WO2002103433A2 - Systeme scanner lineaire compact - Google Patents

Systeme scanner lineaire compact Download PDF

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Publication number
WO2002103433A2
WO2002103433A2 PCT/IL2002/000485 IL0200485W WO02103433A2 WO 2002103433 A2 WO2002103433 A2 WO 2002103433A2 IL 0200485 W IL0200485 W IL 0200485W WO 02103433 A2 WO02103433 A2 WO 02103433A2
Authority
WO
WIPO (PCT)
Prior art keywords
axis
scanner system
axis unit
bracket
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IL2002/000485
Other languages
English (en)
Other versions
WO2002103433A3 (fr
Inventor
Shlomo Turgeman
Oded Anner
Haim Raz
Eitan Shefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idea Machine Development Design and Production Ltd
Original Assignee
Idea Machine Development Design and Production Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idea Machine Development Design and Production Ltd filed Critical Idea Machine Development Design and Production Ltd
Priority to AU2002311615A priority Critical patent/AU2002311615A1/en
Publication of WO2002103433A2 publication Critical patent/WO2002103433A2/fr
Publication of WO2002103433A3 publication Critical patent/WO2002103433A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A61B2018/2035—Beam shaping or redirecting; Optical components therefor
    • A61B2018/20351—Scanning mechanisms
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A61B2018/2035—Beam shaping or redirecting; Optical components therefor
    • A61B2018/20351—Scanning mechanisms
    • A61B2018/20359—Scanning mechanisms by movable mirrors, e.g. galvanometric

