WO2018105455A1 - Capteur de composant - Google Patents

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Publication number
WO2018105455A1
WO2018105455A1 PCT/JP2017/042717 JP2017042717W WO2018105455A1 WO 2018105455 A1 WO2018105455 A1 WO 2018105455A1 JP 2017042717 W JP2017042717 W JP 2017042717W WO 2018105455 A1 WO2018105455 A1 WO 2018105455A1
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WO
WIPO (PCT)
Prior art keywords
component sensor
flow path
light receiving
substrate
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/042717
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English (en)
Japanese (ja)
Inventor
慎一 岸本
正彦 大林
境　浩司
良介 飯井
植村　猛
吉内　茂裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
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Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of WO2018105455A1 publication Critical patent/WO2018105455A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity

Definitions

  • the present disclosure relates to a component sensor such as a fluid component detection device that detects the concentration of a fluid component using light absorption characteristics such as infrared rays.
  • Patent Document 1 a component sensor for fluid flowing through a pipe is known.
  • Patent Document 1 The conventional component sensor disclosed in Patent Document 1 is connected to a pipe through which a liquid passes, and detects the component of the liquid while flowing in and passing the liquid. Moreover, the component sensor using ATR method is known as a component sensor which measures the component of a fluid (patent documents 2, 3, and 4).
  • the component sensor is configured to detect a component of the fluid.
  • the component sensor includes a substrate, first and second convex portions provided on the main surface of the substrate, and infrared rays as the first convex portion. And a light receiving portion for detecting infrared rays emitted from the second convex portion.
  • the surface on the opposite side of the main surface of the substrate is configured so that the fluid contacts.
  • This component sensor is small and can detect fluid components with high accuracy.
  • FIG. 1 is a perspective view of a component sensor in the first embodiment.
  • 2 is a cross-sectional view of the component sensor shown in FIG. 1 taken along line II-II.
  • FIG. 3 is a perspective view of the component sensor in the second embodiment.
  • 4 is a cross-sectional view of the component sensor shown in FIG. 3 taken along line IV-IV.
  • FIG. 5 is a diagram illustrating an infrared ray locus of the component sensor according to the second embodiment.
  • FIG. 6A is a cross-sectional view of a component sensor according to Embodiment 3.
  • FIG. 6B is a cross-sectional view of another component sensor according to Embodiment 3.
  • FIG. 7 is a cross-sectional view of still another component sensor in the third embodiment.
  • FIG. 8 is a cross-sectional view of still another component sensor in the third embodiment.
  • FIG. 9 is an enlarged cross-sectional view of the component sensor in the fourth embodiment.
  • FIG. 10 is a perspective view of a component sensor in the fifth embodiment.
  • FIG. 11 is a schematic diagram of a component sensor in the fifth embodiment.
  • FIG. 12 is a side view of the component sensor in the fifth embodiment.
  • 13 is a cross-sectional view of the component sensor shown in FIG. 12, taken along line XIII-XIII.
  • FIG. 14 is a schematic diagram of a component sensor according to the fifth embodiment.
  • FIG. 15 is a schematic diagram of another component sensor according to the fifth embodiment.
  • FIG. 16 is a schematic diagram of still another component sensor according to the fifth embodiment.
  • FIG. 17 is a schematic diagram of still another component sensor according to the fifth embodiment.
  • FIG. 18 is a schematic diagram of still another component sensor in the fifth embodiment.
  • FIG. 19 is a schematic diagram of a component sensor according to the sixth embodiment.
  • FIG. 20 is a schematic diagram of a component sensor of a comparative example.
  • FIG. 21A is a schematic diagram of a component sensor according to Embodiment 6.
  • FIG. 21B is a schematic diagram of a component sensor according to Embodiment 6.
  • FIG. 22 is a schematic diagram of a component sensor according to the seventh embodiment.
  • FIG. 23 is a schematic diagram of another component sensor according to the seventh embodiment.
  • FIG. 24 is a schematic diagram of still another component sensor according to the seventh embodiment.
  • FIG. 25 is a schematic diagram of still another component sensor according to the seventh embodiment.
  • FIG. 26 is a schematic diagram of a component sensor according to the eighth embodiment.
  • FIG. 1 is a perspective view of a component sensor 1 according to the first embodiment.
  • FIG. 2 is a cross-sectional view of the component sensor 1 shown in FIG. In FIG. 1 and FIG. 2, an X axis, a Y axis, and a Z axis that are orthogonal to each other are defined.
  • the component sensor 1 emits infrared rays 8 toward the convex portion 6, the tube portion 3 extending in the extending direction D 101 parallel to the X axis, the substrate 5, the convex portions 6 and 7 provided on the substrate 5. And a light receiving portion 10 for receiving the infrared ray 8 emitted from the convex portion 7.
  • the tube portion 3 has a side wall 2 that extends in the X-axis direction and surrounds the internal space 3S.
  • Side wall 2 has inner wall surface 2A facing inner space 3S and outer wall surface 3B opposite to inner wall surface 2A.
  • the outer wall surface 3B does not face the inner space 3S.
  • An opening 4 is provided in the side wall 2 of the tube portion 3.
  • the substrate 5 covers the opening 4.
  • FIG. 2 shows a cross section taken along line II-II of the tube part 3 shown in FIG.
  • Both ends of the pipe part 3 are open, and the fluid 91 can flow in or out.
  • the fluid 91 is a liquid of fuel such as gasoline.
  • a flat flat portion 11 is provided on the outer wall surface 2 ⁇ / b> B of the side wall 2 of the tube portion 3.
  • the opening 4 is provided in the flat portion 11.
