WO2005100272A1 - 石英ガラス部材の溶接方法及び装置 - Google Patents
石英ガラス部材の溶接方法及び装置 Download PDFInfo
- Publication number
- WO2005100272A1 WO2005100272A1 PCT/JP2005/001699 JP2005001699W WO2005100272A1 WO 2005100272 A1 WO2005100272 A1 WO 2005100272A1 JP 2005001699 W JP2005001699 W JP 2005001699W WO 2005100272 A1 WO2005100272 A1 WO 2005100272A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- quartz glass
- welding
- glass member
- glass members
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/203—Uniting glass sheets
Definitions
- the present invention relates to a method and apparatus for welding quartz glass members in which a pair of quartz glass members can be welded efficiently and simply without using a welding rod.
- a welding rod made of quartz glass is used, and a method of joining quartz glass members together by melting the welding rods is adopted.
- the method has the advantage that quartz glass products can be produced relatively easily.
- it is necessary to sufficiently weld the molten material obtained by melting the welding rod to the welding site, requiring the experience and skill of a skilled worker, and disadvantageously prolonging the working time.
- a mode of welding a quartz glass member three types of modes as shown in FIG. 5 are known according to a change in shape of an end face of a welding portion at the time of welding.
- the end face of the welded portion of the quartz glass members A and B is a flat surface A, B type I [Fig. 5 (a)], and the end surface is a V type having single-sided tapered surfaces A, B downward in the tip direction [figure 5 (b)] and end
- Patent Document 1 a method and apparatus for mechanically joining quartz glass members without using a welding rod.
- the conventional method described in Patent Document 1 will be described with reference to FIG. 6 and FIG.
- FIG. 6 is a flow chart showing an example of the process sequence of this conventional method
- FIG. 7 is a front schematic view showing an example of the procedure of this conventional method.
- joints A and B of quartz glass members A and B are butted [Step 200 in FIG. 6, (a) in FIG. 7].
- the quartz glass members A and B are placed in the left-right direction (in this case, the panner in the up-down direction) or in the up-down direction (in this case, the panner is in the left-right direction) (A spanner also always discloses only the horizontal direction)
- the junctions are positioned in the vertical direction. There is no disclosure or suggestion of any composition (or even vertical heating).
- the pair of quartz glass members A and B at both the joints A and B are uniformly heated and melted by the horizontal direction of the planar part [step 202 in FIG. 6, FIG. 7 (b)]. Further, an external force is applied to the quartz glass members A and B, and the entire bonding portions A and B are pressed together and welded through the welding portion D [step 204 in FIG. 6, (c) in FIG. Create Y [Fig. 7 (d)]. In this conventional method, the quartz glass members A and B are stationary.
- the joints are pressed together by an external force (no velocity), so the joint is finished smooth in the type I joint state.
- an external force no velocity
- a convex portion is formed at the bonding portion. This point is one of the differences between the conventional method and the method of the present invention.
- the weld quartz glass Y is subjected to an annealing treatment at or near the weld portion D as necessary.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2003-26433
- the present inventors have overcome the above problems by heating, melting and welding the quartz glass member for the purpose of welding such that the welding surface of the thick quartz glass member is raised.
- the present invention has been achieved as a result of extensive research into developing methods.
- a quartz glass member is simply welded without using a welding rod in which the occurrence of a recess and the mixing of bubbles in the welded portion of the quartz glass member are eliminated and therefore optical unevenness is not generated. It is an object of the present invention to provide a method and apparatus for welding quartz glass members that can be suitably used for optical devices.
- a method of welding quartz glass members is a method of welding a pair of quartz glass members facing each other, wherein the quartz glass members are spaced apart by a predetermined distance.
- the step of vertically placing, the step of heating and melting the welded portion of the quartz glass member with equal force on both sides, and the butted and pressed together the welded portions of the pair of quartz glass members by a predetermined pressing force It is characterized by the following steps:
- As the pressing force used in the method of the present invention although an external force may be applied from both directions, it is preferable to use an external force from one direction having a predetermined speed.
- the quartz glass members are butted and pressed together so as to form a raised portion in the welded portion of the fused quartz glass members.
- the apparatus for welding quartz glass members is an apparatus used for welding a pair of opposing quartz glass members, and supports one quartz glass member in a vertically placed state.
