ATE232994T1 - Wässrige entwicklungslösungen für die verminderung der entwicklerrückstände - Google Patents

Wässrige entwicklungslösungen für die verminderung der entwicklerrückstände

Info

Publication number
ATE232994T1
ATE232994T1 AT99303144T AT99303144T ATE232994T1 AT E232994 T1 ATE232994 T1 AT E232994T1 AT 99303144 T AT99303144 T AT 99303144T AT 99303144 T AT99303144 T AT 99303144T AT E232994 T1 ATE232994 T1 AT E232994T1
Authority
AT
Austria
Prior art keywords
oxide units
layer
photoresist
surfactant
developing solutions
Prior art date
Application number
AT99303144T
Other languages
English (en)
Inventor
Robert Barr
Daniel E Lundy
Original Assignee
Nichigo Morton Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichigo Morton Co Ltd filed Critical Nichigo Morton Co Ltd
Application granted granted Critical
Publication of ATE232994T1 publication Critical patent/ATE232994T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/322—Aqueous alkaline compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Removal Of Specific Substances (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Detergent Compositions (AREA)
AT99303144T 1998-04-29 1999-04-23 Wässrige entwicklungslösungen für die verminderung der entwicklerrückstände ATE232994T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/069,518 US5922522A (en) 1998-04-29 1998-04-29 Aqueous developing solutions for reduced developer residue

Publications (1)

Publication Number Publication Date
ATE232994T1 true ATE232994T1 (de) 2003-03-15

Family

ID=22089531

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99303144T ATE232994T1 (de) 1998-04-29 1999-04-23 Wässrige entwicklungslösungen für die verminderung der entwicklerrückstände

Country Status (10)

