WO2010146883A1 - オキシムエステル化合物、ラジカル重合開始剤、重合性組成物、ネガ型レジストおよび画像パターン - Google Patents
オキシムエステル化合物、ラジカル重合開始剤、重合性組成物、ネガ型レジストおよび画像パターン Download PDFInfo
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- WO2010146883A1 WO2010146883A1 PCT/JP2010/051063 JP2010051063W WO2010146883A1 WO 2010146883 A1 WO2010146883 A1 WO 2010146883A1 JP 2010051063 W JP2010051063 W JP 2010051063W WO 2010146883 A1 WO2010146883 A1 WO 2010146883A1
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- 0 C*C1=*CC(*c(cc2)ccc2N=NI)=*C(*)=*1 Chemical compound C*C1=*CC(*c(cc2)ccc2N=NI)=*C(*)=*1 0.000 description 2
- DOUQBLSZJACQSR-AHXMGWLVSA-N C/C(/C(c(cc1c2cc(C(/C(/c3ccccc3)=N\O)=O)ccc22)ccc1[n]2-c(cc1)ccc1C(c1ccccc1)=O)=O)=N\O Chemical compound C/C(/C(c(cc1c2cc(C(/C(/c3ccccc3)=N\O)=O)ccc22)ccc1[n]2-c(cc1)ccc1C(c1ccccc1)=O)=O)=N\O DOUQBLSZJACQSR-AHXMGWLVSA-N 0.000 description 1
- KJSNOFPZUYIIKD-UHFFFAOYSA-N CC(CC1)OC2C1OCCC2 Chemical compound CC(CC1)OC2C1OCCC2 KJSNOFPZUYIIKD-UHFFFAOYSA-N 0.000 description 1
- MFMCSVWGKYVPTA-UHFFFAOYSA-N CC1CC2OCCOC2C1 Chemical compound CC1CC2OCCOC2C1 MFMCSVWGKYVPTA-UHFFFAOYSA-N 0.000 description 1
- QJQAWQSNMXLUDF-UHFFFAOYSA-N CC1COCOC1 Chemical compound CC1COCOC1 QJQAWQSNMXLUDF-UHFFFAOYSA-N 0.000 description 1
- HPRNIEWOTKTXCI-UHFFFAOYSA-N CC1OCC2(COCOC2)CO1 Chemical compound CC1OCC2(COCOC2)CO1 HPRNIEWOTKTXCI-UHFFFAOYSA-N 0.000 description 1
- HDGHQFQMWUTHKL-UHFFFAOYSA-N CC1OCCCO1 Chemical compound CC1OCCCO1 HDGHQFQMWUTHKL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D209/56—Ring systems containing three or more rings
- C07D209/80—[b, c]- or [b, d]-condensed
- C07D209/82—Carbazoles; Hydrogenated carbazoles
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D209/56—Ring systems containing three or more rings
- C07D209/80—[b, c]- or [b, d]-condensed
- C07D209/82—Carbazoles; Hydrogenated carbazoles
- C07D209/86—Carbazoles; Hydrogenated carbazoles with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the ring system
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
Definitions
- the present invention relates to an oxime ester compound, a radical polymerization initiator comprising the same, a polymerizable composition using the same, a negative resist using the same, and an image pattern forming method using the same. Furthermore, molding resin, casting resin, stereolithography resin, sealant, dental polymerization resin, printing ink, paint, printing plate photosensitive resin, printing color proof, color filter resist, black matrix resist, Photo spacer for liquid crystal, screen material for rear projection, optical fiber, rib material for plasma display, dry film resist, resist for printed circuit board, solder resist, photoresist for semiconductor, resist for microelectronics, resist for manufacturing micromachine parts, for etching Resist, microlens array, insulating material, hologram material, optical switch, waveguide material, overcoat agent, powder coating, adhesive, adhesive, release agent, optical recording medium, adhesive, release coating agent, For microcapsules Compositions for image recording material, for various devices.
- Non-Patent Document 1 Patent Documents 1 and 2.
- ⁇ -ketoxime ester compounds have been disclosed as photo radical polymerization initiators for positive or negative photosensitive polyimide precursor compositions (see Patent Document 3).
- certain ⁇ , ⁇ '-diketooxime ester compounds have been disclosed (see Patent Documents 4 to 8).
- certain o-acyl oxime ester compounds have been disclosed (see Patent Documents 9 to 13).
- high sensitivity of polymerization initiators has been universally demanded in order to improve productivity and various newly proposed processes.
- active research has resulted in remarkable progress, but there is still a need for improved productivity by further increasing sensitivity.
- a photoresist method using a photosensitive resin has been used in various fields.
- a photosensitive resin layer is formed on a substrate surface on which a desired image is to be provided by coating or transfer from another base material, and then an original image is formed on the photosensitive resin layer.
- a method of forming an image corresponding to the original image by removing an unexposed portion by a developing treatment with a solvent or an aqueous alkaline solution after exposure by irradiating with an energy ray is generally used.
- a certain type of negative resist is disclosed as a material for forming a display panel spacer (see Patent Documents 14 to 16).
- certain negative resists are disclosed as materials for manufacturing electrical and electronic parts and printed circuit boards (see Patent Documents 17 to 19).
- a resist composition using a certain kind of O-acyl oxime ester as a radical polymerization initiator is known as a more sensitive resist composition, and a certain kind of material for forming a spacer for a display panel is known.
- Negative resist is disclosed (see Patent Document 20).
- a certain type of negative resist is disclosed as a material for manufacturing electrical / electronic components and printed circuit boards (see Patent Document 21). All of these can function as resist compositions, but in recent years, higher and higher functions and new functions have been required for resist compositions to improve productivity and support various newly proposed processes. . In particular, a resist composition with higher sensitivity has been required, and development of various resist compositions has been actively promoted.
- An object of the present invention is to provide a novel oxime ester compound capable of efficiently generating active radicals by irradiation of energy rays, particularly light, and functioning as a highly sensitive radical polymerization initiator capable of polymerizing a radical polymerizable compound in a short time, and The object is to provide a curable composition using the same.
- a further object of the present invention is that the curing speed is extremely high, and it can be suitably used for very clear pattern exposure or direct drawing by an energy beam, and has excellent adhesion to a substrate, in particular.
- An object of the present invention is to provide a negative resist material having alkali developability suitably used for a photoresist material and an image pattern forming method using the negative resist.
- one embodiment of the present invention relates to a compound represented by the following general formula (1).
- R 1 represents a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aryloxy group, Substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted Arylsulfinyl group, substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl group, substituted or unsubstituted acyl group, substituted
- R 2 represents a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aryloxy group, substituted or unsubstituted A heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, a substituted or unsubstituted alkylsulfanyl group, a substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted alkylsulfinyl group, a substituted or unsubstituted arylsulfinyl group Represents a substituted or unsubstituted alkylsulfonyl group, a substituted or unsubstituted arylsulfonyl group, a substitute
- R 3 to R 5 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or Unsubstituted aryl group, substituted or unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl Represents a group, a substituted or unsubstituted acyl group, or a substituted or unsubstituted amino group.
- R 6 to R 9 are each independently a hydrogen atom, halogen atom, cyano group, haloalkyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or unsubstituted aryl group, substituted or Unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl Group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl group,
- R 10 to R 14 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, haloalkyl group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted alkyl A sulfonyl group, a substituted or unsubstituted arylsulfonyl group, or a substituted or unsubstituted acyl group is represented, but all of R 10 to R 14 do not become hydrogen atoms at the same time. )
- Another embodiment of the present invention relates to the above compound, wherein at least one of R 10 to R 14 is a nitro group or a substituted or unsubstituted acyl group.
- R 10 to R 14 is a nitro group or the following general formula (3).
- General formula (3) (Wherein R 15 to R 19 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, haloalkyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or unsubstituted A substituted aryl group, a substituted or unsubstituted aryloxy group, a substituted or unsubstituted heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkylsulfanyl group, Represents a substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted acyl
- Another embodiment of the present invention relates to the above compound, wherein R 12 is a nitro group or the above general formula (3).
- one embodiment of the present invention relates to a radical polymerization initiator (A) comprising the above compound.
- one embodiment of the present invention relates to a polymerizable composition
- a polymerizable composition comprising the radical polymerization initiator (A) and the radical polymerizable compound (B).
- one embodiment of the present invention relates to the polymerizable composition further comprising a sensitizer (C).
- one embodiment of the present invention relates to the polymerizable composition further comprising a coloring component (D).
- one embodiment of the present invention relates to the polymerizable composition further comprising an alkali-soluble resin (E).
- one embodiment of the present invention relates to a negative resist further comprising the polymerizable composition.
- one embodiment of the present invention further relates to a method for producing a polymer, wherein the polymerizable composition is polymerized by irradiation with energy rays.
- the negative resist is further laminated on a base material, partially irradiated with energy rays and polymerized, and an unirradiated portion is removed with an alkali developer.
- the present invention relates to a pattern forming method.
- One embodiment of the present invention further relates to an image pattern formed by the image pattern forming method.
- the content of the disclosure of the present application relates to the subject matter of Japanese Patent Application No. 2009-143790 filed on Jun. 17, 2009, which is incorporated herein by reference in its entirety.
- the compound of the present invention is an ⁇ -ketoxime ester compound characterized in that an electron-withdrawing substituent is substituted on the phenyl group of the N-phenylcarbazole skeleton, and is active by irradiation with energy rays, particularly light. Efficient radical generation. Therefore, a compound having a remarkably good effect as a radical polymerization initiator can be provided. Moreover, the polymeric composition with a favorable characteristic can be provided by using the compound of this invention as a radical polymerization initiator (A).
- A radical polymerization initiator
- the polymerizable composition of the present invention can be suitably used for very clear pattern exposure or direct drawing, and has excellent adhesion to a substrate. Therefore, it is possible to provide a highly sensitive negative resist suitably used for a photoresist material and an image pattern forming method using the negative resist.
- the compound of the present invention is characterized in that an electron-withdrawing substituent is substituted on the phenyl group of the N-phenylcarbazole skeleton as represented by the general formula (1).
- the compound of the present invention decomposes very efficiently without using a sensitizer in combination with light irradiation in the wavelength region.
- the composition of the present invention can function as a highly sensitive material that efficiently generates a large amount of radicals.
- R 1 represents a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aryloxy group, Substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted Arylsulfinyl group, substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl group, substituted or unsubstituted acyl group,
- a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted group, and the like are preferred, and a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, or a substituted or unsubstituted heterocyclic group is more preferred.
- Examples of the substituted or unsubstituted alkenyl group for R 1 include linear, branched, monocyclic or condensed polycyclic alkenyl groups having 1 to 18 carbon atoms. They may have a plurality of carbon-carbon double bonds in the structure.
- Specific examples include vinyl group, 1-propenyl group, allyl group, 2-butenyl group, 3-butenyl group, isopropenyl group, isobutenyl group, 1-pentenyl group, 2-pentenyl group, 3-pentenyl group, 4- Pentenyl group, 1-hexenyl group, 2-hexenyl group, 3-hexenyl group, 4-hexenyl group, 5-hexenyl group, cyclopentenyl group, cyclohexenyl group, 1,3-butadienyl group, cyclohexadienyl group, cyclopenta Although a dienyl group etc. can be mentioned, it is not limited to these.
- the substituted or unsubstituted alkyl group for R 1 is a linear, branched, monocyclic or condensed polycyclic alkyl group having 1 to 18 carbon atoms, or 2 to 18 carbon atoms, and optionally one or more.
- Examples thereof include a linear, branched, monocyclic or condensed polycyclic alkyl group containing an ether bond (—O—).
- Specific examples of the linear, branched, monocyclic or condensed polycyclic alkyl group having 1 to 18 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group.
- linear or branched alkyl group having 2 to 18 carbon atoms and optionally including one or more ether bonds include —CH 2 —O—CH 3 , —CH 2 —CH 2 —. O—CH 2 —CH 3 , —CH 2 —CH 2 —CH 2 —O—CH 2 —CH 3 , — (CH 2 —CH 2 —O) n —CH 3 (where n is 1 to 8) ), — (CH 2 —CH 2 —CH 2 —O) m —CH 3 (where m is 1 to 5), —CH 2 —CH (CH 3 ) —O—CH 2 —CH 3 —, Examples include —CH 2 —CH— (OCH 3 ) 2, but are not limited thereto.
- monocyclic or condensed polycyclic alkyl group having 2 to 18 carbon atoms and optionally including one or more ether bonds include the following, but are not limited thereto. Absent.
- the substituted or unsubstituted alkyloxy group in R 1 is a linear, branched, monocyclic or condensed polycyclic alkyloxy group having 1 to 18 carbon atoms, or 2 to 18 carbon atoms and optionally 1 Examples thereof include linear, branched, monocyclic or condensed polycyclic alkyloxy groups containing at least one ether bond.
- linear, branched, monocyclic or condensed polycyclic alkyloxy group having 1 to 18 carbon atoms include methyloxy group, ethyloxy group, propyloxy group, butyloxy group, pentyloxy group, hexyloxy Group, heptyloxy group, octyloxy group, nonyloxy group, decyloxy group, dodecyloxy group, octadecyloxy group, isopropyloxy group, isobutyloxy group, isopentyloxy group, sec-butyloxy group, tert-butyloxy group, sec-pentyl group Oxy group, tert-pentyloxy group, tert-octyloxy group, neopentyloxy group, cyclopropyloxy group, cyclobutyloxy group, cyclopentyloxy group, cyclohexyloxy group, adamantyloxy group
- linear or branched alkyloxy group having 2 to 18 carbon atoms and optionally including one or more ether bonds include —O—CH 2 —O—CH 3 , —O—CH. 2 —CH 2 —O—CH 2 —CH 3 , —O—CH 2 —CH 2 —CH 2 —O—CH 2 —CH 3 , —O— (CH 2 —CH 2 —O) n —CH 3 (where n is 1 to 8), —O— (CH 2 —CH 2 —CH 2 —O) m —CH 3 (where m is 1 to 5), —O—CH 2 —CH ( CH 3) -O-CH 2 -CH 3 -, - OCH 2 -CH- (OCH 3) can be cited 2, etc., but is not limited thereto.
- monocyclic or condensed polycyclic alkyloxy group having 2 to 18 carbon atoms and optionally including one or more ether bonds include, but are not limited to, the following: is not.
- Examples of the substituted or unsubstituted aryl group for R 1 include monocyclic or condensed polycyclic aryl groups having 6 to 24 carbon atoms. Specific examples include phenyl group, 1-naphthyl group, 2-naphthyl group, 1-anthryl group, 9-anthryl group, 2-phenanthryl group, 3-phenanthryl group, 9-phenanthryl group, 1-pyrenyl group, 5- Naphthacenyl group, 1-indenyl group, 2-azurenyl group, 1-acenaphthyl group, 2-fluorenyl group, 9-fluorenyl group, 3-perylenyl group, o-tolyl group, m-tolyl group, p-tolyl group, 2, 3-xylyl group, 2,5-xylyl group, mesityl group, p-cumenyl group, p-dodecylphenyl group, p-cyclohexy
- Examples of the substituted or unsubstituted aryloxy group for R 1 include a monocyclic or condensed polycyclic aryloxy group having 4 to 18 carbon atoms. Specific examples include phenoxy, 1-naphthyloxy, 2-naphthyloxy, 9-anthryloxy, 9-phenanthryloxy, 1-pyrenyloxy, 5-naphthacenyloxy, 1-indenyl. Examples thereof include, but are not limited to, an oxy group, a 2-azurenyloxy group, a 1-acenaphthyloxy group, and a 9-fluorenyloxy group.
