WO2016170848A1 - Capteur de force multiaxial - Google Patents

Capteur de force multiaxial Download PDF

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Publication number
WO2016170848A1
WO2016170848A1 PCT/JP2016/056324 JP2016056324W WO2016170848A1 WO 2016170848 A1 WO2016170848 A1 WO 2016170848A1 JP 2016056324 W JP2016056324 W JP 2016056324W WO 2016170848 A1 WO2016170848 A1 WO 2016170848A1
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WIPO (PCT)
Prior art keywords
force
sensor
axis
pressure sensor
pressure
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Ceased
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English (en)
Japanese (ja)
Inventor
アレクサンダー シュミッツ
ソフォン ソムロア
リチャード ハルタント
重樹 菅野
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Waseda University
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Waseda University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance

Definitions

  • the present invention relates to a multi-axis force sensor capable of detecting force components in the multi-axis direction of an applied external force.
  • a robot hand includes a six-axis force sensor that detects translational forces acting in the three orthogonal axes directions and a moment around the three orthogonal axes, and a tactile sensor that detects pressing force and shear force acting on the surface.
  • a six-axis force sensor that detects translational forces acting in the three orthogonal axes directions and a moment around the three orthogonal axes
  • a tactile sensor that detects pressing force and shear force acting on the surface.
  • the six-axis force sensor includes a strain gauge type force sensor and a capacitance type force sensor, as described in Patent Documents 1 and 2.
  • the conventional strain gauge type force sensor has a complicated structure and lacks compactness. Therefore, the degree of freedom of installation is small. For example, many sensors are arranged on a robot arm or robot hand. It is difficult to do. Therefore, Patent Documents 1 and 2 propose a capacitive force sensor as a six-axis force sensor applied to a robot.
  • Patent Document 3 discloses a tactile sensor in which three dielectric layers that react corresponding to the directions of three orthogonal axes are stacked, and two external shearing forces and one compressive force are detected with respect to the applied external force. Has been proposed.
  • the tactile sensor of Patent Document 3 must have three dielectric layers that become anisotropic sensors having different characteristics depending on the deformation in each axial direction, and this stacked structure reduces the size of the sensor. Not only is this difficult to achieve, but the spatial resolution is reduced, making it difficult to obtain a quick response.
  • the present invention has been devised in order to solve the above-described problems, and an object of the present invention is to detect a force component with respect to an external force applied from the surroundings with high accuracy and to make the entire configuration compact.
  • An object of the present invention is to provide a multi-axis force sensor that can be used.
  • the present invention mainly includes a sensor unit provided with a plurality of pressure sensors capable of detecting a pressing force in one direction and an external force that is provided around the sensor unit and acts on the sensor unit.
  • the sensor unit includes: The pressure sensors are arranged so as to be able to detect pressing forces from different directions, and even when an external force is applied to the cover from any of the three orthogonal axes, at least a part of the pressure sensors is used. The configuration is such that the pressure can be detected.
  • FIG. 1, FIG. 3 (A), or FIG. The standard. That is, unless otherwise specified, “front” means the near side in the x-axis direction of the coordinate axes of each figure, “rear” means the same depth side in the x-axis direction, and “right” Means the same right side (front side) in the same y-axis direction, “left” means the same left side (same depth side) in the same y-axis direction, and “upper” means the same in the same z-axis direction. “Lower” means the lower side in the z-axis direction.
  • the detection surfaces of the pressure sensors are arranged on different spaces so that the pressing forces from different directions can be detected.
  • each pressure sensor can be arranged in a compact manner, and a reduction in manufacturing cost can be expected.
  • the detection surfaces of the pressure sensors are set on different spaces so that the pressing force can be detected by at least a part of each pressure sensor. Since it can arrange
  • the pressure sensor is arranged so as to stand upright at a predetermined angle with respect to the base, and in accordance with the external force applied to the cover, the base is separated from the base with the joint portion as a fixed end.
  • a triaxial force sensor for obtaining a triaxial force component consisting of two orthogonal shear forces on a predetermined plane and a pressing force on the predetermined plane.
