WO2018143138A1 - Palier à roulement - Google Patents

Palier à roulement Download PDF

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Publication number
WO2018143138A1
WO2018143138A1 PCT/JP2018/002808 JP2018002808W WO2018143138A1 WO 2018143138 A1 WO2018143138 A1 WO 2018143138A1 JP 2018002808 W JP2018002808 W JP 2018002808W WO 2018143138 A1 WO2018143138 A1 WO 2018143138A1
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WIPO (PCT)
Prior art keywords
coating
film
bearing
test
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/002808
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English (en)
Japanese (ja)
Inventor
佐藤　努
方奇 ゴン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
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NSK Ltd
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Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP2018533959A priority Critical patent/JP6481798B2/ja
Priority to US16/337,578 priority patent/US10995798B2/en
Priority to EP18748460.5A priority patent/EP3578839B1/fr
Priority to CN201880009906.6A priority patent/CN110249146A/zh
Publication of WO2018143138A1 publication Critical patent/WO2018143138A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/34—Rollers; Needles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6696—Special parts or details in view of lubrication with solids as lubricant, e.g. dry coatings, powder
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
    • F16C19/16—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
    • F16C19/163—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls with angular contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/14—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load
    • F16C19/18—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls
    • F16C19/181—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls with angular contact
    • F16C19/183—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls with angular contact with two rows at opposite angles
    • F16C19/184—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls with angular contact with two rows at opposite angles in O-arrangement
    • F16C19/185—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with two or more rows of balls with angular contact with two rows at opposite angles in O-arrangement with two raceways provided integrally on a part other than a race ring, e.g. a shaft or housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/30—Electric properties; Magnetic properties
    • F16C2202/32—Conductivity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/02—Noble metals
    • F16C2204/04—Noble metals based on silver
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2204/00—Metallic materials; Alloys
    • F16C2204/40—Alloys based on refractory metals
    • F16C2204/44—Alloys based on chromium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/54—Application independent of particular apparatuses related to environment, i.e. operating conditions high-temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/16—X-ray tubes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/32—Balls

