WO2005104314A3 - Procede de fabrication de circuits electroniques et optoelectroniques - Google Patents

Procede de fabrication de circuits electroniques et optoelectroniques Download PDF

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Publication number
WO2005104314A3
WO2005104314A3 PCT/FR2005/000881 FR2005000881W WO2005104314A3 WO 2005104314 A3 WO2005104314 A3 WO 2005104314A3 FR 2005000881 W FR2005000881 W FR 2005000881W WO 2005104314 A3 WO2005104314 A3 WO 2005104314A3
Authority
WO
WIPO (PCT)
Prior art keywords
electronic component
electronic
production
heat sink
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2005/000881
Other languages
English (en)
Other versions
WO2005104314A2 (fr
Inventor
Jean-Charles Garcia
Regis Hamelin
Stephane Bernabe
Cyrille Rossat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intexys SA
Original Assignee
Intexys SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0403837A external-priority patent/FR2868877B1/fr
Priority claimed from FR0410464A external-priority patent/FR2876191B1/fr
Priority claimed from FR0413629A external-priority patent/FR2879759B1/fr
Priority claimed from FR0502461A external-priority patent/FR2883105A1/fr
Priority claimed from FR0503108A external-priority patent/FR2884047A1/fr
Application filed by Intexys SA filed Critical Intexys SA
Priority to EP05757050A priority Critical patent/EP1741136A2/fr
Priority to US11/578,304 priority patent/US20070278666A1/en
Publication of WO2005104314A2 publication Critical patent/WO2005104314A2/fr
Publication of WO2005104314A3 publication Critical patent/WO2005104314A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42—Arrays of surface emitting lasers
    • H01S5/423—Arrays of surface emitting lasers having a vertical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H10W40/226—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections characterised by projecting parts, e.g. fins to increase surface area
    • H10W40/228—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections characterised by projecting parts, e.g. fins to increase surface area the projecting parts being wire-shaped or pin-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/77—Auxiliary members characterised by their shape
    • H10W40/778—Auxiliary members characterised by their shape in encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/012—Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02251—Out-coupling of light using optical fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0233—Mounting configuration of laser chips
    • H01S5/0234—Up-side down mountings, e.g. Flip-chip, epi-side down mountings or junction down mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0235—Method for mounting laser chips
    • H01S5/02355—Fixing laser chips on mounts
    • H01S5/0237—Fixing laser chips on mounts by soldering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/681—Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/853—On the same surface
    • H10W72/856—Bump connectors and die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/877—Bump connectors and die-attach connectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Semiconductor Lasers (AREA)

Abstract

Selon l’invention, dans un assemblage comportant un composant électronique (108), ledit composant électronique est relié par des microbilles (107) à au moins un dissipateur thermique (106, 109), lesdites billes étant reliées à des lignes électriquement conductrices sur ledit composant électronique et à des lignes électriquement conductrices sur au moins un dissipateur thermique, lesdites billes véhiculant, d’une part, des signaux électriques entre le composant électronique et chaque dissipateur thermique portant lesdites lignes électriquement conductrices et, d’autre part, par conduction thermique, de la chaleur depuis le composant électronique vers chaque dissipateur thermique.
PCT/FR2005/000881 2004-04-13 2005-04-12 Procede de fabrication de circuits electroniques et optoelectroniques Ceased WO2005104314A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP05757050A EP1741136A2 (fr) 2004-04-13 2005-04-12 Procede de fabrication de circuits electroniques et optoelectroniques
US11/578,304 US20070278666A1 (en) 2004-04-13 2005-04-12 Method for Production of Electronic and Optoelectronic Circuits

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
FR0403837A FR2868877B1 (fr) 2004-04-13 2004-04-13 Composants lasers a comportement thermique ameliore et procede de fabrication
FR0403837 2004-04-13
FR0410464A FR2876191B1 (fr) 2004-10-05 2004-10-05 Procede et dispositif de couplage de composants optiques
FR0410464 2004-10-05
FR0413629 2004-12-21
FR0413629A FR2879759B1 (fr) 2004-12-21 2004-12-21 Dispositif optoelectronique et procede de fabrication dudit dispositif
FR0502461A FR2883105A1 (fr) 2005-03-14 2005-03-14 Dispositif optoelectronique et procede de fabrication dudit dispositif
FR0502461 2005-03-14
FR0503108 2005-03-31
FR0503108A FR2884047A1 (fr) 2005-03-31 2005-03-31 Procede et dispositif d'encapsulation de composants electroniques et optoelectroniques

Publications (2)

Publication Number Publication Date
WO2005104314A2 WO2005104314A2 (fr) 2005-11-03
WO2005104314A3 true WO2005104314A3 (fr) 2006-03-02

Family

ID=35414527

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2005/000881 Ceased WO2005104314A2 (fr) 2004-04-13 2005-04-12 Procede de fabrication de circuits electroniques et optoelectroniques

Country Status (3)

Country Link
US (1) US20070278666A1 (fr)
EP (1) EP1741136A2 (fr)
WO (1) WO2005104314A2 (fr)

