WO2010070103A1 - Procede de fabrication collective de modules electroniques pour montage en surface - Google Patents
Procede de fabrication collective de modules electroniques pour montage en surface Download PDFInfo
- Publication number
- WO2010070103A1 WO2010070103A1 PCT/EP2009/067530 EP2009067530W WO2010070103A1 WO 2010070103 A1 WO2010070103 A1 WO 2010070103A1 EP 2009067530 W EP2009067530 W EP 2009067530W WO 2010070103 A1 WO2010070103 A1 WO 2010070103A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- outlets
- metal
- components
- alloy
- upper face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
- H05K1/185—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1461—Applying or finishing the circuit pattern after another process, e.g. after filling of vias with conductive paste, after making printed resistors
- H05K2203/1469—Circuit made after mounting or encapsulation of the components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7438—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support with parts of the auxiliary support remaining in the finished device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07231—Techniques
- H10W72/07232—Compression bonding, e.g. thermocompression bonding
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07231—Techniques
- H10W72/07236—Soldering or alloying
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/251—Materials
- H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
- H10W72/325—Die-attach connectors having a filler embedded in a matrix
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/941—Dispositions of bond pads
- H10W72/9413—Dispositions of bond pads on encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49146—Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
Definitions
- the field of the invention is that of the collective manufacture of two-dimensional electronic modules for surface mounting also called electronic modules CMS.
- An electronic module comprises a set of electronic components connected to a printed circuit also called PCB acronym for the English expression Printed Circuit Board. These electronic components are:
- MEMS Micro ElectroMechanical Systems
- housings are known from the prior art: the so-called clamshell boxes 24, and the so-called ball bearings 23, or BGA boxes (according to the abbreviation of the English expression "Bail Grid Array”). These housings are intended for surface mounting on a support. In some cases, these electronic components are connected by solder, the solder being generally made of a metal alloy tin-lead type or tin-silver-copper for example. However for some applications, mainly high temperature (oil services, car engines, aircraft, etc.), solder is not suitable. Indeed, the metallurgy of these alloys reveals layers of intermetallic. The growth of these intermetallics is activated by the temperature (law of arrhismeus). Mechanisms for accelerated aging of solders appear, leading to their destruction (due for example to grain enlargement, intermetallic diffusion, formation of fragile intermetallic compounds, etc.).
- these electronic components are connected to an interconnection circuit without soldering.
- An example of such an interconnection method is described in patent FR 03 15034. It includes the assembly of components on a support, the external outputs of the components facing the support. This support may be a temporary support intended to be removed.
- the method then comprises the deposition of a layer of resin on the upper face of the support, for molding the components and ensuring their mechanical maintenance, the assembly thus formed forming a wafer which can comprise a large number of components arranged according to a given number of identical patterns, thus allowing a collective process.
- the method then comprises surfacing the wafer making it possible to show, on a substantially flat connection surface, the external outputs of the components.
- the manufacture of the wafer 2 'and a PCB circuit 1 is decoupled. They are then connected to each other by means of a silver-based epoxy adhesive.
- a silver-based epoxy adhesive it is known that the bonding of "tinned" components such as the external outlets 26 gives rise to oxidations in moist heat which can lead to an insulating interface between the external outlet 26 (tab, ball, etc.) based on tin and glue 10 to silver.
- the subject of the invention is a method for collective fabrication of SMD electronic modules from a metallized output wafer comprising, on a first face, electronic components molded in resin and on the opposite face, the external outputs of the components.
- electronics on which is deposited a metal or a non-oxidizable alloy, and a printed circuit provided with pads metal or alloy not oxidizable It is mainly characterized in that it comprises the following steps of:
- reconfigured molded components which comprise at least one electronic component, - assembly of the reconfigured components on the printed circuit, the metallized external outputs of the reconfigured components being arranged vis-à-vis the pads of the printed circuit and,
- This method offers the possibility of repairing the reconfigured defective components, the reconfigured components being obtained from a slab.
- the wafer with metallized outputs can be obtained collectively in different ways.
- deposition of the metal or the alloy that is little or not oxidizable on these outlets by masking or deposition of the metal or alloy on this plane surface and removal of the metal or alloy outside the external outlets by chemical etching or by laser or sandblasting.
- this last deposit step is replaced by the following steps:
- FIG. 1 schematically represents a wafer connected to a PCB circuit. according to the state of the art
- FIG. 2 diagrammatically represents reconfigured components connected to a PCB circuit according to the invention
- FIGS. 3 schematically illustrate a first embodiment of a wafer with metallized external outlets
- FIGS. 4 schematically illustrate a second embodiment of a wafer with metallized external outlets
- FIGS. 5 schematically illustrate a third embodiment of a wafer with metallized external outlets
- FIGS. 6 schematically illustrate a fourth embodiment of a wafer with external outlets. metallized. From one figure to another, the same elements are identified by the same references.
- the electronic modules are made from a circuit PCB 1 with metallized pads 1 1 and a pancake 2 'with external metalized outlets shown in FIG.
