WO2002062680A2 - Stockage a convoyeur et systeme de transport - Google Patents

Stockage a convoyeur et systeme de transport Download PDF

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Publication number
WO2002062680A2
WO2002062680A2 PCT/US2002/003443 US0203443W WO02062680A2 WO 2002062680 A2 WO2002062680 A2 WO 2002062680A2 US 0203443 W US0203443 W US 0203443W WO 02062680 A2 WO02062680 A2 WO 02062680A2
Authority
WO
WIPO (PCT)
Prior art keywords
storage
carriers
elements
conveyor
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/003443
Other languages
English (en)
Other versions
WO2002062680A9 (fr
WO2002062680A3 (fr
WO2002062680A8 (fr
Inventor
George Horn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIDDLESEX GENERAL INDUSTRIES Inc
Middlesex General Ind Inc
Original Assignee
MIDDLESEX GENERAL INDUSTRIES Inc
Middlesex General Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIDDLESEX GENERAL INDUSTRIES Inc, Middlesex General Ind Inc filed Critical MIDDLESEX GENERAL INDUSTRIES Inc
Priority to US10/433,828 priority Critical patent/US6854583B1/en
Priority to JP2002562648A priority patent/JP4067095B2/ja
Publication of WO2002062680A2 publication Critical patent/WO2002062680A2/fr
Publication of WO2002062680A3 publication Critical patent/WO2002062680A3/fr
Anticipated expiration legal-status Critical
Publication of WO2002062680A9 publication Critical patent/WO2002062680A9/fr
Publication of WO2002062680A8 publication Critical patent/WO2002062680A8/fr
Priority to US11/053,136 priority patent/US6971500B2/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612Production flow monitoring, e.g. for increasing throughput
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3216Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222Loading to or unloading from a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