- Examples of the substituted or unsubstituted heterocyclic group for R 1 include aromatic or aliphatic heterocyclic groups having 4 to 24 carbon atoms, including a nitrogen atom, an oxygen atom, a sulfur atom, and a phosphorus atom.
- 2-thienyl group 2-benzothienyl group, naphtho [2,3-b] thienyl group, 3-thiantenyl group, 2-thianthrenyl group, 2-furyl group, 2-benzofuryl group, pyranyl group, Isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxathiinyl group, 2H-pyrrolyl group, pyrrolyl group, imidazolyl group, pyrazolyl group, pyridyl group, pyrazinyl group, pyrimidinyl group, pyridazinyl group, indolizinyl group, isoindolyl group, 3H-indolyl group, 2-indolyl group, 3-indolyl group, 1H-indazolyl group, purinyl group, 4H-quinolidinyl group, isoquinolyl group, quinolyl group, phthala
- Examples of the substituted or unsubstituted heterocyclic oxy group in R 1 include a monocyclic or condensed polycyclic heterocyclic oxy group having 4 to 18 carbon atoms, including a nitrogen atom, an oxygen atom, a sulfur atom, and a phosphorus atom.
- Specific examples include 2-furanyloxy group, 2-thienyloxy group, 2-indolyloxy group, 3-indolyloxy group, 2-benzofuryloxy group, 2-benzothienyloxy group, 2-carbazolyloxy group.
- Examples of the substituted or unsubstituted alkylsulfanyl group in R 1 include a linear, branched, monocyclic or condensed polycyclic alkylthio group having 1 to 18 carbon atoms. Specific examples include, but are not limited to, methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, decylthio group, dodecylthio group, octadecylthio group and the like.
- Examples of the substituted or unsubstituted arylsulfanyl group for R 1 include a monocyclic or condensed polycyclic arylthio group having 6 to 18 carbon atoms. Specific examples include, but are not limited to, phenylthio group, 1-naphthylthio group, 2-naphthylthio group, 9-anthrylthio group, 9-phenanthrylthio group and the like.
- the substituted or unsubstituted alkylsulfinyl group for R 1 is preferably an alkylsulfinyl group having 1 to 20 carbon atoms. Specific examples include methylsulfinyl group, ethylsulfinyl group, propylsulfinyl group, isopropylsulfinyl group, butylsulfinyl group, hexylsulfinyl group, cyclohexylsulfinyl group, octylsulfinyl group, 2-ethylhexylsulfinyl group, decanoylsulfinyl group, dodecanoyl group Examples thereof include, but are not limited to, a sulfinyl group, an octadecanoylsulfinyl group, a cyanomethylsulfinyl group, a methyloxymethylsulfinyl group,
- the substituted or unsubstituted arylsulfinyl group is preferably an arylsulfinyl group having 6 to 30 carbon atoms.
- Specific examples include phenylsulfinyl group, 1-naphthylsulfinyl group, 2-naphthylsulfinyl group, 2-chlorophenylsulfinyl group, 2-methylphenylsulfinyl group, 2-methyloxyphenylsulfinyl group, 2-butyloxyphenylsulfinyl group, 3-chlorophenylsulfinyl group, 3-trifluoromethylphenylsulfinyl group, 3-cyanophenylsulfinyl group, 3-nitrophenylsulfinyl group, 4-fluorophenylsulfinyl group, 4-cyanophenylsulfinyl group, 4-methyloxyphenylsulfinyl group , 4-
- the substituted or unsubstituted alkylsulfonyl group for R 1 is preferably an alkylsulfonyl group having 1 to 20 carbon atoms. Specific examples include methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, isopropylsulfonyl group, butylsulfonyl group, hexylsulfonyl group, cyclohexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, decanoylsulfonyl group, dodecanoyl group.
- Examples thereof include, but are not limited to, a sulfonyl group, an octadecanoylsulfonyl group, a cyanomethylsulfonyl group, and a methyloxymethylsulfonyl group.
- the substituted or unsubstituted arylsulfonyl group for R 1 is preferably an arylsulfonyl group having 6 to 30 carbon atoms.
- Specific examples include phenylsulfonyl group, 1-naphthylsulfonyl group, 2-naphthylsulfonyl group, 2-chlorophenylsulfonyl group, 2-methylphenylsulfonyl group, 2-methyloxyphenylsulfonyl group, 2-butyloxyphenylsulfonyl group, 3-chlorophenylsulfonyl group, 3-trifluoromethylphenylsulfonyl group, 3-cyanophenylsulfonyl group, 3-nitrophenylsulfonyl group, 4-fluorophenylsulfonyl group, 4-cyanophenylsulfonyl group, 4-methyloxyphenylsulfonyl group
- Examples of the substituted or unsubstituted acyl group for R 1 include a hydrogen atom or a carbonyl group to which a linear, branched, monocyclic or condensed polycyclic aliphatic group having 1 to 18 carbon atoms is bonded, or 2 to 20 carbon atoms.
- Specific examples include formyl group, acetyl group, propionyl group, butyryl group, isobutyryl group, valeryl group, isovaleryl group, pivaloyl group, lauroyl group, myristoyl group, palmitoyl group, stearoyl group, cyclopentylcarbonyl group, cyclohexylcarbonyl group, acryloyl group.
- Examples of the substituted or unsubstituted acyloxy group for R 1 include acyloxy groups having 2 to 20 carbon atoms. Specific examples include acetyloxy group, propanoyloxy group, butanoyloxy group, pentanoyloxy group, trifluoromethylcarbonyloxy group, benzoyloxy group, 1-naphthylcarbonyloxy group, 2-naphthylcarbonyloxy group and the like. Can be mentioned.
- Examples of the substituted or unsubstituted amino group in R 1 include an amino group, an alkylamino group, a dialkylamino group, an arylamino group, a diarylamino group, an alkylarylamino group, a benzylamino group, and a dibenzylamino group.
- alkylamino group methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, heptylamino group, octylamino group, nonylamino group, decylamino group, dodecylamino group , Octadecylamino group, isopropylamino group, isobutylamino group, isopentylamino group, sec-butylamino group, tert-butylamino group, sec-pentylamino group, tert-pentylamino group, tert-octylamino group, neopentyl Amino group, cyclopropylamino group, cyclobutylamino group, cyclopentylamino group, cyclohexylamino group, cycloheptylamin
- Dialkylamino group includes dimethylamino group, diethylamino group, dipropylamino group, dibutylamino group, dipentylamino group, dihexylamino group, diheptylamino group, dioctylamino group, dinonylamino group, didecylamino group, didodecylamino group, Dioctadecylamino group, diisopropylamino group, diisobutylamino group, diisopentylamino group, methylethylamino group, methylpropylamino group, methylbutylamino group, methylisobutylamino group, cyclopropylamino group, pyrrolidino group, piperidino group, Examples include, but are not limited to, piperazino groups.
- the arylamino group includes anilino group, 1-naphthylamino group, 2-naphthylamino group, o-toluidino group, m-toluidino group, p-toluidino group, 2-biphenylamino group, 3-biphenylamino group, 4- Examples thereof include, but are not limited to, a biphenylamino group, a 1-fluoreneamino group, a 2-fluoreneamino group, a 2-thiazoleamino group, and a p-terphenylamino group.
- diarylamino group examples include, but are not limited to, a diphenylamino group, a ditolylamino group, an N-phenyl-1-naphthylamino group, and an N-phenyl-2-naphthylamino group.
- alkylarylamino group examples include N-methylanilino group, N-methyl-2-pyridino group, N-ethylanilino group, N-propylanilino group, N-butylanilino group, N-isopropyl, N-pentylanilino group, N Examples include, but are not limited to, -ethylanilino group, N-methyl-1-naphthylamino group and the like.
- Examples of the substituted or unsubstituted phosphinoyl group for R 1 include phosphinoyl groups having 2 to 50 carbon atoms. Specific examples include dimethylphosphinoyl group, diethylphosphinoyl group, dipropylphosphinoyl group, diphenylphosphinoyl group, dimethoxyphosphinoyl group, diethoxyphosphinoyl group, dibenzoylphosphinoyl group, Examples thereof include, but are not limited to, a bis (2,4,6-trimethylphenyl) phosphinoyl group.
- Examples of the substituted or unsubstituted carbamoyl group for R 1 include carbamoyl groups having 1 to 30 carbon atoms. Specific examples include N-methylcarbamoyl group, N-ethylcarbamoyl group, N-propylcarbamoyl group, N-butylcarbamoyl group, N-hexylcarbamoyl group, N-cyclohexylcarbamoyl group, N-octylcarbamoyl group, N-decyl Rucarbamoyl group, N-octadecylcarbamoyl group, N-phenylcarbamoyl group, N-2-methylphenylcarbamoyl group, N-2-chlorophenylcarbamoyl group, N-2-isopropoxyphenylcarbamoyl group, N-2- (2-ethylhexyl) ) Phenylcarb
- Examples of the substituted or unsubstituted sulfamoyl group for R 1 include sulfamoyl groups having 0 to 30 carbon atoms. Specific examples include sulfamoyl group, N-alkylsulfamoyl group, N-arylsulfamoyl group, N, N-dialkylsulfamoyl group, N, N-diarylsulfamoyl group, N-alkyl-N- An aryl sulfamo oil group etc. are mentioned.
- N-methylsulfamoyl group More specifically, N-methylsulfamoyl group, N-ethylsulfamoyl group, N-propylsulfamoyl group, N-butylsulfamoyl group, N-hexylsulfamoyl group, N-cyclohexylsulfur group.
- Famoyl group N-octylsulfamoyl group, N-2-ethylhexylsulfamoyl group, N-decylsulfamoyl group, N-octadecylsulfamoyl group, N-phenylsulfamoyl group, N-2- Methylphenylsulfamoyl group, N-2-chlorophenylsulfamoyl group, N-2-methoxyphenylsulfamoyl group, N-2-isopropoxyphenylsulfamoyl group, N-3-chlorophenylsulfamoyl group, N-3-nitrophenylsulfamoyl group, N-3-cyanophenylsulfamoyl group, N-4-methoxyphenyl Nylsulfamoyl group, N-4-cyanophenylsulfamoyl group, N-4
- R 2 represents a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted or unsubstituted aryloxy group, substituted or unsubstituted A heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, a substituted or unsubstituted alkylsulfanyl group, a substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted alkylsulfinyl group, a substituted or unsubstituted arylsulfinyl group A substituted or unsubstituted alkylsulfonyl group, a substituted or unsubstituted arylsulfonyl group, a substituted or unsub
- a substituted aryl group, a substituted or unsubstituted aryloxy group, a substituted or unsubstituted heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, or a substituted or unsubstituted acyloxy group is preferred, and a substituted or unsubstituted acyloxy group is more preferred.
- R 2 is a substituted or unsubstituted alkenyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or unsubstituted aryl group, substituted or unsubstituted aryloxy group, substituted or unsubstituted A heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, a substituted or unsubstituted alkylsulfanyl group, a substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted alkylsulfinyl group, a substituted or unsubstituted arylsulfinyl group, Examples of the substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl group, substituted or unsubstituted acyloxy group
- Substituted or unsubstituted Alkyl group substituted or unsubstituted alkyloxy group, substituted or unsubstituted aryl group, substituted or unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or Unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl It is synonymous with a group, a substituted or unsubstituted acyloxy group, and a substituted or unsubstituted amino group.
- R 3 to R 5 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or Unsubstituted aryl group, substituted or unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl A group, a substituted or unsubstituted acyl group, or a substituted or unsubstituted amino group.
- a hydrogen atom, halogen atom, nitro group, substituted or unsubstituted alkyl group, substituted or unsubstituted aryl group, substituted or unsubstituted A substituted heterocyclic group is preferable, and a hydrogen atom, a nitro group, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group is more preferable.
- Examples of the halogen atom in R 3 to R 5 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
- the amino group is a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, a substituted
- Substituted or unsubstituted heterocyclic group substituted or unsubstituted heterocyclic ring It is synonymous with an oxy group, a substituted or unsubstituted alkylsulfanyl group, a substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted acyl group, and a substituted or unsubstituted amino group.
- R 6 to R 9 are each independently a hydrogen atom, halogen atom, cyano group, haloalkyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or unsubstituted aryl group, substituted or Unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted arylsulfanyl Group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted alkylsulfonyl group, substituted or unsubstituted arylsulfonyl group,
- R 1 ′ and R 2 ′ have the same meanings as R 1 and R 2.
- the halogen atom in R 6 to R 9 has the same meaning as the halogen atom in R 3 to R 5 .
- haloalkyl group in R 6 to R 9 examples include an alkyl group having 1 to 15 carbon atoms in which all the hydrogen atoms are substituted with the halogen atoms described above, and specific examples thereof include a trifluoromethyl group and a trichloromethyl group.
- Tribromomethyl group Triiodomethyl group, pentafluoroethyl group, pentachloroethyl group, pentabromoethyl group, pentaiodoethyl group, trifluorodibromoethyl group, tribromodiiodoethyl group, heptafluoropropyl group, hepta Chloropropyl group, heptabromopropyl group, nonafluorobutyl group, nonachlorobutyl group, nonabromobutyl group, undecafluoropentyl group, undecachloropentyl group, undecabromopentyl group, tridecafluorohexyl group, tridecachlorohexyl Group, pentadecafluo A heptyl group, a heptadecafluorooctyl group, a nonadecafluorononyl group,
- the haloalkyl group is preferably a trifluoromethyl group or a pentafluoroethyl group from the viewpoints of synthesis and characteristics when used as the radical polymerization initiator (A).
- Alkyloxy group substituted or unsubstituted Aryl group, substituted or unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkylsulfanyl group, substituted Or an unsubstituted arylsulfanyl group, a substituted or unsubstituted alkylsulfinyl group, a substituted or unsubstituted arylsulfinyl group, a substituted or unsubstituted alkylsulfonyl group, a substituted or unsubstituted arylsulfonyl group, and a substituted or unsubstituted It is synonymous with the amino group.
- R 6 to R 9 are not particularly limited as long as they are the above groups. However, in view of characteristics when used as a synthesis surface or a radical polymerization initiator (A), other than hydrogen in R 6 to R 9 R 7 is preferably a group other than hydrogen.
- R 10 to R 14 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, haloalkyl group, substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted alkyl Although they are a sulfonyl group, a substituted or unsubstituted arylsulfonyl group, or a substituted or unsubstituted acyl group, all of R 10 to R 14 do not become hydrogen atoms at the same time.
- the haloalkyl group in R 10 to R 14 has the same meaning as the haloalkyl group in R 6 to R 9 described above, and is a substituted or unsubstituted alkylsulfinyl group, a substituted or unsubstituted arylsulfinyl group, a substituted or unsubstituted alkylsulfonyl.
- a group, a substituted or unsubstituted arylsulfonyl group, and a substituted or unsubstituted acyl group are the substituted or unsubstituted alkylsulfinyl group, substituted or unsubstituted arylsulfinyl group, substituted or unsubstituted in R 1 described above. It is synonymous with an alkylsulfonyl group, a substituted or unsubstituted arylsulfonyl group, and a substituted or unsubstituted acyl group.
