulse number adjustment unit 16 D1 to add an appropriate number of pulses to thinning or high-frequency pulse signal an appropriate number of pulses from the high frequency pulse signal, the pulse number adjustment unit 16 D1 And a second frequency divider 16D2 that divides the frequency of the output signal and generates a signal having a cycle every predetermined number of pulses as a second drive signal. Further, the ultrasonic motor includes a phase shift amount instruction section 16 F for instructing the phase shift amount per unit time of the second drive signal to the sheet oice phase signal generator 16 D.
  • phase shifted signal generating unit 116 D is the phase of the phase of the second drive signal is shifted Bok. This may be shifted by a predetermined amount per unit time, or may be shifted continuously over time. When a continuous shift of the phase occurs, A frequency difference occurs between the first and second drive signals. When the first and second drive signals are pulses, the frequency is varied by increasing or decreasing the number of pulses per unit time.
  • a frequency difference is provided between the first and second drive signals using a frequency synthesizer will be described.
  • the mouth 6 is a state in which the displacement waves generated in the circumferential direction of the opposing contact surfaces of the stay 5 and the row 6 are combined, and one displacement wave is formed. Is rotated by displacing the phase from the other.
  • the displacement wave described here is a wave of physical displacement constituted by the physical deformation of the opposed surface of the stay 5 and the rotor 6, and the conventional drive signal having a 90-degree phase difference is distorted.
  • the displacement wave forms a traveling wave.
  • the displacement wave is a surface formed by ultrasonic waves formed on the opposing surfaces of both the stay 5 and the rotor 6, and when these ultrasonic surfaces are joined by pressing them together, the displacement wave 5 and 6
  • the relative movement between the displacement waves is restricted.
  • a displacement wave is generated on the opposing surfaces of both the stay 5 and the mouth 6, and with the relative movement between the displacement waves being restricted, one displacement wave as the ultrasonic wave surface is placed on the other.
  • the rotor 6 rotates relatively to the stay 5 and when the stator 5 and the mover 6 are used as a stay and a slider, the slider performs a linear motion.
  • a driving method for moving the moving element by combining such displacement waves is referred to as a displacement lock drive.
  • the displacement waves are assumed to be traveling waves.
  • Two mutually related first drive signals are applied from the electric control unit 2 to the stay side vibrator 5 V, and a displacement wave is generated in the stay side elastic body 5 e along the circumferential direction.
  • This is a form in which a displacement wave is rotating on a ring. W 99/44280 rolling displacement wave ".
  • the phase of one of the displacement waves is changed. Is shifted from the other, the combined rotational position of the rotor-side elastic body 6 e and the rotating shaft 4 is shifted, and the continuous shift amount is rotated. Therefore, if the continuity of the shift amount is lost, while the displacement wave coupling is performed, the mouth 6 does not rotate.
  • the frequency of the two-phase first drive signal as two mutually-related drive signals (sine wave and cos wave) supplied from the drive circuit 1 16 to the stay side oscillator 5 V is f
  • the control circuit 17 drives the drive circuit 1 16 so that the frequency of the two-phase second drive signal as two mutually related drive signals (sine wave and cos wave) supplied to the vibrator 6 V becomes f as well. Control.
  • the rotational displacement wave A generated in the convex portion 5p of the stay side elastic body 5e and the rotational displacement wave B generated in the convex portion 6p of the rotor side elastic body 6e are rotationally displaced in phase.
  • the position where the displacement occurs also advances in the circumferential direction and constantly changes, but since A and B are synchronized, the gears are engaged and locked as if they meshed, but the rotating shaft 4 The rotor 6 does not rotate, and the rotor 6 stops.
  • the frequency of the two-phase first drive signal as the two related drive signals supplied from the drive circuit 1 16 to the stay-side vibrator 5 V is supplied to the mouth-side vibrator 6 V.
  • the control circuit 17 controls the drive circuit so that the frequency of the second drive signal is (f + A f). Controls roads 1 1 and 6.