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EP1515364B1 (fr) 2003-09-15 2016-04-13 Nuvotronics, LLC Boîtier de dispositif et leurs procédés de fabrication et de test
US9299634B2 (en) 2006-05-16 2016-03-29 Broadcom Corporation Method and apparatus for cooling semiconductor device hot blocks and large scale integrated circuit (IC) using integrated interposer for IC packages
US9013035B2 (en) 2006-06-20 2015-04-21 Broadcom Corporation Thermal improvement for hotspots on dies in integrated circuit packages
US7423341B2 (en) * 2006-08-16 2008-09-09 Agere Systems Inc. Plastic overmolded packages with mechanically decoupled lid attach attachment
EP1986028A3 (fr) * 2007-03-27 2008-11-05 Rohm and Haas Electronic Materials LLC Ensembles optiques et leurs procédés de formation
US20080303033A1 (en) * 2007-06-05 2008-12-11 Cree, Inc. Formation of nitride-based optoelectronic and electronic device structures on lattice-matched substrates
US20090041412A1 (en) * 2007-08-07 2009-02-12 Jeffrey Dean Danley Laser erosion processes for fiber optic ferrules
JP5277617B2 (ja) * 2007-11-26 2013-08-28 住友電気工業株式会社 光モジュール
CN102064465A (zh) * 2010-12-16 2011-05-18 刘兴胜 一种双向制冷式半导体激光器及其制备方法
JP5809866B2 (ja) * 2011-07-21 2015-11-11 オリンパス株式会社 光素子モジュール、光伝送モジュール、および光伝送モジュールの製造方法
WO2016021589A1 (fr) * 2014-08-08 2016-02-11 古河電気工業株式会社 Structure de faisceau de fibres optiques et structure de connexion de fibres optiques
CN104362507B (zh) * 2014-11-25 2017-07-14 中国科学院半导体研究所 一种双面散热量子级联激光器器件结构
WO2016189691A1 (fr) * 2015-05-27 2016-12-01 オリンパス株式会社 Endoscope et module de transmission optique
JP6667307B2 (ja) * 2016-02-04 2020-03-18 古河電気工業株式会社 光ファイバと半導体レーザとの光結合構造
US10197751B2 (en) 2016-03-17 2019-02-05 Applied Optoelectronics, Inc. Coaxial transmitter optical subassembly (TOSA) including ball lens
JP2018078148A (ja) * 2016-11-07 2018-05-17 株式会社東芝 光半導体モジュール
US10418777B2 (en) * 2017-05-10 2019-09-17 Applied Optoelectronics, Inc. Coaxial transmitter optical subassembly (TOSA) including side-by-side laser diode and monitor photodiode arrangement
JP6920898B2 (ja) * 2017-06-23 2021-08-18 日本ルメンタム株式会社 光モジュール、及び光伝送装置
US10319654B1 (en) 2017-12-01 2019-06-11 Cubic Corporation Integrated chip scale packages
US10901161B2 (en) 2018-09-14 2021-01-26 Toyota Motor Engineering & Manufacturing North America, Inc. Optical power transfer devices with an embedded active cooling chip
US10903618B2 (en) * 2019-03-20 2021-01-26 Chroma Ate Inc. Fixture assembly for testing edge-emitting laser diodes and testing apparatus having the same
KR102862766B1 (ko) * 2019-05-29 2025-09-22 삼성전자주식회사 마이크로 엘이디 디스플레이 및 이의 제작 방법
TWI700780B (zh) * 2019-08-30 2020-08-01 矽品精密工業股份有限公司 電子封裝件及其製法
CN113816332B (zh) * 2020-06-19 2024-07-19 华为技术有限公司 一种光芯片封装结构与封装方法
US20220291462A1 (en) * 2021-03-11 2022-09-15 Intel Corporation Method to couple light using integrated heat spreader
JP2023151188A (ja) * 2022-03-31 2023-10-16 古河電気工業株式会社 光モジュール

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JPS61184889A (ja) * 1985-02-12 1986-08-18 Toshiba Corp 半導体発光装置
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JPS61184889A (ja) * 1985-02-12 1986-08-18 Toshiba Corp 半導体発光装置
US5003357A (en) * 1987-05-30 1991-03-26 Samsung Semiconductor And Telecommunications Co. Semiconductor light emitting device
US5444300A (en) * 1991-08-09 1995-08-22 Sharp Kabushiki Kaisha Semiconductor apparatus with heat sink
EP0603928A1 (fr) * 1992-12-21 1994-06-29 Delco Electronics Corporation Circuit hybride
US6051871A (en) * 1998-06-30 2000-04-18 The Whitaker Corporation Heterojunction bipolar transistor having improved heat dissipation
US20030107114A1 (en) * 2001-10-09 2003-06-12 Lam Yee Loy Thermal circuitry
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Title
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Also Published As

Publication number Publication date
WO2005104314A2 (fr) 2005-11-03
US20070278666A1 (en) 2007-12-06
EP1741136A2 (fr) 2007-01-10

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