ATE236719T1 - Verfahren zur herstellung integrierter vielschichtmikrofluidbauteile - Google Patents

Verfahren zur herstellung integrierter vielschichtmikrofluidbauteile

Info

Publication number
ATE236719T1
ATE236719T1 AT99951826T AT99951826T ATE236719T1 AT E236719 T1 ATE236719 T1 AT E236719T1 AT 99951826 T AT99951826 T AT 99951826T AT 99951826 T AT99951826 T AT 99951826T AT E236719 T1 ATE236719 T1 AT E236719T1
Authority
AT
Austria
Prior art keywords
dna
chamber
dna amplification
layer
integrated multi
Prior art date
Application number
AT99951826T
Other languages
English (en)
Inventor
Jeremy W Burdon
Rong-Fong Huang
David Wilcox
Nicholas J Naclerio
Cynthia Ann Gorsuch Briscoe
Piotr Grodzinski
Huinan Yu
Robert Marrero
Sean Ross Gallagher
Yuk-Tong Chan
Barbara Barenburg Foley
Xunhu Dai
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/235,081 external-priority patent/US6592696B1/en
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of ATE236719T1 publication Critical patent/ATE236719T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6052—Construction of the column body
    • G01N30/6069—Construction of the column body with compartments or bed substructure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00279—Features relating to reactor vessels
    • B01J2219/00306—Reactor vessels in a multiple arrangement
    • B01J2219/00313—Reactor vessels in a multiple arrangement the reactor vessels being formed by arrays of wells in blocks
    • B01J2219/00315—Microtiter plates
    • B01J2219/00317—Microwell devices, i.e. having large numbers of wells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00351—Means for dispensing and evacuation of reagents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00495—Means for heating or cooling the reaction vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00835—Comprising catalytically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/0095—Control aspects
    • B01J2219/00952—Sensing operations
    • B01J2219/00954—Measured properties
    • B01J2219/00966—Measured properties pH
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0689—Sealing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0883—Serpentine channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1822—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using Peltier elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/04—Punching, slitting or perforating
    • B32B2038/042—Punching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00—Metals, their alloys or their compounds
    • B32B2311/02—Noble metals
    • B32B2311/06—Platinum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00—Metals, their alloys or their compounds
    • B32B2311/02—Noble metals
    • B32B2311/08—Silver
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/02—Ceramics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562—Heating rate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/341—Silica or silicates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C40—COMBINATORIAL TECHNOLOGY
    • C40B—COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B60/00—Apparatus specially adapted for use in combinatorial chemistry or with libraries
    • C40B60/14—Apparatus specially adapted for use in combinatorial chemistry or with libraries for creating libraries
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
    • F28D2021/0029—Heat sinks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/50—Conditioning of the sorbent material or stationary liquid
    • G01N30/52—Physical parameters
    • G01N2030/524—Physical parameters structural properties
    • G01N2030/528—Monolithic sorbent material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00029—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor provided with flat sample substrates, e.g. slides
    • G01N2035/00099—Characterised by type of test elements
    • G01N2035/00158—Elements containing microarrays, i.e. "biochip"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00178—Special arrangements of analysers
    • G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6004—Construction of the column end pieces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0272—Adaptations for fluid transport, e.g. channels, holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Hematology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Molecular Biology (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Catalysts (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
AT99951826T 1998-10-09 1999-10-07 Verfahren zur herstellung integrierter vielschichtmikrofluidbauteile ATE236719T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10370198P 1998-10-09 1998-10-09
US09/235,081 US6592696B1 (en) 1998-10-09 1999-01-21 Method for fabricating a multilayered structure and the structures formed by the method
US09/337,086 US6572830B1 (en) 1998-10-09 1999-06-21 Integrated multilayered microfludic devices and methods for making the same
PCT/US1999/023324 WO2000021659A1 (en) 1998-10-09 1999-10-07 Integrated multilayered microfluidic devices and methods for making the same

Publications (1)

Publication Number Publication Date
ATE236719T1 true ATE236719T1 (de) 2003-04-15

Family

ID=27379590

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99951826T ATE236719T1 (de) 1998-10-09 1999-10-07 Verfahren zur herstellung integrierter vielschichtmikrofluidbauteile

Country Status (9)

Country Link
US (5) US6572830B1 (de)
EP (1) EP1123157B1 (de)
JP (1) JP2002527254A (de)
AT (1) ATE236719T1 (de)
AU (1) AU6418499A (de)
CA (1) CA2346059A1 (de)
DE (1) DE69906772T2 (de)
ES (1) ES2197681T3 (de)
WO (1) WO2000021659A1 (de)

Families Citing this family (406)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6048734A (en) 1995-09-15 2000-04-11 The Regents Of The University Of Michigan Thermal microvalves in a fluid flow method
US5885470A (en) * 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6591852B1 (en) 1998-10-13 2003-07-15 Biomicro Systems, Inc. Fluid circuit components based upon passive fluid dynamics
US6601613B2 (en) 1998-10-13 2003-08-05 Biomicro Systems, Inc. Fluid circuit components based upon passive fluid dynamics
US6637463B1 (en) 1998-10-13 2003-10-28 Biomicro Systems, Inc. Multi-channel microfluidic system design with balanced fluid flow distribution
TW496775B (en) * 1999-03-15 2002-08-01 Aviva Bioscience Corp Individually addressable micro-electromagnetic unit array chips
CN1181337C (zh) * 2000-08-08 2004-12-22 清华大学 微流体系统中实体分子的操纵方法及相关试剂盒
US6623945B1 (en) 1999-09-16 2003-09-23 Motorola, Inc. System and method for microwave cell lysing of small samples
US6361958B1 (en) * 1999-11-12 2002-03-26 Motorola, Inc. Biochannel assay for hybridization with biomaterial
CA2290731A1 (en) * 1999-11-26 2001-05-26 D. Jed Harrison Apparatus and method for trapping bead based reagents within microfluidic analysis system
US6432290B1 (en) 1999-11-26 2002-08-13 The Governors Of The University Of Alberta Apparatus and method for trapping bead based reagents within microfluidic analysis systems
US20020112961A1 (en) * 1999-12-02 2002-08-22 Nanostream, Inc. Multi-layer microfluidic device fabrication
US6537433B1 (en) * 2000-03-10 2003-03-25 Applera Corporation Methods and apparatus for the location and concentration of polar analytes using an alternating electric field
US7485454B1 (en) 2000-03-10 2009-02-03 Bioprocessors Corp. Microreactor
US6561208B1 (en) 2000-04-14 2003-05-13 Nanostream, Inc. Fluidic impedances in microfluidic system
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6734401B2 (en) 2000-06-28 2004-05-11 3M Innovative Properties Company Enhanced sample processing devices, systems and methods
US6720187B2 (en) * 2000-06-28 2004-04-13 3M Innovative Properties Company Multi-format sample processing devices
