ATE189009T1 - Verbesserungen in und betreffend verfahren zur verbesserung der sputterabscheidung von metall- schwefel-beschichtungen, z.b. molybdändisulfid beschichtungen und verbesserten beschichtungen - Google Patents

Verbesserungen in und betreffend verfahren zur verbesserung der sputterabscheidung von metall- schwefel-beschichtungen, z.b. molybdändisulfid beschichtungen und verbesserten beschichtungen

Info

Publication number
ATE189009T1
ATE189009T1 AT96924987T AT96924987T ATE189009T1 AT E189009 T1 ATE189009 T1 AT E189009T1 AT 96924987 T AT96924987 T AT 96924987T AT 96924987 T AT96924987 T AT 96924987T AT E189009 T1 ATE189009 T1 AT E189009T1
Authority
AT
Austria
Prior art keywords
coatings
improved
metal
relating
methods
Prior art date
Application number
AT96924987T
Other languages
English (en)
Inventor
Dennis Gerald Teer
Victor Bellido-Gonzalez
Joanne Helen Hampshire
Original Assignee
Teer Coatings Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10777917&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE189009(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Teer Coatings Ltd filed Critical Teer Coatings Ltd
Application granted granted Critical
Publication of ATE189009T1 publication Critical patent/ATE189009T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Paints Or Removers (AREA)
  • Glass Compositions (AREA)
AT96924987T 1995-07-19 1996-07-18 Verbesserungen in und betreffend verfahren zur verbesserung der sputterabscheidung von metall- schwefel-beschichtungen, z.b. molybdändisulfid beschichtungen und verbesserten beschichtungen ATE189009T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9514773.2A GB9514773D0 (en) 1995-07-19 1995-07-19 Methods for improving the sputter deposition of metal-sulphur coatings e.g.molybdenum disulphide(MoS2) coatings
PCT/GB1996/001718 WO1997004142A1 (en) 1995-07-19 1996-07-18 Methods for deposition of molybdenum sulphide

Publications (1)

Publication Number Publication Date
ATE189009T1 true ATE189009T1 (de) 2000-02-15

Family

ID=10777917

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96924987T ATE189009T1 (de) 1995-07-19 1996-07-18 Verbesserungen in und betreffend verfahren zur verbesserung der sputterabscheidung von metall- schwefel-beschichtungen, z.b. molybdändisulfid beschichtungen und verbesserten beschichtungen

Country Status (9)