  • the flat portion 11 can easily form the opening 4 due to its flat shape, and can easily attach the substrate 5 to the tube portion 3.
  • the tube part 3 may not have the flat part 11.
  • the cross section perpendicular to the X axis of the portion of the tube portion 3 where the flat portion 11 is provided has a rectangular parallelepiped shape as shown in FIG. This cross section of the tube part 3 may have a polygonal shape, and a part other than the flat part 11 may have an arc shape.
  • the substrate 5 is made of silicon.
  • the substrate 5 is not limited to silicon, but can be easily processed by being formed of silicon.
  • the substrate 5 has principal surfaces 12 and 13 opposite to each other.
  • the main surface 12 covers the opening 4.
  • Convex portions 6 and 7 are provided on the main surface 13.
  • the convex portions 6 and 7 are formed by etching a silicon substrate that is a material of the substrate 5, that is, the convex portions 6 and 7 are formed integrally with the substrate 5. By forming the substrate 5 and the convex portions 6 and 7 integrally, the convex portions 6 and 7 can be easily formed.
  • the convex portion 6 is provided with an inclined surface 14, and the convex portion 7 is provided with an inclined surface 15.
  • the inclined surfaces 14 and 15 are inclined with respect to the main surface 13.
  • the refractive index of the substrate 5 is larger than the refractive index of the fluid 91. For this reason, the infrared rays 8 are incident on the inside of the substrate 5 from the inclined surface 14 and are emitted from the inclined surface 15 after being totally reflected inside the substrate 5.
  • the inclined surface 14 and the inclined surface 15 are formed by anisotropic etching.
  • the inclined surfaces 14 and 15 can be easily formed by forming by anisotropic etching. When a (100) wafer is used as the substrate 5, the plane orientation of the inclined surfaces 14 and 15 is the (111) plane, and the angle ⁇ of the inclined surfaces 14 and 15 with respect to the main surface 13 is 54.7 °.
  • the infrared rays 8 can be totally reflected by the main surface 12 at the boundary surface between the substrate 5 and the internal space 3S of the tube portion 3, that is, inside the substrate 5.
  • the convex portions 6 and 7 may be formed separately from the substrate 5 and bonded to the substrate 5.
  • the infrared rays 8 incident on the substrate 5 from the inclined surface 14 are totally reflected a plurality of times by the main surfaces 12 and 13 inside the substrate 5 and emitted from the inclined surface 15.
  • an evanescent wave enters the fluid 91 and is absorbed and attenuated by the fluid 91.
  • the convex portions 6 and 7 are provided apart from each other. Therefore, the infrared rays 8 incident from the inclined surface 14 are totally reflected a plurality of times until they are emitted from the inclined surface 15.
  • the attenuation amount by which the infrared rays 8 are attenuated before entering the light receiving unit 10 is increased, and the detection accuracy of the component of the fluid 91 is improved.
  • the region through which the infrared rays 8 between the convex portions 6 and 7 of the substrate 5 are transmitted can be thinned.
  • the number of times the infrared rays 8 are totally reflected when passing through the substrate 5 is increased, and the detection accuracy of the component of the fluid 91 is improved.
  • count that the infrared rays 8 are totally reflected can be increased because the board
  • the conventional component sensor disclosed in Patent Document 1 is difficult to detect components with high accuracy. That is, this component sensor is configured as a side flow in which the flow path for the liquid containing the component to be detected flows is extremely thin. Therefore, it is difficult to stably flow in the liquid, and it is difficult to detect the components with high accuracy.
  • the component sensor is increased in size when the number of reflections of infrared rays in the substrate is increased in order to improve detection accuracy.
  • the component sensor 1 in the first embodiment can detect the component of the fluid 91 with high accuracy and can be downsized.
  • the light emitting unit 9 uses a platinum thin film resistance element capable of emitting infrared rays 8.
  • the light emitting unit 9 may use a light emitting diode capable of emitting infrared rays 8.
  • a semiconductor bare chip is used for the light emitting diode.
  • the light emitting unit 9 is provided on the side of the tube unit 3 on which the substrate 5 is provided, and is arranged so that the infrared rays 8 are incident on the projection 6.
  • the infrared ray 8 has a wavelength that is easily absorbed by the fluid 91 to be detected. In the first embodiment, the wavelength of the infrared ray 8 is 2 ⁇ m to 15 ⁇ m. By using a wavelength in this range, the component of the fluid 91 can be detected with high accuracy.
  • the wavelength range of the infrared ray 8 may be further narrowed according to the use application of the component sensor 1.
  • the wavelength range of the infrared ray 8 can be narrowed.
  • the light receiving unit 10 uses a semiconductor bare chip.
  • the light receiving unit 10 is disposed at a position where the infrared ray 8 emitted from the convex portion 7 can be detected on the side of the tube unit 3 on which the substrate 5 is provided.
  • the light receiving unit 10 includes light receiving elements 16, 17, and 18.
  • the light receiving element 16 is provided with an optical filter 19
  • the light receiving element 17 is provided with an optical filter 20, and an optical filter 21 is provided in front of the light receiving element 18.
  • the light receiving unit 10 includes a housing 22 that supports the light receiving elements 16, 17, and 18 and the optical filters 19, 20, and 21.
  • the optical filters 19, 20, and 21 transmit infrared rays having different wavelengths.
  • the optical filter 19 transmits infrared rays 8 having a small absorption amount absorbed by the fluid 91.
  • the optical filters 20 and 21 transmit the infrared ray 8 having a wavelength with a larger amount of absorption of the fluid 91 than the wavelength transmitted through the optical filter 19.
