ATE112100T1 - Herstellen von zwischenschicht-leiterbahnen in integrierten schaltungen. - Google Patents

Herstellen von zwischenschicht-leiterbahnen in integrierten schaltungen.

Info

Publication number
ATE112100T1
ATE112100T1 AT88907518T AT88907518T ATE112100T1 AT E112100 T1 ATE112100 T1 AT E112100T1 AT 88907518 T AT88907518 T AT 88907518T AT 88907518 T AT88907518 T AT 88907518T AT E112100 T1 ATE112100 T1 AT E112100T1
Authority
AT
Austria
Prior art keywords
integrated circuit
conductive
tracks
integrated circuits
interlayer
Prior art date
Application number
AT88907518T
Other languages
English (en)
Inventor
Terry O Herndon
Glenn H Chapman
Original Assignee
Massachusetts Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Inst Technology filed Critical Massachusetts Inst Technology
Application granted granted Critical
Publication of ATE112100T1 publication Critical patent/ATE112100T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4403—Conductive materials thereof based on metals, e.g. alloys, metal silicides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/921—Nonselective diffusion

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
AT88907518T 1987-06-12 1988-06-09 Herstellen von zwischenschicht-leiterbahnen in integrierten schaltungen. ATE112100T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US6188587A 1987-06-12 1987-06-12
US07/194,720 US4843034A (en) 1987-06-12 1988-05-23 Fabrication of interlayer conductive paths in integrated circuits

Publications (1)

Publication Number Publication Date
ATE112100T1 true ATE112100T1 (de) 1994-10-15

Family

ID=26741606

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88907518T ATE112100T1 (de) 1987-06-12 1988-06-09 Herstellen von zwischenschicht-leiterbahnen in integrierten schaltungen.

Country Status (7)

Country Link
US (2) US4843034A (de)
EP (1) EP0319575B1 (de)
JP (1) JPH02504092A (de)
AT (1) ATE112100T1 (de)
CA (1) CA1286795C (de)
DE (1) DE3851612D1 (de)
WO (1) WO1988010008A1 (de)

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Also Published As

Publication number Publication date
EP0319575B1 (de) 1994-09-21
CA1286795C (en) 1991-07-23
US5087589A (en) 1992-02-11
US4843034A (en) 1989-06-27
JPH02504092A (ja) 1990-11-22
EP0319575A1 (de) 1989-06-14
WO1988010008A1 (en) 1988-12-15
DE3851612D1 (de) 1994-10-27
EP0319575A4 (de) 1989-11-27

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