Country Link
EP (1) EP0842306B2 (de)
JP (1) JP3825803B2 (de)
AT (1) ATE189009T1 (de)
AU (1) AU6525196A (de)
DE (1) DE69606307T3 (de)
DK (1) DK0842306T3 (de)
ES (1) ES2142079T3 (de)
GB (2) GB9514773D0 (de)
WO (1) WO1997004142A1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19614557A1 (de) * 1996-04-12 1997-10-16 Hauzer Holding Bauteil mit Verschleißschutzschicht und Verfahren zu dessen Herstellung
DE19622823A1 (de) * 1996-06-07 1997-12-11 Widia Gmbh Verbundwerkstoff und Verfahren zu seiner Herstellung
CH691776A5 (de) * 1997-04-17 2001-10-15 Bci Bloesch Corp Ag Plasma-Beschichtungs-Verfahren und mit diesem Verfahren herstellbare Arbeitsschichten.
US6726993B2 (en) 1997-12-02 2004-04-27 Teer Coatings Limited Carbon coatings, method and apparatus for applying them, and articles bearing such coatings
WO1999049098A1 (de) * 1998-03-26 1999-09-30 Daimler-Benz Ag Festschmierstoffschicht
EP1076728A1 (de) * 1998-04-27 2001-02-21 European Community (EC) Reibungsarme beschichtung für ein schneidwerkzeug
DE19860474A1 (de) * 1998-12-28 2000-07-06 Fraunhofer Ges Forschung Verfahren und Einrichtung zum Beschichten von Substraten mittels bipolarer Puls-Magnetron-Zerstäubung
ES2197083T3 (es) * 1999-03-03 2004-01-01 Widia Gmbh Pieza de corte para arrancar virutas de materiales metalicos con un revestimiento que contiene sulfuro de molibdeno y procedimiento para su fabricacion.
DE10005612A1 (de) 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung eines Gegenstandes und Gegenstand
GB2360790A (en) * 2000-03-28 2001-10-03 Gehan Anil Joseph Amaratunga Low friction coatings produced by cathodic arc evaporation
DE10031327A1 (de) * 2000-07-03 2002-01-17 Widia Gmbh Schneideinsatz zum Zerspanen und Verfahren zu seiner Herstellung
DE10058803A1 (de) * 2000-11-27 2002-06-06 Widia Gmbh Schneidwerkzeug zum Zerspanen
AU2003222669A1 (en) 2002-04-22 2003-11-03 Yazaki Corporation Electrical connectors incorporating low friction coatings and methods for making them
JP4217027B2 (ja) * 2002-04-26 2009-01-28 株式会社タンガロイ 被覆部材
US6858333B2 (en) 2002-10-09 2005-02-22 Kennametal Inc. Tool with wear resistant low friction coating and method of making the same
AT6792U1 (de) * 2002-10-14 2004-04-26 Plansee Tizit Ag Werkzeug oder bauteil mit niedrigem reibwert
DE10259174B4 (de) 2002-12-18 2006-10-12 Robert Bosch Gmbh Verwendung eines tribologisch beanspruchten Bauelements
KR20050063463A (ko) * 2003-12-22 2005-06-28 재단법인 포항산업과학연구원 윤활특성이 우수한 경질코팅 제조방법 및 경질코팅 구조
KR101170943B1 (ko) * 2004-02-12 2012-08-03 히타치 쓰루 가부시키가이샤 경질 피막 및 그 형성 방법, 및 경질 피막 피복 공구
JP4663336B2 (ja) * 2005-01-17 2011-04-06 日立ツール株式会社 硬質皮膜及び硬質皮膜の製造方法
JP2005249066A (ja) * 2004-03-04 2005-09-15 Yaskawa Electric Corp 転動要素
GB0410729D0 (en) * 2004-05-14 2004-06-16 Teer Coatings Ltd Coating with hard wear and non-stick characteristics
EP1614655B2 (de) 2004-06-18 2018-08-08 Hitachi Tool Engineering Ltd. Hartbeschichtung und Herstellungsverfahren dazu
EP1803950A4 (de) * 2004-09-30 2010-04-21 Thk Co Ltd Wälzführungsvorrichtung
JP4771202B2 (ja) 2005-04-13 2011-09-14 日立金属株式会社 密着性と摺動特性に優れた複合皮膜およびその製造方法
JP2007217768A (ja) * 2006-02-17 2007-08-30 Toyota Industries Corp 圧縮機用摺動部品の製造方法および圧縮機用摺動部品
JP2007217766A (ja) * 2006-02-17 2007-08-30 Toyota Industries Corp 低摩擦複合膜の成膜方法および低摩擦摺動部材
EP2072637B1 (de) * 2007-12-21 2018-08-15 Sandvik Intellectual Property AB Beschichtetes Schneidwerkzeug und Verfahren zum Herstellen
DE102008062332A1 (de) * 2008-12-15 2010-06-17 Gühring Ohg Vorrichtung zur Oberflächenbehandlung und/oder -beschichtung von Substratkomponenten
CH705029A1 (de) * 2011-05-27 2012-11-30 Bloesch W Ag Beschichtetes Holzbearbeitungswerkzeug.
KR20130060544A (ko) 2011-11-30 2013-06-10 현대자동차주식회사 나노멀티레이어 코팅층 형성방법 및 형성장치
JP2014034721A (ja) * 2012-08-09 2014-02-24 Mitsubishi Materials Corp スパッタリングターゲット及びその製造方法
CN103805949B (zh) * 2014-02-17 2016-07-27 武汉大学 二硫化钼自润滑复合涂层及覆有该复合涂层的活塞环
CN104120389B (zh) * 2014-08-04 2016-08-24 上海和辉光电有限公司 镀膜设备
GB201507524D0 (en) * 2015-05-01 2015-06-17 Teer Coatings Ltd Improvements to molybdenum containing coatings
CN108998759B (zh) * 2018-08-08 2020-10-09 电子科技大学 一种提高多层二硫化钼薄膜间接带隙发光性能的方法
TW202122909A (zh) * 2019-10-25 2021-06-16 美商應用材料股份有限公司 減少極紫外遮罩毛坯缺陷之方法
CN111172498A (zh) * 2020-01-19 2020-05-19 中国科学院宁波材料技术与工程研究所 二硫化钼/二硫化钨多层掺钽薄膜及其制备方法与应用
CN115323326B (zh) * 2022-08-17 2023-11-24 中国科学院兰州化学物理研究所 一种耐空间原子氧辐照的长寿命二硫化钼基复合薄膜的制备方法和应用
CN116497457B (zh) * 2023-05-29 2023-09-12 中国科学院宁波材料技术与工程研究所 一种低摩擦长寿命的超晶格复合涂层及其制备方法与用途
CN117089815B (zh) * 2023-08-22 2025-12-02 吉林大学 一种低摩耐磨TiNbMoTaCr/MoS2纳米多层膜及其制备方法和应用
CN117265477A (zh) * 2023-09-28 2023-12-22 台州学院 一种WS2固体润滑薄膜的HiPIMS制备方法
CN118703958B (zh) * 2024-08-28 2024-11-01 广东欧欧优家居有限公司 不锈钢厨具的表面处理工艺