  • the amount of absorption of the infrared ray 8 in the fluid 91 can be known, so that the component of the fluid 91 can be detected with high accuracy. Even without the light receiving element 18, the components of the fluid 91 can be accurately detected by the light receiving elements 16 and 17.
  • two types of components of the fluid 91 can be detected with high accuracy. When it is desired to increase the types of components of the fluid 91 to be detected, the number of light receiving elements may be further increased.
  • the light emitting part 9 is arranged at a position spaced from the convex part 6 in the negative direction of the Z axis.
  • the light receiving unit 10 is disposed at a position away from the convex part 7 in the negative direction of the Z axis.
  • the component sensor 1 can be reduced in size.
  • the incident angle of the infrared rays 8 incident on the inclined surface 14 is reduced, and the infrared rays 8 can penetrate deeply into the fluid 91, thereby improving the detection accuracy of the component sensor 1.
  • the light emitting unit 9 and the light receiving unit 10 are provided on the surface 23 ⁇ / b> A of the same support substrate 23.
  • the light emitting unit 9 has a light emitting surface 9P that emits infrared rays 8.
  • the light receiving unit 10 has a light receiving surface 10 ⁇ / b> P that receives the infrared rays 8.
  • the light emitting unit 9 and the light receiving unit 10 are arranged so that the light emitting surface 9P of the light emitting unit 9 and the light receiving surface 10P of the light receiving unit 10 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. Yes. By arranging in this way, the light emitting unit 9 and the light receiving unit 10 can be easily mounted.
  • the light emitting unit 9 and the light receiving unit 10 do not have to be provided on the same support substrate 23, and the light emitting unit 9 and the light receiving unit 10 are in the range of the angle at which the infrared rays 8 are totally reflected in the substrate 5. You may arrange
  • FIG. 3 is a perspective view of the component sensor 31 in the second embodiment.
  • FIG. 4 is a sectional view of the component sensor 31.
  • FIG. 5 shows the locus of the infrared rays 8 of the component sensor 31.
  • FIG. 4 shows a cross section taken along line IV-IV of the tube part 3 shown in FIG.
  • FIG. 5 shows a portion hidden by the substrate 5 by a broken line, and shows a locus of the infrared rays 8 totally reflected in the substrate 5 by a broken line.
  • the same reference numerals are assigned to the same parts as those of the component sensor 1 in the first embodiment shown in FIGS. 1 and 2.
  • the component sensor 31 has a light receiving portion 32 that receives the infrared ray 8 emitted from the convex portion 7 instead of the light receiving portion 10 of the component sensor 1 shown in FIGS. 1 and 2.
  • the light receiving unit 32 has a light receiving surface 32 ⁇ / b> P that receives the infrared rays 8.
  • the light receiving unit 32 and the light emitting unit 9 are arranged so that the light receiving surface 32P of the light receiving unit 32 and the light emitting surface 9P of the light emitting unit 9 are located on the same plane P23, that is, at the same distance from the surface 23A of the support substrate 23. ing.
  • the light receiving unit 32 includes light receiving elements 16, 17, 18 and optical filters 19, 20, 21, similarly to the light receiving unit 10 of the component sensor 1 shown in FIGS. 1 and 2.
  • the light receiving elements 16, 17, and 18 have light receiving surfaces 16 ⁇ / b> P, 17 ⁇ / b> P, and 18 ⁇ / b> P that receive the infrared rays 816, 817, and 818 that are part of the infrared ray 8.
  • the light receiving elements 16, 17 and 18 are arranged such that the light receiving surfaces 16P, 17P and 18P are positioned on the plane P23, that is, at the same height from the surface 23A of the support substrate 23. This facilitates mounting of the light receiving elements 16, 17, and 18.
  • the light receiving elements 16, 17, and 18 are arranged side by side in the direction of the Y axis, that is, in the direction parallel to the main surface 13 of the substrate 5 and perpendicular to the X axis.
  • the infrared rays 8 transmitted through the substrate 5 are emitted from the convex portion 7 as infrared rays 816, 817, and 818 that are arranged in the Y-axis direction and spread away from each other.
  • the light receiving elements 16, 17, and 18 arranged side by side in the Y-axis direction can efficiently detect the infrared rays 816, 817, and 818, respectively.
  • FIG. 6A is a cross-sectional view of component sensor 41 in the third embodiment.
  • the component sensor 41 has a convex portion 47 provided on the main surface 12 of the substrate 5 instead of the convex portion 7 of the component sensor 1 shown in FIGS. 1 and 2.
  • FIG. 6A shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10.
  • the locus of the infrared ray 8 is indicated by a straight line outside the substrate 5 and indicated by a broken line inside the substrate 5.
  • the substrate 5 of the component sensor 41 has the convex portions 6 and 47 arranged in the Z-axis direction with the substrate 5 sandwiched at the same position in the X-axis direction. Note that a deviation due to a manufacturing error is allowed from the same position here.
  • the light emitting part 9 is provided so that the infrared ray 8 is incident on the convex part 6, and the light receiving part 10 is provided so as to receive the infrared ray 8 emitted from the convex part 47.
  • a reflective film 43M made of gold, aluminum, or the like is provided on the side end face 43 of the substrate 5 in the X-axis direction.
  • the infrared ray 8 incident from the inclined surface 14 of the convex portion 6 travels inside the substrate 5 while repeating total reflection on the main surfaces 12 and 13 in the X-axis direction, and is reflected by the side end surface 43 by the reflective film 43M. It advances inside the substrate 5 while repeating total reflection at the main surfaces 12 and 13 toward 47, and exits from the inclined surface 45 of the convex portion 47 to the outside of the substrate 5.
