ATE179832T1 - Tft mit niedriger parasitärer kapazität - Google Patents

Tft mit niedriger parasitärer kapazität

Info

Publication number
ATE179832T1
ATE179832T1 AT94118141T AT94118141T ATE179832T1 AT E179832 T1 ATE179832 T1 AT E179832T1 AT 94118141 T AT94118141 T AT 94118141T AT 94118141 T AT94118141 T AT 94118141T AT E179832 T1 ATE179832 T1 AT E179832T1
Authority
AT
Austria
Prior art keywords
electrode
parasitic capacity
low parasitic
tft
capacity tft
Prior art date
Application number
AT94118141T
Other languages
English (en)
Inventor
Boer Willem Den
Mohshi Yang
Original Assignee
Optical Imaging Syst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Imaging Syst filed Critical Optical Imaging Syst
Application granted granted Critical
Publication of ATE179832T1 publication Critical patent/ATE179832T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6757Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
AT94118141T 1993-11-19 1994-11-17 Tft mit niedriger parasitärer kapazität ATE179832T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/154,713 US5414283A (en) 1993-11-19 1993-11-19 TFT with reduced parasitic capacitance

Publications (1)

Publication Number Publication Date
ATE179832T1 true ATE179832T1 (de) 1999-05-15

Family

ID=22552458

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94118141T ATE179832T1 (de) 1993-11-19 1994-11-17 Tft mit niedriger parasitärer kapazität

Country Status (5)

Country Link
US (2) US5414283A (de)
EP (1) EP0654828B1 (de)
AT (1) ATE179832T1 (de)
CA (1) CA2135995C (de)
DE (1) DE69418283T2 (de)

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EP0654828A3 (de) 1995-08-30
EP0654828B1 (de) 1999-05-06
EP0654828A2 (de) 1995-05-24
CA2135995C (en) 2000-05-30
US5614427A (en) 1997-03-25
US5414283A (en) 1995-05-09
DE69418283T2 (de) 1999-12-23
CA2135995A1 (en) 1995-05-20
DE69418283D1 (de) 1999-06-10

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