DE10032333A1 (de) * 2000-07-04 2002-01-24 Bosch Gmbh Robert Keramischer Grünkörper, Verfahren zur Herstellung eines derartigen Grünkörpers und Verfahren zur Herstellung eines Keramikkörpers mit dem Grünkörper
US6890093B2 (en) * 2000-08-07 2005-05-10 Nanostream, Inc. Multi-stream microfludic mixers
EP1309404A2 (de) 2000-08-07 2003-05-14 Nanostream, Inc. Mischvorrichtung in einem mikrofluidischen system
WO2002012896A1 (en) * 2000-08-08 2002-02-14 Aviva Biosciences Corporation Methods for manipulating moieties in microfluidic systems
EP1311854A2 (de) * 2000-08-23 2003-05-21 Imego AB Microfluidische vorrichtung und methode, um eine probe in hohlräumen, die mit einem deckel verschlossen oder geöffnet werden können, aufzufangen(19.03.03)
US20020048821A1 (en) * 2000-08-24 2002-04-25 David Storek Sample preparing arrangement and a method relating to such an arrangement
US7998746B2 (en) * 2000-08-24 2011-08-16 Robert Otillar Systems and methods for localizing and analyzing samples on a bio-sensor chip
WO2002021131A1 (en) * 2000-09-06 2002-03-14 Toyo Kohan Co., Ltd. Solid supports having surface-treated layer formed thereon
US6827095B2 (en) 2000-10-12 2004-12-07 Nanostream, Inc. Modular microfluidic systems
US6548252B1 (en) * 2000-10-13 2003-04-15 Esa, Inc. Detection of DNA damage
US20030207307A1 (en) * 2000-10-13 2003-11-06 Esa, Inc. Determining biochemical markers of progression and therapy monitoring and specification, therapeutic lead molecules, and target biochemical systems applied to stroke
US8097471B2 (en) * 2000-11-10 2012-01-17 3M Innovative Properties Company Sample processing devices
US20020123134A1 (en) * 2000-12-26 2002-09-05 Mingxian Huang Active and biocompatible platforms prepared by polymerization of surface coating films
US20020110835A1 (en) * 2001-02-13 2002-08-15 Rajan Kumar Microfluidic devices and methods
US6692700B2 (en) 2001-02-14 2004-02-17 Handylab, Inc. Heat-reduction methods and systems related to microfluidic devices
EP1372828A4 (de) * 2001-03-24 2008-10-29 Aviva Biosciences Corp Biochips mit ionentransporterfassungsstrukturen und verwendungsverfahren
US7192557B2 (en) * 2001-03-28 2007-03-20 Handylab, Inc. Methods and systems for releasing intracellular material from cells within microfluidic samples of fluids
US7829025B2 (en) 2001-03-28 2010-11-09 Venture Lending & Leasing Iv, Inc. Systems and methods for thermal actuation of microfluidic devices
US7323140B2 (en) 2001-03-28 2008-01-29 Handylab, Inc. Moving microdroplets in a microfluidic device
US7270786B2 (en) * 2001-03-28 2007-09-18 Handylab, Inc. Methods and systems for processing microfluidic samples of particle containing fluids
US6852287B2 (en) * 2001-09-12 2005-02-08 Handylab, Inc. Microfluidic devices having a reduced number of input and output connections
US8895311B1 (en) 2001-03-28 2014-11-25 Handylab, Inc. Methods and systems for control of general purpose microfluidic devices
US7010391B2 (en) * 2001-03-28 2006-03-07 Handylab, Inc. Methods and systems for control of microfluidic devices
CA2440785A1 (en) * 2001-04-10 2002-10-24 Bioprocessors Corporation Microfermentor device and cell based screening method
US20030118804A1 (en) * 2001-05-02 2003-06-26 3M Innovative Properties Company Sample processing device with resealable process chamber
US20020173033A1 (en) * 2001-05-17 2002-11-21 Kyle Hammerick Device and method or three-dimensional spatial localization and functional interconnection of different types of cells
US6814938B2 (en) 2001-05-23 2004-11-09 Nanostream, Inc. Non-planar microfluidic devices and methods for their manufacture
US6910503B2 (en) * 2001-05-25 2005-06-28 Upchurch Scientific, Inc. Methods and apparatus for micro-fluidic analytical chemistry
US20020174937A1 (en) * 2001-05-25 2002-11-28 Motorola, Inc. Methods and apparatus for manufacturing patterned ceramic green-sheets and multilayered ceramic devices
US20020174936A1 (en) * 2001-05-25 2002-11-28 Motorola, Inc. Methods for forming recessed patterns in a multilayered ceramic package and devices produced by such methods
US6919046B2 (en) 2001-06-07 2005-07-19 Nanostream, Inc. Microfluidic analytical devices and methods
US6981522B2 (en) 2001-06-07 2006-01-03 Nanostream, Inc. Microfluidic devices with distributing inputs
US6811695B2 (en) 2001-06-07 2004-11-02 Nanostream, Inc. Microfluidic filter
US20020186263A1 (en) * 2001-06-07 2002-12-12 Nanostream, Inc. Microfluidic fraction collectors
US7318912B2 (en) 2001-06-07 2008-01-15 Nanostream, Inc. Microfluidic systems and methods for combining discrete fluid volumes
US7077152B2 (en) 2001-07-07 2006-07-18 Nanostream, Inc. Microfluidic metering systems and methods
JP4019044B2 (ja) * 2001-07-10 2007-12-05 財団法人神奈川科学技術アカデミー 多層流マイクロチャンネルの集積化構造体とこれを用いる多層流操作方法
US6942018B2 (en) 2001-09-28 2005-09-13 The Board Of Trustees Of The Leland Stanford Junior University Electroosmotic microchannel cooling system
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication
US20030108664A1 (en) * 2001-10-05 2003-06-12 Kodas Toivo T. Methods and compositions for the formation of recessed electrical features on a substrate
US6783647B2 (en) * 2001-10-19 2004-08-31 Ut-Battelle, Llc Microfluidic systems and methods of transport and lysis of cells and analysis of cell lysate
US7090003B2 (en) * 2001-10-19 2006-08-15 Wisconsin Alumni Research Foundation Method and apparatus for temperature control of a microfluidic device
US7767437B2 (en) * 2001-11-02 2010-08-03 Genefluidics, Inc. System for detection of a component in a liquid
CN1585898A (zh) * 2001-11-20 2005-02-23 日本电气株式会社 分离装置,分离方法和生产分离装置的方法
US6554591B1 (en) * 2001-11-26 2003-04-29 Motorola, Inc. Micropump including ball check valve utilizing ceramic technology and method of fabrication
WO2003050035A2 (en) 2001-12-06 2003-06-19 Nanostream, Inc. Adhesiveless microfluidic device fabrication
FR2833699B1 (fr) * 2001-12-19 2004-05-28 Bio Merieux Procede de controle de la presence ou de l'absence ou de controle du remplissage d'un contenant et dispositif de mise en oeuvre du procede
US6889468B2 (en) 2001-12-28 2005-05-10 3M Innovative Properties Company Modular systems and methods for using sample processing devices
US20030127105A1 (en) * 2002-01-05 2003-07-10 Fontana Richard Remo Complete compact
US6877892B2 (en) * 2002-01-11 2005-04-12 Nanostream, Inc. Multi-stream microfluidic aperture mixers
US6814859B2 (en) 2002-02-13 2004-11-09 Nanostream, Inc. Frit material and bonding method for microfluidic separation devices
US7261812B1 (en) 2002-02-13 2007-08-28 Nanostream, Inc. Multi-column separation devices and methods
US6923907B2 (en) 2002-02-13 2005-08-02 Nanostream, Inc. Separation column devices and fabrication methods
US7883670B2 (en) * 2002-02-14 2011-02-08 Battelle Memorial Institute Methods of making devices by stacking sheets and processes of conducting unit operations using such devices
GB0203661D0 (en) * 2002-02-15 2002-04-03 Syrris Ltd A microreactor
WO2003072255A1 (en) 2002-02-23 2003-09-04 Nanostream, Inc. Microfluidic multi-splitter
US7459127B2 (en) 2002-02-26 2008-12-02 Siemens Healthcare Diagnostics Inc. Method and apparatus for precise transfer and manipulation of fluids by centrifugal and/or capillary forces
DE10238266A1 (de) * 2002-02-28 2003-11-06 Ibidi Gmbh Mikrofluidsystem
AU2003221844A1 (en) * 2002-04-18 2003-11-03 Esa, Inc. Determining biochemical markers of progression and therapy monitoring and specification, therapeutic lead molecules, and target biochemical systems applied to stroke
DE10218278B4 (de) * 2002-04-19 2005-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroreaktor
US6838640B2 (en) * 2002-05-13 2005-01-04 The Regents Of The University Of Michigan Separation microcolumn assembly for a microgas chromatograph and the like
US20030217923A1 (en) * 2002-05-24 2003-11-27 Harrison D. Jed Apparatus and method for trapping bead based reagents within microfluidic analysis systems