  • the side end face 43 to reflect the infrared rays 8
  • the optical path length of the optical path in the substrate 5 on which the infrared rays 8 travel is increased, and the number of times the infrared rays 8 are reflected can be increased.
  • the sensitivity of the component sensor 41 can be improved. Further, since the optical path length of the infrared ray 8 is increased even if the length of the substrate 5 in the X-axis direction is the same, the component sensor 41 can be downsized while maintaining the sensitivity.
  • the protrusions 6 and 47 may be formed on i such as the substrate 5, or may be formed separately from the substrate 5 and bonded to the substrate 5.
  • FIG. 6B is a cross-sectional view of another component sensor 41A in the third embodiment. 6B, the same reference numerals are given to the same portions as those of the component sensor 41 shown in FIG. 6A.
  • the substrate 5 has a side end surface 143 opposite to the side end surface 43 in the X-axis direction.
  • the component sensor 41 ⁇ / b> A further includes a reflective film 143 ⁇ / b> M provided on the side end surface 143 of the substrate 5.
  • the infrared rays 8 are reflected in the substrate 5 also on the side end surface 143 by the reflective film 143M.
  • the infrared ray 8 is reflected by the side end surfaces 43 and 143 a plurality of times, the optical path length of the optical path through which the infrared ray 8 passes through the inside of the substrate 5 can be increased, and the sensitivity of the component sensor 41A is further improved. Can do. Further, the component sensor 41A can be further downsized while maintaining the sensitivity of the component sensor 41A.
  • the convex portions 6 and 47 are arranged at the same position in the X-axis direction of the substrate 5 with the substrate 5 sandwiched in the Z-axis direction. If the infrared rays 8 are reflected by the side end face 43 of the substrate 5, the arrangement positions of the convex portions 6 and 47 are not limited to this.
  • FIG. 7 is a cross-sectional view of still another component sensor 41B in the third embodiment.
  • the same reference numerals are given to the same portions as the component sensors 41 and 41A shown in FIGS. 6A and 6B.
  • FIG. 7 shows the positional relationship among the substrate 5, the light emitting unit 9, and the light receiving unit 10 of the component sensor 41B.
  • the component sensor 41B the light emitting unit 9 and the light receiving unit 10 are disposed on the same side of the substrate 5 in the Z-axis direction.
  • the component sensor 41 ⁇ / b> B has one convex portion 44 provided on the main surface 13 of the substrate 5 instead of the convex portions 6 and 7 of the component sensors 41 and 41 ⁇ / b> A.
  • the convex portion 44 includes inclined surfaces 45A and 45B that are inclined with respect to the main surface 12 of the substrate 5, and a surface 44A that connects the inclined surfaces 45A and 45B.
  • the surface 44A is parallel to the main surface 13.
  • the infrared rays 8 emitted from the light emitting unit 9 are incident from the inclined surface 45A of the convex portion 44, are repeatedly totally reflected on the surface of the substrate 5, travel inside the substrate 5, are emitted from the inclined surface 45B, and are received by the light receiving unit 10. Received light.
  • Reflective films 43M and 143M are provided on side end surfaces 43 and 143 on the opposite sides of the substrate 5 in the X-axis direction, respectively.
  • the infrared ray 8 is totally reflected at the side end faces 43 and 143 a plurality of times by the reflection films 43M and 143M inside the substrate 5, and is repeatedly totally reflected at the main surfaces 12, 13, and 44A, and from the inclined surface 45B of the convex portion 44 of the substrate 5.
  • substrate 5 of the infrared rays 8 can be lengthened, the sensitivity of the component sensor 41B can be improved, or the component sensor 41B can be reduced in size.
  • FIG. 8 is a plan view of still another component sensor 41C in the third embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensors 1, 41, and 41A shown in FIGS. 1, 2, 6A, and 6B.
  • FIG. 8 shows the positional relationship between the substrate 5 and the convex portions 6 and 7 of the component sensor 41C.
  • FIG. 8 is a view of the main surface 13 of the substrate 5 of the component sensor 41C as viewed from the Z-axis direction.
  • the component sensor 41 ⁇ / b> C is provided with convex portions 6 and 7 on the main surface 13 in the same direction of the Z axis of the substrate 5.
  • the convex portions 6 and 7 are provided at different positions in the X-axis direction and different positions in the Y-axis direction. In FIG. 8, the convex portions 6 and 7 are provided at positions opposite to each other on the diagonal of the main surface 13 of the substrate 5.
  • Reflective films 43M and 143M are provided on side end surfaces 43 and 143 in the opposite directions of the X axis of the substrate 5, respectively.
  • the infrared ray 8 incident from the convex portion 6 is totally reflected a plurality of times at the side end surfaces 43 and 143 by the reflective films 43M and 143M and is emitted from the convex portion 7.
  • the optical path length of the optical path through which the infrared rays 8 travel in the substrate 5 can be increased, so that the sensitivity of the component sensor 41C can be improved and the component sensor 41C can be downsized. .
  • FIG. 9 is an enlarged cross-sectional view of the component sensor 51 in the fourth embodiment. 9, the same parts as those of the component sensors 1, 41, 41A to 41C shown in FIGS. 1 to 8 are denoted by the same reference numerals.
  • the substrate 5 seals the opening 4 using the sealing material 53 on the tube 3.
  • the thickness L2 in the Z-axis direction of the outer edge portion 5C including the side end surfaces 43 and 143 of the substrate 5 is larger than the thickness L1 of the central portion of the substrate 5 in the Z-axis direction. That is, the outer edge portion 5C of the substrate 5 is locally thick. If the thickness of the substrate 5 in the Z-axis direction is reduced, the number of reflections of the infrared rays 8 increases, and the sensitivity of the component sensor 51 can be improved. However, since the strength of the substrate 5 decreases when the substrate 5 is thinned, the substrate 5 may be cracked when the substrate 5 is sealed with the opening portion 4 using the sealing material 53. Since the component sensor 51 locally increases the thickness L2 of the outer edge portion 5C for mounting the substrate 5 on the tube portion 3, the sealing strength can be improved.