Definitions

  • the present invention relates to a compact linear scanner system. Background of the Invention
  • Computer-controlled scanning systems have found uses in many different fields, such as in certain types of surgery, in the application of microscopic markings on precious stones, in the micro-machining of hard or tough materials, and many more.
  • a compact, linear XYZ-scanner system comprising an X-axis unit mounted on a chassis member and including an X-axis motor means fixedly attached to said chassis and adapted to drive a slide linearly guided by first guide means; an X-mirror mount moving together with said X-axis unit; a Y-axis unit mounted on a first bracket that moves together with said X-axis unit and including Y-axis motor means fixedly attached to said first bracket and adapted to drive a slide linearly guided by second guide means; a Y-mirror mount moving together with said Y-axis unit; a Z-axis unit mounted on a second bracket that moves together with said Y-axis unit and including Z-axis motor means fixedly attached to said second bracket and adapted to drive a slide linearly
  • Fig. 1 is an exploded, perspective view of the scanner system according to the present invention, showing the four units of the system;
  • Fig. 2 is an exploded view of the X-axis unit;
  • Fig. 1 is an exploded, perspective view of the scanner system according to the present invention, showing the four units of the system;
  • Fig. 2 is an exploded view of the X-axis unit;
  • Fig. 1 is an exploded, perspective view of the scanner system according to the present invention, showing the four units of the system;
  • Fig. 2 is an exploded view of the X-axis unit;
  • Fig. 1 is an exploded, perspective view of the scanner system according to the present invention, showing the four units of the system;
  • Fig. 2 is an exploded view of the X-axis unit;
  • Fig. 1 is an exploded, perspective view of the scanner system according to the present invention, showing the four units of the system;
  • Fig. 2 is an exploded view of the X-axis unit;
  • FIG. 3 illustrates the fully assembled X-axis unit
  • Fig. 4 is an exploded view of the Y-axis unit in its position above the XY-bracket of the assembled X-axis unit
  • Fig. 5 illustrates the fully assembled X-axis and Y-axis units
  • Fig. 6 is an exploded view of the Z-axis unit in relation to the fully assembled X-axis and Y-axis units
  • Fig. 7 illustrates an optional camera unit in its relation to the fully assembled X-axis
  • Fig. 8 schematically illustrates the optical path of the system, including the optical components
  • Fig. 9 illustrates the manner in which the scanner system according to the invention is used to cover larger volumes.
  • Fig. 1 three units of the system: the X-axis unit 100, the Y-axis unit 200 and the Z-axis unit 300.
  • the fourth unit shown is a camera unit 400, which is optional.
  • Fig. 2 illustrates X-axis unit 100, showing a chassis member 102, to the bottom of which is fixedly attached stator 104 of a linear motor 106.
  • motors are commercially available and can be, e.g., of the electromagnetic, piezo-ceramic, or even the lead-screw type.
  • a vertical, rib-like member 113 To runner 108 of motor 106 is connected a vertical, rib-like member 113, downwardly projecting from the XY-bracket 114, i.e., the bracket that moves along the X-axis and carries the Y-axis unit 200 (Fig. 4).
  • Bracket 114 has a horizontal member 116 and a vertical member 118.
  • Horizontal member 116 To horizontal member 116 is fixedly attached a slide 110, riding on a guide rail 112 mounted on the bottom surface of chassis member 102.
  • Horizontal member 116 carries a post 120, to which is attached a block 122 mounting X-mirror 124.
  • Block 122 is rendered elastically deformable by the provision of two slots 126, 126', whereby, with the aid of adjusting screws (not shown), mirror 124 can be tilted about two mutually perpendicular axes.
  • Fig. 3 shows the fully assembled X-axis unit.
  • Fig. 4 is an exploded view of Y-axis unit 200 in its position above XY-bracket 114 of the assembled X-axis unit. It will be appreciated that, both functionally and structurally, Y-axis unit 200 is largely an analogue of X-axis unit 100.
  • Linear motor 204 including its stator 206 and runner 208, is mounted on horizontal member 116 of XY-bracket 114, as is guide rail 212 on which rides slide 210. To the latter is fixedly attached YZ-bracket 214, the horizontal member 216 of which carries post 220, complete with Y-mirror 224 and mirror mount 226.
  • Vertical member 218 of YZ-bracket 214 serves for the attachment of Z-axis unit 300, as shown in Fig. 6. Also seen is linear " encoder read head 228, which, in assembly, is attached to vertical XY-bracket member 118. It will be understood that, due to the nature of the exploded view, encoder 228 appears to be below YZ-bracket 214, while in assembly it is obviously located above bracket 214, as seen in the illustration of the fully assembled X-axis and Y-axis units 100 and 200 of Fig. 5.
  • Fig. 6 is an exploded view of Z-axis unit 300, shown in its relation to the fully assembled X-axis and Y-axis units 100 and 200.
  • Linear motor 304 is mounted on Y-bracket member 218 (Figs. 4 and 5), as is guide rail 312.
  • the Z-bracket is designed in two parts: the vertical, channel-shaped member 318, and the plate-shaped horizontal member 316. In assembly, both parts 316 and 318 are joined by screws.
  • Member 318 is connected to motor runner 308 with one of its flanges, and to slide 310 with its web. Also shown is focusing lens 338, the focal length of which is not limited by considerations of distortion-free imaging.
  • the kinematic hierarchy of the system is as follows: linear motor 104 moves all three units; linear motor 204 moves the Y-axis and Z-axis units 200 and 300, and linear motor 304 moves only the Z-axis unit 300.
  • Fig. 7 illustrates an optional camera unit 400 and its position relative to units 100, 200 and 300, shown fully assembled.
  • Unit 400 which is attachable to chassis member 102 at its upper left-hand corner, comprises a camera system 440, advantageously of the CCD type, a spacer 442 which accommodates the imaging optics and a mirror housing 444, in which a beam splitter 446 and a dichroic mirror 448 are mounted.
  • an LED light source 450 used to illuminate the scanned object, and a laser beam LB, which enters the system through bore 134 (Fig. 1).
  • annular light source 352 which can be slipped over focusing lens 338 and is intended to provide diffuse light.
  • Fig. 8 is a schematic representation of the light path of the scanning system according to the invention, including the optional camera system 400.
  • a laser beam LB from a laser source outside the system impinges on dichroic mirror 448, is reflected at 90° in the X-direction, impinges on X-mirror 124 and is reflected at 90° in the XY-plane, hitting Y-mirror 224, whence it is reflected upwards in the YZ-plane into focusing lens 338, to be focused onto the object scanned.
  • the object-side focal point of lens 338 can be moved to any point of a. three-dimensional coordinate system.
  • Illumination required for the imaging process is supplied by LED 450, the light of which (dashed line) impinges on beam splitter 446, which reflects it right into the optical axis via dichroic mirror 448.
  • Mirror 448 reflects light of the wavelength of laser beam LB, but passes . ordinary light. This light, reflected from the scanned object, is collected and collimated by focusing lens 338 and returned along the optical path, passing dichroic mirror 448 and beam splitter 446, and reaching the objective of the CCD camera system.
  • the camera unit added to the scanner system, provides an integrated scanner/camera system.
  • XYZ-motion control is provided by a per se known motion controller system and based on the position information provided by linear encoders 128, 228, 328. Also required are a CPU, a frame grabber and a monitor (not shown).
  • the compactness of the scanner according to the invention is the result of the interlinking, indeed, the extensive mechanical integration, of units 100, 200 and 300, producing a "close packing" effect. Due to this effect, a scanner according to the invention, covering a three-dimensional coordinate system of, . e.g., 100 x 100 x 100 mm, weighs less than 15 kg and has physical dimensions of less than 200 x 200 x 250 mm. A scanner according to the invention, covering a 3-D-coordinate system of 50 x 50 x 50 mm, weighs less than 6 kg and measures 140 x 150 x 170 mm.
  • the above-described scanner is suitable for a variety of purposes, using a laser beam or an ordinary light beam, to scan a three-dimensional surface.
  • it can be used for viewing an object illuminated either by an external source or by an internal source via the optical system of the scanner; for 3-D measurement, tracing, viewing (as through a microscope), or for pick-and-place applications.
  • Scanners according to the present invention can cover 3-D coordinate systems of 50 x 50 x 50 mm and 100 x 100 x 100 mm with an accuracy of a few microns and a repeatability of 0.1 microns, and still constitute convenient, cost-efficient packages.
  • Fig. 9 basically shows the four principal units of the system, the X-axis unit 100, the Y-axis unit 200, the Z-axis unit 300, and the camera unit 400. Further seen is an X-, or. XY, or XYZ-motion worktable 500, on which the workpiece (not shown) is positioned.
  • the camera system 440 is an integral part of the scanner and views the workpiece at any given moment with an accuracy determined by the optical design and camera design. This accuracy can be of the order of a few microns without resorting to any extraordinary optical design.
  • the workpiece will be positioned on a motion system 500 (such as a conveyor) or a XY-or XYZ-motion system. Standard repeatability and resolution for these systems (0.01-0.1 mm and even up to 0.5 mm) is sufficient. Special accuracy is not required.
  • the motion system 500 will advance somewhat less than 50mm, in order to bring the next segment into position.
  • the connection between each segment to the next, maintaining the high accuracy and repeatability required by the user, is kept by image processing techniques.
  • the system will be programmed to identify a repeating element or any known feature at the edge of each segment or even create a feature using laser marking techniques.
  • the scanner moves to the area where that element is expected to be (known to within 0.01-0.5

