WO2009072242A1 - 薄膜形成装置および薄膜形成方法 - Google Patents

薄膜形成装置および薄膜形成方法 Download PDF

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Publication number
WO2009072242A1
WO2009072242A1 PCT/JP2008/003375 JP2008003375W WO2009072242A1 WO 2009072242 A1 WO2009072242 A1 WO 2009072242A1 JP 2008003375 W JP2008003375 W JP 2008003375W WO 2009072242 A1 WO2009072242 A1 WO 2009072242A1
Authority
WO
WIPO (PCT)
Prior art keywords
film forming
thin film
region
cooling
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/003375
Other languages
English (en)
French (fr)
Inventor
Yasuharu Shinokawa
Kazuyoshi Honda
Yuma Kamiyama
Masahiro Yamamoto
Tomofumi Yanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to JP2009505674A priority Critical patent/JP4355032B2/ja
Priority to KR1020107014719A priority patent/KR101226390B1/ko
Priority to CN2008801193235A priority patent/CN101889103B/zh
Priority to US12/745,391 priority patent/US20100272901A1/en
Publication of WO2009072242A1 publication Critical patent/WO2009072242A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

ガス冷却を用いた成膜方法において、十分な冷却効果を達成しながらも、ガス導入による成膜レートの低下や真空ポンプへの過大な負荷を回避する。本発明の薄膜形成装置は、薄膜形成領域１４において基板７の裏面に近接して配置された冷却体１０と、冷却体１０と基板７の裏面の間にガスを導入するガス導入手段と、基板７の裏面に接し、薄膜形成領域１４を、第１の薄膜形成領域１４ａと、成膜速度が第１の領域１４ａより低い第２の薄膜形成領域１４ｂとに分割し、かつ冷却体１０と基板７とのギャップを維持するギャップ維持手段１１とを備え、第１の領域１４ａでの冷却量が第２の領域１４ｂでの冷却量より大きくなるように冷却条件が設定されている。
PCT/JP2008/003375 2007-12-05 2008-11-19 薄膜形成装置および薄膜形成方法 Ceased WO2009072242A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009505674A JP4355032B2 (ja) 2007-12-05 2008-11-19 薄膜形成装置および薄膜形成方法
KR1020107014719A KR101226390B1 (ko) 2007-12-05 2008-11-19 박막 형성 장치 및 박막 형성 방법
CN2008801193235A CN101889103B (zh) 2007-12-05 2008-11-19 薄膜形成装置和薄膜形成方法
US12/745,391 US20100272901A1 (en) 2007-12-05 2008-11-19 Thin film forming apparatus and thin film forming method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-314300 2007-12-05
JP2007314300 2007-12-05

Publications (1)

Publication Number Publication Date
WO2009072242A1 true WO2009072242A1 (ja) 2009-06-11

Family

ID=40717426

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/003375 Ceased WO2009072242A1 (ja) 2007-12-05 2008-11-19 薄膜形成装置および薄膜形成方法

Country Status (5)

Country Link
US (1) US20100272901A1 (ja)
JP (1) JP4355032B2 (ja)
KR (1) KR101226390B1 (ja)
CN (1) CN101889103B (ja)
WO (1) WO2009072242A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010235968A (ja) * 2009-03-30 2010-10-21 Sumitomo Metal Mining Co Ltd 真空処理装置
WO2010122742A1 (ja) * 2009-04-22 2010-10-28 パナソニック株式会社 薄膜形成装置および薄膜形成方法
EP2339047A1 (de) * 2009-12-14 2011-06-29 FHR Anlagenbau GmbH Anordnung zum Temperieren von bandförmigen Substraten
JP2011127154A (ja) * 2009-12-16 2011-06-30 Panasonic Corp 蒸着装置
WO2012006045A3 (en) * 2010-07-08 2012-03-29 Aventa Technologies Llc Cooling apparatus for a web deposition system
JP2014031589A (ja) * 2013-11-07 2014-02-20 Panasonic Corp 蒸着方法
JP2017224644A (ja) * 2016-06-13 2017-12-21 株式会社アルバック 搬送装置
CN117107209A (zh) * 2023-10-18 2023-11-24 潍坊坤祥包装材料有限公司 一种用于薄膜镀银的自动化生产设备及加工工艺