Definitions

  • the present invention relates to a rolling bearing, and more particularly to a rolling bearing in which a coating for lubrication is formed on each surface of inner and outer rings made of steel and rolling elements.
  • a rolling bearing for an X-ray tube is used under high vacuum, high temperature, no lubrication, and further requires electrical conductivity.
  • Pb is applied to the raceway surface of the inner and outer rings and the surface of the rolling element.
  • a solid lubricating film as a main component is formed.
  • Pb has a large environmental load, it is required to use an alternative material with a small environmental load.
  • Non-Patent Document 1 As an alternative solid lubricating material, it is conceivable to use Ag in consideration of lubricity and conductivity. However, when Ag is used, it is known that Ag is not a little adhered to (transferred to) the counterpart material (Non-Patent Document 1). Moreover, since Ag is a harder material than Pb, even if a small metal lump is transferred, it is likely to cause noise and vibration.
  • Patent Document 1 describes that a film having low solubility with Ag is formed on the Ag counterpart material, and examples of the film include W and Ta.
  • Non-Patent Document 2 describes mutual solubility of various metal materials, and W and Ni are listed as materials having low solubility with Ag.
  • the present invention has been made in view of such a situation, and in a rolling bearing in which an Ag coating for lubrication is formed on the surface of the rolling element or the raceway surface of the inner and outer rings, the transfer of Ag to the counterpart material is prevented. Therefore, it is an object to suppress the deterioration of the acoustic characteristics and extend the life.
  • the present invention provides the following rolling bearing.
  • the inner ring, outer ring and rolling element are all made of steel material, and An Ag coating is formed on the surface of the rolling element, A rolling bearing, wherein a Cr coating is formed on at least one raceway surface of the inner ring and the outer ring.
  • the inner ring, outer ring and rolling element are all made of steel material, and A Cr film is formed on the surface of the rolling element, and A rolling bearing characterized in that an Ag coating is formed on a raceway surface of at least one of the inner ring and the outer ring.
  • (3) The rolling described in (1) or (2) above, wherein an underlayer composed of a Ni layer and a Cu layer is interposed between the Ag coating and the substrate in this order from the substrate side. bearing.
  • the film thickness of the Ag film or the total film thickness of the Ag film and the base layer is 1.0 ⁇ m or less. The rolling bearing described.
  • the Ag coating is prevented from being transferred to the counterpart material, and has excellent acoustic characteristics, Life can be extended.
  • FIG. 4 is a cross-sectional view showing a high-temperature rotation tester in vacuum used in tests 1 to 3. 10 is a graph showing the results of Test 3.
  • the rolling elements and the inner and outer rings are made of steel such as bearing steel, stainless steel, high-speed steel, etc. that have excellent strength and fatigue life. Specifically, SUS440C, SUJ2, SKH, etc. are mentioned. Then, an Ag coating for lubrication is formed on the surface of the rolling element or at least one of the raceway surface of the inner ring and the raceway surface of the outer ring, preferably on both raceway surfaces.
  • the Cr film may be a Cr-only film, a film made of a Cr alloy, CrN (chromium nitride), or the like.
  • CrN chromium nitride
  • CrN can be formed by reactive sputtering or ion plating.
  • the Cr film may be a multilayer film.
  • it can be obtained by depositing Ni and Cr in this order from the base material (rolling element or inner and outer rings).
  • the multilayer coating may be appropriately adjusted as long as the effects of the present application can be achieved.
  • the Cr content is preferably 99.0 mass% or more, more preferably 99.9 mass% or more with respect to the Cr-only coating. Moreover, the remainder becomes inevitable impurities.
  • the content of CrN (chromium nitride) is preferably 99.0 mass% or more, more preferably 99.8 mass% or more with respect to the CrN (chromium nitride) coating. Moreover, the remainder becomes inevitable impurities.
  • the Cr content is preferably 15 mass% or more, more preferably 30 mass% or more with respect to the Cr alloy coating. Further, the balance becomes alloy components and inevitable impurities.
  • a Cr coating is formed on the raceway surface.
  • a Cr coating is formed on the surface of the rolling element.
  • a base layer in order to improve the adhesion between the Ag coating and the base material (rolling element or inner / outer ring).
  • a Ni layer and a Cu layer are laminated in order from the substrate side. As shown in Test 2 to be described later, the adhesion of the Ag coating is insufficient only with the Ni layer.
  • the film thickness is easily controlled.
  • it can be formed by sputtering, ion plating, or plating.
  • the Cr coating when it is exposed to the atmosphere, it is combined with oxygen and becomes a stable state with a small surface energy, and is excellent in the effect of preventing transfer.
  • the upper limit of the film thickness of the Ag film or the total film thickness of the Ag film and the base layer is preferably 1.0 ⁇ m or less, and more preferably 0.7 ⁇ m or less.
  • the lower limit of the thickness of the Ag coating or the total thickness of the Ag coating and the base layer is preferably 0.2 ⁇ m or more, and more preferably 0.4 ⁇ m or more.