Definitions

  • Stockers have been employed with conventional discrete-vehicle transport systems. Such systems employ a central robot which has access to plural floor-mounted storage cabinets providing bins, shelves or other storage space. A work-piece to be stored is transported to a designated transfer position on the conveying system. It is then retrieved by the stocker robot, which is then manipulated to place the work-piece in the appropriate storage location. As is evident, no parallel work-piece manipulations can be executed by the stocker robot while this storing activity is underway. The same limitation to single work-piece manipulation exists when the stocker robot is in the process of retrieving a work-piece. The stocker becomes a bottle-neck for work-piece flow.
  • the presently disclosed system includes an easily configurable storage system which is particularly well-suited for use with clean-environment conveyors, such as those described in U.S. Patent No. 6,047,812 to Horn et al, incorporated herein by reference.
  • the storage system includes modular conveyor elements which may be provided parallel to and adjacent a ceiling mounted conveyor network.
  • the conveyor elements may be provided as "oneway" paths which, when provided with plural transfer elements with respect to the path of the conveyor elements, can enable the circulation of a work-piece or a carrier of work-pieces from a storage matrix to a transfer path and back to the storage matrix. This avoids a problem with a needed work-piece being located in the middle of other not-needed work-pieces in the storage matrix.
  • plural storage conveyor elements may be provided parallel to one another. Adjacent storage conveyor elements may be used to realize storage loops, thus obviating the need for moving stored work-pieces onto the conveyor process path when accessing a subsequent work-piece.
  • Further embodiments include the use of a single storage conveyor element within multiple loops of storage conveyor elements, where work-pieces of different types proceed in opposite directions when leaving the storage conveyor element.
  • the modularity of the present system further enables the realization of plural, nested loops of storage conveyor elements in which work-pieces may be rapidly exchanged between loops of storage conveyor elements, rotated within a single loop of storage conveyor elements, or retrieved to a transfer path of the conveyor network or to a machine tool.
  • Massively parallel storage solutions can be readily designed and implemented without the need for dedicated floor space .
  • Such varying embodiments may be provided as pre-configured systems, or with the provision of appropriate sensing mechanisms and control logic may be auto-configuring according to a variety of parameters including competing storage needs for various types of work-pieces, time of day, etc.
  • control logic may provide buffering of each machine tool in the system and/or storing work- in-process (WIP) at the machine tool that is ready to be received and processed as soon as the machine tool becomes available.
  • WIP work- in-process
  • the modular storage system as now disclosed may also be configured for use as an input or output buffer for use in conjunction with a machine tool or other processing station associated with a conveyor system.
  • an operating characteristic curve (OC) is associated therewith which relates the cycle time of the production (the elapsed time of the total manufacturing process) to the average utilization of the process machine tools (equipment) . If the cycle time is fixed by customer demand, then the machine tool utilization is automatically defined by the OC.
  • control logic for material handling is defined by the present invention.
  • the control logic requires independent and high density movement of WIP directly between machine tools. Conveyor system accomplish this movement where other conventional vehicle fail.
  • Local buffering and storing systems are the enabling technology for the conveyor system.
  • the buffering and storing system must seamlessly interconnect to the conveyor network and is provided by the present invention.
  • the manufacturing process is highly recursive, i.e. the WIP re-enters a machine tool many times after it has been processed elsewhere.
  • the WIP re-enters a machine tool many times after it has been processed elsewhere.
  • Process machine tools are often placed in a spatial array according to function rather than operating sequence.
  • the control logic according to the present invention sends and pulls each WIP lot to the next process machine tool as soon as the WIP lot is finished at the previous manufacturing step.
  • the control logic is based on asynchronous and independent movement of each WIP lot, which is only possible with a conveyor network capable of moving each WIP independently of the other now matter how close they are to each other.
  • the control logic according to the present invention is particularly applicable to the concept of conveyor networks and Applicants specifically utilize conveyor networks for these clean manufacturing industries and take advantage of the productivity gain therethrough.
  • the present invention is directed to solving these deficiencies in the known techniques by applying conveyor transport networks in conjunction with a native stocker and buffer at the machine tool for improving the machine tool utilization while maintaining the product cycle time as well as improving the financial costs in comparison to the known techniques.
  • Fig. 1 illustrates a closed loop of storage conveyor elements
  • Fig. 2 illustrates a nested loop of storage conveyor elements
  • Fig. 3 illustrates a field stocker of storage conveyor elements having aggregated arrays of nested loops of storage conveyor elements
  • Fig. 4 is a block diagram of a field stocker system according to an embodiment of the present invention.
  • Fig. 5 illustrates a field stocker of storage conveyor elements having aggregated arrays of nested loops of storage conveyor elements that are networked into a unified system for material storage, wherein the adjoining machine process tools have direct I/O with an optional unit buffer;
  • Fig. 6 illustrates a field stocker of storage conveyor elements having aggregated arrays of nested loops of storage conveyor elements that are networked into a unified system for material storage, wherein various tool storage buffers are illustrated.
  • the conveyorized storage and transport system according to the embodiments of the present invention may be used in any type of processing industry requiring storage for maintaining inventories at multiple processing stations.