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100300351A1 (en) * 2008-02-29 2010-12-02 Yasui Seiki Co., Ltd. Apparatus for production of composite material sheet
WO2010067603A1 (ja) * 2008-12-10 2010-06-17 パナソニック株式会社 薄膜の形成方法
US8697582B2 (en) * 2011-11-22 2014-04-15 Panasonic Corporation Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
KR101650755B1 (ko) * 2015-03-31 2016-08-24 주식회사 선익시스템 개시제를 이용하는 화학기상증착시스템
KR101650753B1 (ko) * 2015-03-30 2016-08-24 주식회사 선익시스템 플렉서블기판 화학기상증착시스템
KR101650761B1 (ko) * 2015-03-30 2016-08-24 주식회사 선익시스템 플렉서블기판 화학기상증착시스템
WO2016159460A1 (ko) * 2015-03-30 2016-10-06 주식회사 선익시스템 플렉서블기판 화학기상증착시스템
KR102511233B1 (ko) * 2016-03-17 2023-03-20 주성엔지니어링(주) 박막 처리장치
WO2020031778A1 (ja) * 2018-08-09 2020-02-13 東京エレクトロン株式会社 成膜装置及び成膜方法
CN110205601B (zh) * 2019-05-06 2021-01-19 铜陵市启动电子制造有限责任公司 一种薄膜电容器加工用金属薄膜蒸镀设备
DE102020119155A1 (de) 2020-07-21 2022-01-27 Voestalpine Stahl Gmbh Verfahren zum Abscheiden von metallischen Werkstoffen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150083A (ja) * 1983-02-15 1984-08-28 Fuji Photo Film Co Ltd 真空蒸着装置
JPH06145982A (ja) * 1992-11-06 1994-05-27 Matsushita Electric Ind Co Ltd 薄膜形成装置
JPH09316641A (ja) * 1996-05-24 1997-12-09 Matsushita Electric Ind Co Ltd 真空蒸着装置
JPH11176821A (ja) * 1997-12-08 1999-07-02 Toshiba Corp 成膜装置及び成膜方法
JP2006291308A (ja) * 2005-04-12 2006-10-26 Sumitomo Heavy Ind Ltd 成膜装置及び成膜方法

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JPS62120433A (ja) * 1985-11-20 1987-06-01 Mitsubishi Heavy Ind Ltd 帯状体の冷却ロ−ル
EP0311302B1 (en) * 1987-10-07 1992-06-24 THORN EMI plc Apparatus and method for the production of a coating on a web
JPH02190425A (ja) * 1989-01-13 1990-07-26 Sumitomo Metal Ind Ltd ロールによる鋼板冷却装置
US7025833B2 (en) * 2002-02-27 2006-04-11 Applied Process Technologies, Inc. Apparatus and method for web cooling in a vacuum coating chamber
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
US7244311B2 (en) * 2004-10-13 2007-07-17 Lam Research Corporation Heat transfer system for improved semiconductor processing uniformity
CN2898056Y (zh) * 2006-03-14 2007-05-09 北京实力源科技开发有限责任公司 一种卷绕镀膜机

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150083A (ja) * 1983-02-15 1984-08-28 Fuji Photo Film Co Ltd 真空蒸着装置
JPH06145982A (ja) * 1992-11-06 1994-05-27 Matsushita Electric Ind Co Ltd 薄膜形成装置
JPH09316641A (ja) * 1996-05-24 1997-12-09 Matsushita Electric Ind Co Ltd 真空蒸着装置
JPH11176821A (ja) * 1997-12-08 1999-07-02 Toshiba Corp 成膜装置及び成膜方法
JP2006291308A (ja) * 2005-04-12 2006-10-26 Sumitomo Heavy Ind Ltd 成膜装置及び成膜方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010235968A (ja) * 2009-03-30 2010-10-21 Sumitomo Metal Mining Co Ltd 真空処理装置
WO2010122742A1 (ja) * 2009-04-22 2010-10-28 パナソニック株式会社 薄膜形成装置および薄膜形成方法
JPWO2010122742A1 (ja) * 2009-04-22 2012-10-25 パナソニック株式会社 薄膜形成装置および薄膜形成方法
EP2339047A1 (de) * 2009-12-14 2011-06-29 FHR Anlagenbau GmbH Anordnung zum Temperieren von bandförmigen Substraten
JP2011127154A (ja) * 2009-12-16 2011-06-30 Panasonic Corp 蒸着装置
WO2012006045A3 (en) * 2010-07-08 2012-03-29 Aventa Technologies Llc Cooling apparatus for a web deposition system
US8225527B2 (en) 2010-07-08 2012-07-24 Aventa Technologies Llc Cooling apparatus for a web deposition system
JP2014031589A (ja) * 2013-11-07 2014-02-20 Panasonic Corp 蒸着方法
JP2017224644A (ja) * 2016-06-13 2017-12-21 株式会社アルバック 搬送装置
CN117107209A (zh) * 2023-10-18 2023-11-24 潍坊坤祥包装材料有限公司 一种用于薄膜镀银的自动化生产设备及加工工艺
CN117107209B (zh) * 2023-10-18 2024-02-27 潍坊坤祥包装材料有限公司 一种用于薄膜镀银的自动化生产设备及加工工艺

Also Published As

Publication number Publication date
US20100272901A1 (en) 2010-10-28
CN101889103B (zh) 2011-12-28
JPWO2009072242A1 (ja) 2011-04-21
KR20100094553A (ko) 2010-08-26
CN101889103A (zh) 2010-11-17
KR101226390B1 (ko) 2013-01-24
JP4355032B2 (ja) 2009-10-28

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