WO2010052060A2 - Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile - Google Patents

Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile Download PDF

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Publication number
WO2010052060A2
WO2010052060A2 PCT/EP2009/062161 EP2009062161W WO2010052060A2 WO 2010052060 A2 WO2010052060 A2 WO 2010052060A2 EP 2009062161 W EP2009062161 W EP 2009062161W WO 2010052060 A2 WO2010052060 A2 WO 2010052060A2
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
oil
intake
chamber
sealed vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/062161
Other languages
German (de)
English (en)
Other versions
WO2010052060A3 (fr
Inventor
Hans ROTTLÄNDER
Gerhard Voss
Michael HÖLZEMER
Jean Luc Abraham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to EP09783213A priority Critical patent/EP2342462A2/fr
Publication of WO2010052060A2 publication Critical patent/WO2010052060A2/fr
Publication of WO2010052060A3 publication Critical patent/WO2010052060A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Definitions

  • the invention relates to a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump such as a rotary valve or gate valve pump,
  • Oil-sealed vacuum pumps have pumping elements arranged in a pumping chamber, such as pistons or slides.
  • the seal of the pump elements with respect to the inner wall of the suction chamber is made by oil.
  • the suction space is connected to an intake passage and an exhaust passage.
  • the object of the invention is to provide a method for operating an oil-sealed vacuum pump and an oil-sealed vacuum pump, in which or in the penetration of oil vapor in one with the A ⁇ saugkanal connected area such as a vacuum chamber or the interior of a vacuum pump is significantly reduced.
  • the regulation takes place according to the invention in such a way that the suction TotaStik neither falls below a predetermined pressure range.
  • the intake total pressure prevailing in the intake passage is thus regulated by regulation of the intake total pressure Speed of the oil-sealed vacuum pump kept in a predetermined pressure range.
  • the intake total pressure is measured in the intake passage of the oil-sealed vacuum pump.
  • the rotational speed of this vacuum pump is controlled such that the speed of the vacuum pump is lowered when falling below a lower critical intake total pressure.
  • an upper critical total intake pressure increase the speed of the oil-sealed vacuum pump. Since a time delay may occur due to the inertia of the system, it is advantageous that the pressure limits defined by the lower and upper critical intake total pressures are within the predetermined pressure range.
  • the lower critical intake total pressure is thus higher than the lower limit defined by the pressure range.
  • the upper critical intake total pressure is lower than the upper limit defined by the pressure range. This ensures that the defined pressure range is not left despite the inertia of the system, so that the risk of the entry of oil vapor in the associated with the intake duct vacuum region is also reduced according to the invention in the border areas.
  • the pressure prevailing in the suction pressure region is preferably 5-10 "2 -. 0.5 mbar
  • the lower and upper critical suction Total pressure at which preferably takes place reducing the rotational speed of the oil-sealed vacuum pump is preferably within the predetermined pressure range, wherein the actual values of the lower critical intake total pressure and the upper critical intake total pressure depend on the inertia of the system.
  • the intake channel is cooled. This is preferably done by influx of the intake duct with ambient air, which may preferably also be cooled air.
  • ambient air which may preferably also be cooled air.
  • the cooling of the intake passage is an independent of the speed control invention.
  • the invention relates to an oil-sealed vacuum pump with pumping elements arranged in the pump chamber.
  • the o-sealed vacuum pump is a rotary valve or gate valve pump.
  • the intake duct is curved in the direction of flow directly in front of an intake opening of the pump chamber. Due to the curvature of the intake duct is the risk of leakage of oil particles from the pump chamber into the Ansaugkana! reduced. Due to the curvature of the intake channel, the oil particles in the exit direction of the oil particles shortly after passing through the inlet opening to an air cooled inner wall of the intake passage. On the inside of the intake passage of the oil vapor is cooled and the oil vapor pressure is significantly reduced so that a return flow of the oil vapor through the Ansaugkanai is avoided in a connected to the intake duct vacuum region, such as a vacuum chamber or a pump chamber of a connected pump.
  • a connected to the intake duct vacuum region such as a vacuum chamber or a pump chamber of a connected pump.
  • the curvature of the intake passage is selected such that a straight exit of a particle from the intake passage is avoided from each point of the inlet opening of the pumping chamber.
  • the curvature preferably has an angle of 45 °, whereby in the case of a partially annular configuration of the intake duct in the region of the curvature, this is thus Ve of a circular ring.
  • the curvature is at least 60 ° and more preferably at least 90 ° or 1 A circular ring.
  • the curvature preferably has a length of at least 80 mm, particularly preferably of at least 100 mm. It is particularly preferred that the Krürnrnungscardi of the intake takes place counter to the direction of rotation of the pump elements bearing rotor. This has the advantage that oil vapor particles pass to a large extent through the inlet opening due to an impulse exerted by the pump elements such as the slides on the particles.
  • the direction of the pulse is influenced by the direction of rotation of the rotor carrying the pumping elements, so that by a curvature of the intake channel in the opposite direction, the amount of in the with the Ansaugkana! connected vacuum region penetrating oil vapor can be further reduced.