  • the manufacture of semiconductor devices is one example of an industry that is particularly suited for the features provided by the storage and transport system according to the embodiments of the present invention.
  • various embodiments of the presently disclosed storage and transport system are referred to as a "field stocker.”
  • Carriers conveyed by a clean-environment conveyor system may be pallets carrying one or more individual work-pieces.
  • the conveyor elements may transport the work-pieces themselves without the need for carriers.
  • substrates are usually carried in a transport carrier, while in flat panel manufacturing, the work- pieces may ride in carriers or directly on the conveyor elements.
  • Carriers will be used as a general term for the items to be transported. Carriers are also referred to as the items which are stored in the presently disclosed storage system.
  • the presently disclosed storage system is intended for use with a conveyor system comprised of modular track elements or segments. These track elements include both straight elements, rotating elements, and elevator elements. Other specialized elements may be provided.
  • the carrier width determines the conveyor element width, while the carrier length determines the minimum common denominator for the conveyor element length.
  • conveyor elements are constructed of a predetermined and standard length and width, dependent on the carriers conveyed thereon. It is in general advantageous to construct conveyors with lengths that are integers of the carrier length or are related thereto.
  • corner or junction elements that are preferably of a square footprint, based on the length of the carrier, a rectilinear matrix of conveyor elements can be constructed easily and individualized according to the needs of the particular installation. These junction elements generally turn the carriers in transit of a corner, so as to maintain carrier orientation.
  • a matrix of conveyor element paths can be constructed in such a way that the matrix has the highest density while occupying a minimum area.
  • the modularity of the foregoing conveyor system is also preferably employed in realizing the storage system of the present disclosure.
  • linear conveyor elements 110 and 111 of equal lengths are assembled side by side and then connected to each other with junction elements 120-123 as illustrated in Fig. 1. In this manner, one or more closed loops 112 are formed within which carriers are circulated.
  • Each of the linear conveyor elements 110 and 111 may be comprised of one or more discrete conveyor su- elements. Entry and exit of carriers into such a loop takes place at junction elements 120 and 123 respectively as shown by the arrows in Fig. 1.
  • a storage system having an aggregate storage matrix of four buffer sections or storage cells 310, 320, 330 and 340 as illustrated in Fig. 3 may be hung or incorporated at or near the ceiling in a manufacturing facility substantially proximate a similarly suspended conveyor system.
  • One E type carrier 342 may be received from a conveyor "highway" 350 and stored in the buffer section 340, while one A carrier may be output from the buffer section 310 of the nested loop and delivered to a process station 391.
  • a D carrier 332 in the buffer section 330 of the nested loop array may be returned to the conveyor highway 350.
  • the fourth buffer section 320 is employed for storing more than one type of carrier, B and C carriers in this example.
  • the control over transporting and storing the carriers may be realized by sensors located near nodal junction elements that detect identification codes, such as bar codes or other identifying indicia, included on an accessible portion of the carriers.
  • identification codes such as bar codes or other identifying indicia
  • signals corresponding to detected codes from sensors 420 may be communicated to a centralized processing unit 410, such as by an RF transponder, bus interface, or other known transmitting device, so that the centralized processing unit 410 may determine the direction that the carrier is to be sent in the transport system 400.
  • the detected identifying information may be provided to local controllers 430 ⁇ -430 n associated with the respective portion of the transport system 400.
  • Control signals may then be sent to motive elements associated with the respective conveyor element for controlling the nodal junction in the desired direction, or for moving one or more carriers along a particular conveyor element. This applies whether the nodal junction element or conveyor element is part of a storage matrix or part of the conveyor highway, or both.
  • Circulation in a matrix can be asynchronously controlled with several movements of carriers occurring simultaneously. Such circulation allows the placement of any carrier at any location in the matrix, thus enabling the realization of a random access storage device. Maximum flexibility in terms of configurability and reconfigurability is thus provided.
  • Multiple parallel conveyor elements may be regarded as forming one or more buffer sections.
  • the separation of one buffer matrix from another depends upon the rules associated with the constituent conveyor elements.
  • two parallel conveyor elements, with associated nodal junction elements may be used for conveying only carriers of one type, for example carriers of type A. They thus form a buffer section unto themselves.
  • one or both of these conveyor elements may transport carriers of type A to and from another set of conveyor elements which themselves convey carriers of types A and B. The original two conveyor elements are thus part of two buffer sections.
  • a storage system for carriers in the manufacturing process includes an aggregate storage matrix of buffer sections where the carriers are stored serially within each buffer section.
  • Each buffer section is made of multiple conveyor elements, with the buffer sections aggregated to share common input and output nodal junction elements.
  • carrier flow is locally controlled in an asynchronous manner so that carrier collisions are automatically and inherently avoided.
  • the conveyor elements which comprise a buffer section may also communicate with each other for efficient exchange of carriers according to predetermined control logic.
  • the buffer conveyor elements may serially rotate the respective carriers between each other so that any of the serially stored carriers may be accessed and discharged.
  • the serially stored carriers may also be collaboratively rotated between any two buffer sections independently and asynchronously from other similar and concurrent rotations of other buffer sections.
  • control over carrier movement within a buffer section or between buffer sections may also be provided centrally.