US20050238506A1 (en) * 2002-06-21 2005-10-27 The Charles Stark Draper Laboratory, Inc. Electromagnetically-actuated microfluidic flow regulators and related applications
US7155812B1 (en) 2002-09-05 2007-01-02 Sandia Corporation Method for producing a tube
EP1545740A2 (de) * 2002-09-07 2005-06-29 Arizona Board of Regents Integrierte vorrichtungen und verfahren zur behandlung von flüssigkeiten
US20040115830A1 (en) * 2002-09-25 2004-06-17 Igor Touzov Components for nano-scale Reactor
US7530257B2 (en) * 2002-09-27 2009-05-12 Honeywell International Inc. Phased micro analyzer VIII
US7000452B2 (en) * 2002-09-27 2006-02-21 Honeywell International Inc. Phased micro fluid analyzer
US7367216B2 (en) * 2002-09-27 2008-05-06 Honeywell International Inc. Phased micro analyzer V, VI
US7104112B2 (en) * 2002-09-27 2006-09-12 Honeywell International Inc. Phased micro analyzer IV
WO2004033750A1 (en) * 2002-10-08 2004-04-22 Motorola, Inc. Plasma-assisted micro-scale material deposition
EP1415706B1 (de) * 2002-10-29 2017-07-12 Corning Incorporated Beschichtete Mikrostruktur und deren Herstellungsverfahren
WO2004040295A1 (en) 2002-10-31 2004-05-13 Nanostream, Inc. Parallel detection chromatography systems
US7010964B2 (en) 2002-10-31 2006-03-14 Nanostream, Inc. Pressurized microfluidic devices with optical detection regions
US6936167B2 (en) 2002-10-31 2005-08-30 Nanostream, Inc. System and method for performing multiple parallel chromatographic separations
US6718817B1 (en) * 2002-11-22 2004-04-13 Chung-Shan Institute Of Science And Technology Sample injection device for gas chromatography
TW200409821A (en) * 2002-12-03 2004-06-16 Ind Tech Res Inst Microarray biochip reactor
US7467928B2 (en) * 2002-12-12 2008-12-23 Board Of Trustees Of The University Of Arkansas Microfluidic device utilizing magnetohydrodynamics and method for fabrication thereof
US7147695B2 (en) * 2002-12-13 2006-12-12 New Jersey Institute Of Technology Microfabricated microconcentrator for sensors and gas chromatography
US6706091B1 (en) * 2002-12-17 2004-03-16 Sandia Corporation Sub-to super-ambient temperature programmable microfabricated gas chromatography column
US7507376B2 (en) * 2002-12-19 2009-03-24 3M Innovative Properties Company Integrated sample processing devices
US7445926B2 (en) 2002-12-30 2008-11-04 The Regents Of The University Of California Fluid control structures in microfluidic devices
WO2004059213A1 (en) * 2002-12-31 2004-07-15 Lg Electronics Inc. Microwave oven
US6955777B2 (en) 2003-01-07 2005-10-18 International Business Machines Corporation Method of forming a plate for dispensing chemicals
TW571101B (en) * 2003-01-21 2004-01-11 Ind Tech Res Inst Fluid analysis apparatus
US20050064137A1 (en) * 2003-01-29 2005-03-24 Hunt Alan J. Method for forming nanoscale features and structures produced thereby
WO2004068553A2 (en) * 2003-01-29 2004-08-12 The Regents Of The University Of Michigan Method for forming nanoscale features
US7338637B2 (en) * 2003-01-31 2008-03-04 Hewlett-Packard Development Company, L.P. Microfluidic device with thin-film electronic devices
JP4721624B2 (ja) * 2003-02-19 2011-07-13 京セラ株式会社 空間部を具備するセラミック構造体の製造方法
US20050129580A1 (en) * 2003-02-26 2005-06-16 Swinehart Philip R. Microfluidic chemical reactor for the manufacture of chemically-produced nanoparticles
US6781056B1 (en) 2003-02-28 2004-08-24 Motorola, Inc. Heater for temperature control integrated in circuit board and method of manufacture
US6901217B2 (en) 2003-02-28 2005-05-31 Motorolr, Inc. Conduits integrated in circuit board and method of manufacture
NL1023011C2 (nl) * 2003-03-25 2004-09-30 Ferro Techniek Holding Bv Verwarmingssamenstel met spoorvormige elektrische weerstand.
JP2004294319A (ja) * 2003-03-27 2004-10-21 Jsr Corp 流体プロセッサー
US7178386B1 (en) 2003-04-10 2007-02-20 Nanostream, Inc. Parallel fluid processing systems and methods
US20040255643A1 (en) * 2003-05-13 2004-12-23 Wise Kensall D. High-performance separation microcolumn assembly and method of making same
US7648835B2 (en) * 2003-06-06 2010-01-19 Micronics, Inc. System and method for heating, cooling and heat cycling on microfluidic device
JP4758891B2 (ja) * 2003-06-06 2011-08-31 マイクロニクス， インコーポレイテッド 微小流体デバイス上の加熱、冷却および熱サイクリングのためのシステムおよび方法
JP2005007529A (ja) * 2003-06-19 2005-01-13 Dainippon Screen Mfg Co Ltd マイクロ流体デバイスおよびマイクロ流体デバイスの製造方法
JP2005024316A (ja) * 2003-06-30 2005-01-27 Kyocera Corp マイクロ化学チップおよびその製造方法
WO2005011867A2 (en) 2003-07-31 2005-02-10 Handylab, Inc. Processing particle-containing samples
US20050032238A1 (en) * 2003-08-07 2005-02-10 Nanostream, Inc. Vented microfluidic separation devices and methods
US7028536B2 (en) * 2004-06-29 2006-04-18 Nanostream, Inc. Sealing interface for microfluidic device
US7524464B2 (en) 2003-09-26 2009-04-28 Ahn Chong H Smart disposable plastic lab-on-a-chip for point-of-care testing
US7718133B2 (en) * 2003-10-09 2010-05-18 3M Innovative Properties Company Multilayer processing devices and methods
US20050077657A1 (en) * 2003-10-14 2005-04-14 International Business Machines Corporation A Method of Making a Multichannel and Multilayer Pharmaceutical Device
US6994245B2 (en) * 2003-10-17 2006-02-07 James M. Pinchot Micro-reactor fabrication
US8066955B2 (en) * 2003-10-17 2011-11-29 James M. Pinchot Processing apparatus fabrication
US20050084072A1 (en) * 2003-10-17 2005-04-21 Jmp Industries, Inc., An Ohio Corporation Collimator fabrication
US7498549B2 (en) * 2003-10-24 2009-03-03 Raytheon Company Selective layer millimeter-wave surface-heating system and method
JP4632653B2 (ja) * 2003-10-24 2011-02-16 京セラ株式会社 多層配線基板
US20050100712A1 (en) * 2003-11-12 2005-05-12 Simmons Blake A. Polymerization welding and application to microfluidics
EP1535665A1 (de) * 2003-11-28 2005-06-01 STMicroelectronics S.r.l. Integrierter chemischer Mikroreaktor mit separaten Kanälen zum Einschliessen von Flüssigkeiten und Verfahren zu dessen Herstellung
US20050130177A1 (en) * 2003-12-12 2005-06-16 3M Innovative Properties Company Variable valve apparatus and methods
WO2005064309A1 (en) * 2003-12-23 2005-07-14 Ventana Medical Systems, Inc. Method and apparatus for efficient thin film fluid
US7939249B2 (en) * 2003-12-24 2011-05-10 3M Innovative Properties Company Methods for nucleic acid isolation and kits using a microfluidic device and concentration step
EP1547675A1 (de) * 2003-12-24 2005-06-29 Corning Incorporated Beschichtete Mikrovorrichtung und deren Herstellungsverfahren
KR100750586B1 (ko) * 2003-12-26 2007-08-20 한국전자통신연구원 미소유체 가열 시스템
GB2416030B (en) * 2004-01-28 2008-07-23 Norchip As A diagnostic system for carrying out a nucleic acid sequence amplification and detection process
WO2005072793A1 (en) 2004-01-29 2005-08-11 The Charles Stark Draper Laboratory, Inc. Implantable drug delivery apparatus
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US7494557B1 (en) 2004-01-30 2009-02-24 Sandia Corporation Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures
US8043849B2 (en) * 2004-02-24 2011-10-25 Thermal Gradient Thermal cycling device
WO2005082043A2 (en) * 2004-02-24 2005-09-09 Thermal Gradient Thermal cycling device
US7063910B2 (en) * 2004-04-06 2006-06-20 Angstrom Power Compact chemical reactor with reactor frame
DE102004021780B4 (de) * 2004-04-30 2008-10-02 Siemens Ag Verfahren und Anordnung zur DNA-Isolierung mit Trockenreagenzien
DE102004021822B3 (de) * 2004-04-30 2005-11-17 Siemens Ag Verfahren und Anordnung zur DNA-Amplifikation mittels PCR unter Einsatz von Trockenreagenzien
ES2572382T3 (es) 2004-05-03 2016-05-31 Handylab Inc Un dispositivo microfluídico para el procesamiento de muestras que contienen polinucleótidos
US8852862B2 (en) 2004-05-03 2014-10-07 Handylab, Inc. Method for processing polynucleotide-containing samples
US7799553B2 (en) * 2004-06-01 2010-09-21 The Regents Of The University Of California Microfabricated integrated DNA analysis system