- R 10 to R 14 are preferably a nitro group or a substituted or unsubstituted acyl group from the viewpoints of synthesis and characteristics when used as the radical polymerization initiator (A).
- R 15 to R 19 are each independently a hydrogen atom, halogen atom, cyano group, nitro group, haloalkyl group, substituted or unsubstituted alkyl group, substituted or unsubstituted alkyloxy group, substituted or unsubstituted A substituted aryl group, a substituted or unsubstituted aryloxy group, a substituted or unsubstituted heterocyclic group, a substituted or unsubstituted heterocyclic oxy group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkylsulfanyl group, A substituted or unsubstituted arylsulfanyl group, a substituted or unsubstituted acyl group, or a substituted or unsubstituted amino group.
- R 15 to R 19 include other than hydrogen
- the positions of substituents other than hydrogen are R 15 , R 17 , R 19 is preferable, and R 17 is more preferable.
- the haloalkyl group in R 15 to R 19 has the same meaning as the haloalkyl group in R 6 to R 9 described above, and is a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group, a substituted or unsubstituted aryl group, Substituted or unsubstituted aryloxy group, substituted or unsubstituted heterocyclic group, substituted or unsubstituted heterocyclic oxy group, substituted or unsubstituted alkenyl group, substituted or unsubstituted alkylsulfanyl group, substituted or unsubstituted An arylsulfanyl group, a substituted or unsubstituted acyl group, and a substituted or unsubstituted amino group are a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkyloxy group,
- R 10 to R 14 are used as the radical polymerization initiator (A), it is particularly preferable that R 10 to R 14 are represented by the general formula (3) from the viewpoint of compatibility with solvents and resins.
- R 12 is preferably a group other than hydrogen from the viewpoint of characteristics when used as a synthesis surface or a radical polymerization initiator (A).
- the hydrogen atom of the substituent in R 1 to R 19 described above may be further substituted with another substituent.
- substituents include halogen groups such as fluorine atom, chlorine atom, bromine atom and iodine atom, alkoxy groups such as methoxy group, ethoxy group and tert-butoxy group, aryl groups such as phenoxy group and p-tolyloxy group.
- the compound represented by the general formula (1) is obtained by adjusting an intermediate and adjusting a precursor using the intermediate.
- the intermediate is a ketone compound represented by the general formula (4).
- “intermediate” refers to a ketone compound.
- R 2 ⁇ R 14 has the same meaning as R 2 ⁇ R 14 in the general formula (1).
- ketone compounds are readily available as raw materials. Moreover, it can obtain easily by the conventionally well-known synthetic
- combination methods for example, the various methods described in the Chemical Society of Japan edition, 4th edition, a new experimental chemistry course, the 14th volume, 751 (Maruzen). This document is incorporated herein by reference in its entirety. The same applies to the following documents.
- the ketone body of the carbazole compound as represented by the general formula (4) can be easily obtained by Friedel-Crafts acylation reaction, for example, obtained by the same method as described in Japanese Patent No. 3993725. be able to.
- the precursor for synthesizing the compound represented by the general formula (1) is an oxime represented by the following general formula (5).
- the “precursor” refers to an oxime compound.
- R 2 ⁇ R 14 has the same meaning as R 2 ⁇ R 14 in the general formula (1).
- the oxime represented by the general formula (5) has, as an intermediate, the ketone compound represented by the general formula (4), for example, Org. React., 7, ⁇ 1953>, 327, The Chemical Society of Japan, 4th edition. It can be obtained by various methods described in the edition, Experimental Chemistry Course, Vol. 14, page 1316 (Maruzen). Furthermore, it can also be obtained from the synthesis methods of oximes described in commercially available chemistry texts (for example, J. March, Advanced Organic Organic Chemistry, ry 4th Edition, Wiley Interscience, 1992).
- nitrosation of active methylene groups with nitrous acid or nitrite alkyl esters is nitrosation of active methylene groups with nitrous acid or nitrite alkyl esters.
- Reaction conditions are, for example, Organic Syntheses Coll. Vol. VI, pp 840, Organic Syntheses Coll. Vol. III, pp 191 and 513, Organic Syntheses Coll. Vol. II, pp 202, 204 and 363, J. Am. Chem. Soc., 47, ⁇ 1925>, 2033, J. Chem. Soc., 117, ⁇ 1920>, 590, J. Am. Chem. Soc., 51, ⁇ 1929>, 2264 Suitable for manufacturing.
- Nitrous acid is usually produced from sodium nitrite.
- the nitrite alkyl ester is, for example, methyl nitrite, isopropyl nitrite, butyl nitrite, isoamyl nitrite.
- the compound represented by the general formula (1) is obtained by using a oxime compound represented by the general formula (5) as a precursor in a method described in the literature, for example, an oxime obtained by the method described above and an acyl chloride or an acid anhydride.
- an inert solvent such as tetrahydrofuran, benzene or dimethylformamide
- a base for example a tertiary amine such as triethylamine, or in a basic solvent such as pyridine.
- Such a reaction is known to those skilled in the art, and is generally performed at ⁇ 15 ° C. to + 50 ° C., preferably 0 to 30 ° C.
- All oxime ester groups exist in two configurations, (Z) or (E).
- the isomers can be separated by conventional methods, but mixtures of isomers can also be used as photoinitiating species.
- the invention therefore also relates to a mixture of configurational isomers of the compound of general formula (1).
- the compound represented by the general formula (1) of the present invention can be easily identified using mass spectrometry, elemental analysis, and conventionally known analytical methods such as 1 H-NMR.
- the radical polymerization initiator (A) represented by the general formula (1) of the present invention has an electron-withdrawing substituent introduced on the phenyl group of the N-phenylcarbazole group so that the near-ultraviolet light is introduced. It is possible to have an absorption band in the visible region, and to have activity from the near ultraviolet region to a region having a wavelength longer than the visible region.
- the radical polymerization initiator (A) of the present invention has a keto oxime ester structure as represented by the general formula (1).
- the reason why the radical polymerization initiator (A) of the present invention can function with higher sensitivity than conventionally known radical polymerization initiators can be considered for the following three reasons (possibility), but the details are not clear. Absent.
- the first reason is that the radical polymerization initiator (A) of the present invention has a very good energy due to a given energy beam because the carbazole chromophore represented by the general formula (1) has a good absorption. Can be absorbed into. Furthermore, it is conceivable that the obtained energy is efficiently used for the decomposition of the oxime ester moiety, so that the decomposition by the energy beam irradiation is fast and a large amount of radicals can be generated instantaneously.
- the radical polymerization initiator (A) of the present invention has a keto oxime ester structure, so that an inactive iminyl radical as an active species is rapidly decomposed as shown below. It is conceivable to further generate a decomposition product (carbazolyl radical) that can function as an active species.
- a keto-type oxime ester does not necessarily produce a large amount of radicals, and if the iminyl radical produced is metastable, the decomposition will be slow, and the amount of radicals produced will be less than the theoretical amount. This is greatly affected by the chromophore that it has.
- the radical polymerization initiator (A) of the present invention has a structure represented by the general formula (1), so that the decomposition of iminyl radicals caused by decomposition by light irradiation for some reason is very fast and a large amount of radicals are generated. It is thought that it has brought about the result.
- the radical polymerization initiator (A) of the present invention is considered to suppress recombination because the decomposition of the iminyl radical is very fast.
- the active species generated by the decomposition is reduced, so that the function as a radical polymerization initiator is lowered.
- the radical polymerization initiator (A) of the present invention functions as a very sensitive radical polymerization initiator by irradiation with energy rays, a polymerization reaction and a crosslinking reaction using a conventionally known radical polymerization initiator can be performed in a shorter time. It is possible to achieve with certainty. As a result, it is possible to achieve a significant increase in sensitivity and improvement in characteristics of various applications using these reactions. Below, the utilization method of the radical polymerization initiator (A) of this invention is described.
- composition containing the radical polymerization initiator (A) and the radical polymerizable compound (B) of the present invention can be cured quickly and reliably by energy ray irradiation, and a cured product having good characteristics can be obtained. It can be used as a polymerizable composition.
- the radical polymerizable compound (B) of the present invention will be described.
- the radically polymerizable compound (B) of the present invention is a compound having an ethylenically unsaturated bond capable of radical polymerization.
- the compound having an ethylenically unsaturated bond capable of radical polymerization may be any compound as long as it has at least one ethylenically unsaturated bond capable of radical polymerization in the molecule.
- Examples of such a compound having an ethylenically unsaturated bond capable of radical polymerization include unsaturated carboxylic acids such as acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid and their salts, esters, Examples include urethane, amides and anhydrides, acrylonitrile, styrene, various unsaturated polyesters, unsaturated polyethers, unsaturated polyamides, unsaturated polyurethanes, and other radical polymerizable compounds, but the present invention is not limited thereto. It is not something. Specific examples of the radically polymerizable compound (B) in the present invention are given below.
- Examples of acrylates Examples of monofunctional alkyl acrylates: Methyl acrylate, ethyl acrylate, propyl acrylate, isopropyl acrylate, butyl acrylate, isoamyl acrylate, hexyl acrylate, 2-ethylhexyl acrylate, octyl acrylate, decyl acrylate, lauryl acrylate, stearyl acrylate, isobornyl acrylate, cyclohexyl acrylate, dicyclopentenyl acrylate , Dicyclopentenyloxyethyl acrylate, benzyl acrylate.
- monofunctional alkyl acrylates Methyl acrylate, ethyl acrylate, propyl acrylate, isopropyl acrylate, butyl acrylate, isoamyl acrylate, hexyl acrylate, 2-ethylhexyl acrylate
- Examples of monofunctional hydroxy acrylates 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 2-hydroxy-3-chloropropyl acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-hydroxy-3-allyloxypropyl acrylate, 2-acryloyloxyethyl-2 -Hydroxypropyl phthalate.
- Examples of monofunctional halogenated acrylates 2,2,2-trifluoroethyl acrylate, 2,2,3,3-tetrafluoropropyl acrylate, 1H-hexafluoroisopropyl acrylate, 1H, 1H, 5H-octafluoropentyl acrylate, 1H, 1H, 2H, 2H- Heptadecafluorodecyl acrylate, 2,6-dibromo-4-butylphenyl acrylate, 2,4,6-tribromophenoxyethyl acrylate, 2,4,6-tribromophenol 3EO addition acrylate.
- Examples of monofunctional ether-containing acrylates 2-methoxyethyl acrylate, 1,3-butylene glycol methyl ether acrylate, butoxyethyl acrylate, methoxytriethylene glycol acrylate, methoxypolyethylene glycol # 400 acrylate, methoxydipropylene glycol acrylate, methoxytripropylene glycol acrylate, methoxypolypropylene glycol acrylate, Ethoxydiethylene glycol acrylate, ethyl carbitol acrylate, 2-ethylhexyl carbitol acrylate, tetrahydrofurfuryl acrylate, phenoxyethyl acrylate, phenoxydiethylene glycol acrylate, phenoxy polyethylene glycol acrylate, cresyl polyethylene glycol acrylate, p Nonyl phenoxyethyl acrylate, p- nonylphenoxy polyethylene glycol acrylate, glycidy
- Examples of monofunctional carboxyl acrylates ⁇ -carboxyethyl acrylate, succinic acid monoacryloyloxyethyl ester, ⁇ -carboxypolycaprolactone monoacrylate, 2-acryloyloxyethyl hydrogen phthalate, 2-acryloyloxypropyl hydrogen phthalate, 2-acryloyloxypropyl hexahydrohydrogen phthalate, 2- Acryloyloxypropyltetrahydrophthalate.
- Examples of other monofunctional acrylates N, N-dimethylaminoethyl acrylate, N, N-dimethylaminopropyl acrylate, morpholinoethyl acrylate, trimethylsiloxyethyl acrylate, diphenyl-2-acryloyloxyethyl phosphate, 2-acryloyloxyethyl acid phosphate, caprolactone-modified-2-acryloyl Oxyethyl acid phosphate.
- bifunctional acrylates 1,4-butanediol diacrylate, 1,6-hexanediol diacrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, tetraethylene glycol diacrylate, polyethylene glycol # 200 diacrylate, polyethylene glycol # 300 Diacrylate, polyethylene glycol # 400 diacrylate, polyethylene glycol # 600 diacrylate, dipropylene glycol diacrylate, tripropylene glycol diacrylate, tetrapropylene glycol diacrylate, polypropylene glycol # 400 diacrylate, polypropylene glycol # 700 diacrylate, neo Pentyl glycol diacrylate, ne Pentyl glycol PO-modified diacrylate, hydroxypivalic acid neopentyl glycol ester diacrylate, caprolactone adduct diacrylate of hydroxypivalic acid neopentyl glycol ester, 1,6-he
- trifunctional acrylates Glycerin PO-modified triacrylate, trimethylolpropane triacrylate, trimethylolpropane EO-modified triacrylate, trimethylolpropane PO-modified triacrylate, isocyanuric acid EO-modified triacrylate, isocyanuric acid EO-modified ⁇ -caprolactone-modified triacrylate, 1,3 5-triacryloylhexahydro-s-triazine, pentaerythritol triacrylate, dipentaerythritol triacrylate tripropionate.
- tetra- or higher functional acrylates Pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate monopropionate, dipentaerythritol hexaacrylate, tetramethylolmethane tetraacrylate, oligoester tetraacrylate, tris (acryloyloxy) phosphate.
- methacrylates examples of monofunctional alkyl methacrylates: Methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, butyl methacrylate, isoamyl methacrylate, hexyl methacrylate, 2-hexyl methacrylate, 2-ethylhexyl methacrylate, octyl methacrylate, decyl methacrylate, lauryl methacrylate, stearyl methacrylate, isobornyl methacrylate, cyclohexyl methacrylate , Dicyclopentenyl methacrylate, dicyclopentenyloxyethyl methacrylate, benzyl methacrylate.
- Examples of monofunctional hydroxymethacrylates 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 2-hydroxy-3-chloropropyl methacrylate, 2-hydroxy-3-phenoxypropyl methacrylate, 2-hydroxy-3-allyloxypropyl methacrylate, 2-methacryloyloxyethyl-2 -Hydroxypropyl phthalate.
- Examples of monofunctional halogenated methacrylates 2,2,2-trifluoroethyl methacrylate, 2,2,3,3-tetrafluoropropyl methacrylate, 1H-hexafluoroisopropyl methacrylate, 1H, 1H, 5H-octafluoropentyl methacrylate, 1H, 1H, 2H, 2H- Heptadecafluorodecyl methacrylate, 2,6-dibromo-4-butylphenyl methacrylate, 2,4,6-tribromophenoxyethyl methacrylate, 2,4,6-tribromophenol 3EO addition methacrylate.
- Examples of monofunctional ether-containing methacrylates 2-methoxyethyl methacrylate, 1,3-butylene glycol methyl ether methacrylate, butoxyethyl methacrylate, methoxytriethylene glycol methacrylate, methoxypolyethylene glycol # 400 methacrylate, methoxydipropylene glycol methacrylate, methoxytripropylene glycol methacrylate, methoxypolypropylene glycol methacrylate, Ethoxydiethylene glycol methacrylate, 2-ethylhexyl carbitol methacrylate, tetrahydrofurfuryl methacrylate, phenoxyethyl methacrylate, phenoxydiethylene glycol methacrylate, phenoxy polyethylene glycol methacrylate, cresyl polyethylene glycol methacrylate, p- Cycloalkenyl phenoxyethyl methacrylate, p- nonylphenoxy polyethylene glycol me
- Examples of monofunctional carboxyl-containing methacrylates ⁇ -carboxyethyl methacrylate, succinic acid monomethacryloyloxyethyl ester, ⁇ -carboxypolycaprolactone monomethacrylate, 2-methacryloyloxyethyl hydrogen phthalate, 2-methacryloyloxypropyl hydrogen phthalate, 2-methacryloyloxypropyl hexahydrohydrogen phthalate, 2- Methacryloyloxypropyl tetrahydrophthalate.