  • FIG. 1 is an overall configuration diagram including a schematic perspective view of a six-axis force sensor according to a first embodiment.
  • FIG. (A) is the schematic sectional drawing which looked at FIG. 1 from the right side (A direction in the figure)
  • (B) is the schematic sectional drawing which looked at the figure from back (B direction in the figure).
  • (C) is the schematic sectional drawing which looked at the figure from the upper part (A direction in the figure).
  • (A) is a schematic perspective view of the sensor unit which comprises the 6-axis force sensor of FIG. 1
  • (B) is a partial exploded perspective view of (A).
  • the schematic perspective view of the pressure sensor which comprises the said sensor unit.
  • the whole block diagram including the schematic perspective view which decomposed
  • FIG. 6 is a partial cross-sectional view of FIG. 5 viewed from the rear.
  • (A) is a whole block diagram including a schematic perspective view of a three-axis force sensor according to the third embodiment, and
  • (B) is a schematic perspective view of a sensor unit constituting the three-axis force sensor of (A). is there.
  • FIG. 1 shows an overall configuration diagram including a schematic perspective view of a six-axis force sensor according to the first embodiment.
  • FIG. 2 (A) shows FIG. 1 from the right side (A direction in FIG. 1). It is the schematic sectional drawing seen, the figure (B) is the schematic sectional drawing seen from the back (same B direction), and the figure (C) is the schematic sectional view seen from the same upper direction (same A direction) FIG.
  • the 6-axis force sensor 10 is configured to calculate the force component in the 6-axis direction of the applied external force, that is, the respective translational force in the orthogonal 3-axis direction (xyz axis direction in FIG. 1). Each moment around each axis is provided so as to be detectable.
  • the rear end side of the six-axis force sensor 10 is attached to an end effector of a robot such as a robot fingertip or a robot arm (not shown) via a connecting member J. .
  • the six-axis force sensor 10 includes a sensor unit 11 that detects a pressing force for the applied external force in each of the three axis directions, a cover 12 that is disposed so as to surround the outside of the sensor unit 11, and detection of the sensor unit 11. Based on the results, a calculation unit 13 is provided that calculates force components in the six-axis directions of external forces by calculation.
  • the sensor unit 11 is arranged at an inner support 15 (see FIG. 3B) having a T-shaped block shape in plan view and at a plurality of locations on the surface of the inner support 15.
  • the pressure sensor 16 is configured to detect a pressing force in one direction.
  • the internal support 15 is connected to the front at a substantially rectangular center position in the left-right direction of the first part 15A in the shape of a rectangular parallelepiped located on the rear side, and the width in the left-right direction is the first part 15A. And a second portion 15B having a cubic shape formed to be approximately half the size.
  • the pressure sensor 16 includes a lower fixed electrode 18 in FIG. 4 and a movable electrode 19 on the upper side in FIG.
  • a capacitance type pressure sensor having the following is used. That is, in this pressure sensor 16, the movable electrode 19 is arranged with a gap with respect to the fixed electrode 18, and the static electrode corresponding to the difference in the separation distance from the fixed electrode 18 based on the pressing force to the movable electrode 19 is provided. The pressing force can be detected by changing the electric capacity.
  • the movable electrode 19 is made of beryllium copper capable of optimizing sensitivity, and a cylindrical button-shaped protrusion 19A is formed on the surface of the movable electrode 19. Is adopted.
  • the projecting portion 19A displaces the movable electrode 19 substantially parallel to the opposed surface of the fixed electrode 18, so that crosstalk can be minimized.
  • the pressure sensor 16 is fixedly disposed at 12 locations on the outer surface of the internal support 15 so as to be able to detect pressing force from the top, bottom, left, and right and front and rear. .
  • the first and second sensors S1, S2 arranged in two places on the upper surface of the first portion 15A in the left-right direction
  • the third sensor S3 is disposed at one location on the upper surface of the portion 15B.
  • the first and second portions 15A are opposed to the first, second and third sensors S1, S2 and S3.
  • 15B, fourth, fifth and sixth sensors S4, S5, S6 are opposed to the first, second and third sensors S1, S2 and S3.
  • the fourth, fifth and sixth sensors S4, S5, S6 are relatively arranged in the vertical direction
  • the second and fifth sensors S2, S5 are relatively arranged in the vertical direction.