  • the lowering of the oil vapor partial pressure is carried out by condensation of oil vapor in the intake passage.
  • Thedeetnraum may be, for example, a fan for air cooling, the cooling is preferably carried out by ambient air, which may optionally be cooled.
  • the cooling device on guide elements, such as baffles, baffles or the like, to direct the flow of air in the direction of the intake duct, in particular targeted toward critical areas of the intake duct.
  • guide elements such as baffles, baffles or the like.
  • a gas inlet is arranged in the intake passage.
  • An additional flow in the intake channel in the direction of the pump chamber of the oil-sealed vacuum pump can be generated via the gas inlet.
  • the risk of leakage of oil vapor is reduced.
  • the valve is connected to the gas inlet a controllable valve. At higher pressures, the valve is preferably completely closed. The lower the pressures, the more the valve is opened, so that a larger amount of additional gas flows into the intake passage. As a result, the SaugAusslee that occur by introducing an additional gas is reduced.
  • a gas inlet in the intake passage represents an independent of the curvature of the intake passage invention, wherein in a particularly preferred embodiment, the two inventions for further reducing the risk of ⁇ ldarnpf-outlet can be combined.
  • the oil-sealed vacuum pump for carrying out the method according to the invention has a total pressure sensor arranged in the intake duct.
  • a further pressure sensor is arranged in the vacuum region connected to the intake passage.
  • the drawing shows a schematic cross section of a preferred embodiment of a rotary vane pump according to the invention.
  • the schematically illustrated rotary vane pump has in a housing 10 an eccentrically mounted rotor 12.
  • the rotor 12 carries in slits 14 slide 16, which rest against the inner wall 18 of the pumping chamber 20.
  • the housing 10 of the oil-sealed rotary vane pump to an intake passage 22 is sucked through the medium in the direction of an arrow 24.
  • the suction channel 22 is connected to a vacuum chamber, not shown, or a suction chamber of a series-connected further vacuum pump.
  • the sucked through the A ⁇ saugkanal 22 medium is ejected via an ejection channel 26 due to the rotation of the rotor 12 in the direction of an arrow 28, as shown by the arrow 30.
  • a pump chamber 32 is formed within the housing 10. Since it is an oil-sealed rotary vane pump, the seal between the rotor 12 and the inner wall 18 and between the sliders 16 and the inner wall 18 of the pumping chamber 32 due to an oil film, the resulting oil vapor occurs here not only through the discharge channel 26, but can also against the suction direction 24 into the intake passage 22 pass. Optionally, the oil vapor from the intake passage 22 may penetrate into the vacuum region connected to the intake passage 22.
  • the intake duct 22 which in the illustrated embodiment is a curve around 90 °, which takes place counter to the direction of rotation 28 of the rotor 12. Due to the curvature of the Ansaugkanais 22 as shown by the dashed line 34, the risk of leakage of oil vapor particles is reduced because they meet even at unfavorable exit angles from an inlet opening 36 of the pumping chamber to an inner wall 38 of the curved Ansaugkanais 22.
  • an exemplary embodiment illustrated as fan 40 can be provided.
  • the cooling device 40 blows ambient air to an outside of the Ansaugkanafs 22.
  • At this cooling fins 42 may be provided to further improve the cooling.
  • guide elements 44 such as baffles or baffles to ensure a targeted flow against the outside of the intake duct.
  • a pressure sensor 46 is arranged in the intake passage 22.
  • the measurement of the total pressure in the intake channel 22 is effected by the pressure sensor 46.
  • the pressure sensor 46 is connected via a line 48 to a regulating / control device 50.
  • a control of the rotational speed of the rotor 12 of the vacuum pump takes place via a control line 52 connected to the control device 50.
  • the in particular electronic control / control device 50 can be connected to a further pressure sensor arranged in the vacuum region, so that a comparison of the pressure prevailing in the vacuum region, such as the vacuum chamber and the pressure prevailing in the suction channel 22, is directly possible. On the basis of the comparison, a control of the rotational speed of the rotor 12 can then take place.
  • a further measure according to the invention consists in providing a gas inlet 54 in the intake duct 22. Through this gas can be admitted into the intake duct, in particular in critical pressure ranges, in order to generate an additional flow.
  • the gas inlet is connected in a preferred embodiment with a controllable valve 56.
  • the valve 56 is preferably connected via a line 58 to the Regeh / control device 50.
  • the amount of gas flowing into the intake passage through the gas inlet 54 can thus be regulated in dependence on the measured pressure in the intake passage and / or the vacuum region.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Dans un procédé de fonctionnement d'une pompe à vide à joint d'huile, a lieu comme première étape une mesure de la pression totale d'aspiration régnant dans une canalisation d'aspiration (22) de la pompe à vide. Afin de réduire le risque de retour de vapeur d'huile dans une zone sous vide raccordée à la canalisation d'aspiration, la vitesse de rotation de la pompe à vide est régulée en fonction de la pression totale d'aspiration mesurée sur une plage de pressions prédéterminée. L'invention concerne en outre une pompe à vide à joint d'huile, la canalisation d'aspiration (22) de la pompe à vide, reliée à l'espace d'aspiration, étant recourbée immédiatement avant une ouverture d'admission (36).
PCT/EP2009/062161 2008-11-08 2009-09-21 Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile Ceased WO2010052060A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09783213A EP2342462A2 (fr) 2008-11-08 2009-09-21 Procede de fonctionnement d'une pompe a vide a joint d'huile et pompe a vide a joint d'huile

