ATE116792T1 - Chip-zuführungssystem für chipkontaktierer. - Google Patents

Chip-zuführungssystem für chipkontaktierer.

Info

Publication number
ATE116792T1
ATE116792T1 AT91301752T AT91301752T ATE116792T1 AT E116792 T1 ATE116792 T1 AT E116792T1 AT 91301752 T AT91301752 T AT 91301752T AT 91301752 T AT91301752 T AT 91301752T AT E116792 T1 ATE116792 T1 AT E116792T1
Authority
AT
Austria
Prior art keywords
die
magazine
chip
package
clamp assembly
Prior art date
Application number
AT91301752T
Other languages
English (en)
Inventor
Karl Schweitzer
Gerhard Zeindl
Original Assignee
F&K Delvotec Bondtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by F&K Delvotec Bondtechnik Gmbh filed Critical F&K Delvotec Bondtechnik Gmbh
Application granted granted Critical
Publication of ATE116792T1 publication Critical patent/ATE116792T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0446Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7622Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips

Landscapes

  • Die Bonding (AREA)
  • Specific Conveyance Elements (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT91301752T 1990-03-16 1991-03-04 Chip-zuführungssystem für chipkontaktierer. ATE116792T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909006036A GB9006036D0 (en) 1990-03-16 1990-03-16 Die presentation system for die bonder

Publications (1)

Publication Number Publication Date
ATE116792T1 true ATE116792T1 (de) 1995-01-15

Family

ID=10672784

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91301752T ATE116792T1 (de) 1990-03-16 1991-03-04 Chip-zuführungssystem für chipkontaktierer.

Country Status (5)

Country Link
EP (1) EP0447082B1 (de)
JP (1) JPH0774189A (de)
AT (1) ATE116792T1 (de)
DE (1) DE69106410T2 (de)
GB (1) GB9006036D0 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9803935D0 (en) * 1998-02-26 1998-04-22 Secr Defence Liquid crystal polymer devices and materials
EP1310986A1 (de) 2001-11-08 2003-05-14 F & K Delvotec Bondtechnik GmbH Chipträgerplatten-Wechselmechanismus
JP5136100B2 (ja) * 2008-02-08 2013-02-06 パナソニック株式会社 チップ供給装置
JP5077254B2 (ja) * 2009-01-30 2012-11-21 パナソニック株式会社 パレット自動交換方法
JP5077253B2 (ja) * 2009-01-30 2012-11-21 パナソニック株式会社 パレット自動交換装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3894671A (en) * 1971-01-06 1975-07-15 Kulicke & Soffa Ind Inc Semiconductor wire bonder
JPS6021535A (ja) * 1983-06-30 1985-02-02 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 半導体装置を相互接続する方法
JPS6012799A (ja) * 1983-07-01 1985-01-23 三洋電機株式会社 チップ状電子部品の自動装着装置

Also Published As

Publication number Publication date
DE69106410T2 (de) 1995-08-24
JPH0774189A (ja) 1995-03-17
EP0447082B1 (de) 1995-01-04
DE69106410D1 (de) 1995-02-16
GB9006036D0 (en) 1990-05-09
EP0447082A1 (de) 1991-09-18

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