  • the rotational displacement wave B of the vibrator 6 V on the mouth side is relatively relative to the rotational displacement wave A of the vibrator 5 V on the stay side. (See Figure 4).
  • the rotational displacement waves A and B babble while the stay stays still 5 and the relative positional relationship between them is locked.
  • the stay 5 and the mouth 6 have a pressing force applied between the stay 5 and the rotor 6 so as to maintain the meshing state. Only the rotation axis of the rotor 6 rotates. That is, the rotation direction of the rotating shaft 4 when (: f + Af) is applied to the rotor 6 is the same as the rotation direction of the rotational displacement wave, Become.
  • the rotation direction is determined by the phase relationship between the displacement waves A and B.
  • the direction of rotation is determined by the relationship between the traveling direction of the displacement wave and the phase difference, and is not determined only by the traveling direction of the displacement wave.
  • the frequency of the two-phase first drive signal supplied from the drive circuit 116 to the stay side oscillator 5 V is f
  • the frequency of the second drive signal supplied to the rotor side oscillator 6 V is (f — ⁇
  • the control circuit 17 controls the drive circuit 116 so that f).
  • the rotational displacement wave B of the rotor vibrator 6 V is relative to the rotational displacement wave A of the stay vibrator 5 V. Because the positional relationship is delayed, the traveling waves A and B are engaged and the relative positional relationship between the two is locked.
  • the rotor 6 rotates in the direction opposite to (f + Af) corresponding to the phase delay, and the rotor 6 rotates in the reverse direction.
  • the rotation speed of the rotor 6 is increased or decreased.
  • FIG. 9 is a system configuration diagram of an electric control unit 2 including a drive circuit 116 connected to the stays 5 and 6 and a control circuit 17 for controlling the drive circuit 116.
  • the drive circuit 1 16 applies the first drive voltage signal of the first frequency f to the stay side vibrator 5 V to generate the displacement wave A on the opposite surface of the stay side elastic body 5 e.
  • the second drive voltage signal of the second frequency or f— ⁇ : £ ” is applied to the rotor-side vibrator 6 V to generate the displacement wave B on the opposing surface of the rotor-side elastic body 6 ⁇ .
  • the driving circuit 1 16 includes an oscillator section 1 16 A for generating a signal of the first frequency f, and a signal of the first frequency f output from the oscillator section 1 16 A , which is connected to a stationary oscillator 5 V A drive signal generator 1 16 B that vibrates the stay 5 by applying a voltage to the actuator, and drives the feedback displacement detection signal generated by the 5 V oscillator and the first frequency f that is applied. and a phase difference detecting unit 1 1 6 C for detecting a phase difference between the signals.
  • the drive circuit 1 16 receives the rotor rotation speed instruction information from the control circuit 17 and generates a signal of the second frequency f or f—A f from the first frequency f according to the input information.
  • a signal generation unit 1 16 E Note that can be set to zero.
  • the oscillator section 116 has a voltage-controlled oscillator (VCO) 116 A1 that outputs a signal of frequency f.
  • VCO voltage-controlled oscillator
  • the frequency f is rather than the output frequency of the oscillator unit 1 1 6 A, a rather natural frequency circumferential stearyl Isseki 5, stearyl Isseki 5 itself is the most resonant frequency.
  • the signal of frequency f output from frequency divider 1 16 in the present embodiment is a square wave signal, this signal may be a sine wave if the fundamental wave has frequency f.
  • the drive signal generator 1 16 B removes the high-frequency component of the input square wave voltage signal of the first component, amplifies the sine wave voltage signal generated thereby, and oscillates on the stationary side.
  • An amplifier 1 16 B1 applied between the first side electrode section SS of the element 5 v and the ground; a phase shift circuit 116 B2 for generating a second component by shifting the phase of the first component of the first drive signal by 90 °;
  • the high-frequency component of the second-component square wave voltage signal output from the phase shift circuit 116 B2 is removed, and the sine wave voltage signal generated thereby is amplified to amplify the second side of the stator-side vibrator 5.
  • It comprises an amplifier 116 B3 applied between the electrode section CC and the ground.