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008057548.8 2008-11-08
DE200810057548 DE102008057548A1 (de) 2008-11-08 2008-11-08 Verfahren zum Betreiben einer ölgedichteten Vakuumpumpe sowie ölgedichtete Vakuumpumpe

Publications (2)

Publication Number Publication Date
WO2010052060A2 true WO2010052060A2 (fr) 2010-05-14
WO2010052060A3 WO2010052060A3 (fr) 2010-07-29

Family

ID=42096522

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/062161 Ceased WO2010052060A2 (fr) 2008-11-08 2009-09-21 Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile

Country Status (3)

Country Link
EP (1) EP2342462A2 (fr)
DE (1) DE102008057548A1 (fr)
WO (1) WO2010052060A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108414406A (zh) * 2018-04-27 2018-08-17 华北电力大学 一种超临界视窗实验系统
US20230296096A1 (en) * 2019-12-19 2023-09-21 Leybold France S.A.S. Lubricant-sealed vacuum pump, lubricant filter and method
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB747344A (en) * 1952-02-29 1956-04-04 Edwards & Co London Ltd W Improvements in or relating to oil sealed rotary vacuum pumps
CH359237A (de) * 1958-05-07 1961-12-31 Balzers Hochvakuum Ein- oder mehrstufige Gasballastpumpe
CH419421A (de) * 1964-09-14 1966-08-31 Balzers Patent Beteilig Ag Drehschieberpumpe
AU5180279A (en) * 1978-10-27 1980-05-01 Dynavac Pty. Ltd. Vacuum pump inlet valve
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
CA2631001C (fr) * 2005-11-23 2011-06-21 Global Power Tech Inc. Moteur a combustion interne

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108414406A (zh) * 2018-04-27 2018-08-17 华北电力大学 一种超临界视窗实验系统
CN108414406B (zh) * 2018-04-27 2024-04-12 华北电力大学 一种超临界视窗实验系统
US20230296096A1 (en) * 2019-12-19 2023-09-21 Leybold France S.A.S. Lubricant-sealed vacuum pump, lubricant filter and method
US12196207B2 (en) * 2019-12-19 2025-01-14 Leybold France Sas Lubricant-sealed vacuum pump, lubricant filter and method
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Also Published As

Publication number Publication date
WO2010052060A3 (fr) 2010-07-29
EP2342462A2 (fr) 2011-07-13
DE102008057548A1 (de) 2010-05-12

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