- It is characterized by comprising a spanner means provided between the fixed support means and the movable support means so as to heat and melt the portion to be
- a pair of straight spanners be used as the spanner means, and that the spanner means be provided in parallel to the welding portion of the quartz glass member and on both sides thereof.
- the banner means be installed so as to be vertically movable and tiltable at an arbitrary angle.
- the quartz glass member can be simply and conveniently used without using a welding rod which can not cause optical unevenness. It is possible to achieve the effect that welding can be performed, and the obtained welded quartz glass member can be suitably used as a quartz glass member for an optical device.
- the device according to the invention is advantageously used for the implementation of the method according to the invention.
- FIG. 1 is a perspective view of a quartz glass member welding apparatus according to the present invention.
- FIG. 2 is a flow chart showing an example of the order of steps of the method of welding quartz glass members according to the present invention.
- FIG. 3 is a front view schematically showing an example of the procedure of the method of welding quartz glass members according to the present invention, wherein (a) is a state in which the quartz glass members are vertically opposed with a predetermined interval, (b) is (C) is a state in which the welded portion of the quartz glass member is melted, (d) is a state in which the melted portion welded of the quartz glass member is butted, In (e), the state force of (a) also shows a state in which a convex portion is formed by pressing the quartz glass members together.
- FIG. 4 It is an upper surface schematic diagram which shows the procedure similar to FIG.
- FIG. 5 is an explanatory view showing a welding aspect of a quartz glass member, wherein (a) shows an I-type, (b) shows a V-type, and (c) shows an X-type.
- FIG. 6 A flow chart showing an example of the order of steps of the conventional method of bonding quartz glass members
- FIG. 7 is a schematic front view showing an example of the procedure of the conventional method of bonding quartz glass members. Explanation of sign
- 10 welding apparatus
- 14 fixed support means
- 16 first base
- 18a, 18b first lower support
- 20a, 20b first upper support
- 22 movable support means
- 26 Second base
- 28 Rail
- 30 Movable
- 32a, 32b second lower support
- 34a, 34b second upper support
- 36 third base
- 38a, 38b straight panner
- 38 Perna means
- 40 Perna holding member
- A, B Quartz glass member.
- FIG. 1 is a perspective view of a quartz glass member welding apparatus according to the present invention.
- 10 is a welding apparatus for a quartz glass member according to the present invention.
- the welding apparatus 10 has a fixed support means 14 for supporting the first quartz glass member A.
- the reference numeral 16 denotes a first base constituting the fixed support means 14.
- first lower supports 18a and 18b and first auxiliary receivers 18c and 18d for supporting the lower part of the first quartz glass member A are provided.
- Reference numerals 20 a and 20 b denote a first upper support for supporting the upper portion of the first quartz glass member A.
- Reference numeral 22 denotes a movable support means for supporting the second quartz glass member B, which is provided opposite to the fixed support means 14 so as to be capable of coming into and coming out of contact with it.
- Reference numeral 26 denotes a second base constituting the movable support means 22. Rails 28, 28 are longitudinally laid on the upper surface of the second base 26, and a movable stand 30 is slidably mounted on the rails 28, 28 in the longitudinal direction.
- second lower supports 32a and 32b and second auxiliary receivers 32c and 32d for supporting the lower part of the second quartz glass member B are provided.
- Reference numerals 34a and 34b denote second upper supports for supporting the upper portion of the second quartz glass member B.
- the mechanical static accuracy of each of the supports 18a, 18b, 20a, 20b, 32a, 32b, 34a, 34b described above is maintained, and when the previously-designated quartz glass members A and B are supported,
- the third base 36 is provided between the first base 16 and the second base 26.
- a spanner holding member 40 for holding spanner means 38 consisting of a pair of straight spanners 38a and 38b is installed.
- the perna means 38 is provided parallel to and on both sides of the welded portions A and B of the quartz glass members A and B.
- the panner holding member 40 is installed so as to be vertically movable and adjustable in inclination angle, so that the panner means 38 is movable in the up and down direction and can be inclined at an arbitrary angle. ! /.
- the welded portion of the first quartz glass member A supported by the fixed support means 14 with secured mechanical accuracy ie, the one end face A and the movable support means 22 with secured mechanical accuracy.
- the welded portion of the second quartz glass member B supported on the side, that is, one end face B is melted by the flames F and F of the planer means 38, and the molten welded portions A and B are fixedly supported by the movable supporting means 22.