  • Such larger systems at remote physical locations in the system, may be network connected to each other, forming a unified system of material storage and delivery with utmost capacity and efficiency throughout an entire factory.
  • a storage system as previously described, with direct input and output ports, may be located near plural process stations, so that storage may be provided where physically needed in each process. When so done, a storage system is easily constructed of the same modular conveyor elements. Integration of storage with conveyance is simplified with none of the transfer bottle-necks associated with carrier hand-over between a traditional robotic stocker and a conveyor.
  • the factory wide transport and storage system according to the embodiments of the present invention is advantageous in achieving the goal of low cycle time and high utilization of the tool stations.
  • the WIP work-in-process
  • the buffer sections or the field stocker serve more than one tool station if there is more than one process tool dedicated to the same value add process. In this case it can be assured that the first WIP arriving into the buffer section will be served first.
  • one embodiment of a storage system includes four buffer sections 510, 520, 530 and 540 corresponding to each of four process tool stations: Tool Station A 590, Tool Station B&C 591, Tool Station D 592 and Tool Station E 593.
  • Tool Station A 590 and Tool Station B&C 591 each include their respective buffer section 595 or 596 for storing carriers until input into the respective process tool station.
  • Tool Station D 592 retrieves carriers for immediate processing, i.e., without any buffering on input or output.
  • Tool Station A 590, Tool Station B&C 591, Tool Station D 592 are configured for "straight I/O,” or input to the respective tool upstream from the output from the respective tool.
  • Tool Station E 593 which also has buffering at its input 598 and output 597, is a "reverse I/O" tool, meaning that its input is downstream of its output with respect to the flow of carriers along the conveyor peripheral path 552.
  • the circulating direction in each buffer section is identical.
  • control logistics are simplified because only conflicts between carriers in motion at junctions may occur. These conflicts can then be automatically resolved according to, for instance, the order of first arrival for transporting through the junction.
  • a large number of conveyor elements are aggregated into a single storage system, and when several of these systems are joined into a larger one, such a flow method results in carrier flow loops within larger flow loops.
  • a peripheral pair of common input and output conveyor elements may be joined so that carriers may circulate circumferentially around a grouping of other buffer sections.
  • the boundary of each buffer section may be shared at the adjoining side so that the flow direction on the shared side is identical.
  • Multiple buffer sections may be joined to form transport and storage paths having loops within loops.
  • a control methodology where the direction of the flow is alternated by demand and may occur in either of two possible directions is also possible. This type of control requires more complex software and may be more efficient in some circumstances.
  • the flow direction being alternated on demand means that carrier flow conflict can occur on linear conveyor elements as well as at nodal junction elements.
  • the direction of circulation of each buffer section may be determined on demand and may be contradictory with concurrent circulation in other buffer sections such that the shared circumferential conveyor elements have an arbitrary direction of flow.
  • a unifying conveyor network may connect multiple storage systems. Thereby, any carrier contained in any storage system can be retrieved by a controller capable of accessing each individual buffer section in any storage system. The selected carrier is then transported and stored in any of the other interconnected systems. Conflicts are resolved with a highly sophisticated and more substantial control logic. Aggregates of these storage systems may be inserted into a generalized conveyor highway, serving as the point of material distribution in a bay of process tools. When so done, the outer periphery of the aggregate system becomes the generalized conveyor highway. Each such bay system may be connected to a series of neighboring bays, similarly equipped with respective transport and storage systems.
  • the peripheral transport highway may best be connected to a series of outer loops, where the flow of material is counter to the flow in the storage and highway system.
  • Such counter flow loops are used for buffering carriers waiting for process tools in the bay.
  • Such buffering may also be used as random storage and retrieval systems because they can be configured to rotate the buffered carriers through the storage and transport system conveyor elements for random access selection of any particular carrier.
  • a storage system having four buffer sections 610, 620, 630 and 640 corresponding to four process stations 690, 691, 692 and 693 is illustrated in Fig. 6. Again, this storage system may be suspended or incorporated at or near the ceiling.
  • Each of the buffer sections 610, 620, 630 and 640 is associated with one of four process stations 690-693, similar to the system illustrated in the embodiment associated with Fig. 5. However, in the present embodiment, various types of storage conveyor elements are provided at the tool stations.
  • random access storage buffers 695 and 696 are utilized; the random access storage buffers 695 and 696 circulate the carriers in a closed loop between the respective buffer section (s) and the conveyor peripheral path until a carrier that is desired for processing at the respective tool reaches the input nodal junction elementfor that tool.
  • Tool Station A 690 includes random retrieval and storage for the carriers achieved by bi-directionally operating the movement of the carriers inside of the buffer sections so that the serial order of the carriers may be rearranged for discharge or storage.
  • Tool Station B&C 691 is similar to Tool Station A 690, though without bi-directional nodal junction elements; instead, discrete input and output nodal junction elements are provided.
  • FIFO buffer storage is provided having a limited, predetermined amount of carrier storage 697 available adjacent Tool D 692.
  • single buffer storage is provided near Tool E. Again, sensors and RF transponders may be associated with the nodal junction elements for sensing and controlling the direction in which carriers are to be sent.