US7290555B2 (en) * 2004-06-18 2007-11-06 Harris Corporation Embedded microfluidic check-valve
US7290554B2 (en) * 2004-06-18 2007-11-06 Harris Corporation Embedded microfluidic check-valve
DE102004033317A1 (de) * 2004-07-09 2006-02-09 Roche Diagnostics Gmbh Analytisches Testelement
DE102004034269A1 (de) * 2004-07-15 2006-02-09 Volkswagen Ag Verfahren zur Herstellung eines Substrats und ein solches Substrat
JP4683872B2 (ja) * 2004-07-28 2011-05-18 京セラ株式会社 マイクロ化学チップおよびその製造方法
KR20070046875A (ko) * 2004-07-29 2007-05-03 쿄세라 코포레이션 마이크로화학 칩
US7645423B2 (en) 2004-08-20 2010-01-12 International Business Machines Corporation Optical micro plugs for multichannel and multilayer pharmaceutical device
JP4574369B2 (ja) * 2004-08-26 2010-11-04 京セラ株式会社 配線基板およびその製造方法
CN101073002B (zh) 2004-09-15 2012-08-08 英特基因有限公司 微流体装置
EP1637228A1 (de) * 2004-09-16 2006-03-22 Roche Diagnostics GmbH Methode und Vorrichtung zum Ausführen schneller Thermocyclierung sowie mikrofluidisches System
US7592139B2 (en) * 2004-09-24 2009-09-22 Sandia National Laboratories High temperature flow-through device for rapid solubilization and analysis
WO2006039293A2 (en) * 2004-09-29 2006-04-13 University Of Virginia Patent Foundation Localized control of thermal properties on microdevices and applications thereof
US20060094028A1 (en) * 2004-11-04 2006-05-04 Welch Allyn, Inc. Rapid diagnostic assay
US8695355B2 (en) * 2004-12-08 2014-04-15 California Institute Of Technology Thermal management techniques, apparatus and methods for use in microfluidic devices
CA2594277A1 (en) * 2004-12-22 2006-06-29 University Of Virginia Patent Foundation The use of microwaves for thermal and non-thermal applications in micro and nanoscale devices
DE112006000170T5 (de) * 2005-01-10 2007-11-22 Dana Corp., Toledo Formen einer Brennstoffzellen-Trennplattenverstärkung vor Ort
US7662614B2 (en) * 2005-01-14 2010-02-16 Samsung Electronics Co., Ltd. Biochip platform including dielectric particle layer and optical assay apparatus using the same
DE102005004075B4 (de) * 2005-01-28 2008-04-03 Umicore Ag & Co. Kg Keramischer Mikroreaktor
FR2881363B1 (fr) * 2005-02-02 2008-03-14 Commissariat Energie Atomique Dispositif d'analyses biologiques avec detecteur integre
US7273517B1 (en) * 2005-02-25 2007-09-25 Sandia Corporation Non-planar microfabricated gas chromatography column
EP1868725B1 (de) * 2005-03-08 2012-01-18 Authentix, Inc. Verwendung einer mikrofluidischen vorrichtung zur identifikation, quantifizierung und authentifizierung latenter marker
JP4851822B2 (ja) * 2005-03-30 2012-01-11 シチズンホールディングス株式会社 マイクロ化学チップ
JP2006297198A (ja) * 2005-04-15 2006-11-02 Sumitomo Electric Ind Ltd マイクロ流路デバイス
EP1717566A1 (de) * 2005-04-25 2006-11-02 Mettler-Toledo AG Thermoanalytischer Sensor
US20070031819A1 (en) * 2005-04-26 2007-02-08 University Of Washington Microfluidic systems for biological and molecular analysis and methods thereof
US7513936B2 (en) * 2005-05-03 2009-04-07 Roques Ned J Flat spiral capillary column assembly with thermal modulator
JP2006320772A (ja) * 2005-05-17 2006-11-30 Hitachi Plant Technologies Ltd マイクロ流体デバイス
US20060263873A1 (en) * 2005-05-21 2006-11-23 Levine Leanna M Controlled flow microfluidic device and method of fabrication
AP2693A (en) 2005-05-27 2013-07-16 Monsanto Technology Llc Soybean event MON89788 and methods for detection thereof
USD564667S1 (en) 2005-07-05 2008-03-18 3M Innovative Properties Company Rotatable sample processing disk
US7323660B2 (en) * 2005-07-05 2008-01-29 3M Innovative Properties Company Modular sample processing apparatus kits and modules
US7754474B2 (en) 2005-07-05 2010-07-13 3M Innovative Properties Company Sample processing device compression systems and methods
US7763210B2 (en) * 2005-07-05 2010-07-27 3M Innovative Properties Company Compliant microfluidic sample processing disks
US20080217796A1 (en) * 2005-08-23 2008-09-11 Koninklijke Philips Electronics, N.V. Method for Manufacturing a Component Having a Three-Dimensional Structure in a Surface Region and a Ceramic Component
US7556776B2 (en) * 2005-09-08 2009-07-07 President And Fellows Of Harvard College Microfluidic manipulation of fluids and reactions
CN101263077B (zh) * 2005-09-09 2011-11-09 皇家飞利浦电子股份有限公司 一种制造具有间隔的微系统的方法
JP2009511059A (ja) * 2005-10-11 2009-03-19 ハンディーラブ インコーポレイテッド ポリヌクレオチドサンプル調製装置
US20070092399A1 (en) * 2005-10-24 2007-04-26 Kyocera Corporation Fluid Examination Chip and Method of Manufacturing the Fluid Examination Chip
DE202005017612U1 (de) * 2005-11-11 2006-01-12 M & C Products Analysentechnik Gmbh Pumpe
KR100738085B1 (ko) * 2005-12-21 2007-07-12 삼성전자주식회사 유체의 ｐＨ를 전기화학적으로 조절하기 위한 미세유동장치및 그를 이용하여 ｐＨ를 조절하는 방법
DE102006002258B4 (de) * 2006-01-17 2008-08-21 Siemens Ag Modul zur Aufbereitung einer biologischen Probe, Biochip-Satz und Verwendung des Moduls
US7749365B2 (en) 2006-02-01 2010-07-06 IntegenX, Inc. Optimized sample injection structures in microfluidic separations
EP1979079A4 (de) 2006-02-03 2012-11-28 Integenx Inc Mikrofluidische vorrichtungen
US20070204749A1 (en) * 2006-03-01 2007-09-06 Douglas Adkins Gas chromatograph column and method of making the same
US7766033B2 (en) * 2006-03-22 2010-08-03 The Regents Of The University Of California Multiplexed latching valves for microfluidic devices and processors
US11806718B2 (en) 2006-03-24 2023-11-07 Handylab, Inc. Fluorescence detector for microfluidic diagnostic system
DK3088083T3 (en) 2006-03-24 2018-11-26 Handylab Inc Method of carrying out PCR down a multi-track cartridge
US8088616B2 (en) 2006-03-24 2012-01-03 Handylab, Inc. Heater unit for microfluidic diagnostic system
EP1999465B1 (de) * 2006-03-24 2016-11-16 Waters Technologies Corporation Chromatographievorrichtung auf keramikbasis
US7998708B2 (en) 2006-03-24 2011-08-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US10900066B2 (en) 2006-03-24 2021-01-26 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US9476856B2 (en) 2006-04-13 2016-10-25 Advanced Liquid Logic, Inc. Droplet-based affinity assays
US7816121B2 (en) * 2006-04-18 2010-10-19 Advanced Liquid Logic, Inc. Droplet actuation system and method
US10078078B2 (en) 2006-04-18 2018-09-18 Advanced Liquid Logic, Inc. Bead incubation and washing on a droplet actuator
US8809068B2 (en) 2006-04-18 2014-08-19 Advanced Liquid Logic, Inc. Manipulation of beads in droplets and methods for manipulating droplets
US8389297B2 (en) 2006-04-18 2013-03-05 Duke University Droplet-based affinity assay device and system
US7439014B2 (en) 2006-04-18 2008-10-21 Advanced Liquid Logic, Inc. Droplet-based surface modification and washing
US20070246106A1 (en) 2006-04-25 2007-10-25 Velocys Inc. Flow Distribution Channels To Control Flow in Process Channels
JP4771151B2 (ja) * 2006-04-28 2011-09-14 公立大学法人大阪府立大学 マイクロミキサー
US7846391B2 (en) * 2006-05-22 2010-12-07 Lumencor, Inc. Bioanalytical instrumentation using a light source subsystem
EP2021476B1 (de) 2006-05-26 2014-07-09 Monsanto Technology, LLC Maispflanze und samen entsprechend dem transgenen ereignis mon89034 und verfahren zu ihrem nachweis und ihrer verwendung
US7641860B2 (en) 2006-06-01 2010-01-05 Nanotek, Llc Modular and reconfigurable multi-stage microreactor cartridge apparatus
US7998418B1 (en) 2006-06-01 2011-08-16 Nanotek, Llc Evaporator and concentrator in reactor and loading system
DE102006027675B4 (de) * 2006-06-14 2011-05-12 Siemens Ag Verfahren zur Bestimmung der Konzentration von Nukleinsäuren
EP1876453A1 (de) * 2006-07-07 2008-01-09 Agilent Technologies, Inc. Temperatursteuerung für integrierten Chip
EP1878501A1 (de) * 2006-07-14 2008-01-16 Roche Diagnostics GmbH Vorrichtung zur Heizung und Kühlung
EP1878502A1 (de) * 2006-07-14 2008-01-16 Roche Diagnostics GmbH Temperiervorrichtung
FR2903679B1 (fr) * 2006-07-17 2014-07-04 Centre Nat Rech Scient Fabrication de dispositifs microfluidiques polymeriques par impression photo-assistee.
