ATE125885T1 - Verfahren und vorrichtung zur entfernung von verunreinigungen. - Google Patents

Verfahren und vorrichtung zur entfernung von verunreinigungen.

Info

Publication number
ATE125885T1
ATE125885T1 AT92921198T AT92921198T ATE125885T1 AT E125885 T1 ATE125885 T1 AT E125885T1 AT 92921198 T AT92921198 T AT 92921198T AT 92921198 T AT92921198 T AT 92921198T AT E125885 T1 ATE125885 T1 AT E125885T1
Authority
AT
Austria
Prior art keywords
hydrogen peroxide
final reaction
reaction bath
initial
contaminants
Prior art date
Application number
AT92921198T
Other languages
English (en)
Inventor
Thomas B Stanford
Richard C George Jr
Jennifer I Shinno
Dhiren C Mehta
Gifford W Rodine
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of ATE125885T1 publication Critical patent/ATE125885T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • B23K1/206—Cleaning
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793—Aqueous alkaline solution, e.g. for cleaning or etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0796—Oxidant in aqueous solution, e.g. permanganate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
AT92921198T 1991-11-13 1992-09-28 Verfahren und vorrichtung zur entfernung von verunreinigungen. ATE125885T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79181991A 1991-11-13 1991-11-13

Publications (1)

Publication Number Publication Date
ATE125885T1 true ATE125885T1 (de) 1995-08-15

Family

ID=25154884

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92921198T ATE125885T1 (de) 1991-11-13 1992-09-28 Verfahren und vorrichtung zur entfernung von verunreinigungen.

Country Status (15)

Country Link
EP (1) EP0566712B1 (de)
JP (1) JPH06504817A (de)
KR (1) KR960002638B1 (de)
AT (1) ATE125885T1 (de)
AU (1) AU651253B2 (de)
BR (1) BR9205457A (de)
CA (1) CA2096546A1 (de)
DE (1) DE69203851T2 (de)
DK (1) DK0566712T3 (de)
ES (1) ES2075718T3 (de)
GR (1) GR3017956T3 (de)
MX (1) MX9206559A (de)
MY (1) MY129926A (de)
WO (1) WO1993010280A1 (de)
ZA (1) ZA928056B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2096452A1 (en) * 1992-06-19 1993-12-20 William E. Elias Inorganic oxidant compositions for removing contaminants
FR2736936B1 (fr) * 1995-07-19 1997-08-14 Air Liquide Procede de degraissage a base de peroxyde d'hydrogene et applications a des articles metalliques
GB2349892A (en) * 1999-05-13 2000-11-15 Warwick Internat Group Ltd Metal cleaning
CN115338181A (zh) * 2022-07-26 2022-11-15 泸州龙芯微科技有限公司 芯片划片后表面清洗装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3046477A1 (de) * 1980-12-10 1982-07-08 Gebr. Schmid Maschinenfabrik GmbH & Co, 7290 Freudenstadt "verfahren zum aetzen von metalloberflaechen"
US4578162A (en) * 1984-05-29 1986-03-25 The Dow Chemical Company Method for dissolving copper in the presence of iron
HU198096B (en) * 1987-05-19 1989-07-28 Gyoergy Schamschula Composition for cleaning furnaces from the combustion side
CA2044607C (en) * 1989-12-20 1997-10-28 David P. Jackson Peroxide composition for removing organic contaminants and method of using same
US5968039A (en) * 1991-10-03 1999-10-19 Essential Dental Systems, Inc. Laser device for performing canal surgery in narrow channels

Also Published As

Publication number Publication date
EP0566712B1 (de) 1995-08-02
DE69203851T2 (de) 1995-12-07
DE69203851D1 (de) 1995-09-07
CA2096546A1 (en) 1993-05-14
BR9205457A (pt) 1994-06-21
GR3017956T3 (en) 1996-02-29
AU651253B2 (en) 1994-07-14
EP0566712A1 (de) 1993-10-27
DK0566712T3 (da) 1995-12-18
ZA928056B (en) 1993-05-07
MX9206559A (es) 1993-05-01
MY129926A (en) 2007-05-31
JPH06504817A (ja) 1994-06-02
ES2075718T3 (es) 1995-10-01
WO1993010280A1 (en) 1993-05-27
KR960002638B1 (ko) 1996-02-24
AU2753792A (en) 1993-06-15

Similar Documents

Publication Publication Date Title
ATE181042T1 (de) Verfahren und vorrichtung zur optimalen ozonisierung von, für den menschlichen verbrauch, bestimmtem wasser
ATE270254T1 (de) Verfahren zur stabilisierung von flüssigem schlamm
GB9003282D0 (en) Method and apparatus for photographic processing
DE69937747D1 (de) Vorrichtung und verfahren zur kontrolle einer akustischen behandlung
ATE443343T1 (de) Verfahren und vorrichtung zur reinigung von einem halbleiterwafer
DE69605434D1 (de) Vorrichtung zur behandlung von flüssigkeiten
DE69607283D1 (de) Stabile flüssige enzymzusammensetzungen und verfahren zur verwendung in reinigungs- und desinfizierungssystemen von kontaktlinsen
ATE125885T1 (de) Verfahren und vorrichtung zur entfernung von verunreinigungen.
ATE344695T1 (de) Vorrichtung und verfahren zur reinigung von giftgas
ATE90739T1 (de) Verfahren beim phosphatieren von metalloberflaechen.
NO993617L (no) FremgangsmÕte og anordning for gjenvinning av avgass fra en ozoniseringsreaktor
DE59810619D1 (de) Verfahren und Vorrichtung zur biologischen Behandlung von Flüssigkeiten, insbesondere zur vollbiologischen Klärung von Abwasser
ATE76593T1 (de) Verfahren und vorrichtung zur abscheidung von schwefeldioxid aus gasen, insbesondere aus rauchgasen.
ATE186423T1 (de) Verfahren und vorrichtung zur nassbehandlung von substraten in einem behälter
CA2027913A1 (en) Dissolved gas stripping apparatus and methods
ZA918841B (en) Method and apparatus for the removal of constituents from a wast gas
ATE180239T1 (de) Verfahren zum stabilisieren von alkalipercarbonatteilchen,durch das verfahren erhaltene teilchen, sowie deren verwendung in wasch- und bleichzusammensetzungen
RU97109823A (ru) Раствор для очистки объектов от урановых соединений и способ очистки
DE60107553D1 (de) Verfahren und anlage zur entfernung von quecksilberkontamination aus metallen unter verwendung eines flüssigen reduktionsmittels
JPS5638175A (en) Method and apparatus for removing ammoniacal nitrogen
ATE13391T1 (de) Verfahren und vorrichtung zum reinigen, desinfizieren, spuelen und trocknen von gegenstaenden oder instrumenten.
JPS55147191A (en) Treatment process for waste water
ATE409954T1 (de) Verfahren und vorrichtung zur lokalen flüssigkeitsbehandlung von einer substratoberfläche
ATE206479T1 (de) Gefässvorrichtung zur behandlung von metallschmelzen
JPS57204285A (en) Removal of volatile organic component from water