  • Displacement wave A is generated.
  • a displacement detection signal is generated between the feedback electrode FB and the ground based on the piezoelectric effect. Let the frequency of this displacement detection signal be f ⁇ . Displacement detection signal outputted from the full Eid back electrode portion FB 'is input to the phase difference detecting unit 11 6 C.
  • the phase difference detection unit 116 C includes a limiter 116 C3 that converts a sine wave displacement detection signal into a square wave, a phase difference detector (PD) 116 C1 cascaded to the limiter 116 C3 , and a phase difference detector 1 16 C1. And a low-pass filter 116 C2 cascaded in the direction.
  • the phase detector 116 has a frequency that is a voltage applied to the transducer 5 V: a square wave signal at the front stage of the amplification of the drive signal of f and a frequency that is a displacement detection signal as a feedback signal from the transducer 5 V: e 6>'is input, and a detection signal corresponding to the phase difference is output.
  • the detection signal is to be smoothed straight Ryuka by the low-pass fill evening 116 C2, the phase difference detecting unit 116 c outputs the controls signals corresponding to the phase difference between these input signals.
  • This control signal is fed back to the voltage controlled oscillator 116A1. If there is a small difference between the input frequencies f, f ⁇ , a phase difference occurs, so the control signal changes according to the small frequency difference.
  • the voltage-controlled oscillator 116-1 changes the output frequency according to the input voltage.
  • the voltage-controlled oscillator 116-1 reduces the feedback signal frequency f6>', and if the frequency is higher than the reference frequency of the drive signal :, lowers the output signal frequency fout and lowers the drive signal frequency f. , In the opposite case, increase the output signal frequency f Then, the frequency f of the drive signal is increased.
  • the level of the control signal output from the mouth-to-pass filter 116 C2 is lower than the reference value in the former case, and is higher in the latter case.
  • the circuit 1 1 6 A ⁇ 1 16 C constitute a phase-locked loop, the input frequency f, Ith 'gar Itasu that so that the output frequency: Controls f, mouth frequency f and phase of the drive signal Click.
  • Frequency converter 1 16 D control control circuit 1 7 Dry Isseki speed instruction information is input through the terminal S, the first frequency in response to input information: from the f second frequency: f + delta f Or: Generate a signal of f1. While various configurations are conceivable as the frequency converter 1 1 6 D, it will now be described a preferred configuration.
  • Figure 1 0 shows a first example of the frequency converter 1 1 6 D.
  • the frequency converter 1 16 D is composed of an l / n A divider 1 16 D1 (n A is a natural number) to which the signal of the frequency f generated by the oscillator 116 A is input, and l / n A divider 1 16 m are sequentially cascaded phase detection can 1 16 D2, mouth one Pasufiru the evening 1 16 D3 and the voltage controlled oscillator 1 1 6 D4, the voltage controlled oscillator 1 16 D4 phase detector 1 16 the output of It is composed of an l / n B divider 1 16 D5 (n B is a natural number) that feeds back to D2 .
  • the path returning from the phase detector 1 16 D2 to the phase detector 1 16 D2 via the single-pass filter 1 16 D3 and the voltage-controlled oscillator 1 16 D4 forms a phase-locked loop, and the voltage-controlled oscillator 1 16 D4 is the output signal frequency f / n a of the phase detector 1 1 6 D1 is the reference frequency input to the l / n a divider 1 16 D1, l / n B divider 1 1 6 D5
  • the output signal frequency is varied so that the outputs of the two coincide.
  • the frequency division ratios l / n A and l / n B of the frequency divider 1 16 m and the frequency divider 1 16 D5 can be changed according to the mouth rotation speed instruction information from the control circuit 17. Both are programmable dividers. That is, according to the frequency division ratios l / n A and l / n B set in the frequency divider 116 D1 and the frequency divider 116 D5 , the signal output from the frequency converter 116 D Frequency change of frequency (f + Af or f1) (Af or 1) The value of ⁇ f) varies.
  • the rotor rotation speed instruction information from the control circuit 17 is equal to the frequency corresponding to the mouth rotation speed.