  • the respective film thicknesses are preferably as follows.
  • the film thickness of Ni is preferably 0.05 to 0.2 ⁇ m, more preferably 0.05 to 0.15 ⁇ m.
  • the film thickness of Cu is preferably 0.05 to 0.2 ⁇ m, more preferably 0.05 to 0.15 ⁇ m.
  • the film thickness of Ag is preferably 0.1 to 0.6 ⁇ m, more preferably 0.2 to 0.5 ⁇ m.
  • each content of Ni, Cu, and Ag is as follows. -99.0 mass% or more is preferable with respect to Ni film, and, as for content of Ni, More preferably, it is 99.9 mass% or more. Moreover, the remainder becomes inevitable impurities. -99.0 mass% or more is preferable with respect to Cu coating, and, as for content of Cu, More preferably, it is 99.9 mass% or more. Moreover, the remainder becomes inevitable impurities. -99.0 mass% or more is preferable with respect to Ag film, and, as for content of Ag, More preferably, it is 99.9 mass% or more. Moreover, the remainder becomes inevitable impurities.
  • additives and the like may be added as appropriate to the Ag coating.
  • the content of Ag may be 90 mass% or more.
  • the balance becomes the additive and inevitable impurities used together.
  • the film thickness of the Cr coating is preferably 0.05 to 1.0 ⁇ m, more preferably 0.05 to 0.15 ⁇ m.
  • Ag may form an extremely thin oxide film on the surface in the atmosphere, and there is a concern that the lubricity may be lowered by the oxide film.
  • an antioxidant coating made of a soft metal may be added to the surface of the Ag film.
  • the soft metal Ti, In, Sn, Mg, Zn, Al, or the like, which has good adhesion with Ag and has a higher ionization tendency than Ag, is preferable, and a good antioxidant effect is obtained.
  • In and Sn are preferable because lubricity can be expected.
  • the film thickness is preferably 100 nm or less, and it is necessary to adjust the film thickness. is there.
  • the thickness is 100 nm or less, the antioxidant coating is quickly peeled off during use, so that lubrication with Ag having excellent lubricity can be obtained.
  • Ag is easy to oxidize, it is preferable to perform a reduction process before formation of an antioxidant film.
  • the rolling bearing of the present invention is suitable as an X-ray tube bearing that is used at high vacuum and high temperature and also requires electrical conductivity.
  • FIG. 1 An example is shown in FIG.
  • a pair of ball bearings 11, 11 are rotatably supported on the rotary shaft 20.
  • the outer rings 30, 30 are fitted to the housing 7 by a clearance fit and are arranged so as to be movable in the axial direction with respect to the housing 7.
  • Both the total ball bearings 11, 11 are so-called “integral type” in which a large number of balls 40, 40 are interposed between the outer ring raceway surfaces 31, 31 and the inner ring raceway surfaces 21, 21 formed directly on the rotary shaft 20.
  • "Deep groove ball bearing" is so-called “integral type” in which a large number of balls 40, 40 are interposed between the outer ring raceway surfaces 31, 31 and the inner ring raceway surfaces 21, 21 formed directly on the rotary shaft 20.
  • Ag balls are formed on the balls 40, 40, and Cr coatings are formed on the outer ring raceway surfaces 31, 31 and the inner ring raceway surfaces 21, 21.
  • a Cr coating may be formed on the balls 40, 40, and an Ag coating may be formed on the outer ring raceway surfaces 31, 31 and the inner ring raceway surfaces 21, 21.
  • the Ag film may be formed through an underlayer composed of a Ni layer and a Cu layer.
  • Reference numeral 8 denotes a target plate.
  • FIG. 1 An integral type deep groove ball bearing is used.
  • the rotary shaft and the inner ring may be separated, and the present invention can also be applied to angular ball bearings and roller bearings.
  • the present invention preferably has the following configuration.
  • Bearing type The present invention is preferably applied to ball bearings such as integral type ball bearings, deep groove ball bearings, and angular ball bearings.
  • a base material As for the material of a ball, SUS440C or SUJ2 or SKH4 is preferable.
  • the material of the outer ring and the inner ring is preferably SUS440C, SUJ2, or SKH4.
  • the components of these steel materials are in accordance with JIS G 4303 (2012) for SUS440C, JIS G 4805 (2008) for SUJ2, and JIS G 4403 (2015) for SKH4.
  • the total of the Ni plating, Cu plating and Ag plating is preferably 0.4 to 0.7 ⁇ m.
  • the Ni content of the Ni plating is preferably 99.9 mass% or more, the Cu content of the Cu plating is preferably 99.9 mass% or more, and the Ag content of the Ag plating is preferably 99.9 mass% or more, and the remainder is any Is also an inevitable impurity.
  • -Coating of outer ring It is preferable to form a film made of Cr of 0.05 to 0.15 ⁇ m by sputtering.
  • the Cr content of the Cr coating is preferably 99.9 mass% or more, and the remainder is an inevitable impurity.
  • -Inner ring film It is preferable to form a film made of Cr of 0.05 to 0.15 ⁇ m by sputtering.
  • the Cr content of the Cr coating is preferably 99.9 mass% or more, and the remainder is an inevitable impurity.
  • the inner ring and the outer ring are made of SUJ2, the balls are made of SUS440C or SUJ2, and an Ag coating is formed on the surface of four balls at equal intervals in 12 pieces, and the remaining 8 pieces have no coating. It was.
  • the Ag coating an undercoat layer was formed in the order of the Ni layer and the Cu layer from the base material side by the electroplating method, and the Ag coating was formed thereon.
  • the film thickness of the Ni film was 0.1 ⁇ m
  • the film thickness of the Cu film was 0.1 ⁇ m