  • FIG. 10 is a perspective view that three-dimensionally represents the component sensor 110 according to the fifth embodiment.
  • FIG. 11 is a schematic diagram of the component sensor 110.
  • FIG. 12 is a side view of the component sensor 110.
  • 13 is a cross-sectional view of the component sensor 110 shown in FIG. 12 taken along line XIII-XIII.
  • FIG. 14 is a schematic diagram of the component sensor 110. 10 to 14, the X axis, the Y axis, and the Z axis that are orthogonal to each other are defined.
  • the component sensor 110 detects a fluid component.
  • the component sensor 110 is connected to a fuel pipe of an automobile and allows liquid fuel, which is a fluid, to flow in and pass through to detect the fuel component.
  • the component sensor 110 includes a flow channel 101 into which the fluid 191 flows, a detection flow channel 107 connected to the flow channel 101, and a flow that is connected to the detection flow channel 107 and discharges the fluid 191 to the outside of the component sensor 110.
  • a path 103 and a detour 102 connected to the flow paths 101 and 103 are provided.
  • the fluid 191 is a fuel that is a liquid.
  • the channel 101 extends in the extending direction that is the direction of the X axis.
  • the channel 101, the detection channel 107, and the channel 103 are arranged on a straight line parallel to the X axis.
  • a light emitting unit 104 and a light receiving unit 105 are provided outside the detection channel 107 so as to sandwich the detection channel 107 therebetween.
  • the Z axis extends in a direction from the center point 107C of the detection flow path 107 toward the light emitting unit 104.
  • the X axis extends from the center point 107C of the detection flow path 107 in a direction toward the connection port 116 at a right angle to the Z axis.
  • the Y axis is orthogonal to the X axis and the Z axis at the center point 107C of the detection flow path 107.
  • the detection flow path 107 is located in the extending direction of the flow path 101 from the flow path 101. That is, a straight line 101S parallel to the X axis passes through an internal space in which the fluid 191 in the flow channel 101 flows and an internal space in which a part 191A of the fluid 191 in the detection flow channel 107 flows.
  • the detour 102 has a U-shape to bypass the detection flow path 107.
  • the detour 102 is connected to the flow path 101 through the connection port 119 and is connected to the flow path 103 through the connection port 219.
  • the detection flow path 107 is connected to the flow path 101 through the connection port 116, and is connected to the flow path 103 through the connection port 121.
  • the connection port 119 is perpendicular to the connection port 116.
  • FIG. 11 specifically shows the ranges of the flow path 101, the bypass 102, the flow path 103, the detection flow path 107, the connection port 116, and the connection port 119 with a frame indicated by a broken line.
  • the distance L101 of the farthest part between the internal space of the flow path 101 and the internal space of the detour 102 in the Y-axis direction is equal to the internal space of the detection flow path 107 and the detour 102. Is equal to the distance L102 of the furthest part from the internal space.
  • connection port 116 has a shape extending in the Y-axis direction, that is, toward the connection port 119. That is, the width of the connection port 116 in the Y-axis direction is larger than the width of the Z-axis direction perpendicular to that direction.
  • the connection port 116 has a rectangular shape extending in the Y-axis direction.
  • the shape may be an arbitrary shape that is elongated in the Y-axis direction.
  • the materials of the flow paths 101 and 103 and the detour 102 are appropriately selected according to the fluid 191.
  • the fluid 191 is fuel, and it is preferable to use a single metal or an alloy as the material of the flow paths 101 and 103 and the bypass 102.
  • a resin may be used as the material of the flow paths 101 and 103 and the bypass 102, or glass, wood, bamboo, etc. As long as the purpose of the form can be satisfied, it is appropriately selected.
  • the material of the detection channel 107 is made of a material that transmits the light 108 emitted from the light emitting unit 104. In the fifth embodiment, silicon, germanium, glass, or the like is used, but the material is not particularly limited thereto.
  • the flow paths 101 and 103, the detour path 102, and the detection flow path 107 are appropriately selected in consideration of the purpose of use, manufacturing cost, and the like. For example, screw connection, soldering, welding, joining by unevenness, screwing, adhesion, etc. Connected in the way. If the effects of the fifth embodiment can be realized without hindrance, the flow paths 101 and 103, the bypass path 102, and the detection flow path 107 are made of the same material and can be manufactured seamlessly using a mold or the like. Alternatively, it may be composed of two or more parts.
  • the width of the detection channel 107 in the Z-axis direction is preferably 10 ⁇ m or more and 100 ⁇ m or less, but is not limited to this as long as the object of the present embodiment can be satisfied.
  • the fluid 191 to be detected is a liquid that easily absorbs the light 108 such as water, soft drinks, and fruit juice
  • the light 108 does not easily reach the light receiving unit 105.
  • the detection flow path 107 is not easily manufactured as compared with the case where the fuel component is detected, but the width of the detection flow path 107 may be 10 ⁇ m or less.
  • the component sensor 110 performs processing based on information obtained from the light receiving unit 105 and the housing 106 that accommodates each of the above-described components, and the processing provided in the housing 106 that detects components and analyzes the concentration. And a portion 109.
  • the light 108 emitted from the light emitting unit 104 is an infrared ray having a wavelength in the range of 2.5 ⁇ m to 15 ⁇ m. Infrared light whose wavelength stays within this range is easily absorbed by the fluid 191 and can detect various components of the fluid 191 with high sensitivity.