  • the change amount (Af or 100 f) that is, a set value of the frequency division ratios l / n A and l / n B.
  • the drive signal generation unit 1 1 6 E is the high-frequency component is removed from a first component of the second drive signal input square-wave voltage signal, it had it occurred generated thereto
  • An amplifier 1 16 E1 that amplifies a sinusoidal voltage signal of two frequencies and applies it between the first electrode SS of the low-side vibrator 6 V and the ground, and the second component by shifting the phase of the first component by 90 ° a phase shift circuit 1 16 E2 to generate a signal, the high frequency components are removed from the square-wave voltage signal which is a second component which is output from the phase-shift circuit 1 1 6 E2, was this by connexion generation 2
  • It comprises an amplifier 116 E3 that amplifies a sine wave voltage signal of frequency and applies it between the second side electrode section CC of the rotor-side vibrator 6 V and the ground.
  • the control circuit 17 determines the frequency division ratio l / n A and l / n B associated with the rotor rotational speed instruction information, and determines the frequency division ratio l of the frequency divider 1 16 D1 and the frequency divider 1 16 D5. Variables / n A and 1 / n B.
  • control circuit 17 changes the frequency division ratios l / n A and l / n B , whereby the traveling speed of the rotational displacement wave B as the displacement wave is variable, and the rotation of the rotor 6 is changed. Speed and direction can be controlled.
  • the second drive signal having a minute frequency difference with respect to the first drive signal can be continuously supplied for a long time while following the frequency change.
  • Have difficulty. For example, it is obtained the n A as 999 1000, n B, if the resonance frequency f is 50 kHz, a 50 Hz, delta f 0. inferior to 1 Hz order.
  • a heterodyne method is conceivable.However, since the heterodyne output is extracted through a bandpass filter, the difference between the input and output frequencies is not less than the cutoff frequency of the filter. Necessary, frequency conversion of ⁇ 0.1 Hz is difficult.
  • FIGS. 11 to 13 are circuit diagrams of such a frequency conversion unit 1 16 D ′.
  • the frequency conversion unit 1 16 D ′ in this example is composed of a first frequency synthesizer composed of circuits 1 16 m , to 1 16 D5 , and circuits 1 16 D6 ′ to 1 16 D10 . This is a frequency synthesizer that is cascaded with a second frequency synthesizer.
  • the first frequency synthesizer is sequentially cascaded to a frequency divider 1 16 D1 , to which a signal of frequency f generated by the oscillator section 116 A is input (n! Is a natural number), and a frequency divider 1 16 m ′
  • the output of the phase detector 1 16 D2 ′, low-pass filter 1 16 D3 , voltage-controlled oscillator 1 16 D4 ′, and voltage-controlled oscillator 1 16 D4 ′ is fed back to the phase detector 1 16 D2 , l / n. 2 frequency divider 1 16 D5 , where n 2 is a natural number.
  • the phase detector 1 1 6 D2 via constitute a phase-locked loop, a voltage controlled oscillator 1 16 D4 , is the reference frequency input to the phase detector 1 16 D1 ' Then, the output signal frequency is varied so that the output of the frequency divider 1 16 D5 matches. That is, the output signal frequency f out ′ of the voltage controlled oscillator 116 D4 , is (i ⁇ / nj.f.
  • the second frequency synthesizer is output from the voltage controlled oscillator 116 D4 ′ of the first frequency synthesizer.
  • L / n 3 frequency divider 1 16 D6 to which a signal of frequency foul; 'is input (n 3 is a natural number), and a phase detector 1 1 cascaded to the l / n 3 frequency divider 1 16 D6 , 1 1 6 D7 ⁇ Single-pass filter 1 16 D8 'and voltage-controlled oscillator 1 16 D9 ' and voltage-controlled oscillator 1 16 D9 , l / n 4- divider which feeds back the output of phase detector 1 1 6 D7 ' 1 16 D10 , where n 4 is a natural number.