- Examples of other monofunctional methacrylates Dimethylaminomethyl methacrylate, N, N-dimethylaminoethyl methacrylate, N, N-dimethylaminopropyl methacrylate, morpholinoethyl methacrylate, trimethylsiloxyethyl methacrylate, diphenyl-2-methacryloyloxyethyl phosphate, 2-methacryloyloxyethyl acid phosphate, caprolactone Modified-2-methacryloyloxyethyl acid phosphate.
- bifunctional methacrylates 1,4-butanediol dimethacrylate, 1,6-hexanediol dimethacrylate, ethylene glycol dimethacrylate, diethylene glycol dimethacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, polyethylene glycol # 200 dimethacrylate, polyethylene glycol # 300 Dimethacrylate, polyethylene glycol # 400 dimethacrylate, polyethylene glycol # 600 dimethacrylate, dipropylene glycol dimethacrylate, tripropylene glycol dimethacrylate, tetrapropylene glycol dimethacrylate, polypropylene glycol # 400 dimethacrylate, polypropylene glycol # 700 dimethacrylate, neopenty Glycol dimethacrylate, neopentyl glycol PO modified dimethacrylate, hydroxypivalic acid neopentyl glycol ester dimethacrylate,
- trifunctional methacrylates Glycerin PO modified trimethacrylate, trimethylolethane trimethacrylate, trimethylolpropane trimethacrylate, trimethylolpropane EO modified trimethacrylate, trimethylolpropane PO modified trimethacrylate, isocyanuric acid EO modified trimethacrylate, isocyanuric acid EO modified ⁇ -caprolactone modified tri Methacrylate, 1,3,5-trimethacryloyl hexahydro-s-triazine, pentaerythritol trimethacrylate, dipentaerythritol trimethacrylate tripropionate.
- tetrafunctional or higher methacrylates Pentaerythritol tetramethacrylate, dipentaerythritol pentamethacrylate monopropionate, dipentaerythritol hexamethacrylate, tetramethylolmethane tetramethacrylate, oligoester tetramethacrylate, tris (methacryloyloxy) phosphate.
- arylates Allyl glycidyl ether, diallyl phthalate, triallyl trimellitate, isocyanuric acid triarylate.
- acid amides examples include Acrylamide, N-methylolacrylamide, diacetoneacrylamide, N, N-dimethylacrylamide, N, N-diethylacrylamide, N-isopropylacrylamide, acryloylmorpholine, methacrylamide, N-methylolmethacrylamide, diacetone methacrylamide, N, N -Dimethylmethacrylamide, N, N-diethylmethacrylamide, N-isopropylmethacrylamide, methacryloylmorpholine.
- styrenes Styrene, p-hydroxystyrene, p-chlorostyrene, p-bromostyrene, p-methylstyrene, p-methoxystyrene, pt-butoxystyrene, pt-butoxycarbonylstyrene, pt-butoxycarbonyloxystyrene 2,4-diphenyl-4-methyl-1-pentene.
- vinyl compounds Vinyl acetate, vinyl monochloroacetate, vinyl benzoate, vinyl pivalate, vinyl butyrate, vinyl laurate, divinyl adipate, vinyl methacrylate, vinyl crotonate, vinyl 2-ethylhexanoate, N-vinylcarbazole, N-vinylpyrrolidone Such.
- the above-mentioned radical polymerizable compound (B) can be easily obtained as a commercial product of the manufacturer shown below.
- “Light acrylate”, “Light ester”, “Epoxy ester”, “Urethane acrylate” and “Highly functional oligomer” series manufactured by Kyoeisha Yushi Chemical Co., Ltd., Shin Nakamura Chemical Co., Ltd.
- "NK Ester” and “NK Oligo” series “Funkril” series manufactured by Hitachi Chemical Co., Ltd., "Aronix M” series manufactured by Toagosei Co., Ltd., manufactured by Daihachi Chemical Industry Co., Ltd.
- examples of the radical polymerizable compound (B) include those described in the following documents. For example, edited by Shinzo Yamashita et al., “Cross-linking agent handbook” (1981, Taiseisha), Kiyomi Kato edition, “UV / EB curing handbook (raw material edition)”, (1985, Polymer publication society), Radtech Research Meeting, Kiyoshi Akamatsu, “New Technology for Photosensitive Resins” (1987, CMC), Takeshi Endo, “Refinement of Thermosetting Polymers” (1986, CMC), Takiyama Soichiro, “Polyester Resin Handbook” (1988, Nikkan Kogyo Shimbun), edited by Radtech Study Group, “Application and Market of UV / EB Curing Technology” (2002, CMC).
- the radical polymerizable compound (B) of the present invention may be used alone or in a mixture of two or more at an arbitrary ratio in order to improve desired properties.
- the amount of the radical polymerization initiator (A) of the present invention used in the polymerizable composition is 0.1 to 100 parts by weight, preferably 3 to 60 parts by weight, based on 100 parts by weight of the radical polymerizable compound (B). Part.
- the polymerizable composition of the present invention can be used by mixing with a binder such as an organic polymer and applying it to a polymer film such as a glass plate, an aluminum plate, another metal plate, or polyethylene terephthalate.
- a binder such as an organic polymer
- a polymer film such as a glass plate, an aluminum plate, another metal plate, or polyethylene terephthalate.
- polymerizable composition of the present invention can be used in combination with other polymerization initiators for the purpose of further improving sensitivity.
- Examples of other polymerization initiators that can be used in combination with the polymerizable composition of the present invention include triazine derivatives described in JP-B-59-1281, JP-B-61-9621, and JP-A-60-60104.
- Luto-quinonediazides including iodonium compounds described in JP-B-55-39162, JP-A-59-140203 and “MACROMOLECULES”, Vol. 10, page 1307 (1977)
- thermal polymerization inhibitor can be added to the polymerizable composition of the present invention for the purpose of preventing polymerization during storage.
- the amount of these thermal polymerization inhibitors used is preferably added in the range of 0.001 to 5 parts by weight with respect to 100 parts by weight of the radical polymerizable compound (B).
- the polymerizable composition of the present invention can be added with a polymerization accelerator represented by amine, thiol, disulfide or the like, a chain transfer catalyst, or the like.
- the polymerizable composition of the present invention can be used depending on the purpose, such as dyes, organic and inorganic pigments, phosphine, phosphonate, phosphite and other oxygen scavengers and reducing agents, antifoggants, antifading agents, antihalation agents, fluorescent enhancers.
- a sensitizer (C) can be added for the purpose of further promoting polymerization.
- a sensitizer increases the activity with respect to light from the ultraviolet to the near infrared region, and therefore it is preferable to add a sensitizer when it is necessary to promote polymerization.
- sensitizers include unsaturated ketones typified by chalcone derivatives and dibenzalacetone, 1,2-diketone derivatives typified by benzyl and camphorquinone, benzoin derivatives, and fluorene derivatives.
- examples of the sensitizer capable of particularly suitably sensitizing the radical polymerization initiator of the present invention include thioxanthone derivatives and Michler ketone derivatives. More specifically, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dichlorothioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 1-chloro-4-propoxythioxanthone, 4,4′-bis (Dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone and the like can be mentioned, but are not limited thereto.
- the amount used is 0.01 to 60 parts by weight, preferably 0.01 to 30 parts by weight with respect to 100 parts by weight of the radical polymerizable compound (B). More preferably, it is 0.1 to 10 parts by weight.
- a coloring component (D) can be added depending on the purpose of coloring.
- a conventionally known pigment can be used as the coloring component (D).
- a dye may be contained within a range in which heat resistance and weather resistance are not lowered. These may be used alone or in combination of two or more in order to obtain a desired color density and hue.
- an organic pigment for example, an organic pigment, an inorganic pigment, or carbon black (for example, acetylene black, channel black, furnace black, etc.) can be used, and two or more kinds of pigments can be mixed and used.
- carbon black for example, acetylene black, channel black, furnace black, etc.
- organic pigments examples include diketopyrrolopyrrole pigments, azo pigments (eg, azo, disazo, polyazo, etc.), phthalocyanine pigments (eg, copper phthalocyanine, halogenated copper phthalocyanine, metal-free phthalocyanine, etc.), anthraquinone type Pigment (for example, aminoanthraquinone, diaminodianthraquinone, anthrapyrimidine, flavantron, anthanthrone, indanthrone, pyrantrone, violanthrone, etc.), quinacridone pigment, dioxazine pigment, perinone pigment, perylene pigment, thioindigo pigment, iso Examples thereof include indoline pigments, isoindolinone pigments, quinophthalone pigments, selenium pigments, and metal complex pigments.
- diketopyrrolopyrrole pigments examples include diketopyrrolopyrrole pigments,
- inorganic pigments include titanium oxide, zinc white, zinc sulfide, lead white, calcium carbonate, precipitated barium sulfate, white carbon, alumina white, kaolin clay, talc, bentonite, black iron oxide, carbon black, cadmium red, Bengara, molybdenum red, molybdate orange, chrome vermilion, yellow lead, cadmium yellow, yellow iron oxide, titanium yellow, chromium oxide, viridian, titanium cobalt green, cobalt green, cobalt chrome green, Victoria green, ultramarine blue, bitumen, cobalt Examples include blue, cerulean blue, cobalt silica blue, cobalt zinc silica blue, manganese violet, and cobalt violet.
- carbon black examples include “Special Black 350, 250, 100, 550, 5, 4, 4A, 6” manufactured by Degussa, Inc., “Printex U, V, 140 U, 140 V, 95, 90, 85, 80, 75, 55, 45.
- pigments that can be used in the polymerization composition of the present invention are indicated by color index (CI) numbers.
- red pigments examples include C.I. I. Pigment Red 7, 9, 14, 41, 48: 1, 48: 2, 48: 3, 48: 4, 81: 1, 81: 2, 81: 3, 97, 122, 123, 146, 149, 168, 177, 178, 180, 184, 185, 187, 192, 200, 202, 208, 210, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 246, 254, 255, 264, 272 or the like can be used, but is not limited thereto.
- yellow pigments examples include C.I. I. Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37: 1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120, 123, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 161, 162, 164, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 17 , But the invention is not limited to the like can be used 177,179,180,
- orange pigments examples include C.I. I. Pigment Orange 36, 43, 51, 55, 59, 61 and the like can be used, but are not limited thereto.
- green pigments examples include C.I. I. Green pigments such as CI Pigment Green 7, 10, 36, and 37 can be used, but are not limited thereto.
- blue pigments examples include C.I. I. Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64 and the like can be used, but are not limited thereto.
- purple pigments examples include C.I. I. Pigment Violet 1, 19, 23, 27, 29, 30, 32, 37, 40, 42, 50 and the like can be used, but are not limited thereto.
- black pigments examples include C.I. I. Pigment Violet 1, 6, 7, 12, 20, 31 etc. can be used, but it is not limited to these.
- These pigments can be used in admixture of two or more at any ratio.
- the amount used is 0.01 to 100 parts by weight, preferably 1 to 60 parts by weight with respect to 100 parts by weight of the radical polymerizable compound (B). is there
- the particle diameter of the pigment is preferably sufficiently small with respect to the wavelength of visible light from the viewpoint of absorption coefficient of visible light (spectrum appropriateness) and transparency. That is, the pigment preferably has an average primary particle size of 0.01 ⁇ m or more and 0.3 ⁇ m or less, particularly 0.01 ⁇ m or more and 0.1 ⁇ m or less.
- the primary particle diameter refers to the diameter of the smallest unit pigment particle, and is measured with an electron microscope.
- the primary particle diameter of the pigment can be controlled within an appropriate range using a known dispersing device such as a sand mill, a kneader, or a two-roll.
- a pigment derivative or a pigment dispersant can be used for the purpose of improving the dispersibility of the pigment and the storage stability of the polymerization composition.
- the pigment derivative is a compound in which a substituent is introduced into an organic dye.
- Organic dyes include light yellow aromatic polycyclic compounds such as phthalimide, naphthalene, naphthoquinone, anthracene, and anthraquinone that are not generally called dyes.
- Examples of the pigment derivative include JP-A-63-305173, JP-B-57-15620, JP-B-59-40172, JP-B-63-17102, JP-B-5-9469, JP-A-06- Those described in JP-A No. 306301, JP-A No. 2001-220520, JP-A No. 2003-238842, and the like can be used. These can be used alone or in admixture of two or more.
- the pigment dispersant examples include a hydroxyl group-containing carboxylic acid ester, a salt of a long chain polyaminoamide and a high molecular weight acid ester, a salt of a high molecular weight polycarboxylic acid, a salt of a long chain polyaminoamide and a polar acid ester, a high molecular weight unsaturated acid ester, Polymer copolymer, modified polyurethane, modified polyacrylate, polyether ester type anionic activator, naphthalene sulfonic acid formalin condensate salt, aromatic sulfonic acid formalin condensate salt, polyoxyethylene alkyl phosphate ester, polyoxyethylene Nonylphenyl ether, stearylamine acetate, etc. can be used.
- pigment dispersant examples include “Anti-Terra-U (polyaminoamide phosphate)”, “Anti-Terra-203 / 204 (high molecular weight polycarboxylate)”, “Disperbyk-101” (by BYK Chemie).
- the addition amount of the pigment derivative and the pigment dispersant is not particularly limited, but is preferably 0.1 to 40 parts by weight, more preferably 0.1 to 30 parts by weight with respect to 100 parts by weight of the pigment. is there.
- Examples of the dye that may be contained to obtain a desired hue include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinoneimine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes. It is done.
- azo dyes examples include C.I. I. Acid Yellow 11, C.I. I. Acid Orange 7, C.I. I. Acid Red 37, C.I. I. Acid Red 180, C.I. I. Acid Blue 29, C.I. I. Direct Red 28, C.I. I. Direct Red 83, C.I. I. Direct Yellow 12, C.I. I. Direct Orange 26, C.I. I. Direct Green 28, C.I. I. Direct Green 59, C.I. I. Reactive Yellow 2, C.I. I. Reactive Red 17, C.I. I. Reactive Red 120, C.I. I. Reactive Black 5, C.I. I. Disperse Orange 5, C.I. I. Disperse thread 58, C.I. I.
- Disperse Blue 165 C.I. I. Basic Blue 41, C.I. I. Basic Red 18, C.I. I. Molded Red 7, C.I. I. Moldant Yellow 5, C.I. I. Examples thereof include, but are not limited to, Mordant Black 7.
- anthraquinone dyes include C.I. I. Bat Blue 4, C.I. I. Acid Blue 40, C.I. I. Acid Green 25, C.I. I. Reactive Blue 19, C.I. I. Reactive Blue 49, C.I. I. Disper thread 60, C.I. I. Disperse Blue 56, C.I. I. Examples include, but are not limited to, Disperse Blue 60.
- phthalocyanine dyes include C.I. I.
- quinoneimine dyes such as Pad Blue 5 include C.I. I. Basic Blue 3, C.I. I.