  • the light 108 emitted from the light emitting unit 104 passes through the detection channel 107, passes through the fluid 191 flowing through the detection channel 107, and is received by the light receiving unit 105.
  • the amount of the light 108 that can be received by the liquid flowing through the detection flow path 107 and received by the light receiving unit 105 is determined in the detection flow path 107. It decreases compared to the case where there is no.
  • the processing unit 109 can process output information corresponding to the amount of light received by the light receiving unit 105 to detect a component of the fluid 191 or measure the concentration of the fluid 191.
  • the detection flow path 107 is connected to the flow path 101 in the extending direction D101 of the flow path 101. Due to this positional relationship, the fluid 191 that flows in from the outside travels straight toward the detection flow path 107. With this configuration, it is possible to solve the following problems that occur when the components of the fluid 191 are detected using the light 108.
  • the amount of absorption by which the fluid 191 absorbs the light 108 is calculated based on the amount of light 108 emitted from the light emitting unit 104 at the light receiving unit 105. Then, the component of the fluid 191 is detected and the concentration is measured.
  • the light 108 emitted from the light emitting unit 104 needs to reach the light receiving unit 105. In order to ensure that the emitted light 108 reaches the light receiving unit 105, the light 108 is increased or the distance between the light emitting unit 104 and the light receiving unit 105 is shortened.
  • the distance between the light emitting unit 104 and the light receiving unit 105 can be increased, whereby the fluid 191 can easily flow into the detection channel 107.
  • the power consumed by the light emitting unit 104 is increased and the component sensor 110 is enlarged.
  • the detection channel 107 becomes narrow, there arises a problem that it is difficult to allow the fluid 191 to flow in.
  • infrared rays used to detect components with high accuracy are easily absorbed by the fluid 191, they may be excessively absorbed by the fluid 191 before reaching the light receiving unit 105 and may not be detected by the light receiving unit 105. .
  • the detection flow path 107 is located in the extending direction D101 of the flow path 101 and is connected to the flow path 101. Therefore, the fluid 191 that is the liquid flowing in from the flow path 101 is used. Goes straight toward the connection port 116 with the detection channel 107. As a result, pressure is generated toward the detection flow path 107, and the fluid 191 (191A) easily flows into the detection flow path 107 due to this pressure.
  • the fluid 191 (191B) that has not flowed into the detection flow path 107 flows to the detour path 102, bypasses the detection flow path 107, reaches the flow path 103, and is discharged to the outside.
  • the flow path 101, the detection flow path 107, and the flow path 103 constitute a linear piping structure whose intermediate portion is narrowed rapidly.
  • the detour 102 prevents the flow of the entire fluid 191 from being obstructed by causing the part 191B of the fluid 191 to bypass the piping structure.
  • the component sensor 110 in the fifth embodiment has a symmetrical shape with respect to a straight line 107L (see FIG. 14) that passes through the center point 107C of the detection flow path 107 and extends in the Y-axis direction. In this case, even if the fluid 191 flows in from the flow path 101 or the fluid 191 flows in from the flow path 103, there is no functional problem, so the fluid 191 may flow in any direction.
  • the component sensor 110 suppresses the power consumption of the light-emitting unit 104 and allows the fluid 191 (191A) to stably flow into the narrow detection channel 107 while reducing the size. Make it possible.
  • FIG. 15 is a schematic diagram of another component sensor 110A according to the fifth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14.
  • each of the flow paths 101 and 103 and the detour 102 form a sharp ridge of 90 degrees at the connection ports 119 and 219.
  • the U-shaped corner of the detour 102 forms a sharp ridge of 90 degrees.
  • the corners 1102 and 2102 of the connection ports 119 and 219 are smoothly rounded, and the corners 3102 to 6102 of the detour 102 are also smoothly rounded. This configuration is preferable because the flow of the fluid 191 is not hindered in the flow paths 101 and 103 and the bypass 102.
  • FIG. 16 is a schematic diagram of still another component sensor 110B in the fifth embodiment.
  • the same reference numerals are assigned to the same parts as those of the component sensor 110 shown in FIGS.
  • the component sensor 110 ⁇ / b> B bypasses the detection flow path 107 in the same manner as the bypass 102 and is connected to the flow paths 101 and 103. Is provided.
  • the detours 102A and 102B have the same effect as the detour 102.
  • a portion 191B1 of the portion 191B of the fluid 191 flows through the detour 102A, and the remaining portion 191B2 of the portion 191B of the fluid 191 flows through the detour 120B.
  • the sum of the cross-sectional areas of the cross sections perpendicular to the flow direction of the portions 191B1 and 191B2 of the part 191B of the fluid 191 of the detours 102A and 102B is equal to the cross-sectional area S4 of the detour 102 of the component sensor 110 shown in FIGS.
  • the cross-sectional area S1 of the flow channel 101, the cross-sectional area S2 of the flow channel 103, and the cross-sectional area S3 of the detection flow channel 107 satisfy the above relationship.
  • the plurality of detours 102A and 102B provide design diversity according to the size of the member, design problems, and the shape of the target to which the component sensor 110 is attached.
  • FIG. 17 is a schematic diagram of still another component sensor 110C according to the fifth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS. 10 to 14.
  • the flow paths 101 and 103 are bent halfway.
  • the portion connected to the connection port 116 of the flow channel 101 extends in the extending direction D101
  • the portion connected to the connection port 121 of the flow channel 103 extends in the extending direction D101.
  • FIG. 18 is a schematic diagram of still another component sensor 110D according to the fifth embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110A shown in FIG.