JP2008051803A (ja) * 2006-07-28 2008-03-06 Sharp Corp 分析用マイクロ流路デバイス
US20080036566A1 (en) * 2006-08-09 2008-02-14 Andrzej Klesyk Electronic Component And Methods Relating To Same
US7854902B2 (en) * 2006-08-23 2010-12-21 Nanotek, Llc Modular and reconfigurable multi-stage high temperature microreactor cartridge apparatus and system for using same
US8173071B2 (en) 2006-08-29 2012-05-08 International Business Machines Corporation Micro-fluidic test apparatus and method
DE112007002709A5 (de) * 2006-08-31 2009-08-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines Bioreaktors oder Lab-on-a-Chip-Systems sowie damit hergestellte Bioreaktoren oder Lab-on-a-Chip-Systeme
US8841116B2 (en) 2006-10-25 2014-09-23 The Regents Of The University Of California Inline-injection microdevice and microfabricated integrated DNA analysis system using same
WO2008055915A2 (en) * 2006-11-06 2008-05-15 Clondiag Gmbh Device and process for assays using binding members
WO2008060604A2 (en) 2006-11-14 2008-05-22 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US8709787B2 (en) 2006-11-14 2014-04-29 Handylab, Inc. Microfluidic cartridge and method of using same
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen
JP4997571B2 (ja) 2006-12-19 2012-08-08 有限会社フルイド マイクロ流体デバイスおよびそれを用いた分析装置
AU2007336774A1 (en) 2006-12-22 2008-07-03 3M Innovative Properties Company Thermal transfer methods and structures for microfluidic systems
KR20090105934A (ko) * 2006-12-22 2009-10-07 쓰리엠 이노베이티브 프로퍼티즈 컴파니 향상된 샘플 처리 장치, 시스템 및 방법
US9046192B2 (en) 2007-01-31 2015-06-02 The Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
US20110039303A1 (en) 2007-02-05 2011-02-17 Stevan Bogdan Jovanovich Microfluidic and nanofluidic devices, systems, and applications
CN101541962A (zh) * 2007-03-23 2009-09-23 株式会社东芝 核酸检测盒以及核酸检测装置
US7797988B2 (en) 2007-03-23 2010-09-21 Advion Biosystems, Inc. Liquid chromatography-mass spectrometry
EP2149610B1 (de) * 2007-03-26 2018-05-16 Fundacion Gaiker Vorrichtung zum nachweis genetischen materials mittels polymerasekettenreaktion
US10312018B2 (en) * 2007-04-05 2019-06-04 Edward Handy Method for potting an electrical component
DE102007018752B4 (de) * 2007-04-20 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum geregelten Transport mikrofluidischer Proben
JP2008296119A (ja) * 2007-05-30 2008-12-11 Kyocera Corp 反応装置
DE102007026306A1 (de) * 2007-06-06 2008-12-11 Osram Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung von keramischen Spiral-Puls-Generatoren und Gasentladungslampen mit solchen Generatoren
TWI322032B (en) * 2007-06-20 2010-03-21 Nat Univ Chung Cheng Microfluid mixer
US7709811B2 (en) * 2007-07-03 2010-05-04 Conner Arlie R Light emitting diode illumination system
US9618139B2 (en) 2007-07-13 2017-04-11 Handylab, Inc. Integrated heater and magnetic separator
USD621060S1 (en) 2008-07-14 2010-08-03 Handylab, Inc. Microfluidic cartridge
AU2008276211B2 (en) 2007-07-13 2015-01-22 Handylab, Inc. Polynucleotide capture materials, and methods of using same
US8105783B2 (en) 2007-07-13 2012-01-31 Handylab, Inc. Microfluidic cartridge
US8182763B2 (en) 2007-07-13 2012-05-22 Handylab, Inc. Rack for sample tubes and reagent holders
US8133671B2 (en) 2007-07-13 2012-03-13 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US20090136385A1 (en) 2007-07-13 2009-05-28 Handylab, Inc. Reagent Tube
US8287820B2 (en) 2007-07-13 2012-10-16 Handylab, Inc. Automated pipetting apparatus having a combined liquid pump and pipette head system
US9186677B2 (en) 2007-07-13 2015-11-17 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US8454906B2 (en) * 2007-07-24 2013-06-04 The Regents Of The University Of California Microfabricated droplet generator for single molecule/cell genetic analysis in engineered monodispersed emulsions
EP2171420A1 (de) * 2007-07-31 2010-04-07 Micronics, Inc. Tupferaufnahmesystem, mikrofluidische testvorrichtung und verfahren für diagnosetests
US8098375B2 (en) 2007-08-06 2012-01-17 Lumencor, Inc. Light emitting diode illumination system
US8206025B2 (en) * 2007-08-07 2012-06-26 International Business Machines Corporation Microfluid mixer, methods of use and methods of manufacture thereof
CL2008003008A1 (es) 2007-10-12 2009-10-02 Bigtec Private Ltd Un micro dispositivo portatil de reaccion en cadena de polimerasa (pcr) basado en un micro chip de ceramica de coccion conjunta de baja temperatura (ltcc) que comprende camara de reaccion, calentador, control de temperatura del calentador, deteccion optica de interfaz de comunicacion, y el metodo para monitorearlo y controlarlo.
US8381169B2 (en) * 2007-10-30 2013-02-19 International Business Machines Corporation Extending unified process and method content to include dynamic and collaborative content
EP2070594A1 (de) * 2007-12-14 2009-06-17 Koninklijke Philips Electronics N.V. Mikrofluidische Vorrichtung und Herstellungsverfahren dafür und Sensor damit
KR20110030415A (ko) 2008-01-22 2011-03-23 인터젠엑스 인크. 만능 샘플 제조 시스템 및 집적 분석 시스템에서의 용도
KR101465701B1 (ko) * 2008-01-22 2014-11-28 삼성전자 주식회사 핵산 증폭 장치
US20090186344A1 (en) * 2008-01-23 2009-07-23 Caliper Life Sciences, Inc. Devices and methods for detecting and quantitating nucleic acids using size separation of amplicons
CN101939437A (zh) 2008-02-15 2011-01-05 孟山都技术公司 对应于转基因事件mon87769的大豆植物和种子及其检测方法
MX341747B (es) 2008-02-29 2016-08-31 Monsanto Technology Llc Evento de maiz mon87460 y composiciones y metodos para detectarlo.