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4424101A (en) * 1980-11-06 1984-01-03 The Perkin-Elmer Corp. Method of depositing doped refractory metal silicides using DC magnetron/RF diode mode co-sputtering techniques
DD202898A1 (de) * 1981-11-02 1983-10-05 Ruhla Uhren Veb K Hartstoff und festkoerperschmierstoffschichtsystem
US4591418A (en) * 1984-10-26 1986-05-27 The Parker Pen Company Microlaminated coating
DE3569265D1 (en) * 1985-01-17 1989-05-11 Ibm Deutschland Process for the production of low-resistance contacts
JPS61238958A (ja) * 1985-04-15 1986-10-24 Hitachi Ltd 複合薄膜形成法及び装置
US4731172A (en) * 1985-04-18 1988-03-15 Matsushita Electric Industrial Co., Ltd. Method for sputtering multi-component thin-film
DE3516933A1 (de) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Verfahren zum aufbringen einer mos(pfeil abwaerts)2(pfeil abwaerts)-beschichtung auf ein substrat
FR2586430B1 (fr) * 1985-08-26 1992-10-30 Preci Coat Sa Procede de traitement pour diminuer l'usure et le frotttement d'objets et objets traites selon ce procede
GB8629409D0 (en) * 1986-12-09 1987-01-21 Evans B L Multilayered structures
JPH02217467A (ja) * 1989-02-17 1990-08-30 Pioneer Electron Corp 対向ターゲット型スパッタリング装置
US5002798A (en) * 1989-04-10 1991-03-26 University Of Dayton Method for forming thin solid lubricious films and film articles made thereby
JPH0314227A (ja) * 1989-06-13 1991-01-22 Sharp Corp 半導体装置の製造方法
EP0409451A1 (de) * 1989-07-18 1991-01-23 Optical Coating Laboratory, Inc. Verfahren zum Auftragen von dünnen optischen Schichten auf sowohl flachen als auch nicht flachen Substraten
JPH0397855A (ja) * 1989-09-07 1991-04-23 Shimadzu Corp スパッタリング装置
GB9006073D0 (en) * 1990-03-17 1990-05-16 D G Teer Coating Services Limi Magnetron sputter ion plating
WO1992001081A1 (en) * 1990-07-06 1992-01-23 The Boc Group, Inc. Method and apparatus for co-sputtering and cross-sputtering homogeneous films
DE4038497C1 (de) * 1990-12-03 1992-02-20 Leybold Ag, 6450 Hanau, De
US5268216A (en) * 1990-12-21 1993-12-07 Ovonic Synthetic Materials Company, Inc. Multilayer solid lubricant composite structures and method of making same
CA2078245A1 (en) * 1991-09-23 1993-03-24 Roland Dubach Machining tools
JPH05271928A (ja) * 1992-03-23 1993-10-19 Hitachi Ltd 摺動部材とその製法並びにその用途
US5282985A (en) * 1993-06-24 1994-02-01 The United States Of America As Represented By The Secretary Of The Air Force Lubricant coatings
DE4414051C1 (de) * 1994-04-22 1995-07-06 Dresden Ev Inst Festkoerper Reibarmer Schichtverbund für Bauteile aus metallischen Werkstoffen

Also Published As

Publication number Publication date
JP3825803B2 (ja) 2006-09-27
GB9514773D0 (en) 1995-09-20
EP0842306A1 (de) 1998-05-20
DE69606307T2 (de) 2000-07-20
DE69606307T3 (de) 2006-04-13
GB2303380B (en) 1999-06-30
GB9615137D0 (en) 1996-09-04
ES2142079T3 (es) 2000-04-01
AU6525196A (en) 1997-02-18
WO1997004142A1 (en) 1997-02-06
GB2303380A (en) 1997-02-19
DE69606307D1 (de) 2000-02-24
EP0842306B2 (de) 2005-06-08
EP0842306B1 (de) 2000-01-19
JPH11509580A (ja) 1999-08-24
DK0842306T3 (da) 2000-05-08

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