- Means 14 may be moved in the direction 14 to weld the welding site B at a predetermined speed to the welding site A so as to be butted and pressed together (collision) by welding.
- a convex portion C is formed on the welded portion by butting and pressing the welding portions A and B with an external force (a one-way external force having a predetermined speed) causing them to collide (FIG. 3 and FIG. Figure 4).
- thermal distortion can be dispersed by softening and heating the welded portion of the welded quartz glass member using the panner means 38.
- a straight heating device (a pair of straight spanners for quartz glass members) positioned at an arbitrary inclination angle, the welding part and its neighboring part (moving area part of the spanner), the softening point of the quartz glass By heating close, the thermal strain generated by welding can be dispersed, and the occurrence of cracking of the welded quartz glass member is eliminated.
- an annealing treatment is carried out in an annealing furnace, but the annealing treatment heats the entire quartz glass member to near the softening point to distort it, so a plate with a large area is There is a disadvantage that the planarity is lost.
- this straight heating apparatus it is advantageous that a welded quartz glass member can be obtained with the same flatness as the mechanical accuracy set for the fixed support means 14 and the movable support means 22. There is.
- FIG. 2 is a flow chart showing an example of the order of steps of the method of welding quartz glass members according to the present invention
- FIG. 3 is a front schematic view showing an example of the procedure of the present invention
- FIG. 4 is the same procedure as FIG. It is an upper surface schematic diagram showing.
- a pair of quartz glass members A and B are vertically arranged at predetermined intervals (step 100 in FIG. 2, and (a) in FIG. 3 and FIG. 4). That is, one quartz glass member A is vertically supported by the fixed support means 14, and the other quartz glass member B is vertically supported by the movable support means 22. By moving the quartz glass member B supported by the movable support member 22, the quartz glass members A and B can be vertically arranged at predetermined intervals.
- the weld portions A and B of the quartz glass members A and B are uniformly heated and melted using the panner means 38 [step 102 in FIG. 2, and (b) in FIG. 3 and FIG. ].
- the quartz glass member B supported by the movable support member 22 By moving the quartz glass member B supported by the movable support member 22, the melted welding portions A and B are butted at a predetermined speed, butted and pressed together to form a raised state protruding to the outer peripheral surface It welds in the state which formed convex part C, welds quartz glass members A and B, and creates welding quartz glass member W [Step 104 of Drawing 2, (d) (e) of Drawing 3 and Drawing 4]. the above
- the weld quartz glass member W may be made by using a panner means 38, if necessary.
- the thermal strain is dispersed by heating and softening the weld part of the and its vicinity (step 106 in Figure 2). Then, cool this welded quartz glass W (step 1 in Figure 2)
- Step 112 The quartz glass member W obtained in this manner has bubbles in its welded portion.
- the chamfered portion of the end face will be hit by a panner flame at a 45 degree surface, and dissolution will be more enhanced compared to Type I.
- the efficiency of the spot or spot width of the panner flame is improved compared to the type I in the X-type, which affects the dissolution and increases the solubility of the end face of the quartz glass member. It has the advantage of being easy to operate.