  • the detour 102 does not have the corners 3102 to 6102 of the component sensor 110A shown in FIG. 15, but has a C shape. With this configuration, the fluid 191 flows through the detour 102 smoothly.
  • FIG. 19 is a schematic diagram of a component sensor 110E according to the sixth embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS.
  • the detection flow path 107 is displaced in parallel to the positive direction of the Y axis, and the inner space of the flow path 101 and the internal space of the detour 102 are farthest apart in the Y axis direction.
  • the distance L101 of the left portion is larger than the distance L102 of the farthest portion between the internal space of the detection flow path 107 and the internal space of the detour 102.
  • the detection flow path 107 is displaced in parallel from the flow paths 101 and 103 toward the detour 102 in the Y-axis direction.
  • a taper 120 is provided on the inner wall surface that is connected to the connection port 116 and faces the internal space through which the fluid 191 of the flow path 101 flows.
  • the taper 120 is inclined with respect to the extending direction D101 parallel to the X axis toward the detection flow path 107 and the bypass path 102.
  • the taper 120 moves the fluid 191 directly from the flow channel 101 to the detection flow channel 107 and the detour 102, thereby facilitating the inflow of the fluid 191 (191 ⁇ / b> A) into the detection flow channel 107.
  • FIG. 20 is a schematic diagram of a component sensor 110P of a comparative example. 20, the same reference numerals are assigned to the same portions as those of the component sensor 110E shown in FIG.
  • the inner wall surface of the flow path 101 is not provided with a taper.
  • the flow of the fluid 191 is hindered around the connection port 116, and the fluid 191 does not smoothly flow into the detection flow path 107 and the bypass 102.
  • 21A and 21B are schematic diagrams showing the flow of the fluid 191 of the component sensor 110E and the component sensor 110, respectively.
  • the fluid 191 flowing in from the end of the flow path 101 flows as a flow 111 toward the detection flow path 107.
  • the flow 112 reaches the connection port 116 as a flow 112 following the taper 120 leading to the detection flow path 107. Since the detection flow path 107 has a much smaller volume than the flow path 101, a part 191 ⁇ / b> B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as the flow 113.
  • the fluid 191 goes straight to the detection flow path 107 as the flow 111, and a part 191B of the fluid 191 flows into the detection flow path 107 as the flow 112. A part 191B of the fluid 191 that does not flow into the detection flow path 107 flows into the detour 102 as a flow 115.
  • a stagnation 114 may occur between the flow channel 101 and the detection flow channel 107.
  • the detection flow path 107 is shifted in parallel toward the bypass path 102, thereby reducing the retention 114 of the fluid 191 and improving the movement efficiency of the fluid 191. As a result, the inflow efficiency in which a part 191A of the fluid 191 flows into the detection channel 107 is improved.
  • FIG. 22 is a schematic diagram of a component sensor 110F according to the seventh embodiment.
  • the same reference numerals are assigned to the same portions as those of the component sensor 110 in the fifth embodiment shown in FIGS.
  • the portion closest to the detour 102 on the inner wall surface facing the internal space through which a part 191A of the fluid 191 of the detection flow path 107 of the component sensor 110 in the fifth embodiment flows is the detour 102. It's shifted away.
  • a connection port 116 with the channel 101 extends to the inside of the detour 102.
  • the volume of the detection channel 107 increases, the area of the connection port 116 increases, and the inflow efficiency of the part 191A of the fluid 191 into the detection channel 107 increases.
  • FIG. 23 is a schematic diagram of another component sensor 110G according to the seventh embodiment.
  • the detection flow path 107 of the component sensor 110 ⁇ / b> F shown in FIG. 22 is shifted from the flow path 101 in parallel toward the detour 102.
  • the size of the members and the shape of the detection flow path 107 may be changed according to design requirements.
  • FIGS. 24 and 25 are schematic diagrams of still other component sensors 110H and 110I in the seventh embodiment, respectively. 24 and 25, the same reference numerals are assigned to the same parts as those of the component sensors 110F and 110G shown in FIGS. In the component sensors 110H and 110I shown in FIGS. 24 and 25, the detection flow path 107 is narrowed from the connection port 116 toward the connection port 121.
  • FIG. 26 is a schematic diagram of a component sensor 110J according to the eighth embodiment.
  • the same reference numerals are given to the same portions as those of the component sensor 110 shown in FIGS.
  • the flow path 103 extends in a direction orthogonal to the plane where the bypass 102 is connected to the flow path 103, that is, in the Y-axis direction. It flows in the direction of the axis.
  • the discharge flow 117 mainly from the detour 102 having a large flow rate goes straight toward the end of the flow path 103, so that the passage speed of the fluid 191 passing through the flow path 103 increases.
  • the discharge flow 118 discharged from the detection flow path 107 is also drawn into the discharge flow 117 due to the surface tension of the fluid 191 body, and the flow speed increases. To do. If the speed of the discharged water stream 118 increases, the inflow speed of the part 191A of the fluid 191 that flows into the detection channel 107 from the action of the surface tension of the fluid 191 also increases. As described above, the flow path 103 extends in the Y-axis direction, so that the discharge efficiency of the entire fluid 191 increases, and as a result, the inflow speed at which a part 191A of the fluid 191 flows into the detection flow path 107 increases. Therefore, the inflow of a part 191A of the fluid 191 into the detection channel 107 can be promoted.
  • the component sensors 110.110A to 110J in Embodiments 5 to 8 are inexpensive, space-saving and highly sensitive, and the detection accuracy is stable.
  • the concentration of the fuel component can be detected.
  • the fuel consumption of the internal combustion engine can be improved and the exhaust emission can be reduced.