  • the third and sixth sensors S3 and S6 are relatively arranged in the vertical direction.
  • the seventh sensor S7 disposed on the left side surface of the first portion 15A and the left side surface of the second portion 15B are disposed on the left side surface.
  • the first and second portions 15A and 15B are arranged so as to be symmetrical to the seventh and eighth sensors S7 and S8. It is comprised by 9th and 10th sensor S9, S10 arrange
  • the seventh and ninth sensors S7, S9 are relatively arranged in the left-right direction
  • the eighth and tenth sensors S8, S10 are relatively arranged in the left-right direction. ing.
  • the pressure sensor 16 for detecting the pressing force from the front is constituted by an eleventh sensor S11 disposed at one place on the front surface of the second portion 15B.
  • a twelfth sensor disposed at one place on the rear surface of the first portion 15A and disposed symmetrically relative to the eleventh sensor S11.
  • S12 is comprised.
  • the cover 12 is not particularly limited, but has a substantially rectangular parallelepiped outer shape as shown in FIG. 1 and the like, and as shown in FIG. A space 12A is formed to be accommodated in a state where the protrusions 19A (see FIG. 4) of the 11 pressure sensors 16 are in contact with each other. That is, the cover 12 covers the sensor unit 11 while supporting the sensor unit 11 so as not to be relatively movable. Therefore, even when an external force is applied to each outer surface of the cover 12 from any one of the front, rear, left, and right directions, the pressing force based on the external force is detected by any one of the pressure sensors 16.
  • the calculation unit 13 calculates the force component in the six-axis direction of the external force acting on the cover 12 based on the detection result of each pressure sensor 16 according to the following equation.
  • the translational force in the three axes directions of the xyz axis is (Fx, Fy, Fz), and the moment (torque) around the three axes direction is (Mx, My, Mz).
  • the translational force and moment with a minus sign next to the translational force F and moment M represent components in the opposite direction in the axial direction represented by the character.
  • the detection values of the first and fourth sensors S1 and S4 that are opposed in the vertical direction are f 1a and f 1b, and the detection values of the second and fifth sensors S2 and S5 that are opposed in the vertical direction are f 2a
  • the detection values of the seventh and ninth sensors S7 and S9 that are opposite in the left-right direction are f 4a and f 4b
  • the detection values of the eighth and tenth sensors S8 and S10 that are opposite in the left-right direction are f 5a , f 4b .
  • Let f 5b Let f 5b .
  • Ln is a constant for performing adjustment based on the difference in performance. In addition to the adjustment between the sensors, Ln represents the distance of each pressure sensor 16 from a reference point (the center of gravity of the six-axis force sensor 19). This is a constant taken into account. In the following equation, the crosstalk process is omitted.
  • the present embodiment has a configuration of a six-axis force sensor 30 having a shape different from that of the first embodiment. It can be detected.
  • electrostatic pressure sensors 33 having the same principle as the pressure sensor 16 of the first embodiment are arranged on the six surfaces serving as the surfaces of the cubic internal support 32, respectively.
  • the sensor unit 11 is characterized. Although not shown, also in this embodiment, when a cover is covered around the sensor unit 11 and an external force is applied to each outer surface of the cover from one of the front, rear, left, and right directions. In addition, the pressing force based on the external force is detected by any one of the pressure sensors 33.
  • the pressure sensor 33 used in the present embodiment has a shape such that the fixed electrode 18 is divided into two with respect to the pressure sensor 16 used in the first embodiment, and the divided movable electrodes 18 are not mutually separated. It is configured so as to cause interference, and a single pressure sensor 16 is provided to allow moment measurement.
  • the pressure sensor 33 disposed on the upper surface of the internal support 32 detects a pressing force from above.
  • the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is divided into left and right.
  • a portion where a signal is detected by the left fixed electrode 18 is referred to as a first sensor S1
  • the right sensor A portion where a signal is detected by the fixed electrode 18 is referred to as a second sensor S2.
  • the pressure sensor 33 disposed on the lower surface of the internal support 32 detects a pressing force from below.
  • the pressure sensor 33 here is also arranged in a direction in which the fixed electrode 18 is divided into left and right.