- the wafer 2 'comprises foot boxes 24 and / or ball housings 23 and / or passive components 22 and / or MEMS, referred to as electronic components, molded in resin 28; on one face of the wafer appear the outer outlets 26 of these components on which is deposited a metal or a little or no oxidizable alloy 21 such as gold or a layer of gold on a nickel layer.
- the circuit PCB 1 generally comprises several layers (or levels) of routing tracks stacked on each other, the links between the tracks of the different layers being provided by metallized vias.
- the upper layer for receiving the electronic components further comprises pads for connection to the external outputs of the components. As for external outputs, these pads are covered with a metal or alloy little or not oxidizable such as gold or a layer of gold on a nickel layer.
- Connecting elements 10 glue or conductive ink for example) are deposited on the metallized pads 1 1 in anticipation of their connection to the external metallized outlets.
- the metallized outer outlet slab 2 is cut into several parts designated reconfigured units 30 or more, depending on whether they comprise one or more electronic components 22, 23, 24.
- These reconfigured components 30 which are molded components metallized external outlets, are then assembled on the PCB circuit 1 and connected by gluing, for example as illustrated in FIG. 2.
- An electronic module CMS was then obtained capable of producing a complete electronic function of which the possible reconfigured defective components can be repaired: it is sufficient remove the failed reconfigured component for repair.
- connection without solder is obtained by gluing from a heat-curable epoxy glue based on silver, polymerized or more precisely cross-linked, or thermoplastic based on non-oxidizable metal particles. It can also be obtained by sintering a nano-silver ink. Sintering is the consolidation of a material, obtained by supply of energy, without going to the fusion. In this case, the material is this ink which comprises silver nanoparticles. Under the effect of this energy, the nanoparticles are welded between they thus form a mechanical and electrical connection. In this case, the ink is deposited on the pads of the PCB circuit.
- plastic housing a housing contains an electronic chip in general
- reconfigured that is to say having gold studs and can be glued on a standard circuit board
- Bonding by means of an adhesive or an electrically conductive ink makes it possible to electrically bond these reconfigured housings to the printed circuit at a low temperature (around 100 ° C.).
- the wafer 2 'metallized external outlets can be obtained in different ways.
- the production of the wafer 2 comprises the following steps:
- the production of the wafer 2 comprises the following steps:
- the embodiment of the wafer 2 comprises the following steps:
- the production of the wafer 2 comprises the following steps: assembly of the electronic components on the face of a temporary support such as the adhesive face of a sticky skin called the upper face as illustrated in FIG. 3a,
- the embodiment of the wafer 2 comprises the same steps as those described for the fourth embodiment, the last step of depositing the metal being replaced by the following steps:
- the photoresist layer that is to say photogravable resin is then dissolved as well as the nurse layer.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011541475A JP6388427B2 (ja) | 2008-12-19 | 2009-12-18 | 表面実装用電子モジュールのウェハスケール製造の方法 |
| US13/140,637 US8359740B2 (en) | 2008-12-19 | 2009-12-18 | Process for the wafer-scale fabrication of electronic modules for surface mounting |
| EP09797035.4A EP2368262B1 (fr) | 2008-12-19 | 2009-12-18 | Procede de fabrication collective de modules electroniques pour montage en surface |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR08/07208 | 2008-12-19 | ||
| FR0807208A FR2940521B1 (fr) | 2008-12-19 | 2008-12-19 | Procede de fabrication collective de modules electroniques pour montage en surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2010070103A1 true WO2010070103A1 (fr) | 2010-06-24 |
Family
ID=40652703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2009/067530 Ceased WO2010070103A1 (fr) | 2008-12-19 | 2009-12-18 | Procede de fabrication collective de modules electroniques pour montage en surface |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8359740B2 (fr) |
| EP (1) | EP2368262B1 (fr) |
| JP (1) | JP6388427B2 (fr) |
| FR (1) | FR2940521B1 (fr) |
| WO (1) | WO2010070103A1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2923081B1 (fr) * | 2007-10-26 | 2009-12-11 | 3D Plus | Procede d'interconnexion verticale de modules electroniques 3d par des vias. |
| FR2940521B1 (fr) | 2008-12-19 | 2011-11-11 | 3D Plus | Procede de fabrication collective de modules electroniques pour montage en surface |
| FR2943176B1 (fr) | 2009-03-10 | 2011-08-05 | 3D Plus | Procede de positionnement des puces lors de la fabrication d'une plaque reconstituee |
| CN104900623B (zh) * | 2014-03-06 | 2018-11-30 | 恩智浦美国有限公司 | 露出管芯的功率半导体装置 |
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- 2009-12-18 EP EP09797035.4A patent/EP2368262B1/fr active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| FR2940521B1 (fr) | 2011-11-11 |
| JP6388427B2 (ja) | 2018-09-12 |
| US20110247210A1 (en) | 2011-10-13 |
| EP2368262A1 (fr) | 2011-09-28 |
| FR2940521A1 (fr) | 2010-06-25 |
| US8359740B2 (en) | 2013-01-29 |
| JP2012513109A (ja) | 2012-06-07 |
| EP2368262B1 (fr) | 2017-03-08 |
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