WO2010052060A3 - Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile - Google Patents

Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile Download PDF

Info

Publication number
WO2010052060A3
WO2010052060A3 PCT/EP2009/062161 EP2009062161W WO2010052060A3 WO 2010052060 A3 WO2010052060 A3 WO 2010052060A3 EP 2009062161 W EP2009062161 W EP 2009062161W WO 2010052060 A3 WO2010052060 A3 WO 2010052060A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
oil
tight vacuum
operating
tight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/062161
Other languages
German (de)
English (en)
Other versions
WO2010052060A2 (fr
Inventor
Hans ROTTLÄNDER
Gerhard Voss
Michael HÖLZEMER
Jean Luc Abraham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to EP09783213A priority Critical patent/EP2342462A2/fr
Publication of WO2010052060A2 publication Critical patent/WO2010052060A2/fr
Publication of WO2010052060A3 publication Critical patent/WO2010052060A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Dans un procédé de fonctionnement d'une pompe à vide à joint d'huile, a lieu comme première étape une mesure de la pression totale d'aspiration régnant dans une canalisation d'aspiration (22) de la pompe à vide. Afin de réduire le risque de retour de vapeur d'huile dans une zone sous vide raccordée à la canalisation d'aspiration, la vitesse de rotation de la pompe à vide est régulée en fonction de la pression totale d'aspiration mesurée sur une plage de pressions prédéterminée. L'invention concerne en outre une pompe à vide à joint d'huile, la canalisation d'aspiration (22) de la pompe à vide, reliée à l'espace d'aspiration, étant recourbée immédiatement avant une ouverture d'admission (36).
PCT/EP2009/062161 2008-11-08 2009-09-21 Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile Ceased WO2010052060A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09783213A EP2342462A2 (fr) 2008-11-08 2009-09-21 Procede de fonctionnement d'une pompe a vide a joint d'huile et pompe a vide a joint d'huile

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008057548.8 2008-11-08
DE200810057548 DE102008057548A1 (de) 2008-11-08 2008-11-08 Verfahren zum Betreiben einer ölgedichteten Vakuumpumpe sowie ölgedichtete Vakuumpumpe

Publications (2)

Publication Number Publication Date
WO2010052060A2 WO2010052060A2 (fr) 2010-05-14
WO2010052060A3 true WO2010052060A3 (fr) 2010-07-29

Family

ID=42096522

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/062161 Ceased WO2010052060A2 (fr) 2008-11-08 2009-09-21 Procédé de fonctionnement d'une pompe à vide à joint d'huile et pompe à vide à joint d'huile

Country Status (3)

Country Link
EP (1) EP2342462A2 (fr)
DE (1) DE102008057548A1 (fr)
WO (1) WO2010052060A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108414406B (zh) * 2018-04-27 2024-04-12 华北电力大学 一种超临界视窗实验系统
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP1813818A2 (fr) * 1999-11-17 2007-08-01 Teijin Seiki Co., Ltd. Appareil d'évacuation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB747344A (en) * 1952-02-29 1956-04-04 Edwards & Co London Ltd W Improvements in or relating to oil sealed rotary vacuum pumps
CH359237A (de) * 1958-05-07 1961-12-31 Balzers Hochvakuum Ein- oder mehrstufige Gasballastpumpe
CH419421A (de) * 1964-09-14 1966-08-31 Balzers Patent Beteilig Ag Drehschieberpumpe
AU5180279A (en) * 1978-10-27 1980-05-01 Dynavac Pty. Ltd. Vacuum pump inlet valve
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
CA2631001C (fr) * 2005-11-23 2011-06-21 Global Power Tech Inc. Moteur a combustion interne

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP1813818A2 (fr) * 1999-11-17 2007-08-01 Teijin Seiki Co., Ltd. Appareil d'évacuation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2342462A2 *

Also Published As

Publication number Publication date
WO2010052060A2 (fr) 2010-05-14
EP2342462A2 (fr) 2011-07-13
DE102008057548A1 (de) 2010-05-12

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