JPWO2009110270A1 (ja) * 2008-03-07 2011-07-14 コニカミノルタオプト株式会社 マイクロチップ及びその製造方法
KR100970480B1 (ko) * 2008-09-03 2010-07-16 삼성전자주식회사 마이크로파와 음이온을 이용한 액체 매질 가열방법, 음이온이 첨가된 생물학적 분석장치 및 액체 매질 가열용 용액
US9664619B2 (en) 2008-04-28 2017-05-30 President And Fellows Of Harvard College Microfluidic device for storage and well-defined arrangement of droplets
JPWO2009139246A1 (ja) * 2008-05-14 2011-09-15 国立大学法人東北大学 マイクロソート機構およびマイクロチップ
USD618820S1 (en) 2008-07-11 2010-06-29 Handylab, Inc. Reagent holder
US20100009351A1 (en) * 2008-07-11 2010-01-14 Handylab, Inc. Polynucleotide Capture Materials, and Method of Using Same
USD787087S1 (en) 2008-07-14 2017-05-16 Handylab, Inc. Housing
JPWO2010032712A1 (ja) * 2008-09-20 2012-02-09 国立大学法人長岡技術科学大学 マイクロリアクター
CN107699545A (zh) 2008-09-29 2018-02-16 孟山都技术公司 大豆转基因时间mon87705及其检测方法
EP2169391B1 (de) * 2008-09-30 2013-04-03 ibidi GmbH Probenkammerhalter zum Haltern einer Probenkammer und System bestehend aus der Probenkammer und dem Probenkammerhalter
US8020314B2 (en) * 2008-10-31 2011-09-20 Corning Incorporated Methods and apparatus for drying ceramic green bodies with microwaves
TWI358539B (en) * 2008-12-09 2012-02-21 Univ Nat Taiwan Integrated electrophoresis device and operation th
US9057568B2 (en) 2008-12-16 2015-06-16 California Institute Of Technology Temperature control devices and methods
KR20110111449A (ko) 2008-12-31 2011-10-11 인터젠엑스 인크. 미세유체 칩을 갖는 기구
US9713802B2 (en) * 2009-01-13 2017-07-25 Kobe Steel, Ltd. Method and apparatus for manufacturing liquid microspheres
US8242462B2 (en) 2009-01-23 2012-08-14 Lumencor, Inc. Lighting design of high quality biomedical devices
JP4904374B2 (ja) * 2009-03-30 2012-03-28 東レエンジニアリング株式会社 マイクロリアクタ
US8699866B2 (en) 2009-05-04 2014-04-15 Lg Electronics Inc. Heating apparatus
CN102459565A (zh) 2009-06-02 2012-05-16 尹特根埃克斯有限公司 具有隔膜阀的流控设备
DE112010002222B4 (de) 2009-06-04 2024-01-25 Leidos Innovations Technology, Inc. (n.d.Ges.d. Staates Delaware) Mehr-Proben-Mikrofluidchip fur DNA-Analyse
EP3586945A3 (de) 2009-06-05 2020-03-04 IntegenX Inc. Universelles probenvorbereitungssystem und verwendung in einem integrierten analysesystem
US20120241445A1 (en) * 2009-09-01 2012-09-27 Lg Electronics Inc. Cooking appliance employing microwaves
US20110094290A1 (en) * 2009-10-26 2011-04-28 General Electric Company Low power preconcentrator for micro gas analysis
US8834792B2 (en) 2009-11-13 2014-09-16 3M Innovative Properties Company Systems for processing sample processing devices
USD638951S1 (en) 2009-11-13 2011-05-31 3M Innovative Properties Company Sample processing disk cover
USD638550S1 (en) 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD667561S1 (en) 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
US8584703B2 (en) 2009-12-01 2013-11-19 Integenx Inc. Device with diaphragm valve
US8980550B2 (en) 2009-12-15 2015-03-17 California Institute Of Technology Methods for measuring samples using consumer electronic devices and systems
TWI388829B (zh) * 2009-12-29 2013-03-11 Nat Applied Res Laboratoires 聚合酶連鎖反應之方法、聚合酶連鎖反應之液珠裝置及其陣列式液珠裝置
TWI417531B (zh) * 2010-01-12 2013-12-01 Ind Tech Res Inst 介電泳粒子濃縮器以及濃縮與偵測方法
WO2011141512A2 (en) * 2010-05-11 2011-11-17 Artelis S.A. Apparatus and methods for cell culture
US8512538B2 (en) 2010-05-28 2013-08-20 Integenx Inc. Capillary electrophoresis device
NZ603506A (en) 2010-06-04 2013-11-29 Monsanto Technology Llc Transgenic brassica event mon 88302 and methods of use thereof
WO2011154363A2 (en) * 2010-06-07 2011-12-15 Commissariat à l'énergie atomique et aux énergies alternatives Analysis device including a mems and/or nems network
CN103069272B (zh) 2010-06-07 2015-07-01 法国原子能及替代能源委员会 包括至少一个色谱柱的用于分析气体混合物的系统
EP2606154B1 (de) 2010-08-20 2019-09-25 Integenx Inc. Integriertes analysesystem
WO2012024657A1 (en) 2010-08-20 2012-02-23 IntegenX, Inc. Microfluidic devices with mechanically-sealed diaphragm valves
TWM406265U (en) * 2010-10-02 2011-06-21 Domintech Co Ltd Inductance IC chip packaging multi-layer substrate
CN103270173B (zh) 2010-10-12 2017-11-21 孟山都技术公司 对应于转基因事件mon87712的大豆植物和种子及其检测方法
GB2497501A (en) 2010-10-15 2013-06-12 Lockheed Corp Micro fluidic optic design
EP2457658B1 (de) * 2010-11-30 2013-07-10 Corning Incorporated Direkte Dichtung von Glasmikrostrukturen
KR20120063162A (ko) 2010-12-07 2012-06-15 삼성전자주식회사 유전자 분석 장치 및 이를 이용한 유전자 분석 방법
US8968585B2 (en) 2010-12-23 2015-03-03 California Institute Of Technology Methods of fabrication of cartridges for biological analysis
US9233369B2 (en) 2010-12-23 2016-01-12 California Institute Of Technology Fluidic devices and fabrication methods for microfluidics
US8466436B2 (en) 2011-01-14 2013-06-18 Lumencor, Inc. System and method for metered dosage illumination in a bioanalysis or other system
US8389957B2 (en) 2011-01-14 2013-03-05 Lumencor, Inc. System and method for metered dosage illumination in a bioanalysis or other system
CA2825757C (en) 2011-02-02 2019-09-03 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
EP2689005A4 (de) * 2011-03-23 2014-09-03 California Inst Of Techn System zur durchführung einer nukleinsäureamplifikation für eine polymerasekettenreaktion
ES2769028T3 (es) 2011-04-15 2020-06-24 Becton Dickinson Co Termociclador microfluídico de barrido en tiempo real
US8847130B2 (en) * 2011-05-09 2014-09-30 Kabushiki-Kaisha Takumi Heating unit of vehicle heating system
US9168523B2 (en) 2011-05-18 2015-10-27 3M Innovative Properties Company Systems and methods for detecting the presence of a selected volume of material in a sample processing device
AU2012255144B2 (en) 2011-05-18 2015-01-29 Diasorin Italia S.P.A. Systems and methods for volumetric metering on a sample processing device
CN103501908B (zh) 2011-05-18 2016-03-16 3M创新有限公司 用于样品处理装置上阀调的系统和方法
EP3228713A1 (de) 2011-06-30 2017-10-11 Monsanto Technology LLC Alfalfa-pflanze und samen im zusammenhang mit dem transgenen ereignis kk 179-2 sowie verfahren zu ihrem nachweis
USD692162S1 (en) 2011-09-30 2013-10-22 Becton, Dickinson And Company Single piece reagent holder
ES2645966T3 (es) 2011-09-30 2017-12-11 Becton, Dickinson And Company Tira reactiva unificada
US20150136604A1 (en) 2011-10-21 2015-05-21 Integenx Inc. Sample preparation, processing and analysis systems
US10865440B2 (en) 2011-10-21 2020-12-15 IntegenX, Inc. Sample preparation, processing and analysis systems
CN104040238B (zh) 2011-11-04 2017-06-27 汉迪拉布公司 多核苷酸样品制备装置
US9341604B2 (en) 2011-11-09 2016-05-17 The Regents Of The University Of Michigan Devices and methods for adaptive micro-gas chromatography
KR101301256B1 (ko) * 2011-11-28 2013-08-28 한국기초과학지원연구원 다층의 기체 크로마토그래피용 칩 및 이의 제조방법
US9689029B2 (en) 2011-12-02 2017-06-27 Caliper Life Sciences, Inc. Systems and methods for sampling of amplification products
US9090891B2 (en) 2011-12-23 2015-07-28 California Institute Of Technology Pen-shaped device for biological sample preparation and analysis
US8883088B2 (en) 2011-12-23 2014-11-11 California Institute Of Technology Sample preparation devices and systems
US9518291B2 (en) 2011-12-23 2016-12-13 California Institute Of Technology Devices and methods for biological sample-to-answer and analysis