- the width and height of the convex portion of the welded portion is greater than the width and height of the I-shaped quartz glass member. Can be enlarged.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Joining Of Glass To Other Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020067007754A KR101100845B1 (ko) | 2004-03-31 | 2005-02-04 | 석영유리부재의 용접방법 및 장치 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004-104884 | 2004-03-31 | ||
| JP2004104884A JP4486392B2 (ja) | 2004-03-31 | 2004-03-31 | 石英ガラス部材の溶接方法及び装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2005100272A1 true WO2005100272A1 (ja) | 2005-10-27 |
Family
ID=35149912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2005/001699 Ceased WO2005100272A1 (ja) | 2004-03-31 | 2005-02-04 | 石英ガラス部材の溶接方法及び装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4486392B2 (2) |
| KR (1) | KR101100845B1 (2) |
| TW (1) | TW200535108A (2) |
| WO (1) | WO2005100272A1 (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009242151A (ja) * | 2008-03-31 | 2009-10-22 | Covalent Materials Tokuyama Corp | 石英ガラス基板の製造方法 |
| CN116395945A (zh) * | 2023-04-14 | 2023-07-07 | 浙江泓芯半导体有限公司 | 一种用于石英熔接定位的控制系统 |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102659303A (zh) * | 2012-03-30 | 2012-09-12 | 湖州奥博石英科技有限公司 | 石英拼接产品的制造方法及产品 |
| KR101433668B1 (ko) * | 2012-09-10 | 2014-08-26 | (주) 디에스테크노 | 석영 유리 판재의 용접 방법 |
| CN106396355B (zh) * | 2016-08-31 | 2019-11-22 | 成都富通光通信技术有限公司 | 一种玻璃棒熔接方法 |
| US11739019B2 (en) | 2019-01-22 | 2023-08-29 | Heraeus Quartz North America Llc | High-strength welding process for making heavy glass preforms with large cross sectional areas |
| KR20200117770A (ko) | 2019-04-05 | 2020-10-14 | (주) 디에스테크노 | 페이스트가 사용되는 세라믹 글라스 접합 방법 |
| CN110127993A (zh) * | 2019-05-17 | 2019-08-16 | 湖州东科电子石英有限公司 | 不透明石英板与透明石英棒的焊接工艺 |
| KR20210016874A (ko) | 2019-08-05 | 2021-02-17 | (주) 디에스테크노 | 글라스 세라믹 판재의 용접 방법 |
| KR20210056707A (ko) | 2019-11-11 | 2021-05-20 | (주) 디에스테크노 | 글라스 세라믹 판재의 접합 방법 |
| CN112133658A (zh) * | 2020-09-29 | 2020-12-25 | 吴静立 | 一种石英舟的加工生产方法 |
| KR102559225B1 (ko) * | 2021-04-28 | 2023-07-25 | 대한광통신(주) | 유리 광학소재의 대형화를 위한 유리 벌크의 접합 방법 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355128A (ja) * | 1986-08-22 | 1988-03-09 | Nippon Electric Glass Co Ltd | 薄板ガラスの製造方法及び装置 |
| EP1201610A2 (de) * | 2000-10-24 | 2002-05-02 | Institut für Fügetechnik und Werkstoffprüfung GmbH | Verfahren und Vorrichtung zum thermischen Fügen von Bauteilen aus silikatischen Werkstoffen |
| JP2003026433A (ja) * | 2001-05-10 | 2003-01-29 | Tokuyama Toshiba Ceramics Co Ltd | 石英ガラス部材の接合方法及びこの方法に用いられる接合装置 |
-
2004
- 2004-03-31 JP JP2004104884A patent/JP4486392B2/ja not_active Expired - Lifetime
-
2005
- 2005-02-04 WO PCT/JP2005/001699 patent/WO2005100272A1/ja not_active Ceased
- 2005-02-04 KR KR1020067007754A patent/KR101100845B1/ko not_active Expired - Fee Related
- 2005-02-22 TW TW094105297A patent/TW200535108A/zh not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355128A (ja) * | 1986-08-22 | 1988-03-09 | Nippon Electric Glass Co Ltd | 薄板ガラスの製造方法及び装置 |
| EP1201610A2 (de) * | 2000-10-24 | 2002-05-02 | Institut für Fügetechnik und Werkstoffprüfung GmbH | Verfahren und Vorrichtung zum thermischen Fügen von Bauteilen aus silikatischen Werkstoffen |
| JP2003026433A (ja) * | 2001-05-10 | 2003-01-29 | Tokuyama Toshiba Ceramics Co Ltd | 石英ガラス部材の接合方法及びこの方法に用いられる接合装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009242151A (ja) * | 2008-03-31 | 2009-10-22 | Covalent Materials Tokuyama Corp | 石英ガラス基板の製造方法 |
| CN116395945A (zh) * | 2023-04-14 | 2023-07-07 | 浙江泓芯半导体有限公司 | 一种用于石英熔接定位的控制系统 |
| CN116395945B (zh) * | 2023-04-14 | 2023-12-08 | 浙江泓芯半导体有限公司 | 一种用于石英熔接定位的控制系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI349654B (2) | 2011-10-01 |
| KR20070027490A (ko) | 2007-03-09 |
| JP2005289696A (ja) | 2005-10-20 |
| TW200535108A (en) | 2005-11-01 |
| JP4486392B2 (ja) | 2010-06-23 |
| KR101100845B1 (ko) | 2012-01-02 |
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