  • the fluid 191 is water or a soft drink, it can be used for detection of mixing of other components, etc., to help maintain quality.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un capteur de composant conçu pour détecter un composant d'un fluide. Ce capteur de composant est pourvu : d'un substrat ; de première et seconde saillies qui sont disposées sur une surface principale du substrat ; d'une partie photoémettrice qui émet une lumière infrarouge incidente sur la première saillie ; et d'une partie de réception de lumière qui détecte la lumière infrarouge émise par la seconde projection. Une surface du substrat, qui est sur le côté opposé à la surface principale, est conçue de façon à être en contact avec un fluide. Ce capteur de composant est de petite taille, et est capable de détecter un composant d'un fluide avec une précision élevée.
PCT/JP2017/042717 2016-12-07 2017-11-29 Capteur de composant Ceased WO2018105455A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016237244 2016-12-07
JP2016-237244 2016-12-07
JP2017-010909 2017-01-25
JP2017010909 2017-01-25

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WO2018105455A1 true WO2018105455A1 (fr) 2018-06-14

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PCT/JP2017/042717 Ceased WO2018105455A1 (fr) 2016-12-07 2017-11-29 Capteur de composant

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WO (1) WO2018105455A1 (fr)

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JPS4717917Y1 (fr) * 1966-04-18 1972-06-21
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JPS63274840A (ja) * 1987-05-06 1988-11-11 Hamamatsu Photonics Kk プロセス監視制御装置
JPH0720046A (ja) * 1993-07-06 1995-01-24 Canon Inc 液体クロマトグラフ用赤外分光セル
JPH0875639A (ja) * 1994-09-09 1996-03-22 Agency Of Ind Science & Technol スラブ光導波路を利用した光吸収スペクトル測定装置
JPH09113439A (ja) * 1995-10-20 1997-05-02 Kdk Corp 生体成分測定方法及びこれを用いた生体成分測定装置
JP2001108611A (ja) * 1999-10-12 2001-04-20 System Instruments Kk 光導波路分光器のための光結合法及びこれを用いた測定法
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JP2005077245A (ja) * 2003-08-29 2005-03-24 Dainippon Printing Co Ltd 有機電子素子形成用材料の組成選定方法
JP2005077246A (ja) * 2003-08-29 2005-03-24 Dainippon Printing Co Ltd 有機電子素子形成用材料の解析方法及びその解析装置
JP2005106711A (ja) * 2003-09-30 2005-04-21 Dainippon Printing Co Ltd 有機積層体及び有機デバイス
JP2005106712A (ja) * 2003-09-30 2005-04-21 Dainippon Printing Co Ltd 有機材料インキ、その選定方法、及び有機デバイス
JP2005530986A (ja) * 2002-04-03 2005-10-13 ヨハン ヴォルフガング ゲーテ−ウニヴェルジテート フランクフルト アム マイン 特に水性系、好ましくは多成分系の分光測定法のための赤外線測定装置
WO2014018002A1 (fr) * 2012-07-23 2014-01-30 Halliburton Energy Services, Inc. Procédé et appareil pour analyser un écoulement de fluide multiphase à l'aide d'un dispositif de calcul à élément optique à plusieurs variables
WO2016121338A1 (fr) * 2015-01-29 2016-08-04 パナソニックＩｐマネジメント株式会社 Capteur

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4717917Y1 (fr) * 1966-04-18 1972-06-21
JPS62161041A (ja) * 1986-01-10 1987-07-17 Hitachi Ltd 全反射赤外スペクトル測定法
JPS63274840A (ja) * 1987-05-06 1988-11-11 Hamamatsu Photonics Kk プロセス監視制御装置
JPH0720046A (ja) * 1993-07-06 1995-01-24 Canon Inc 液体クロマトグラフ用赤外分光セル
JPH0875639A (ja) * 1994-09-09 1996-03-22 Agency Of Ind Science & Technol スラブ光導波路を利用した光吸収スペクトル測定装置
JPH09113439A (ja) * 1995-10-20 1997-05-02 Kdk Corp 生体成分測定方法及びこれを用いた生体成分測定装置
JP2001108611A (ja) * 1999-10-12 2001-04-20 System Instruments Kk 光導波路分光器のための光結合法及びこれを用いた測定法
WO2003021239A1 (fr) * 2001-08-28 2003-03-13 Matsushita Electric Industrial Co., Ltd. Appareil de mesure d'information sur un composant particulier
JP2005530986A (ja) * 2002-04-03 2005-10-13 ヨハン ヴォルフガング ゲーテ−ウニヴェルジテート フランクフルト アム マイン 特に水性系、好ましくは多成分系の分光測定法のための赤外線測定装置
JP2005077245A (ja) * 2003-08-29 2005-03-24 Dainippon Printing Co Ltd 有機電子素子形成用材料の組成選定方法
JP2005077246A (ja) * 2003-08-29 2005-03-24 Dainippon Printing Co Ltd 有機電子素子形成用材料の解析方法及びその解析装置
JP2005106711A (ja) * 2003-09-30 2005-04-21 Dainippon Printing Co Ltd 有機積層体及び有機デバイス
JP2005106712A (ja) * 2003-09-30 2005-04-21 Dainippon Printing Co Ltd 有機材料インキ、その選定方法、及び有機デバイス
WO2014018002A1 (fr) * 2012-07-23 2014-01-30 Halliburton Energy Services, Inc. Procédé et appareil pour analyser un écoulement de fluide multiphase à l'aide d'un dispositif de calcul à élément optique à plusieurs variables
WO2016121338A1 (fr) * 2015-01-29 2016-08-04 パナソニックＩｐマネジメント株式会社 Capteur

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