US9090890B2 (en) 2011-12-23 2015-07-28 California Institute Of Technology Devices and methods for biological sample preparation
CN102517205B (zh) * 2012-01-09 2013-04-17 青岛理工大学 一种基于dna扩增的热传递检测装置
US9103528B2 (en) 2012-01-20 2015-08-11 Lumencor, Inc Solid state continuous white light source
AU2013214849B2 (en) 2012-02-03 2016-09-01 Becton, Dickinson And Company External files for distribution of molecular diagnostic tests and determination of compatibility between tests
US9533308B2 (en) 2012-02-10 2017-01-03 California Institute Of Technology PC board-based polymerase chain reaction systems, methods and materials
US9738887B2 (en) 2012-02-13 2017-08-22 Neumodx Molecular, Inc. Microfluidic cartridge for processing and detecting nucleic acids
US11648561B2 (en) 2012-02-13 2023-05-16 Neumodx Molecular, Inc. System and method for processing and detecting nucleic acids
US9322054B2 (en) 2012-02-22 2016-04-26 Lockheed Martin Corporation Microfluidic cartridge
US9791080B2 (en) 2012-03-12 2017-10-17 Idex Health & Science Llc Microfluidic interconnect
WO2013186640A2 (en) 2012-05-24 2013-12-19 Lundy Douglas H Threat detection system and method
US9217561B2 (en) 2012-06-15 2015-12-22 Lumencor, Inc. Solid state light source for photocuring
US20140039177A1 (en) * 2012-07-31 2014-02-06 General Electric Company Methods of isolating nucleic acids under reduced degradation condition
US20150259671A1 (en) * 2012-07-31 2015-09-17 General Electric Company Devices and systems for isolating biomolecules and associated methods thereof
DE102012015204B4 (de) * 2012-08-03 2014-08-07 Krohne Messtechnik Gmbh Verfahren zur Herstellung eines Flammenionisationsdetektors
CN104685344B (zh) 2012-08-03 2017-07-28 加州理工学院 用于化学分析和生物化学分析的光学技术
WO2014028016A1 (en) * 2012-08-16 2014-02-20 Empire Technology Development Llc Porous catalytic substrates
WO2014035547A2 (en) * 2012-08-30 2014-03-06 General Electric Company Methods of isolating nucleic acids under reduced degradation condition
TWI593797B (zh) * 2012-10-23 2017-08-01 國立清華大學 奈米電極晶片
WO2014066376A1 (en) * 2012-10-25 2014-05-01 Neumodx Molecular, Inc. Method and materials for isolation of nucleic acid materials
WO2014071259A1 (en) * 2012-11-05 2014-05-08 California Institute Of Technology Methods of fabrication of cartridges for biological analysis
US9284520B2 (en) 2012-11-05 2016-03-15 California Institute Of Technology Instruments for biological sample preparation devices
EP2962093A4 (de) 2013-02-26 2016-10-05 Implant Sciences Corp Miniaturisierte sensorstrukturen für ionenbeweglichkeitsspektrometer
CN105579842A (zh) * 2013-05-17 2016-05-11 密执安大学评议会 用于气相色谱的整合流体系统
US9333463B2 (en) 2013-07-26 2016-05-10 General Electric Company Devices and systems for elution of biomolecules
US9999856B2 (en) 2013-07-26 2018-06-19 General Electric Company Methods for electroelution of biomolecules
DE102013012731A1 (de) * 2013-08-01 2015-02-05 Krohne Messtechnik Gmbh Verfahren zur Herstellung eines Gaskonverters und entsprechender Gaskonverter
DE102014200060A1 (de) * 2013-08-28 2015-03-19 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensorelement und Sensor mit einem entsprechenden Sensorelement
CN105611827A (zh) 2013-10-09 2016-05-25 孟山都技术公司 转基因玉米事件mon87403和其检测方法
JP2015095551A (ja) * 2013-11-12 2015-05-18 東京エレクトロン株式会社 シャワーヘッドアセンブリ及びプラズマ処理装置
CN114471756B (zh) 2013-11-18 2024-04-16 尹特根埃克斯有限公司 用于样本分析的卡盒和仪器
WO2015078825A1 (en) * 2013-11-27 2015-06-04 Total Sa Plate for gas chromatograph with a capillary column, capillary device and gas chromatograph
WO2015082956A1 (en) * 2013-12-02 2015-06-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives System and method for analyzing a gas
CN103708408A (zh) * 2013-12-17 2014-04-09 北京工业大学 一种微纳流体驱动装置
EP3089823A4 (de) * 2013-12-31 2017-12-20 Canon U.S. Life Sciences, Inc. Vor ort einsetzbares kleinformatiges mikrofluidisches system mit schnellem erstergebnis
US9580360B2 (en) * 2014-04-07 2017-02-28 Lam Research Corporation Monolithic ceramic component of gas delivery system and method of making and use thereof
WO2015179098A1 (en) 2014-05-21 2015-11-26 Integenx Inc. Fluidic cartridge with valve mechanism
EP3155396A4 (de) * 2014-06-12 2017-12-27 Wafergen, Inc. Einzelzellenerfassung mit polymererfassungsfilmen
US10471411B2 (en) * 2014-07-03 2019-11-12 Advanced Materials Technology Porous media compositions and methods for producing the same
WO2016005557A1 (de) * 2014-07-10 2016-01-14 Ceramtec Gmbh Keramischer laminierter formkörper mit aussparungen
WO2016028378A1 (en) * 2014-08-21 2016-02-25 Schlumberger Canada Limited Measurement of liquid parameters using a microfluidic device
JP6509330B2 (ja) * 2014-09-05 2019-05-08 イマジン ティーエフ，エルエルシー 微細構造分離フィルタ
CN107106983B (zh) 2014-10-22 2021-04-16 尹特根埃克斯有限公司 用于样品制备、处理和分析的系统和方法
WO2016075327A2 (en) 2014-11-14 2016-05-19 Basf Plant Science Company Gmbh Production of pufas in plants
CN107787181A (zh) 2015-06-05 2018-03-09 国际水稻研究所 通过细胞质雄性不育水稻中更高的异交率提高杂交种子生产以及相关材料和方法
US10273149B2 (en) * 2015-07-28 2019-04-30 Carrier Corporation Gas detector with a thermally uniform MEMS die
CN105514060B (zh) * 2015-11-25 2018-05-25 中国电子科技集团公司第二十九研究所 一种在ltcc陶瓷基板中集成内埋散热微通道的方法
US10208739B2 (en) 2016-01-05 2019-02-19 Funai Electric Co., Ltd. Microfluidic pump with thermal control
US10117364B2 (en) * 2016-02-07 2018-10-30 Display Logic USA Inc. Display device with optically clear fluid disposed between display panel and display cover
DE102016214883B4 (de) * 2016-08-10 2022-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ventil aus einem keramischen Werkstoff und ein Verfahren zu seiner Herstellung
EP3301438B1 (de) * 2016-09-30 2020-09-02 Roche Diagniostics GmbH Verfahren zur detektion eines status eines fluids in einer mikrotiterplatte
EP3523646B1 (de) 2016-10-04 2023-05-10 The Regents of The University of Michigan Mehrkanalige mehrdimensionale umfassende gaschromatografie
TWI728225B (zh) * 2017-01-25 2021-05-21 英屬開曼群島商鴻騰精密科技股份有限公司 微流體盒及其堆疊測試組件
WO2018224861A1 (en) 2017-06-07 2018-12-13 International Rice Research Institute Increasing hybrid seed production through higher outcrossing rate in cytoplasmic male sterile gramineae plants and related materials and methods
US11383236B2 (en) 2017-11-10 2022-07-12 Christopher Walker Polymerase chain reaction using a microfluidic chip fabricated with printed circuit board techniques
JP6971812B2 (ja) * 2017-11-28 2021-11-24 国立研究開発法人産業技術総合研究所 マイクロ波処理装置、マイクロ波処理方法、加熱処理方法及び化学反応方法
FR3074800B1 (fr) * 2017-12-11 2019-11-01 S.A.S 3Dceram-Sinto Procede de fabrication de pieces en materiau ceramique par la technique des procedes additifs
KR102112031B1 (ko) * 2018-04-09 2020-06-04 한국과학기술원 정렬된 3차원 다공성 구조를 갖는 사전 농축기 및 그 제조 방법
DE102018110210A1 (de) * 2018-04-27 2019-10-31 Schott Ag Mikrofluidikzelle und Verfahren zu deren Herstellung
WO2020081342A1 (en) * 2018-10-19 2020-04-23 President And Fellows Of Harvard College Smart toilet paper
MX2020014071A (es) 2018-11-16 2021-05-27 Illumina Inc Circuito fluidico de laminado para un cartucho de fluido.