  • oscillator 1 1 6 D9 it is the phase detector 1 16 D7, a reference frequency to be inputted is l / n 3 frequency divider to 1 1 6 D6, the output signal frequency f out '/ n 3 of, l / n 4 minutes Peripheral 1 1 6 D1 .
  • the output signal frequency is varied so that the outputs of the two signals coincide with each other.
  • the division ratios of the divider 1 16 D1 ′, the divider 1 16 D5 , the divider 1 16 D6 , and the divider 1 16 ⁇ / ⁇ ,, 1 / ⁇ 2 , 1 / ⁇ 3 , and 1 / ⁇ 4 can be changed according to the mouth rotation speed instruction information from the control circuit 17, and these are all programmable dividers. That is, the frequency divider 1 16 D1 ', the frequency divider 1 16 D5 , the frequency divider 1 16 D6 ', and the frequency divider 1 16 D1 .
  • the value of the amount of change (Af or 1) varies.
  • this variable method parallel switching, serial input switching, or the like can be used.
  • Figure 14 shows the input signal frequency fin to the frequency converter 1 16 consisting of multiple frequency synthesizers and the output signal frequency of the final-stage frequency synthesizer, that is, the output of the voltage-controlled oscillator 1 16 D9 ,
  • the relationship with the signal frequency f out is determined by setting the indicated values r ⁇ , n 2 , n 3 , and n 4 that determine the division ratio 1 / ri !, l / n 2 , l / n 3 , 1 / n 4. It is a table shown correspondingly.
  • the operation in each setting will be described in detail.
  • the frequency divider 1 1 6 D As shown in FIG. 1 2, the frequency divider 1 1 6 D, the divider 1 1 6 D5, the divider 1 1 6 D6 ', the divider 1 16 D1.
  • the frequency divider 1 1 6 D1 ', the divider 1 1 6 D5, the divider 1 1 6 D6', the divider 1 16 D1. Shows the frequency division ratio 1 / n have l / n 2, l / n 3, l / n 4, FIG. 14
  • the output signal frequency becomes font2: e
  • the frequency f of the signal applied to the mouth-side vibrator 6 V is the frequency of the signal applied to the stay-side vibrator 5 V.
  • the rotation speed instruction information from the control circuit 17 corresponds to the mouth rotation speed.
  • association was frequency change ( ⁇ :? or - Af), that is, the set value of the frequency dividing ratio l / n 1 / ⁇ 2, 1 / ⁇ 3, 1 / ⁇ 4.
  • a phase detector used in the drive circuit a digital memory circuit phase comparator that locks when the input signal rises can also be used. In this case, an appropriate value of the low-pass filter is used. With the phase comparator in a stable state, jitter can be suppressed within 40 ns at a drive signal frequency of 50 kHz.
  • Is preferably set to a value between 0.98 and 1.02. That is, depending on the ratio of the frequency shift amount and eta 2, and if the difference between eta 2 are determined, the ratio is higher the frequency shift amount is reduced as close as possible to 1, low evening 6
  • the rotation speed of the motor can be reduced.
  • the present invention is not limited to the rotary motor, and is naturally applicable to a linear motor.
  • this ultrasonic motor it can be understood by reading “rotor” as “slider” and “rotation” as “moving”.
  • the ultrasonic motor responds to the vibrations of the vibrators 5 v and 6 V provided on the stator 5 and the mover 6 that are opposed to each other in the pressed state.
  • the ultrasonic wave mode includes the vibrators respectively provided on the stator 5 and the mover 6 facing each other.
  • the first drive signal is applied to one of the 5 V and 6 V, and the second drive signal is applied to the other, so that the oscillator 5 V
  • Shift phase signal generation unit (frequency conversion unit) that shifts relative to the frequency. Is provided. That is, shift Bok phase signal generating unit 1 1 6 D is shifted successively phase temporally.
  • the displacement lock drive used in the present driving method is different from the conventional driving method based on frictional force between each point in a minute area, and is driven by a combination of ultrasonic surfaces. Although it is possible to improve the movement control accuracy, it is necessary to form both ultrasonic surfaces with high precision in order to perform more accurate movement control because it is premised on driving by combining ultrasonic surfaces. There is. Therefore, this driving method In addition, since the driving signal of the second frequency has an accurate frequency difference with respect to the driving signal of the first frequency as a reference, the configuration of the upper channel 3 can improve the movement control accuracy. Was.