- quinoline dyes such as Basic Blue 9 include C.I. I. Solvent Yellow 33, C.I. I. Acid Yellow 3, C.I. I. Disperse Yellow 64 and the like are nitro dyes such as C.I. I. Acid Yellow 1, C.I. I. Acid Orange 3, C.I. I. Examples include, but are not limited to, Disperse Yellow 42.
- the amount used in the case of adding these dyes is 0.01 to 100 parts by weight, preferably 1 to 60 parts by weight, based on 100 parts by weight of the radical polymerizable compound (B). From the viewpoint of heat resistance and weather resistance, it is not preferable that the amount used is excessive.
- the polymerizable composition of the present invention may be used in combination with an alkali-soluble resin (E) for the purpose of, for example, being used for image formation as a so-called alkali development type photoresist material.
- the alkali-soluble resin (E) of the present invention acts as a binder and has a solubility in a developer used in the development processing step, particularly preferably an alkali developer, when forming an image pattern. If there is, it will not be specifically limited.
- an alkali-soluble resin which is a carboxyl group-containing copolymer is preferable, and in particular, an ethylenically unsaturated monomer having one or more carboxyl groups (hereinafter simply referred to as “carboxyl group-containing unsaturated monomer”). ) And other copolymerizable ethylenically unsaturated monomers (hereinafter simply referred to as “copolymerizable unsaturated monomers”) (hereinafter simply referred to as “carboxyl group-containing copolymers”). Is preferred).
- carboxyl group-containing unsaturated monomer examples include unsaturated monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, ⁇ -chloroacrylic acid, cinnamic acid; maleic acid, maleic anhydride, fumaric acid, itacone Unsaturated dicarboxylic acids or anhydrides thereof such as acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid; trivalent or higher unsaturated polycarboxylic acids or anhydrides thereof; succinic acid mono (2-acrylic acid) Divalent or higher polyvalent carboxylic acids such as leuoxyethyl), succinic acid mono (2-methacryloyloxyethyl), phthalic acid mono (2-acryloyloxyethyl), phthalic acid mono (2-methacryloyloxyethyl) Mono [(meth) acryloyloxyalkyl] esters; ⁇ -carboxypol
- succinic acid mono (2-acryloyloxyethyl) and phthalic acid mono (2-acryloyloxyethyl) are M-5300 and M-5400 (Toagosei Co., Ltd.). (Commercially available) under the trade name.
- the said carboxyl group-containing unsaturated monomer can be used individually or in mixture of 2 or more types.
- Examples of the copolymerizable unsaturated monomer include styrene, ⁇ -methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxystyrene, and m-methoxy.
- Methyl acrylate methyl methacrylate, ethyl acrylate, ethyl methacrylate, n-propyl acrylate, n-propyl methacrylate, i-propyl acrylate, i-propyl methacrylate, n-butyl acrylate, n-butyl methacrylate, i-butyl acrylate, i-butyl Methacrylate, sec-butyl acrylate, sec-butyl methacrylate, t-butyl acrylate, t-butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl Acrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl acrylate, 2-hydroxy Butyl methacrylate, 3-hydroxybutyl methacrylate, 3-hydroxybutyl methacrylate
- Unsaturated glycidyl esters such as glycidyl acrylate and glycidyl methacrylate, vinyl carboxylic acid esters such as vinyl acetate, vinyl propionate, vinyl butyrate and vinyl benzoate, vinyl methyl ether, vinyl ethyl ether and allyl glycidyl ether Saturated ethers, acrylonitrile, methacrylonitrile, ⁇ -chloroacrylonitrile, vinyl cyanide compounds such as vinylidene cyanide, acrylamide, methacrylamide, ⁇ -chloroacrylamide, N-2-hydroxyethylacrylamide, N-2-hydroxyethylmethacryl Unsaturated amides such as amide, unsaturated imides such as maleimide, N-phenylmaleimide, N-cyclohexylmaleimide, 1,3-butadiene, isoprene, chloropre Aliphatic conjugated dienes such as polystyrene, poly
- carboxyl group-containing copolymer (R) is: (P) Acrylic acid and / or methacrylic acid as an essential component, and optionally succinic acid.
- carboxyl group-containing copolymer (R) examples include (meth) acrylic acid / methyl (meth) acrylate copolymer, (meth) acrylic acid / benzyl (meth) acrylate copolymer, (meth) acrylic acid.
- the substituent present in the molecule may be further modified with another material.
- a part of the carboxyl group present in the polymer is modified by reacting with a monomer having a functional group reactive with a carboxyl group such as a known glycidyl group, and the crosslinking that can participate in radical polymerization in the molecule It is also possible to provide points.
- glycidyl (meth) acrylic acid alkyl ester can be used, for example, glycidyl (meth) acrylic acid, glycidyl (meth) methyl acrylate, glycidyl (meth) ethyl acrylate, glycidyl (meth).
- examples include butyl acrylate and 2-ethylhexyl glycidyl (meth) acrylate.
- a similar polymer crosslinking point may be provided by condensing hydroxyl groups present in the polymer with 2-acryloyloxyethyl isocyanate, 2-methacryloylethyl isocyanate (“Karenz MOI” manufactured by Showa Denko KK), and the like. Is also possible.
- the copolymerization ratio of the carboxyl group-containing unsaturated monomer in the carboxyl group-containing copolymer is preferably 5 to 50% by weight. If the copolymerization ratio is less than 5% by weight, the solubility of the resulting resist composition in an alkaline developer tends to decrease. On the other hand, if it exceeds 50% by weight, the solubility in an alkali developer becomes excessive, and alkali development is caused. When developing with a liquid, the resist film tends to fall off from the substrate or the image surface becomes rough.
- the polystyrene-converted weight average molecular weight (hereinafter referred to as “Mw”) measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the alkali-soluble resin in the present invention is preferably 3,000 to 300,000. More preferably, it is 5,000 to 100,000.
- the number average molecular weight in terms of polystyrene (hereinafter referred to as “Mn”) measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the alkali-soluble resin in the present invention is 3,000 to 60,000. It is preferably 5,000 to 25,000.
- the radiation sensitive composition excellent in developability is obtained by using such alkali-soluble resin which has specific Mw and Mn.
- the ratio of Mw to Mn (Mw / Mn) of the alkali-soluble resin in the present invention is preferably 1 to 5, particularly preferably 1 to 4.
- alkali-soluble resin (E) other than the carboxyl group-containing copolymer examples include novolac resins and resins having a phenolic hydroxyl group such as polyhydroxystyrene. E).
- the alkali-soluble resin (E) can be used alone or in admixture of two or more.
- the amount of the alkali-soluble resin (E) used in the present invention is 10 to 600 parts by weight with respect to 100 parts by weight of the radical polymerizable compound (B).
- the polymerizable composition of the present invention can be polymerized by applying energy such as ultraviolet rays, visible rays, near infrared rays, electron beams, etc. to obtain a desired polymer.
- energy such as ultraviolet rays, visible rays, near infrared rays, electron beams, etc.
- a light source for applying energy a light source having a dominant wavelength of light emission in a wavelength region of 250 nm to 450 nm is preferable.
- Examples of light sources having a dominant wavelength of light emission in the wavelength region of 250 nm to 450 nm include ultrahigh pressure mercury lamps, high pressure mercury lamps, medium pressure mercury lamps, mercury xenon lamps, metal halide lamps, high power metal halide lamps, xenon lamps, and pulsed light emission.
- Various light sources such as a xenon lamp, a deuterium lamp, a fluorescent lamp, an Nd-YAG triple wave laser, a He-Cd laser, a nitrogen laser, an Xe-Cl excimer laser, an Xe-F excimer laser, and a semiconductor-excited solid laser can be used.
- the definitions of ultraviolet rays, visible light, near-infrared rays and the like in this specification are based on “Iwanami Rikagaku Dictionary 4th Edition” (1987, Iwanami) edited by Ryogo Kubo et al.
- the polymerizable composition of the present invention is recorded on various inks, inkjet inks, overcoat varnishes, various printing plate materials, photoresists, electrophotography, direct printing plate materials, optical fibers, hologram materials, and other photosensitive materials and microcapsules. It can be applied to a medium, and further to an adhesive, a pressure-sensitive adhesive, an adhesive, a release coating agent, a sealant, and various paints.
- the polymerizable composition of the present invention comprising an alkali resin (E) is applied on a substrate, partially exposed to an energy ray and cured, and an image pattern in which an unexposed portion is removed with an alkali developer. It can be used as a negative resist used in forming.
- An image pattern forming method using the negative resist of the present invention containing an alkali resin (E) will be described. First, after applying a negative resist liquid composition on the surface of the substrate, pre-baking is performed to evaporate the solvent, thereby forming a coating film. Next, after exposing this coating film to pattern shape through a photomask, it develops using an alkali developing solution, and the unexposed part of a coating film is melted and removed. Thereafter, the target image pattern can be formed by post-baking as necessary.
- a known coating method such as spray coating, spin coating, slit coating, roll coating or the like can be employed.
- the coating thickness can be appropriately changed depending on the application, but the thickness after drying is preferably from 0.1 to 200 ⁇ m, more preferably from 0.2 to 100 ⁇ m.
- a so-called industry in which a negative resist layer of the present invention is provided on a base film mainly composed of polyester, polypropylene, polyethylene, and the like typified by polyethylene terephthalate, and the negative resist layer is sandwiched between protective films as necessary.
- a known dry film It is also possible to use the negative resist of the present invention in a form called a known dry film.
- the dry film is usually used by laminating the protective film and adhering it to a substrate on which a resist pattern is to be formed, and laminating the substrate on a substrate under heating and pressure conditions as necessary. To do.
- pattern exposure may be carried out without peeling off the base film. In that case, the base film is removed after the exposure to perform alkali development. carry out.
- the energy irradiated to obtain a polymer by polymerizing the negative resist of the present invention containing the alkali resin (E) is the same as that for obtaining the polymer from the above-described polymerization composition of the present invention.
- the negative resist of the present invention comprising the alkali resin (E) is a low-pressure mercury lamp, a medium-pressure mercury lamp, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a xenon lamp, a pulse emission xenon lamp, a carbon arc lamp, a metal halide lamp, or a fluorescent lamp.
- Tungsten lamp argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser, various semiconductor lasers, YAG laser, light emitting diode, CRT light source, plasma light source, electron beam, gamma ray, ArF excimer laser, KrF excimer laser,
- the target polymer or cured product can be obtained by applying energy from various light sources such as an F2 laser.
- the image pattern forming method of the present invention it is possible to use energy rays from the light source during exposure.
- energy rays having a wavelength in the range of 190 to 450 nm are preferable.
- the amount of exposure depends on the film thickness and cannot be determined uniquely, but is usually 0.5 to 100,000 J / m 2 .
- Examples of the base material used in the image pattern forming method of the present invention include glass, silicon, polycarbonate, polyester, aromatic polyamide, polyamideimide, polyimide, glass epoxy film or substrate, but are not limited thereto. Is not to be done.
- these base materials may be subjected to appropriate pretreatment such as chemical treatment with a silane coupling agent or the like, plasma treatment, ion plating, sputtering, gas phase reaction method, vacuum deposition, etc., if desired.
- any of a liquid filling method, a dipping method, a shower method, a spray method and the like may be used.
- the development time is 20 to 30 ° C., and preferably 5 to 300 seconds.
- the alkaline developer include inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia, primary amines such as ethylamine and n-propylamine, diethylamine, and the like.
- aqueous solution of an alkaline compound such as quaternary ammonium salts such as tetraethylammonium hydroxide can be used.
- a water-soluble organic solvent such as methanol or ethanol and / or a surfactant can be added to the aqueous solution of the alkaline compound.
- the compound of the present invention efficiently generates active radicals by irradiation with energy rays, particularly light, it can function as a highly sensitive radical polymerization initiator. Therefore, the radically polymerizable composition containing the radical polymerization initiator (A) of the present invention is a highly sensitive polymerizable composition that can be polymerized in a short time. Therefore, by using the polymerizable composition of the present invention, it is possible to provide a negative resist having alkali developability that is suitably used for a photoresist material and an image pattern forming method using the negative resist. Furthermore, a suitable image pattern can be provided by using this image pattern forming method.
- compound (A) which is an intermediate of compound (1), was synthesized as follows.
- compound (C) which is an intermediate of compound (2), was synthesized as follows.
- compound (E) which is an intermediate of compound (46), was synthesized as follows.
- compound (J) which is a precursor of compound (259), was synthesized from the obtained compound (I) as follows.
- reaction solution is poured into 600 ml of ice water, the composition organism is extracted with 300 ml of ethyl acetate, the organic layer is washed with water (200 ml ⁇ 3 times), dried over magnesium sulfate, the desiccant is filtered off and the solvent is distilled off.
- the product was purified by silica gel chromatography (hexane / chloroform) to obtain 25.3 g of compound (7) (yield 65.7%).
- B) ′ Example 7 As well as a method of synthesizing from two acid chlorides and triethylamine
- the coated material was irradiated with ultraviolet rays (high pressure mercury lamp 130 W / cm1 light) at a compare speed of 40 m / min, 40 m / min, or 50 m / min, and then rubbed with a cotton cloth to check for damage to the film. confirmed.
- the results are shown in Table 5. In addition, it can be judged that it is good not to be damaged at a higher conveyor speed after ultraviolet irradiation.
- the photopolymerizable compositions (Examples 109 to 216) using the radical polymerization initiator (A) of the present invention are the same as the photopolymerizable compositions (Comparative Examples 1 to 6) using a conventionally known radical polymerization initiator. It became clear that it has high curability compared with. Further, the photopolymerizable composition (Examples 217 to 254) using the radical polymerization initiator (A) and the sensitizer of the present invention in combination uses a conventionally known radical polymerization initiator and a sensitizer in combination. It was also revealed that the resin had higher curability than when used (Comparative Examples 7 to 12).
- the keto oxime ester compound of the present invention is clearly more sensitive than when a conventionally known keto oxime ester is used as a photopolymerization initiator.
- the photopolymerization initiator (A) of the present invention is a highly efficient radical due to the excellent chromophore and keto oxime ester structure represented by the general formula (1). As a result of the decomposition, it seems that it worked with high sensitivity.
- the photopolymerizable composition using the radical polymerization initiator (A) of the present invention exhibits sufficiently high curability as it is (Examples 109 to 216), it can be further increased by using the sensitizer (C) in combination. It was revealed that the curability can be increased (Examples 217 to 254).
- R 10 ⁇ at least one of R 14 is a radical polymerization initiator (A) a photopolymerizable composition using the present invention which is a nitro group or a substituted or unsubstituted acyl group
- examples 109 to 147, 174 to 185, 187, 190 to 195, 204 to 212, 215, 216) are the radical polymerization initiators (A) according to the present invention, wherein at least one of R 7 to R 10 is a substituent other than the above substituents.
- the photopolymerization initiator of the present invention can function as an excellent chromophore by substituting an electron-withdrawing substituent on the N-position phenyl group of the carbazole group. It has been clarified that substitution with a nitro group or an acyl group has a remarkable effect.
- R 10 to R 14 is an acyl group represented by the general formula (3) (Examples 109 to 111, 113 to 127, 174 to 178, 187, 190 to 192, 204, 205, 210) exhibit higher curability than the acyl groups other than those described above (Examples 142 to 147, 179 to 181, 216), and, like the nitro group, the highest curability in this example. Indicated.