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Abstract

L'invention concerne un système de stockage de configuration variable dont l'utilisation convient particulièrement avec des convoyeurs en environnement propre. Ce système de stockage comprend des éléments modulaires de piste de convoyeur qui peuvent être disposés en parallèle et adjacents à un convoyeur aérien principal. Les éléments de convoyeur peuvent être à sens unique et permettre, lorsqu'il sont combinés à plusieurs éléments de transfert par rapport à un convoyeur principal, l'aller et le retour d'une pièce de travail entre une matrice de stockage et une voie de transfert. On peut utiliser des éléments convoyeurs de stockage adjacents afin de réaliser des boucles d'éléments de stockage. Un seul élément convoyeur de stockage peut être partagé par plusieurs boucles d'éléments de stockage. La modularité du présent système permet la réalisation de plusieurs boucles imbriquées d'éléments de stockage. La commande d'un tel système peut être locale, centralisée ou réalisée par une combinaison des deux, et permet de régler le comportement d'éléments convoyeurs de stockage individuels sur la base de facteurs variés.
PCT/US2002/003443 2001-02-06 2002-02-06 Stockage a convoyeur et systeme de transport Ceased WO2002062680A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/433,828 US6854583B1 (en) 2001-02-06 2002-02-06 Conveyorized storage and transportation system
JP2002562648A JP4067095B2 (ja) 2001-02-06 2002-02-06 コンベヤ化された貯蔵及び搬送システム
US11/053,136 US6971500B2 (en) 2001-02-06 2005-02-08 Conveyorized storage and transportation system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26671501P 2001-02-06 2001-02-06
US60/266,715 2001-02-06

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10433828 A-371-Of-International 2002-02-06
US11/053,136 Continuation US6971500B2 (en) 2001-02-06 2005-02-08 Conveyorized storage and transportation system

Publications (4)

Publication Number Publication Date
WO2002062680A2 true WO2002062680A2 (fr) 2002-08-15
WO2002062680A3 WO2002062680A3 (fr) 2003-02-13
WO2002062680A9 WO2002062680A9 (fr) 2004-02-12
WO2002062680A8 WO2002062680A8 (fr) 2004-04-22

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PCT/US2002/003443 Ceased WO2002062680A2 (fr) 2001-02-06 2002-02-06 Stockage a convoyeur et systeme de transport

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JP (1) JP4067095B2 (fr)
WO (1) WO2002062680A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012123335A1 (fr) * 2011-03-11 2012-09-20 SSI Schäfer PEEM GmbH Itinérance circulaire

Family Cites Families (4)

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Publication number Priority date Publication date Assignee Title
US5636966A (en) * 1992-10-07 1997-06-10 Hk Systems, Inc. Case picking system
FR2755677B1 (fr) * 1996-11-08 1998-12-24 Savoye Nouvelle Societe Anonym Installation de convoyage pour preparation d'ensemble d'objets
US5893697A (en) * 1997-03-26 1999-04-13 Automated Healthcare, Inc. Automated system for selecting packages from a storage area
US6321138B1 (en) * 2000-09-15 2001-11-20 Woodson Incorporated Storage and retrieval system with automated order make up

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012123335A1 (fr) * 2011-03-11 2012-09-20 SSI Schäfer PEEM GmbH Itinérance circulaire
DE102011014394C5 (de) 2011-03-11 2022-02-17 Ssi Schäfer Automation Gmbh Zirkulares Roaming für ein Lager- und Kommissioniersystem

Also Published As

Publication number Publication date
JP4067095B2 (ja) 2008-03-26
WO2002062680A9 (fr) 2004-02-12
WO2002062680A3 (fr) 2003-02-13
JP2004523444A (ja) 2004-08-05
WO2002062680A8 (fr) 2004-04-22

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