  • the second frequency drive signal is generated by inputting the first frequency drive signal to a frequency synthesizer using a phase locked loop.
  • the shift direction of the first frequency can be set to positive and negative directions with respect to the first frequency in the step of generating the drive signal of the second frequency.
  • the shift direction of the second frequency can be set in the positive and negative directions with respect to the first frequency, so the mover moves the positive and negative directions with respect to the stator according to the setting. Can be done. In other words, shift the phase signal generating unit 1 1 6 D, as the second frequency is increased or decreased relative to the first frequency, shifting the phase.
  • the frequency synthesizer includes a determination unit 1 16 D2 ′ that outputs a signal corresponding to a phase difference between two input signals, and a determination unit 1 16 D2 ′.
  • the output signal frequency is varied according to the output, and the frequency variable means 1 16 D4 'and the frequency variable means 1 16 D4 are fed back to the decision means 1 16 D2 , so that the phase difference is reduced as one input signal.
  • speed information to be input unit 1 1 6 for varying the frequency of the feedback the signal to D1 ', 1 1 6 D5' and provided with the other input signal is the first frequency signal
  • the driving signal of the second frequency is output from the frequency varying means 1 16 D4 , and in the step of generating the driving signal of the second frequency, the speed information input means 1 16 D1 ′, 1 16 D5 ,
  • the shift amount of the first frequency is set in accordance with the speed instruction information input to the control unit. In this case, since the drive signal of the second frequency is generated by shifting the first frequency by a predetermined amount while monitoring the phase with respect to the first frequency, it is necessary to accurately maintain the frequency difference. Can be.
  • the frequency synthesizer receives the signal of the first frequency.
  • Division ratio variable can first divider with the force 1 1 6 m, a first phase detector first divider 1 1 6 D1, the output signal and the first feedback signal is input 1 16 D2 , and the first phase detector 1 16 D2 , which smoothes the output of the first-port one-pass filter 116 D3 , and outputs according to the output voltage of the first low-pass filter 116 D3 , A variable-frequency first voltage-controlled oscillator 1 16 D4 ′ between the input and output terminals S and T, and divides the output of the first voltage-controlled oscillator 116 D4 , by a variable frequency division ratio.
  • a first frequency synthesizer further comprising a second frequency divider 1 16 D5 , which is input to the first phase detector 1 16 D2 , as a first feedback signal.
  • the frequency synthesizer includes a third frequency divider 1 16 D6 , which receives an output signal of the first frequency synthesizer and has a variable frequency division ratio.
  • a frequency divider 1 1 6 D6 'second phase detector 1 16 D7 of the output signal and a second feedback signal are entered in the' second port for smoothing the output of the second phase detector 1 1 6 D7 '
  • the one-pass filter 1 16 D8 , and the second voltage-controlled oscillator 1 16 D9 whose output frequency varies according to the output voltage of the second low-pass filter 1 16 D8 , are connected to their input / output terminals S, In addition to the period between T, the output of the second voltage-controlled oscillator 1 16 D9 ′ is divided by a variable division ratio and input to the second phase detector 1 16 D7 ′ as a second feedback signal.
  • a second frequency synthesizer further comprising a frequency divider 1 16 D1Q , is provided.
  • the frequency division ratio of the first frequency divider is When the division ratio of the second frequency divider is l / n 2 , the difference between and 2 is 1. That is, depending on the difference between the frequency shift amount and n 2, n, and if both the magnitude of the eta 2 is identified, as the frequency shift amount is reduced this difference is less, Mover's The moving speed can be reduced. Since n and n 2 are preferably integers, when the difference is 1, the smallest frequency shift can be performed.
  • Is preferably set to a value between 0.98 and 1.02. That is, the frequency shift amount and depends on the ratio of n 2, and if the difference between n 2 are determined, the ratio is about the frequency shift amount is reduced as close as possible to 1, the moving element 6 can reduce the moving speed.