- the obtained acrylic resin solution (1) is a solution containing the alkali-soluble resin (E) of the present invention.
- the polymerizable composition solution is filtered through a 0.2 ⁇ m pore size disk filter, coated on a stainless steel plate (# 600 polishing) using a spin coater, and heated and dried in an oven at 80 ° C. for 3 minutes. The solvent was removed. After drying, the film thickness of the polymerizable composition formed on the stainless steel plate was 2 ⁇ m.
- this polymerizable composition film is irradiated with a high pressure mercury lamp light (4.6mW / cm 2) through a band-pass filter for selectively transmitting 380nm of light from 350 nm, the polymerizable composition film
- a high pressure mercury lamp light 4mW / cm 2
- a band-pass filter for selectively transmitting 380nm of light from 350 nm
- the IR spectrum was measured, and from the change in absorption intensity at 810 cm ⁇ 1 , which is the characteristic absorption of the acrylic group, the consumption rate of the acrylic group after 10 seconds of light irradiation relative to that before light irradiation was calculated.
- Table 6 The results are shown in Table 6.
- the polymerizable composition (Examples 255 to 281) using the radical polymerization initiator (A) of the present invention is compared with the case where a known oxime ester is used as the radical polymerization initiator (Comparative Examples 13 to 18).
- the radicals are efficiently generated by light irradiation, and the acrylic group is polymerized. Even the slightest polymerization of acrylic has a significant impact on the improvement in productivity that has been demanded in recent years.
- the radical polymerization initiator (A) of the present invention it is possible to cope with a more sensitive process. Is possible.
- Methacrylic acid 20.0 parts by weight Methyl methacrylate 10.0 parts by weight n-butyl methacrylate 55.0 parts by weight 2-hydroxyethyl methacrylate 15.0 parts by weight 2,2'-azobisisobutyronitrile 4.0 parts by weight Room temperature After cooling to about 2 g, sample the acrylic resin solution, heat dry at 180 ° C. for 20 minutes, measure the nonvolatile content, and add cyclohexanone to the previously synthesized acrylic resin solution so that the nonvolatile content is 20 wt% By doing this, the acrylic resin solution (2) was prepared. The weight average molecular weight of the obtained acrylic resin was 40000.
- the obtained acrylic resin solution (2) is a solution containing the alkali-soluble resin (E) of the present invention.
- the polymerizable composition solution is filtered through a 0.2 ⁇ m pore size disk filter, coated on a 1 mm thick glass plate using a spin coater, and heated and dried in an oven at 80 ° C. for 3 minutes to remove the solvent. Removed. After drying, the film thickness of the polymerizable composition film formed on the glass plate was 5 ⁇ m.
- This polymerizable composition film was exposed using a JASCO Corp. SS-25CP type spectral irradiator by changing the irradiation energy amount of the high-pressure mercury lamp, that is, the irradiation time in 13 stages, and then 20 Development was carried out with a 1% aqueous sodium carbonate solution at 1 ° C. for 1 minute, and the minimum amount of energy required to insolubilize the polymerizable composition at an irradiation wavelength of 365 nm was defined as sensitivity, and the results are shown in Table 7.
- the polymerizable compositions (Examples 282 to 353) using the radical polymerization initiator (A) of the present invention are the same as the polymerizable compositions (Comparative Examples 19 to 33) using known oxime esters as radical polymerization initiators.
- the sensitivity is clearly higher than that.
- the polymerizable composition of the present invention is sufficiently sensitive even when no sensitizer is used in combination, but further sensitivity can be increased by using the sensitizer together.
- Examples 354 to 425, Comparative Examples 34 to 48> [Pattern shape test]
- the polymerizable composition film on the glass substrate prepared in Examples 282 to 353 and Comparative Examples 19 to 33 has an exposure gap of about 100 ⁇ m and an exposure energy of 365 nm with a predetermined pattern mask (20 ⁇ m ⁇ 20 ⁇ m resolution).
- a predetermined pattern mask (20 ⁇ m ⁇ 20 ⁇ m resolution).
- Light from a high pressure mercury lamp of 4.5 mW / cm 2 was irradiated for 10 seconds. Thereafter, development was performed at room temperature for 60 seconds with a 0.2% by weight tetramethylammonium hydroxide aqueous solution to remove unexposed portions, and after washing with pure water, the resulting cured product was placed in an oven at 230 ° C. Heated for 30 minutes.
- the pattern shape obtained on the glass substrate was evaluated by the following method. The results are shown in Table 8.
- a green pigment dispersion was prepared in the same manner as the red pigment dispersion using a mixture having the following composition.
- Halogenated copper phthalocyanine pigment CI Pigment Green 36
- Lionol Green 6YK manufactured by Toyo Ink Co., Ltd.
- Monoazo pigment CI Pigment Yellow 150
- E4GN-GT manufactured by LANXESS
- Triazine pigment derivative having the following structure 1.0 part by weight Acrylic resin solution 40.0 parts by weight Cyclohexanone 48.0 parts by weight
- a blue pigment dispersion was prepared in the same manner as the red pigment dispersion using a mixture having the following composition.
- ⁇ -type copper phthalocyanine pigment (CIPigment Blue15: 6) 11.0 parts by weight (“Heliogen Blue L-6700F” manufactured by BASF)
- Phthalocyanine pigment derivative having the following structure: 1.0 part by weight
- Acrylic resin solution 40.0 parts by weight
- Cyclohexanone 48.0 parts by weight
- a black pigment dispersion was prepared using a mixture having the following composition in the same manner as the red pigment dispersion.
- Carbon black (“MA77” manufactured by Mitsubishi Chemical Corporation) 12.0 parts by weight
- Acrylic resin solution 40.0 parts by weight
- Cyclohexanone 48.0 parts by weight
- Red polysynthetic composition As a radical polymerization initiator (A), 58 parts by weight of the red pigment dispersion, 20 parts by weight of the acrylic resin solution (2), 3 parts by weight of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.) A mixture of 2 parts by weight of compound (1) and 17 parts by weight of cyclohexanone was stirred and mixed uniformly, and then filtered through a 1 ⁇ m filter to obtain a red polymerizable composition of the present invention (Example 499). ).
- A radical polymerization initiator
- Blue polysynthetic composition As a radical polymerization initiator (A), 54 parts by weight of the blue pigment dispersion, 15 parts by weight of the acrylic resin solution (2), 4 parts by weight of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.) A mixture of 4 parts by weight of compound (1) and 25 parts by weight of cyclohexanone was stirred and mixed uniformly, and then filtered through a 1 ⁇ m filter to obtain a blue polymerizable composition of the present invention (Example 500). ).
- Green polysynthetic composition 67 parts by weight of the green pigment dispersion, 11 parts by weight of the acrylic resin solution (2), 3 parts by weight of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.), and radical polymerization initiator (A)
- NK ester ATMPT trimethylolpropane triacrylate
- A radical polymerization initiator
- Black composite composition As a radical polymerization initiator (A), 75 parts by weight of the black pigment dispersion, 9 parts by weight of the acrylic resin solution (2), 3 parts by weight of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.) A mixture of 3 parts by weight of compound (1) and 13 parts by weight of cyclohexanone was stirred and mixed uniformly, and then filtered through a 1 ⁇ m filter to obtain a green polymerizable composition of the present invention (Example 502). ).
- A As a radical polymerization initiator (A), 75 parts by weight of the black pigment dispersion, 9 parts by weight of the acrylic resin solution (2), 3 parts by weight of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.) A mixture of 3 parts by weight of compound (1) and 13 parts by weight of cyclohexanone was stirred and mixed uniformly, and then filtered through a 1
- the colored polymerizable compositions of Examples 503 to 606 and Comparative Examples 64 to 91 were also prepared as follows.
- [Red polysynthetic composition] A red polymerizable composition shown in Table 10 was obtained in the same manner as in Example 499, except that the compound (1) as the radical polymerization initiator (A) was replaced with the compound shown in Table 10.
- Green polysynthetic composition Green polymerizable compositions shown in Table 10 were obtained in the same manner as in Example 501, except that the compound (1) as the radical polymerization initiator (A) was replaced with the compounds shown in Table 10.
- Black composite composition A black polymerizable composition shown in Table 10 was obtained in the same manner as in Example 502 except that the compound (1) as the radical polymerization initiator (A) was replaced with the compound shown in Table 10.
- the obtained colored polymerizable composition was applied on a glass substrate of 10 cm ⁇ 10 cm by spin coating so that the film thickness after post-baking would be the film thickness shown in Table 11 for each color, and then in a clean oven, 70 Prebaked at 15 ° C. for 15 minutes.
- a clean oven 70 Prebaked at 15 ° C. for 15 minutes.
- ultraviolet rays were exposed through a photomask using an ultrahigh pressure mercury lamp.
- the substrate was spray-developed using a sodium carbonate aqueous solution at 23 ° C., washed with ion-exchanged water, and air-dried.
- post-baking was performed at 230 ° C. for 30 minutes in a clean oven to form striped filter segments on the substrate.
- Film thickness Film thickness of each color filter segment and black matrix
- the sensitivity of the resist was determined by the irradiation exposure amount at which the formed filter segment or black matrix pattern was finished according to the image size of the photomask.
- the rank of evaluation is as follows. A: Less than 40 mJ / cm 2 ⁇ : 40 mJ / cm 2 or more and less than 80 mJ / cm 2 ⁇ : 80 mJ / cm 2 or more and less than 250 mJ / cm 2 ⁇ : 250 mJ / cm 2 or more
- the colored polymerizable compositions (Examples 499 to 606) using the radical polymerization initiator (A) represented by the general formula (1) had very high sensitivity and were obtained. While the linearity and cross-sectional shape of the pattern were good, the colored polysynthetic composition (Comparative Examples 64-91) using a known oxime ester compound as a radical polymerization initiator had poor sensitivity and had a pattern. -No good linearity and cross-sectional shape were obtained.
- a colored polysynthetic composition (Examples 499 to 606) using the radical polymerization initiator (A) represented by the general formula (1), a high residual film ratio and production stability in coating film formation are achieved. A product having excellent properties can be obtained.
- a colored polysynthetic composition (Comparative Examples 64-91) using a known oxime ester compound as a radical polymerization initiator has a poor residual film ratio and does not reach a sufficient level in forming a coating film.
- the photopolymerizable composition using the compound of the present invention as a radical polymerization initiator may be excellent in curability as compared with a photopolymerizable composition using a combination of a conventionally known radical polymerization initiator and a sensitizer. It became clear. It became clear that this high curability contributes to a more sensitive process.
- the compound of the present invention that has brought about such high curability absorbs light well, and can significantly improve radical generation efficiency, and a carbazole chromophore represented by the general formula (1): This is probably because the keto-type oxime ester structure capable of generating a large amount of radicals by decomposition by light irradiation has a synergistic effect.
- the present invention relates to a novel oxime ester compound, a radical polymerization initiator (A) using the same, a polysynthetic composition using the same, a negative resist using the same, and an image pattern forming method using the same.
- the compound of the present invention functions as a radical generator that is very sensitive to irradiation with energy rays. Therefore, the radical polymerization initiator (A) of the present invention using the compound of the present invention rapidly and surely proceeds with polymerization, crosslinking reaction, etc. using a radical generated by irradiation of energy rays as conventionally used as a catalyst.