Country Link
US (1) US5922522A (de)
EP (1) EP0953880B1 (de)
KR (1) KR100326617B1 (de)
CN (1) CN1141622C (de)
AT (1) ATE232994T1 (de)
BR (1) BR9901322A (de)
CA (1) CA2270013A1 (de)
DE (1) DE69905417T2 (de)
IL (1) IL129658A0 (de)
SG (1) SG80021A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6248506B1 (en) * 1998-12-04 2001-06-19 Nichigo-Morton Aqueous developing solutions for reduced developer residue
US6455234B1 (en) 1999-05-04 2002-09-24 Air Products And Chemicals, Inc. Acetylenic diol ethylene oxide/propylene oxide adducts and their use in photoresist developers
US6281170B1 (en) 1999-10-18 2001-08-28 Air Products And Chemicals, Inc. Surface tension reduction with N,N,N'-trialkkyl ureas
JP2001215690A (ja) 2000-01-04 2001-08-10 Air Prod And Chem Inc アセチレン列ジオールエチレンオキシド／プロピレンオキシド付加物および現像剤におけるその使用
EP1172699B1 (de) 2000-07-14 2013-09-11 FUJIFILM Corporation Verfahren zur Herstellung lithographischer Druckplatten
US6649324B1 (en) * 2000-08-14 2003-11-18 Kodak Polychrome Graphics Llc Aqueous developer for lithographic printing plates
US6503694B1 (en) * 2001-06-12 2003-01-07 Chi Mei Corporation Developer solution and edge bead remover composition
JP2003021901A (ja) * 2001-07-05 2003-01-24 Fuji Photo Film Co Ltd 感光性平版印刷版の光重合方法
US6756183B2 (en) 2001-08-24 2004-06-29 Fuji Photo Film Co., Ltd. Method for preparing lithographic printing plate
US20030196685A1 (en) * 2001-12-18 2003-10-23 Shipley Company, L.L.C. Cleaning composition and method
EP1335016A1 (de) * 2002-02-06 2003-08-13 Shipley Company LLC Reinigungszusammensetzung
JP2003302770A (ja) * 2002-02-08 2003-10-24 Fuji Photo Film Co Ltd 画像形成方法
US6900003B2 (en) * 2002-04-12 2005-05-31 Shipley Company, L.L.C. Photoresist processing aid and method
TW200307856A (en) * 2002-05-07 2003-12-16 Shipley Co Llc Residue reducing stable concentrate
US6887654B2 (en) * 2002-05-07 2005-05-03 Shipley Company, L.L.C. Residue and scum reducing composition and method
JP2004163904A (ja) * 2002-09-30 2004-06-10 Rohm & Haas Electronic Materials Llc 改善された光開始剤
KR20050101458A (ko) * 2004-04-19 2005-10-24 주식회사 하이닉스반도체 포토레지스트 세정액 조성물 및 이를 이용한 패턴 형성방법
US20050282093A1 (en) * 2004-06-16 2005-12-22 Dammel Ralph R Aqueous edge bead remover
US7094523B1 (en) 2005-11-30 2006-08-22 Kesheng Feng Developer solution and process for use
CN102540771A (zh) * 2010-12-24 2012-07-04 无锡华润上华半导体有限公司 正性光刻胶用显影液及光刻工艺中的显影方法
CN104597727A (zh) * 2015-01-14 2015-05-06 深圳市国华光电科技有限公司 一种kmpr光刻胶用koh显影液
KR102378341B1 (ko) * 2015-06-11 2022-03-24 주식회사 이엔에프테크놀로지 포토레지스트 현상액
JP7828293B2 (ja) * 2020-11-30 2026-03-11 富士フイルム株式会社 フレキソ印刷版用水性現像液およびフレキソ印刷版の製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3884825D1 (de) * 1987-02-16 1993-11-18 Konishiroku Photo Ind Entwickler für lichtempfindliche lithographische Druckplatte, gemeinschaftlich verarbeitungsfähig für den Negativ-Typ und den Positiv-Typ und Entwicklerzusammensetzung für lichtempfindliches Material.
US5364736A (en) * 1987-12-07 1994-11-15 Morton International, Inc. Photoimageable compositions
JP2543742B2 (ja) * 1988-04-07 1996-10-16 富士写真フイルム株式会社 ポジ型フオトレジスト用現像液
US5122438A (en) * 1989-11-02 1992-06-16 Konica Corporation Method for developing a waterless light-sensitive lithographic plate
JPH04163556A (ja) * 1990-10-29 1992-06-09 Konica Corp 感光性平版印刷版の処理方法及び処理装置
JP2866951B2 (ja) * 1990-11-28 1999-03-08 富士写真フイルム株式会社 ハロゲン化銀カラー写真感光材料の処理方法
JP2748057B2 (ja) * 1991-07-22 1998-05-06 富士写真フイルム株式会社 画像形成方法及びアルカリ性現像液
JPH0572686A (ja) * 1991-09-11 1993-03-26 Konica Corp ハロゲン化銀写真感光材料
US5532116A (en) * 1992-01-13 1996-07-02 Fuji Photo Film Co., Ltd. Aqueous alkaline developing solution
JP3094716B2 (ja) * 1992-01-16 2000-10-03 富士写真フイルム株式会社 ハロゲン化銀カラー写真感光材料の処理方法
US5457011A (en) * 1993-12-27 1995-10-10 Eastman Kodak Company Photographic developing composition containing a sludge inhibiting agent and use thereof in the high contrast development of nucleated photographic elements
US5364737A (en) * 1994-01-25 1994-11-15 Morton International, Inc. Waterbone photoresists having associate thickeners
JP2937801B2 (ja) * 1994-03-31 1999-08-23 東京応化工業株式会社 レジスト用現像原液
DE4419166A1 (de) * 1994-06-01 1995-12-07 Hoechst Ag Entwickler für Photoresistschichten
JPH0810600A (ja) * 1994-06-30 1996-01-16 Toho Chem Ind Co Ltd 感光性樹脂工業用消泡分散剤
US5576145A (en) * 1995-02-10 1996-11-19 Morton International, Inc. Esterified styrene/maleic anhydride polymer and polymer-containing photoimageable composition having improved alkaline process resistance
US5609991A (en) * 1995-02-10 1997-03-11 Morton International, Inc. Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging
US5998102A (en) * 1997-10-06 1999-12-07 Agfa Corporation Etch inhibitors in developer for lithographic printing plates

Also Published As

Publication number Publication date
KR19990083501A (ko) 1999-11-25
IL129658A0 (en) 2000-02-29
DE69905417T2 (de) 2003-08-28
EP0953880A2 (de) 1999-11-03
EP0953880B1 (de) 2003-02-19
SG80021A1 (en) 2001-04-17
CN1141622C (zh) 2004-03-10
US5922522A (en) 1999-07-13
BR9901322A (pt) 2000-03-14
CA2270013A1 (en) 1999-10-29
KR100326617B1 (ko) 2002-03-02
CN1233783A (zh) 1999-11-03
DE69905417D1 (de) 2003-03-27
EP0953880A3 (de) 1999-11-17

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