  • a portion where a signal is detected by the left fixed electrode 18 is referred to as a third sensor S3, A portion where a signal is detected by the fixed electrode 18 is referred to as a fourth sensor S4.
  • the first and third sensors S1, S3 are relatively arranged in the vertical direction
  • the second and fourth sensors S2, S4 are relatively arranged in the vertical direction.
  • the pressure sensor 33 disposed on the left side surface of the internal support 32 detects a pressing force from the left side.
  • the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is divided into the front and the rear.
  • a portion where a signal is detected by the front fixed electrode 18 is referred to as a fifth sensor S5, and the rear side.
  • a portion where a signal is detected by the fixed electrode 18 is referred to as a sixth sensor S6.
  • the pressure sensor 33 disposed on the right side surface of the internal support 32 detects a pressing force from the right side.
  • the pressure sensor 33 here is also arranged in a direction in which the fixed electrode 18 is divided into the front and the rear.
  • a portion where a signal is detected by the front fixed electrode 18 is referred to as a seventh sensor S7.
  • a portion where a signal is detected by the fixed electrode 18 is referred to as an eighth sensor S8.
  • the fifth and seventh sensors S5, S7 are relatively arranged in the left-right direction
  • the sixth and eighth sensors S6, S8 are relatively arranged in the left-right direction.
  • the pressure sensor 33 disposed on the front surface of the internal support 32 detects a pressing force from the front.
  • the pressure sensor 33 is arranged in a direction in which the fixed electrode 18 is vertically divided.
  • a portion where a signal is detected by the upper fixed electrode 18 is referred to as a ninth sensor S9.
  • a portion where a signal is detected by the fixed electrode 18 is referred to as a tenth sensor S10.
  • the pressure sensor 33 disposed on the rear surface of the internal support 32 detects a pressing force from the rear.
  • the pressure sensor 33 is disposed so as to penetrate the connecting member J having a U-shape in plan view and exposed to the inside thereof, and is disposed in a direction in which the fixed electrode 18 is divided vertically.
  • a portion where a signal is detected by the upper fixed electrode 18 is referred to as an eleventh sensor S11
  • a portion where a signal is detected by the lower fixed electrode 18 is referred to as a twelfth sensor S12.
  • the ninth and eleventh sensors S9 and S11 are relatively disposed in the front-rear direction
  • the tenth and twelfth sensors S10 and S12 are relatively disposed in the front-rear direction.
  • the force components in the six-axis directions of the external force acting on the cover are calculated using the detection result of each pressure sensor 33 according to the following equation.
  • the translational force in the three axis directions and the moments about the same axis are represented by the same characters as described in the first embodiment, and the translational force in the three axis directions of the xyz axis is expressed as (Fx , Fy, Fz), and the moment (torque) around the three axis directions is (Mx, My, Mz).
  • the detection values of the first and third sensors S1, S3 facing in the vertical direction are f 1a , f 1b
  • the detection values of the second and fourth sensors S2, S4 facing in the vertical direction are f 2a
  • Let f2b Let f2b .
  • the detection values of the fifth and seventh sensors S5 and S7 facing in the left-right direction are f 3a and f 3b
  • the detection values of the sixth and eighth sensors S6 and S8 facing in the left-right direction are f 4a , f 3b
  • Let f4b the detection values of the ninth and eleventh sensors S9, S11 that are opposed in the front-rear direction
  • the detection values of the tenth and twelfth sensors S10, S12 that are opposed in the front-rear direction are f 6a
  • Let f6b Furthermore, Kn and Ln are the constants described in the first embodiment.
  • the present embodiment uses a pressure sensor 16 having a structure substantially the same as that of the first embodiment, as shown in FIGS. 7 (A) and FIG. 8 is characterized in that a three-axis force sensor 40 capable of detecting a shear force in the x-axis direction and the y-axis direction) and a pressing force in the z-axis direction in FIG.
  • the triaxial force sensor 40 is used as, for example, a tactile sensor disposed on the surface of a robot arm or the like.
  • the triaxial force sensor 40 includes a sensor unit 41 that detects the magnitude of the applied external force in a predetermined direction, a rubber cover 42 that is disposed so as to surround the outside of the sensor unit 41, and is elastically deformable, and a sensor. Based on the detection result of the unit 41, there is provided a calculation unit 43 that calculates the shear force in the biaxial direction and the pressing force on the xy axis plane by calculation.