- Examples of applications that can be expected to increase sensitivity and improve properties according to the present invention include molding resins, casting resins, photo-molding resins, sealants, dental polymerization resins, printing inks that utilize polymerization or crosslinking reactions, Inkjet ink, paint, photosensitive resin for printing plate, color proof for printing, resist for color filter, resist for black matrix, photo spacer for liquid crystal, screen material for rear projection, optical fiber, rib material for plasma display, dry film resist, Resist for printed circuit boards, solder resist, photoresist for semiconductor, resist for microelectronics, resist for micromachine parts manufacturing, etching resist, microlens array, insulating material, hologram material, optical switch, waveguide material, overcoat Agent, powder coatings, adhesives, pressure-sensitive adhesives, release agents, optical recording media, adhesive, release coat agent composition for image recording materials using microcapsul
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Abstract
Description
本発明の更なる目的は、硬化速度が極めて速く、かつエネルギー線により、非常に鮮明なパターン露光あるいは直接描画に好適に用いることが可能で、なおかつ基板との密着性に非常に優れた、特にフォトレジスト材料に好適に用いられるアルカリ現像性を有するネガ型レジスト材料および該ネガ型レジストを用いた画像パターン形成方法を提供することである。
R2は、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、置換もしくは未置換のアシルオキシ基、または置換もしくは未置換のアミノ基を表す。
R3~R5は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ニトロ基、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアシル基、または置換もしくは未置換のアミノ基を表す。
R6~R9は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ハロアルキル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、置換もしくは未置換のアミノ基、または下記一般式(2)である置換基を表す。
一般式(2)
R10~R14は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ニトロ基、ハロアルキル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、または置換もしくは未置換のアシル基を表すが、R10~R14のすべてが同時に水素原子になることはない。)
一般式(3)
本願の開示の内容は、2009年6月17日に出願された日本国特許出願 特願2009-143790号の主題に関し、この出願明細書をここに全体的に参照のために組み込むものとする。
また、本発明の化合物をラジカル重合開始剤(A)として用いることで、良好な特性を持った重合性組成物を提供することができる。例えば、成形樹脂、注型樹脂、光造形用樹脂、封止剤、歯科用重合レジン、印刷インキ、インクジェットインキ、塗料、印刷版用感光性樹脂、印刷用カラープルーフ、カラーフィルター用レジスト、ブラックマトリクス用レジスト、液晶用フォトスペーサー、リアプロジェクション用スクリーン材料、光ファイバー、プラズマディスプレー用リブ材、ドライフィルムレジスト、プリント基板用レジスト、ソルダーレジスト、半導体用フォトレジスト、マイクロエレクトロニクス用レジスト、マイクロマシン用部品製造用レジスト、エッチングレジスト、マイクロレンズアレー、絶縁材、ホログラム材料、光学スイッチ、導波路用材料、オーバーコート剤、粉末コーティング、接着剤、粘着剤、離型剤、光記録媒体、粘接着剤、剥離コート剤等の分野において実用的なオリゴマーやポリマーを工業的に提供し、良好な特性を持った硬化物を得るための、ラジカル重合開始剤およびそれを用いた重合性組成物を提供することができる。
特に本発明の重合性組成物は、非常に鮮明なパターン露光あるいは直接描画に好適に用いることが可能で、なおかつ基板との密着性に非常に優れる。そのため、フォトレジスト材料に好適に用いられる高感度なネガ型レジストおよび該ネガ型レジストを用いた画像パターン形成方法を提供することができる。
中でも、化合物としての合成面や開始剤として使用した場合の性能面などの観点から、水素原子、ハロゲン原子、シアノ基、ハロアルキル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアリール基、置換もしくは未置換の複素環基、または置換もしくは未置換のアミノ基が好ましく、より好ましくは水素原子、シアノ基、置換もしくは未置換のアルキル基、置換もしくは未置換のアリール基である。
好ましくは、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、または置換もしくは未置換のアミノ基であり、より好ましくは、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアルキルスルファニル基、または置換もしくは未置換のアミノ基である。
中でも、化合物としての合成面や開始剤として使用した場合の性能面などを考慮すると、R15~R19に水素以外を含む場合は、水素以外の置換基の位置がR15、R17、R19であることが好ましく、より好ましくはR17である。
単官能アルキルアクリレート類の例:
メチルアクリレート、エチルアクリレート、プロピルアクリレート、イソプロピルアクリレート、ブチルアクリレート、イソアミルアクリレート、ヘキシルアクリレート、2-エチルヘキシルアクリレート、オクチルアクリレート、デシルアクリレート、ラウリルアクリレート、ステアリルアクリレート、イソボルニルアクリレート、シクロヘキシルアクリレート、ジシクロペンテニルアクリレート、ジシクロペンテニルオキシエチルアクリレート、ベンジルアクリレート。
2-ヒドロキシエチルアクリレート、2-ヒドロキシプロピルアクリレート、2-ヒドロキシ-3-クロロプロピルアクリレート、2-ヒドロキシ-3-フェノキシプロピルアクリレート、2-ヒドロキシ-3-アリルオキシプロピルアクリレート、2-アクリロイルオキシエチル-2-ヒドロキシプロピルフタレート。
2,2,2-トリフルオロエチルアクリレート、2,2,3,3-テトラフルオロプロピルアクリレート、1H-ヘキサフルオロイソプロピルアクリレート、1H,1H,5H-オクタフルオロペンチルアクリレート、1H,1H,2H,2H-ヘプタデカフルオロデシルアクリレート、2,6-ジブロモ-4-ブチルフェニルアクリレート、2,4,6-トリブロモフェノキシエチルアクリレート、2,4,6-トリブロモフェノール3EO付加アクリレート。
2-メトキシエチルアクリレート、1,3-ブチレングリコールメチルエーテルアクリレート、ブトキシエチルアクリレート、メトキシトリエチレングリコールアクリレート、メトキシポリエチレングリコール#400アクリレート、メトキシジプロピレングリコールアクリレート、メトキシトリプロピレングリコールアクリレート、メトキシポリプロピレングリコールアクリレート、エトキシジエチレングリコールアクリレート、エチルカルビトールアクリレート、2-エチルヘキシルカルビトールアクリレート、テトラヒドロフルフリルアクリレート、フェノキシエチルアクリレート、フェノキシジエチレングリコールアクリレート、フェノキシポリエチレングリコールアクリレート、クレジルポリエチレングリコールアクリレート、p-ノニルフェノキシエチルアクリレート、p-ノニルフェノキシポリエチレングリコールアクリレート、グリシジルアクリレート。
β-カルボキシエチルアクリレート、こはく酸モノアクリロイルオキシエチルエステル、ω-カルボキシポリカプロラクトンモノアクリレート、2-アクリロイルオキシエチルハイドロゲンフタレート、2-アクリロイルオキシプロピルハイドロゲンフタレート、2-アクリロイルオキシプロピルヘキサヒドロハイドロゲンフタレート、2-アクリロイルオキシプロピルテトラヒドロハイドロゲンフタレート。
N,N-ジメチルアミノエチルアクリレート、N,N-ジメチルアミノプロピルアクリレート、モルホリノエチルアクリレート、トリメチルシロキシエチルアクリレート、ジフェニル-2-アクリロイルオキシエチルホスフェート、2-アクリロイルオキシエチルアシッドホスフェート、カプロラクトン変性-2-アクリロイルオキシエチルアシッドホスフェート。
1,4-ブタンジオールジアクリレート、1,6-ヘキサンジオールジアクリレート、エチレングリコールジアクリレート、ジエチレングリコールジアクリレート、トリエチレングリコールジアクリレート、テトラエチレングリコールジアクリレート、ポリエチレングリコール#200ジアクリレート、ポリエチレングリコール#300ジアクリレート、ポリエチレングリコール#400ジアクリレート、ポリエチレングリコール#600ジアクリレート、ジプロピレングリコールジアクリレート、トリプロピレングリコールジアクリレート、テトラプロピレングリコールジアクリレート、ポリプロピレングリコール#400ジアクリレート、ポリプロピレングリコール#700ジアクリレート、ネオペンチルグリコールジアクリレート、ネオペンチルグリコールPO変性ジアクリレート、ヒドロキシピバリン酸ネオペンチルグリコールエステルジアクリレート、ヒドロキシピバリン酸ネオペンチルグリコールエステルのカプロラクトン付加物ジアクリレート、1,6-ヘキサンジオールビス(2-ヒドロキシ-3-アクリロイルオキシプロピル)エーテル、ビス(4-アクリロキシポリエトキシフェニル)プロパン、1,9-ノナンジオールジアクリレート、ペンタエリスリトールジアクリレート、ペンタエリスリトールジアクリレートモノステアレート、ペンタエリスリトールジアクリレートモノベンゾエート、ビスフェノールAジアクリレート、EO変性ビスフェノールAジアクリレート、PO変性ビスフェノールAジアクリレート、水素化ビスフェノールAジアクリレート、EO変性水素化ビスフェノールAジアクリレート、PO変性水素化ビスフェノールAジアクリレート、ビスフェノールFジアクリレート、EO変性ビスフェノールFジアクリレート、PO変性ビスフェノールFジアクリレート、EO変性テトラブロモビスフェノールAジアクリレート、トリシクロデカンジメチロールジアクリレート、イソシアヌル酸EO変性ジアクリレート。
グリセリンPO変性トリアクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパンEO変性トリアクリレート、トリメチロールプロパンPO変性トリアクリレート、イソシアヌル酸EO変性トリアクリレート、イソシアヌル酸EO変性ε-カプロラクトン変性トリアクリレート、1,3,5-トリアクリロイルヘキサヒドロ-s-トリアジン、ペンタエリスリトールトリアクリレート、ジペンタエリスリトールトリアクリレートトリプロピオネート。
ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレートモノプロピオネート、ジペンタエリスリトールヘキサアクリレート、テトラメチロールメタンテトラアクリレート、オリゴエステルテトラアクリレート、トリス(アクリロイルオキシ)ホスフェート。
単官能アルキルメタクリレート類の例:
メチルメタクリレート、エチルメタクリレート、プロピルメタクリレート、イソプロピルメタクリレート、ブチルメタクリレート、イソアミルメタクリレート、ヘキシルメタクリレート、2-ヘキシルメタクリレート、2-エチルヘキシルメタクリレート、オクチルメタクリレート、デシルメタクリレート、ラウリルメタクリレート、ステアリルメタクリレート、イソボルニルメタクリレート、シクロヘキシルメタクリレート、ジシクロペンテニルメタクリレート、ジシクロペンテニルオキシエチルメタクリレート、ベンジルメタクリレート。
2-ヒドロキシエチルメタクリレート、2-ヒドロキシプロピルメタクリレート、2-ヒドロキシ-3-クロロプロピルメタクリレート、2-ヒドロキシ-3-フェノキシプロピルメタクリレート、2-ヒドロキシ-3-アリルオキシプロピルメタクリレート、2-メタクリロイルオキシエチル-2-ヒドロキシプロピルフタレート。
2,2,2-トリフルオロエチルメタクリレート、2,2,3,3-テトラフルオロプロピルメタクリレート、1H-ヘキサフルオロイソプロピルメタクリレート、1H,1H,5H-オクタフルオロペンチルメタクリレート、1H,1H,2H,2H-ヘプタデカフルオロデシルメタクリレート、2,6-ジブロモ-4-ブチルフェニルメタクリレート、2,4,6-トリブロモフェノキシエチルメタクリレート、2,4,6-トリブロモフェノール3EO付加メタクリレート。
2-メトキシエチルメタクリレート、1,3-ブチレングリコールメチルエーテルメタクリレート、ブトキシエチルメタクリレート、メトキシトリエチレングリコールメタクリレート、メトキシポリエチレングリコール#400メタクリレート、メトキシジプロピレングリコールメタクリレート、メトキシトリプロピレングリコールメタクリレート、メトキシポリプロピレングリコールメタクリレート、エトキシジエチレングリコールメタクリレート、2-エチルヘキシルカルビトールメタクリレート、テトラヒドロフルフリルメタクリレート、フェノキシエチルメタクリレート、フェノキシジエチレングリコールメタクリレート、フェノキシポリエチレングリコールメタクリレート、クレジルポリエチレングリコールメタクリレート、p-ノニルフェノキシエチルメタクリレート、p-ノニルフェノキシポリエチレングリコールメタクリレート、グリシジルメタクリレート。
β-カルボキシエチルメタクリレート、こはく酸モノメタクリロイルオキシエチルエステル、ω-カルボキシポリカプロラクトンモノメタクリレート、2-メタクリロイルオキシエチルハイドロゲンフタレート、2-メタクリロイルオキシプロピルハイドロゲンフタレート、2-メタクリロイルオキシプロピルヘキサヒドロハイドロゲンフタレート、2-メタクリロイルオキシプロピルテトラヒドロハイドロゲンフタレート。
ジメチルアミノメチルメタクリレート、N,N-ジメチルアミノエチルメタクリレート、N,N-ジメチルアミノプロピルメタクリレート、モルホリノエチルメタクリレート、トリメチルシロキシエチルメタクリレート、ジフェニル-2-メタクリロイルオキシエチルホスフェート、2-メタクリロイルオキシエチルアシッドホスフェート、カプロラクトン変性-2-メタクリロイルオキシエチルアシッドホスフェート。
1,4-ブタンジオールジメタクリレート、1,6-ヘキサンジオールジメタクリレート、エチレングリコールジメタクリレート、ジエチレングリコールジメタクリレート、トリエチレングリコールジメタクリレート、テトラエチレングリコールジメタクリレート、ポリエチレングリコール#200ジメタクリレート、ポリエチレングリコール#300ジメタクリレート、ポリエチレングリコール#400ジメタクリレート、ポリエチレングリコール#600ジメタクリレート、ジプロピレングリコールジメタクリレート、トリプロピレングリコールジメタクリレート、テトラプロピレングリコールジメタクリレート、ポリプロピレングリコール#400ジメタクリレート、ポリプロピレングリコール#700ジメタクリレート、ネオペンチルグリコールジメタクリレート、ネオペンチルグリコールPO変性ジメタクリレート、ヒドロキシピバリン酸ネオペンチルグリコールエステルジメタクリレート、ヒドロキシピバリン酸ネオペンチルグリコールエステルのカプロラクトン付加物ジメタクリレート、1,6-ヘキサンジオールビス(2-ヒドロキシ-3-メタクリロイルオキシプロピル)エーテル、1,9-ノナンジオールジメタクリレート、ペンタエリスリトールジメタクリレート、ペンタエリスリトールジメタクリレートモノステアレート、ペンタエリスリトールジメタクリレートモノベンゾエート、2,2-ビス(4-メタクリロキシポリエトキシフェニル)プロパン、ビスフェノールAジメタクリレート、EO変性ビスフェノールAジメタクリレート、PO変性ビスフェノールAジメタクリレート、水素化ビスフェノールAジメタクリレート、EO変性水素化ビスフェノールAジメタクリレート、PO変性水素化ビスフェノールAジメタクリレート、ビスフェノールFジメタクリレート、EO変性ビスフェノールFジメタクリレート、PO変性ビスフェノールFジメタクリレート、EO変性テトラブロモビスフェノールAジメタクリレート、トリシクロデカンジメチロールジメタクリレート、イソシアヌル酸EO変性ジメタクリレート。
グリセリンPO変性トリメタクリレート、トリメチロールエタントリメタクリレート、トリメチロールプロパントリメタクリレート、トリメチロールプロパンEO変性トリメタクリレート、トリメチロールプロパンPO変性トリメタクリレート、イソシアヌル酸EO変性トリメタクリレート、イソシアヌル酸EO変性ε-カプロラクトン変性トリメタクリレート、1,3,5-トリメタクリロイルヘキサヒドロ-s-トリアジン、ペンタエリスリトールトリメタクリレート、ジペンタエリスリトールトリメタクリレートトリプロピオネート。
ペンタエリスリトールテトラメタクリレート、ジペンタエリスリトールペンタメタクリレートモノプロピオネート、ジペンタエリスリトールヘキサメタクリレート、テトラメチロールメタンテトラメタクリレート、オリゴエステルテトラメタクリレート、トリス(メタクリロイルオキシ)ホスフェート。
アリルグリシジルエーテル、ジアリルフタレート、トリアリルトリメリテート、イソシアヌル酸トリアリレート。
アクリルアミド、N-メチロールアクリルアミド、ジアセトンアクリルアミド、N,N-ジメチルアクリルアミド、N,N-ジエチルアクリルアミド、N-イソプロピルアクリルアミド、アクリロイルモルホリン、メタクリルアミド、N-メチロールメタクリルアミド、ジアセトンメタクリルアミド、N,N-ジメチルメタクリルアミド、N,N-ジエチルメタクリルアミド、N-イソプロピルメタクリルアミド、メタクリロイルモルホリン。