  • the first drive signal input to the stay 5 has the first frequency f
  • the second drive signal input to the mouth 6 has the second drive frequency f.
  • the first drive signal input to the station 5 has the first frequency f and the rotor 6
  • the second drive signal to be output has the second frequency f—Af
  • the switch S 2 is switched so that the first drive signal input to the station 5 is changed to the second drive signal.
  • the frequency f 1 is generated by continuously delaying the phase of the signal of the frequency f in time.
  • the switch S2 is switched so that the first drive signal input to the station 5 becomes the second frequency: f, and the second drive signal input to the rotor 6 may have + A f at the first frequency.
  • the frequency f + ⁇ :? is generated by advancing the phase of the signal of the frequency f continuously in time.
  • the first drive signal input to the step 5 has the first frequency f and the second drive signal input to the rotor 6
  • the traveling directions of the traveling waves generated in the stay 5 and the rotor 6 are simultaneously reversed by the respective drive signals.
  • the sin wave and the cos wave inputted to the electrodes S S and C C at the time of the forward rotation are respectively inputted to the electrodes C C and S S on the contrary. In other words, the phase difference between the sin wave and the cos wave is inverted.
  • the first drive signal input to the stay 5 has the first frequency f + ⁇ and the first drive signal input to the mouth 6 (2)
  • the traveling direction of the traveling wave generated in the stay 5 and the rotor 6 by the respective drive signals may be simultaneously reversed. Good.
  • the ultrasonic motor includes the control circuit 17 that controls the moving direction (rotation direction) of the moving element 6. This control is performed as described below in detail.
  • the shift phase signal generation unit (frequency conversion unit) 1 16 D temporally continuously shifts the phase so that a frequency difference ⁇ occurs between the first and second drive signals.
  • the first and second drive signals have first and second frequencies, respectively, and the control circuit 17 controls the frequency shift direction of the second frequency with respect to the first frequency.
  • control circuit 17 controls the phase shift direction of the second drive signal with respect to the first drive signal.
  • control circuit 17 sends the first and second drive signals output from the shift phase signal generator 16 D ′ to the stator 5 and the mover 6. It controls which of the transducers 5 V and 6 V is input.
  • control circuit 17 inputs the first and second drive signals to the transducers 5 V and 6 v, thereby simultaneously reversing the traveling directions of the traveling waves generated in the stator 5 and the movable element 6 respectively. Let it.
  • the driving method of the ultrasonic motor shifts the first frequency to generate a signal of the second frequency, so that stable rotation control can be performed according to the speed instruction information.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Des vibreurs (5v, 6v) sont disposés sur un stator (5) et sur un rotor (6) opposés l'un à l'autre. Un premier et un second signal de commande sont appliqués aux vibreurs (5v, 6v) de façon à les faire vibrer. La vibration fait tourner le rotor (6). Un générateur de signaux à déphasage (16D, 116D) déphase le second signal de commande par rapport au premier en fonction d'informations de régulation de la vitesse.
PCT/JP1999/000887 1998-02-27 1999-02-25 Moteur a ultrasons Ceased WO1999044280A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP10/47945 1998-02-27
JP10047945A JP3090903B2 (ja) 1998-02-27 1998-02-27 超音波モータ
JP10/48149 1998-02-27
JP10048149A JP3069074B2 (ja) 1998-02-27 1998-02-27 超音波モータの駆動方法

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WO1999044280A1 true WO1999044280A1 (fr) 1999-09-02

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179281A (ja) * 1988-12-29 1990-07-12 Miki Puurii Kk 超音波モータ
JPH07154981A (ja) * 1993-07-30 1995-06-16 Crouzet Automat Sa 表面弾性波モータ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179281A (ja) * 1988-12-29 1990-07-12 Miki Puurii Kk 超音波モータ
JPH07154981A (ja) * 1993-07-30 1995-06-16 Crouzet Automat Sa 表面弾性波モータ

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