  • the sensor unit 41 of the present embodiment has a predetermined angle (for example, 45 degrees) for each of the pressure sensors 16 at a plurality of portions of the base 45 disposed on the lower side in the figure. It is supported by standing up. Further, when an external force is applied from any direction around the cover 42, each pressure sensor 16 elastically deforms the cover 42 with the external force, so that the joint portion with the base 45 serves as a fixed end. It is arranged so as to be elastically displaceable in a direction approaching and separating from 45.
  • a predetermined angle for example, 45 degrees
  • the pressure sensor 16 is disposed in the first to fourth regions A1 to A4 obtained by dividing the upper surface of the base 45, which has a substantially rectangular shape in plan view, into four, and the inclination directions are different from each other. That is, the pressure sensor 16 is provided so as to be displaceable in opposite directions by external forces acting on the cover 42 in each of the two orthogonal axes (x-axis and y-axis directions).
  • two pressure sensors 16, 16 are arranged in parallel to each other.
  • First and second sensors S1, S2 are arranged in the first area A1 at the upper left in FIG. 8 so as to incline to the left in the figure.
  • third and fourth sensors S3 and S4 are arranged so as to incline upward in the figure.
  • fifth and sixth sensors S5 and S6 are arranged in the third area A3 at the lower left in the figure so as to incline downward in the figure.
  • seventh and eighth sensors S7 and S8 are arranged so as to incline to the right in the figure. That is, the pressure sensors 16 and 16 arranged in the first and fourth regions A1 and A4 are arranged point-symmetrically with respect to the center of the base 45, and when an external force compressing the cover 42 is applied, FIG.
  • the pressure sensors 16 and 16 arranged in the second and third regions A2 and A3 are also arranged point-symmetrically with respect to the center of the base 45, and when an external force that compresses the cover 42 is applied, They are tilted in opposite directions along the vertical direction (y-axis direction), which is the middle / up / down direction.
  • the pressure sensor 16 When the pressure sensor 16 is displaced with respect to the base 45 according to the external force acting on the cover 42 and the external force does not act on the cover 42, the pressure sensor 16 elastically returns to the original posture before the external force action. It is like that.
  • the pressure sensors 16 in the first to fourth regions A1 to A4 move toward the base 45. It falls down with the same amount of displacement, and the same detection value is obtained for all.
  • a shearing force acts on the upper surface of the cover 42 in the xy-axis direction
  • the pressure sensors 16 in the first to fourth regions A1 to A4 are inclined in the shearing force acting direction.
  • the pressure sensor 16 is the maximum amount of displacement.
  • the three-axis direction consisting of the shearing force in the xy-axis direction and the pressing force (compression force) in the z-axis direction is used.
  • the force component can be detected.
  • the force component in the three-axis direction of the external force acting on the cover 42 is calculated using the detection result of each pressure sensor 16 according to the following equation.
  • one detection value is specified for each of the first to fourth regions A1 to A4 from the detection value of the pressure sensor 16 provided in each of the first to fourth regions A1 to A4. .
  • This specification is performed based on preset processing such as an average value, a maximum value, a minimum value, and the like of each of the two pressure sensors 16 and 16.
  • the pressure sensors 16 provided in each of the regions A1 to A4 can be one each, or three or more.
  • the plurality of pressure sensors 16 are inclinedly arranged in the same direction for each of the first to fourth regions A1 to A4, more pressure sensors are provided in a limited region of the base 45. 16 can be arranged, and the sensor can be compact and have high spatial resolution.
  • the shearing force in the x-axis direction is Fx
  • the shearing force in the y-axis direction is Fy
  • the pressing force in the z-axis direction is Fz.
  • the detected values of the pressure sensor 16 in the first, second, third, and fourth regions A1, A2, A3, and A4 are defined as f 1 , f 2 , f 3 , and f 4 .
  • the pressure sensor in the present invention is not limited to the beryllium copper capacitive pressure sensor 16 of each of the embodiments described above, and various pressure sensors can be used as long as a pressing force in one direction can be similarly detected. be able to.
  • the pressure sensor 16 a structure in which the movable electrodes 19, 19 are arranged on the upper and lower surfaces of the fixed electrode 18 in FIG. In this case, since the detection values from the two movable electrodes 19 and 19 can be used at one place, the sensitivity can be doubled.