  • the film thickness of the Ag film was 0.3 ⁇ m.
  • the metal film shown in Table 1 was formed in each raceway surface of an inner ring
  • the test bearing described above was attached to a high-temperature rotation tester in vacuum shown in FIG. 2 and a rotation test was performed.
  • This testing machine includes a rotating shaft S supported by a test bearing J, a motor M that rotates the rotating shaft S, a heater H that heats the rotating shaft S, a flange S1 that forms a vacuum chamber, and walls S2 and S3. And a thermocouple (not shown) for detecting the temperature of the test bearing J.
  • the rotating shaft S is also supported by a bearing indicated by reference numeral 18 in addition to the test bearing J.
  • the end of the rotating shaft S on the motor M side is connected to one end of the rotating shaft of the magnetic seal unit 16 by the coupling 10, and the other end of the rotating shaft of the magnetic seal unit 16 is connected to the motor by the coupling 17.
  • the magnetic seal unit 16, the coupling 17, and the motor M are accommodated in a housing (not shown) and are installed in the atmosphere.
  • test bearing J was rotated at an axial load of 30 N, a rotational speed of 4500 min ⁇ 1 , a temperature of 25 ° C., and a degree of vacuum of 3 ⁇ 10 ⁇ 3 Pa, and an acceleration pickup installed on the flange S1 surface of the vacuum chamber
  • the vibration value was measured by The time required to exceed 5 times the initial vibration value (25 m / s 2 ) was measured, and is shown in Table 1 as “Time until vibration rise”.
  • Comparative Example 5 is a combination of Ag and W listed in Patent Document 1, but only about one-tenth of the lifetime is obtained as compared with the combination of Ag and Cr in Example 1. .
  • Test 2 Using the same total ball angular bearing as in Test 1, an Ag coating was formed on all 12 balls. At that time, as shown in Table 2, in the coating 1, only the Ni layer was formed as the underlayer, and in the coating 2, the Ni layer and the Cu layer were formed in this order from the substrate side, and the Ag coating was formed thereon. Both the Ag coating and the underlayer were formed by electroplating, and the thickness of the Ag coating was 0.6 ⁇ m. On the other hand, a Cr film having a thickness of 0.12 ⁇ m was formed on each raceway surface of the inner and outer rings by sputtering.
  • test bearing was prepared, and the vibration value was measured under the same conditions using a high temperature rotating test machine in a vacuum shown in FIG.
  • the test was performed by preparing four test bearings for the coating 1 and preparing five test bearings for the coating 2. When no increase in vibration was observed at 1333.0 min from the start of rotation, the test was terminated. The results are shown in Table 2.
  • the coating 1 consisting only of the Ni layer as the underlayer
  • the increase in vibration was observed in the remaining three test bearings in a short time, resulting in a longer life.
  • the coating film 2 in which the base layer is composed of two layers of the Ni layer and the Cu layer, no increase in vibration is observed until the test is terminated in all the test bearings, and the life extension is stably achieved. This seems to be because the adhesion of the Ag coating was further improved by interposing the Cu layer between the Ag coating and the Ni layer.
  • Test 3 Using the same total ball angular bearing as in Test 1, an Ag coating was formed on all 12 balls. At that time, as shown in Table 3, the thicknesses of the Ag coating and the underlayer were changed, and any coating was formed by electroplating. In addition, the base layer was made into two layers, Ni layer and Cu layer in order from the base-material side. On the other hand, a Cr film having a thickness of 0.12 ⁇ m was formed on each raceway surface of the inner and outer rings by sputtering.
  • FIG. 3 is a graph showing the relationship between the total film thickness of the Ag coating and the underlayer and the average life.
  • the present invention can improve acoustic characteristics and extend the life of a rolling bearing used in applications requiring high vacuum, high temperature, and no lubrication, and further requiring electrical conductivity.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Rolling Contact Bearings (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne un palier à roulement conçu de telle sorte que : chacun parmi une bague interne, une bague externe et un corps de roulement est formée à partir d'un matériau en acier ; et (A) un film de revêtement d'Ag est formé sur la surface du corps de roulement et un film de revêtement de Cr est formé sur la surface de chemin de roulement de la bague interne et/ou de la bague externe, ou (B) un film de revêtement de Cr est formé sur la surface du corps de roulement et un film de revêtement de Cr est formé sur la surface de chemin de roulement de la bague interne et/ou de la bague externe.
PCT/JP2018/002808 2017-02-02 2018-01-29 Palier à roulement Ceased WO2018143138A1 (fr)

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JP2022055432A (ja) * 2020-09-29 2022-04-08 株式会社ジェイテクト 軸受装置及び軸受装置を用いた回転装置
CN117570118A (zh) * 2024-01-17 2024-02-20 苏州长城精工科技股份有限公司 Ct球管的联轴轴承结构

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See also references of EP3578839A4

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US10995798B2 (en) 2021-05-04
CN110249146A (zh) 2019-09-17
EP3578839B1 (fr) 2022-03-23
EP3578839A4 (fr) 2020-04-22
JP2019082256A (ja) 2019-05-30
EP3578839A1 (fr) 2019-12-11
JP6481798B2 (ja) 2019-03-13
US20200032847A1 (en) 2020-01-30
JPWO2018143138A1 (ja) 2019-02-07

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