スチレン、p-ヒドロキシスチレン、p-クロロスチレン、p-ブロモスチレン、p-メチルスチレン、p-メトキシスチレン、p-t-ブトキシスチレン、p-t-ブトキシカルボニルスチレン、p-t-ブトキシカルボニルオキシスチレン、2,4-ジフェニル-4-メチル-1-ペンテン。
酢酸ビニル、モノクロロ酢酸ビニル、安息香酸ビニル、ピバル酸ビニル、酪酸ビニル、ラウリン酸ビニル、アジピン酸ジビニル、メタクリル酸ビニル、クロトン酸ビニル、2-エチルヘキサン酸ビニル、N-ビニルカルバゾール、N-ビニルピロリドンなど。
1号公報、特開2000-80068号公報、特開2001-233842号公報、特表2004-534797号公報、USP3558309号明細書(1971年)、USP4202697号明細書(1980年)ならびに特開昭61-24558号公報記載のオキシムエステル化合物等があげられる。これらの重合開始剤を用いる場合の使用量はラジカル重合性化合物(B)100重量部に対して0.01から10重量部の範囲で含有されるのが好ましい。
アルカリ樹脂(E)を含んでなる本発明の重合性組成物は、基材上に塗布し、部分的にエネルギー線を露光し硬化させ、未露光の部分をアルカリ現像液によって除去する画像パターンを形成する際に用いられる、ネガ型レジストして用いることが出来る。
まず、本発明の化合物について合成例を示す。
ラジカル重合開始剤:化合物(1)の合成
ラジカル重合開始剤:化合物(2)の合成
ラジカル重合開始剤:化合物(7)の合成
ラジカル重合開始剤:化合物(46)の合成
ラジカル重合開始剤:化合物(244)の合成
ラジカル重合開始剤:化合物(259)の合成
ラジカル重合開始剤:化合物(263)の合成
化合物(H)30.0gとトリエチルアミン17.6gとベンゾイルクロライド9.8gとテトラヒドロフラン300mlとを氷浴で冷却しながら混合した後、室温で1時間攪拌後、さらに50℃で2時間攪拌した。反応液を再び氷浴で冷却した後、アセチルクロリド5.5gを加え、室温で1時間攪拌後、さらに50℃で2時間攪拌した。反応液を氷水600ml中に注ぎ、組成生物を酢酸エチル300mlで抽出し、有機層を水洗(200ml×3回)し、硫酸マグネシウムで乾燥後、乾燥剤をろ過して溶媒を溜去し、残留物をシリカゲルクロマトグラフィー(ヘキサン/クロロホルム)により精製して、化合物(7)を25.3gを得た(収率65.7%)。
表1に示す条件に従いオキシム化及びエステル化反応をそれぞれ行い、本発明の化合物を得ることができた。
条件(A):実施例1と同様に、無水酢酸と酢酸ナトリウムより合成する方法
条件(B):実施例3と同様に、酸クロリドとトリエチルアミンより合成する方法
条件(B)’:実施例7と同様に、2種の酸クロリドとトリエチルアミンより合成する方法
次に、得られた一般式(1)で表される本発明の化合物をラジカル重合開始剤(A)として、以下の通り、重合性組成物に加え、重合物の硬化性を調べた。
ラジカル重合開始剤(A)4重量部、増感剤0または1重量部、ラジカル重合性化合物(B)としてダップトートDT170(東都化成(株)製ジアリルフタレート樹脂)10重量部、ジトリメチロールプロパンテトラアクリレート85重量部を配合し、加熱溶融して塗工液を作製した。比較例に用いた化合物および増感剤の構造については表4に示す(以下の比較例においても表4を参照のこと)。使用されたラジカル重合開始剤(A)および増感剤(C)を表5に示す。この塗工液を、バーコーター(#3)を用いてペットフィルム上に塗工した。この塗工物に、コンペアスピードを40m/分、40m/分、または50m/分の条件で、紫外線照射(高圧水銀灯130W/cm1灯)を行った後、綿布で擦って皮膜の傷の有無を確認した。その結果を表5に示す。尚、紫外線照射後、より高いコンベアスピードにて傷がつかないのが、よいと判断できる。
[評価基準]
5:皮膜に傷が確認されなかった
4:極かすかに皮膜に傷が確認された
3:かすかに皮膜に傷が確認された
2:皮膜に傷が確認された
1:皮膜に多くの傷が確認された
以下の通り、アルカリ可溶性樹脂を調整して重合性組成物に加え、硬化性試験及び現像を行った。
[アクリル樹脂溶液(1)の調製]
反応溶液にシクロヘキサノン800重量部を入れ、容器に窒素ガスを注入しながら、100℃に加熱して、同温度で下記モノマー及び熱重合開始剤の混合物を1時間かけて滴下して重合反応を行った。
スチレン 60.0重量部
メタクリル酸 60.0重量部
メタクリル酸メチル 65.0重量部
メタクリル酸ブチル 65.0重量部
アゾビスイソブチロニトリル 10.0重量部
[硬化性試験]
ラジカル重合性化合物(B)としてジペンタエリスリトールペンタアクリレート(サートマー社、SR399)を100重量部、アルカリ可溶性樹脂(E)を含む溶液としてアクリル樹脂溶液(1)を500重量部、溶媒としてシクロヘキサノンを400重量部、ラジカル重合開始剤(A)として表6に示した化合物を6重量部添加し、混合して均一な重合性組成物の溶液を調整した。
以下の通り、アルカリ可溶性樹脂を調整して重合性組成物に加え、硬化性試験及び現像を行った。
[アクリル樹脂溶液(2)の調製]
反応溶液にシクロヘキサノン370重量部を入れ、容器に窒素ガスを注入しながら、80℃に加熱して、同温度で下記モノマー及び熱重合開始剤の混合物を1時間かけて滴下して重合反応を行った。
メタクリル酸 20.0重量部
メチルメタクリレート 10.0重量部
n-ブチルメタクリレート 55.0重量部
2-ヒドロキシエチルメタクリレート 15.0重量部
2,2’-アゾビスイソブチロニトリル 4.0重量部
室温まで冷却した後、アクリル樹脂溶液約2gをサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成したアクリル樹脂溶液に不揮発分が20重量%になるようにシクロヘキサノンを添加することにより、アクリル樹脂溶液(2)を調整した。得られたアクリル樹脂の重量平均分子量は40000であった。得られたアクリル樹脂溶液(2)は、本発明のアルカリ可溶性樹脂(E)を含む溶液である。
ラジカル重合性化合物(B)としてジペンタエリスリトールペンタアクリレート(サートマー社、SR399)を100重量部、アルカリ可溶性樹脂(E)を含む溶液としてアクリル樹脂溶液(2)を500重量部、溶媒としてプロピレングリコールモノメチルエーテルアセテートを200重量部、ラジカル重合開始剤(A)および増感剤(C)として表7に示した化合物をそれぞれ同表記載の重量部だけ添加し、混合して均一な重合性組成物の溶液を調整した。
[パターン形状試験]
実施例282~353、および比較例19~33で作成したガラス基板上の重合性組成物膜に、所定のパターンマスク(20μm×20μm解像度)にて、露光ギャップを約100μmで365nmの露光エネルギーが4.5mW/cm2の高圧水銀灯の光を10秒照射した。その後、0.2重量%のテトラメチルアンモニウムヒドロキシド水溶液にて室温で60秒間現像して、未露光部を除去し、純水にて洗浄後、得られた硬化物をオーブン中230℃にて30分間加熱した。ガラス基板上に得られたパターン形状を下記の方法で評価した。結果を表8に示した。
ガラス基板上に得られたパターン形状を、光学顕微鏡により観察してパターンの直線性の評価を行なった。評価のランクは次の通りである。
○:直線性良好
×:直線性不良
-:硬化不十分のため、パターンを観測できず
[パターン密着性試験]
実施例354~425、および比較例34~48で作成したパターン形成基板を、121℃、100%RH、2atm、24時間の条件において、PCT(プレッシャー・クッカー)テストを実施後、20μmパターン部にセロファンテープを貼り付け、ピーリングテストを行うことにより、パターン密着性を評価した。結果を表9に示した。
評価のランクは次の通りである。
○:20μmパターンの剥れが認められない
×:20μmパターンの剥れが認められた
-:硬化不十分のため、評価できず
以下に示すとおり、顔料分散体を調整し、次に、これを含む着色性重合化合物を調整した。
下記の組成の混合物を均一に撹拌混合した後、アイガーミル(アイガージャパン社製「ミニモデルM-250 MKII」)で2時間分散した後、5μmのフィルタで濾過し赤色顔料分散体を作製した。
ジケトピロロピロール系顔料(C.I.Pigment Red 254) 11.0重量部
(チバ・スペシャルティ・ケミカルズ社製「イルガフォーレッドB-CF」)
下記構造のジケトピロロピロール系顔料誘導体 1.0重量部
アクリル樹脂溶液 40.0重量部
シクロヘキサノン 48.0重量部
下記の組成の混合物を、赤色顔料分散体と同様にして緑色顔料分散体を作製した。
ハロゲン化銅フタロシアニン系顔料(C.I. Pigment Green 36)
(東洋インキ製造社製「リオノールグリーン6YK」) 7.1重量部
モノアゾ系顔料(C.I. Pigment Yellow 150) 3.9重量部
(ランクセス社製「E4GN-GT」)
下記構造のトリアジン系顔料誘導体 1.0重量部
アクリル樹脂溶液 40.0重量部
シクロヘキサノン 48.0重量部
下記の組成の混合物を、赤色顔料分散体と同様にして青色顔料分散体を作製した。
ε型銅フタロシアニン顔料(C.I.Pigment Blue15:6) 11.0重量部
(BASF製「ヘリオゲンブルーL-6700F」)
下記構造のフタロシアニン系顔料誘導体 1.0重量部
アクリル樹脂溶液 40.0重量部
シクロヘキサノン 48.0重量部
下記の組成の混合物を、赤色顔料分散体と同様にして黒色顔料分散体を作製した。
カーボンブラック(三菱化学社製「MA77」) 12.0重量部
アクリル樹脂溶液 40.0重量部
シクロヘキサノン 48.0重量部
赤色顔料分散体を58重量部、アクリル樹脂溶液(2)を20重量部、トリメチロールプロパントリアクリレート(新中村化学社製「NKエステルATMPT」)を3重量部、ラジカル重合開始剤(A)として化合物(1)を2重量部、シクロヘキサノン17重量部の混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過することにより、本発明の赤色重合性組成物を得た(実施例499)。
青色顔料分散体を54重量部、アクリル樹脂溶液(2)を15重量部、トリメチロールプロパントリアクリレート(新中村化学社製「NKエステルATMPT」)を4重量部、ラジカル重合開始剤(A)として化合物(1)を4重量部、シクロヘキサノン25重量部の混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過することにより、本発明の青色重合性組成物を得た(実施例500)。
緑色顔料分散体を67重量部、アクリル樹脂溶液(2)を11重量部、トリメチロールプロパントリアクリレート(新中村化学社製「NKエステルATMPT」)を3重量部、ラジカル重合開始剤(A)として化合物(1)を2重量部、シクロヘキサノン18重量部の混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過することにより、本発明の緑色重合性組成物を得た(実施例501)。
黒色顔料分散体を75重量部、アクリル樹脂溶液(2)を9重量部、トリメチロールプロパントリアクリレート(新中村化学社製「NKエステルATMPT」)を3重量部、ラジカル重合開始剤(A)として化合物(1)を3重量部、シクロヘキサノン13重量部の混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過することにより、本発明の緑色重合性組成物を得た(実施例502)。
〔赤色重合成組成物〕
ラジカル重合開始剤(A)としての化合物(1)を、表10に示す化合物に置き換えた以外は、実施例499と同様にして、表10に示す赤色重合性組成物をそれぞれ得た。
ラジカル重合開始剤(A)としての化合物(1)を、表10に示す化合物に置き換えた以外は、実施例500と同様にして、表10に示す青色重合性組成物をそれぞれ得た。
ラジカル重合開始剤(A)としての化合物(1)を、表10に示す化合物に置き換えた以外は、実施例501と同様にして、表10に示す緑色重合性組成物をそれぞれ得た。
ラジカル重合開始剤(A)としての化合物(1)を、表10に示す化合物に置き換えた以外は、実施例502と同様にして、表10に示す黒色重合性組成物をそれぞれ得た。
得られた着色重合性組成物をスピンコート法により10cm×10cmのガラス基板にポストベーク後の膜厚が、各色それぞれ表11に示す膜厚になるよう塗工した後、クリーンオーブン中で、70℃で15分間プリベークした。次いで、この基板を室温に冷却後、超高圧水銀ランプを用い、フォトマスクを介して紫外線を露光した。その後、この基板を23℃の炭酸ナトリウム水溶液を用いてスプレー現像した後、イオン交換水で洗浄し、風乾した。その後、クリーンオーブン中で、230℃で30分間ポストベークを行い、基板上にストライプ状のフィルタセグメントを形成した。
得られた着色重合性組成物の感度および上記方法により形成されたフィルタセグメントあるいはブラックマトリックスのパタ-ン形状を下記の方法で評価した。結果を表12に示す。
形成されたフィルタセグメントあるいはブラックマトリックスのパタ-ンがフォトマスクの画像寸法とおりに仕上がる照射露光量をもってレジストの感度とした。評価のランクは次の通りである。
◎:40mJ/cm2未満
○:40mJ/cm2以上80mJ/cm2未満
△:80mJ/cm2以上250mJ/cm2未満
×:250mJ/cm2以上
形成されたフィルタセグメントあるいはブラックマトリックスのパタ-ンの形状を、(1)パタ-ンの直線性、(2)パタ-ンの断面形状により評価した。
○:直線性良好
△:部分的に直線性不良
×:直線性不良
○:順テーパー形状。
△:ノンテーパー形状。
×:逆テーパー形状。
各着色重合成組成物の塗工膜を形成し乾燥させた後に測定した膜厚に対して、露光(100mJ/cm2)、現像、ポストベイク工程までを経た後に測定した膜厚の比をもって残膜率とした。評価のランクは次の通りである。
○:70%以上
×:70%未満
Claims (13)
- 下記一般式(1)で表される化合物:
ただし、式中、R1は、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、置換もしくは未置換のアシル基、置換もしくは未置換のアシルオキシ基、置換もしくは未置換のアミノ基、置換もしくは未置換のホスフィノイル基、置換もしくは未置換のカルバモイル基、または置換もしくは未置換のスルファモイル基を表し、
R2は、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、置換もしくは未置換のアシルオキシ基、または置換もしくは未置換のアミノ基を表し、
R3~R5は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ニトロ基、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアシル基、または置換もしくは未置換のアミノ基を表し、
R6~R9は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ハロアルキル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、置換もしくは未置換のアミノ基、または下記一般式(2)である置換基を表し、
式中、R1’およびR2’は、R1およびR2と同義であり、
R10~R14は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ニトロ基、ハロアルキル基、置換もしくは未置換のアルキルスルフィニル基、置換もしくは未置換のアリールスルフィニル基、置換もしくは未置換のアルキルスルホニル基、置換もしくは未置換のアリールスルホニル基、または置換もしくは未置換のアシル基を表すが、R10~R14のすべてが同時に水素原子になることはない。 - 前記R10~R14の少なくとも一つが、ニトロ基、または置換もしくは未置換のアシル基である請求項1記載の化合物。
- 前記R10~R14の少なくとも一つが、ニトロ基、または下記一般式(3)である請求項1または2記載の化合物:
ただし、式中、R15~R19は、それぞれ独立に、水素原子、ハロゲン原子、シアノ基、ニトロ基、ハロアルキル基、置換もしくは未置換のアルキル基、置換もしくは未置換のアルキルオキシ基、置換もしくは未置換のアリール基、置換もしくは未置換のアリールオキシ基、置換もしくは未置換の複素環基、置換もしくは未置換の複素環オキシ基、置換もしくは未置換のアルケニル基、置換もしくは未置換のアルキルスルファニル基、置換もしくは未置換のアリールスルファニル基、置換もしくは未置換のアシル基、または置換もしくは未置換のアミノ基を表す。 - 前記R12が、ニトロ基、または上記一般式(3)である請求項3記載の化合物。
- 請求項1ないし4いずれか記載の化合物を含むラジカル重合開始剤(A)。
- 請求項5記載のラジカル重合開始剤(A)とラジカル重合性化合物(B)とを含む重合性組成物。
- さらに増感剤(C)を含む請求項6記載の重合性組成物。
- さらに着色成分(D)を含む請求項6または7記載の重合性組成物。
- さらにアルカリ可溶性樹脂(E)を含む請求項6~8いずれか記載の重合性組成物。
- 請求項9記載の重合性組成物を含むネガ型レジスト。
- 請求項6~9いずれか記載の重合性組成物に、エネルギー線を照射して重合させる、重合物の製造方法。
- 請求項10記載のネガ型レジストを基材上に積層し、部分的にエネルギー線を照射し重合させ、未照射の部分をアルカリ現像液によって除去することを特徴とする画像パターンの形成方法。
- 請求項12記載の画像パターンの形成方法により形成された画像パターン。
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| TWI760311B (zh) * | 2015-08-31 | 2022-04-11 | 日商富士軟片股份有限公司 | 著色感光性組成物、硬化膜、彩色濾光片、遮光膜、固體攝影元件、圖像顯示裝置以及硬化膜的製造方法 |
| US10095110B2 (en) | 2015-11-26 | 2018-10-09 | Jsr Corporation | Photosensitive resin composition, method for forming resist pattern, and method for producing metallic pattern |
| JP2019099582A (ja) * | 2017-12-07 | 2019-06-24 | サムヤン コーポレイション | カルバゾールオキシムエステル誘導体化合物、それを含む光重合開始剤及び感光性組成物 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120028384A (ko) | 2012-03-22 |
| TW201100379A (en) | 2011-01-01 |
| JP4600600B1 (ja) | 2010-12-15 |
| CN102459171A (zh) | 2012-05-16 |
| JP2011020998A (ja) | 2011-02-03 |
| KR101678028B1 (ko) | 2016-11-21 |
| CN102459171B (zh) | 2014-07-09 |
| TWI411606B (zh) | 2013-10-11 |
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