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Abstract

La présente invention a pour objet de fournir un capteur de force multiaxial qui peut précisément détecter des composantes de force par rapport à une force externe appliquée à partir de la périphérie, et qui peut rendre la structure globale compacte. Un capteur de force à six axes (10) comprend une unité de capteur (11) dans laquelle une pluralité de capteurs de pression (16) aptes à détecter une force de pression dans un sens sont prévus, un couvercle (12) qui est disposé à la périphérie de l'unité de capteur (11) et qui est constitué pour être apte à transmettre une force externe appliquée à l'unité de capteur (11), et une unité de calcul (13) qui trouve par calcul les composantes de force d'une force externe dans une pluralité de directions d'axe sur la base de la valeur de détection provenant de chaque capteur de pression (16). Chaque capteur de pression (16) est conçu de manière à être apte à détecter une force de pression provenant d'une direction mutuellement différente, et l'unité de capteur (11) est conçue de manière à être apte à détecter une force de pression par au moins certains des capteurs de pression (16), même lorsqu'une force externe est appliquée sur le couvercle (12) dans l'une quelconque des directions orthogonales à trois axes.
PCT/JP2016/056324 2015-04-20 2016-03-02 Capteur de force multiaxial Ceased WO2016170848A1 (fr)

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JP2015086315A JP2016205942A (ja) 2015-04-20 2015-04-20 多軸力センサ

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US10274627B2 (en) 2015-10-30 2019-04-30 Ion Geophysical Corporation Ocean bottom seismic systems
US11204365B2 (en) 2018-09-13 2021-12-21 Ion Geophysical Corporation Multi-axis, single mass accelerometer
CN113924196A (zh) * 2019-06-06 2022-01-11 欧姆龙株式会社 触觉传感器、机械手以及机器人
US11524414B2 (en) * 2018-08-30 2022-12-13 Toyota Jidosha Kabushiki Kaisha Sensor unit, sensor system, robot hand, robot arm, server device, calculation method, and program

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WO2020246009A1 (fr) 2019-06-06 2020-12-10 オムロン株式会社 Capteur tactile, main de robot et robot
CN113874179A (zh) * 2019-06-06 2021-12-31 欧姆龙株式会社 触觉传感器、机械手以及机器人
JP7509154B2 (ja) 2019-11-18 2024-07-02 ソニーグループ株式会社 ３軸センサ、センサモジュールおよび電子機器
DE102020125583A1 (de) 2020-09-30 2022-03-31 Neura Robotics GmbH Vorrichtung und Verfahren zur Ermittlung einer auf einen Körper wirkenden Kraft in wenigstens drei Raumrichtungen und Verfahren zur Ansteuerung der Bewegung eines Körpers

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Cited By (9)

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Publication number Priority date Publication date Assignee Title
US10274627B2 (en) 2015-10-30 2019-04-30 Ion Geophysical Corporation Ocean bottom seismic systems
US10545254B2 (en) 2015-10-30 2020-01-28 Ion Geophysical Corporation Multi-Axis, single mass accelerometer
US11561314B2 (en) 2015-10-30 2023-01-24 TGS-NOPEC Geophysical Corporation Multi-axis, single mass accelerometer
US12019197B2 (en) 2015-10-30 2024-06-25 Tgs-Nopec Geophysical Company Multi-axis, single mass accelerometer
US11524414B2 (en) * 2018-08-30 2022-12-13 Toyota Jidosha Kabushiki Kaisha Sensor unit, sensor system, robot hand, robot arm, server device, calculation method, and program
US11204365B2 (en) 2018-09-13 2021-12-21 Ion Geophysical Corporation Multi-axis, single mass accelerometer
CN113924196A (zh) * 2019-06-06 2022-01-11 欧姆龙株式会社 触觉传感器、机械手以及机器人
EP3981560A4 (fr) * 2019-06-06 2023-01-04 OMRON Corporation Capteur tactile, main de robot et robot
US12275132B2 (en) 2019-06-06 2025-04-15 Omron Corporation Tactile sensor, robot hand, and robot

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