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electromagnetism (AREA)
  • Otolaryngology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système scanner XYZ linéaire compact comprenant une unité axe X montée sur un élément châssis et un moyen moteur axe X solidaire du châssis et conçu pour commander un coulisseau guidé linéairement par un premier moyen; une monture de miroir X se déplaçant avec l'unité axe X; une unité axe Y montée sur un premier support qui se déplace avec l'unité axe X et comporte un moyen moteur axe Y solidaire du premier support et conçu pour commander un coulisseau guidé linéairement par un deuxième moyen; une monture de miroir Y se déplaçant avec l'unité axe Y; une unité axe Z montée sur un deuxième support qui se déplace avec l'unité axe Y et comporte un moyen moteur axe Z solidaire du deuxième support et conçu pour commander un coulisseau guidé linéairement par un troisième moyen, et une monture de lentille portant une lentille de focalisation et se déplaçant avec l'unité axe Z; un faisceau lumineux émis par une source lumineuse et frappant le miroir X est réfléchi dans un plan XY sur le miroir Y et donc, dans un plan YZ dans la lentille de focalisation. En actionnant sélectivement le moyen motor, le point focal du faisceau lumineux focalisé par la lentille de focalisation peut se déplacer jusqu'à n'importe quel point dans un système de coordonnées tridimensionnel.
PCT/IL2002/000485 2001-06-19 2002-06-19 Systeme scanner lineaire compact Ceased WO2002103433A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002311615A AU2002311615A1 (en) 2001-06-19 2002-06-19 Compact linear scanner system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ILI43836 2001-06-19
IL4383601 2001-06-19

Publications (2)

Publication Number Publication Date
WO2002103433A2 true WO2002103433A2 (fr) 2002-12-27
WO2002103433A3 WO2002103433A3 (fr) 2003-03-13

Family

ID=11047465

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2002/000485 Ceased WO2002103433A2 (fr) 2001-06-19 2002-06-19 Systeme scanner lineaire compact

Country Status (2)

Country Link
AU (1) AU2002311615A1 (fr)
WO (1) WO2002103433A2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1488767A3 (fr) * 2003-06-17 2005-03-09 Alcon RefractiveHorizons, Inc. Système et procédé pour la translation d'un rayon laser
EP1617273A1 (fr) * 2004-07-12 2006-01-18 Olympus Corporation Microscope optique à balayage
CN100460924C (zh) * 2006-07-28 2009-02-11 武汉楚天激光（集团）股份有限公司 单镜片二维扫描激光地标机
CN102688019A (zh) * 2012-06-01 2012-09-26 上海奥通激光技术有限公司 Xyz立体扫描运动机构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101551520B (zh) * 2009-05-14 2010-12-29 上海英雷红外水份系统科技有限公司 主动式旋转平面镜扫描器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3503401A1 (de) * 1985-02-01 1986-08-07 Walter 6000 Frankfurt Röder Fuehrungsvorrichtung fuer einen laserstrahl, vorzugsweise zur dreidimensionalen werkstueckbearbeitung
US4661680A (en) * 1985-06-28 1987-04-28 Westinghouse Electric Corp. End-of-arm tooling carousel apparatus for use with a robot
JPS6316894A (ja) * 1986-07-07 1988-01-23 Mitsubishi Electric Corp レ−ザ加工装置
TW245669B (fr) * 1993-09-27 1995-04-21 Mitsubishi Electric Machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1488767A3 (fr) * 2003-06-17 2005-03-09 Alcon RefractiveHorizons, Inc. Système et procédé pour la translation d'un rayon laser
EP1617273A1 (fr) * 2004-07-12 2006-01-18 Olympus Corporation Microscope optique à balayage
US7154084B2 (en) 2004-07-12 2006-12-26 Olympus Corporation Optical-scanning microscope apparatus
CN100460924C (zh) * 2006-07-28 2009-02-11 武汉楚天激光（集团）股份有限公司 单镜片二维扫描激光地标机
CN102688019A (zh) * 2012-06-01 2012-09-26 上海奥通激光技术有限公司 Xyz立体扫描运动机构

Also Published As

Publication number Publication date
AU2002311615A1 (en) 2003-01-02
WO2002103433A3 (fr) 2003-03-13

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