WO2020136602A1 (en) * 2018-12-27 2020-07-02 3M Innovative Properties Company A multilayer test pack for sterilization monitoring
CN109908987B (zh) * 2019-03-20 2021-01-29 山东大学 基于热释电效应无损失移取微量液滴的移液器的制备方法
JP7261351B2 (ja) * 2019-08-13 2023-04-19 サン－ゴバン グラス フランス 両側にセンサーアセンブリを有している複合パネル
US12181471B2 (en) * 2020-03-10 2024-12-31 SciKare, Inc. Devices and methods of urinalysis for real-time monitoring of organ health
WO2021188464A1 (en) * 2020-03-16 2021-09-23 Vaon, Llc 3-d glass printable hand-held gas chromatograph for biomedical and environmental applications
CN111389473B (zh) * 2020-03-25 2021-05-04 武汉大学 一种垂直沟道可调谐高通量声流控分选芯片及其制备方法
CN111473805B (zh) 2020-04-17 2021-09-21 江苏多维科技有限公司 一种微机电环境传感器及其制备方法
WO2021222084A1 (en) * 2020-04-28 2021-11-04 Siemens Healthcare Diagnostics Inc. Acoustophoretic lysis devices and methods
WO2022038536A1 (en) 2020-08-18 2022-02-24 International Rice Research Institute Methods of increasing outcrossing rates in gramineae
WO2022140045A1 (en) * 2020-12-23 2022-06-30 Vaon, Llc Breathalyzer
US20230086183A1 (en) * 2021-09-21 2023-03-23 The United States Of America, As Represented By The Secretary Of The Navy Detection and identification of chemical derivatives formed from pyrotechnic smoke reactions
WO2023111587A1 (en) 2021-12-17 2023-06-22 Vidya Holdings Ltd Improvements in or relating to microarray fabrication
US20240053244A1 (en) * 2022-08-09 2024-02-15 International Business Machines Corporation Multi-point capacitive motion sensing structure
AT526265A1 (de) * 2022-10-03 2023-11-15 Avl List Gmbh Vorrichtung zur Aufbereitung eines gasförmigen Mediums
US20240139741A1 (en) * 2022-10-27 2024-05-02 Cytonome/St, Llc Massively parallel cell analysis and sorting apparatus and methods
US12600682B2 (en) * 2022-11-11 2026-04-14 Applied Materials, Inc. Monolithic substrate support having porous features and methods of forming the same
CN117511739B (zh) * 2024-01-04 2024-03-12 中日友好医院(中日友好临床医学研究所) 微流体骨类器官芯片的构建方法及装置
KR102832793B1 (ko) * 2024-07-02 2025-07-11 주식회사 디아이티 냉각 수단이 구비된 다층 세라믹 기판의 제조 방법 및 이에 따라 제조된 냉각 수단이 구비된 다층 세라믹 기판

Family Cites Families (143)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293072A (en) 1961-06-29 1966-12-20 Vitta Corp Ceramic-metallizing tape
DE1140377B (de) * 1961-10-04 1962-11-29 Bodenseewerk Perkin Elmer Co Verfahren zur Herstellung von Kapillarsaeulen fuer die Gaschromatographie
DE1258631B (de) * 1962-05-04 1968-01-11 Erwin Heine Dipl Chem Dr Trennkolonne fuer die Durchfuehrung gaschromatographischer Analysen
US3506473A (en) 1964-06-25 1970-04-14 Vitta Corp Method of transferring glass frit image from transfer sheet
US3598679A (en) 1968-03-04 1971-08-10 Vitta Corp Method of making a pressure-transferrable tape
US3574029A (en) 1968-04-04 1971-04-06 Spears Inc Method of producing multi-layer transferable castings
GB1452896A (en) * 1972-12-21 1976-10-20 Nat Res Dev Packing materials
US3991029A (en) 1973-05-03 1976-11-09 E. I. Du Pont De Nemours And Company Ceramic compositions and articles made therefrom
US3948706A (en) 1973-12-13 1976-04-06 International Business Machines Corporation Method for metallizing ceramic green sheets
US3956052A (en) 1974-02-11 1976-05-11 International Business Machines Corporation Recessed metallurgy for dielectric substrates
US4035613A (en) 1976-01-08 1977-07-12 Kyoto Ceramic Co., Ltd. Cylindrical ceramic heating device
US4098645A (en) 1976-02-24 1978-07-04 W. R. Grace & Co. Immobilization of proteins with polyurethane polymers
JPS5349264A (en) 1976-10-15 1978-05-04 Fujitsu Ltd Method of producing multilayer ceramic substrate
US4118237A (en) 1977-08-04 1978-10-03 Corning Glass Works Glass-ceramics displaying inherent lubricity
JPS5747494A (en) 1980-09-02 1982-03-18 Fuji Photo Film Co Ltd Method of determining a trace amount of enzyme
US4474889A (en) 1982-04-26 1984-10-02 Microsensor Technology Inc. Miniature gas chromatograph apparatus
EP0094078B1 (de) 1982-05-11 1988-11-02 Nec Corporation Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht
EP0149339B1 (de) 1983-12-16 1989-08-23 MediSense, Inc. Test für Nukleinsäuren
JPS60135752A (ja) 1983-12-23 1985-07-19 Yokogawa Hokushin Electric Corp マイクロ波水分計
JPS60135756A (ja) 1983-12-24 1985-07-19 Ngk Insulators Ltd 電気化学的セルの製造方法
JPS60250686A (ja) 1984-05-25 1985-12-11 日本碍子株式会社 セラミツク配線基板の製造方法
JPS61288154A (ja) 1985-06-14 1986-12-18 Yokogawa Electric Corp ガスクロマトグラフイ
EP0213825A3 (de) 1985-08-22 1989-04-26 Molecular Devices Corporation Chemisch-modulierte Mehrfachkapazitanz
US4793920A (en) * 1985-12-11 1988-12-27 Lee Scientific, Inc. Chromatography columns with cast porous plugs and methods of fabricating same
JPS62288154A (ja) * 1986-06-04 1987-12-15 ライオン株式会社 セラミツクス焼結体の製造方法
JP2515303B2 (ja) 1986-08-07 1996-07-10 新光電気工業株式会社 セラミツクパツケ−ジの製造方法
US4737208A (en) 1986-09-29 1988-04-12 American Telephone And Telegraph Company, At&T Bell Laboratories Method of fabricating multilayer structures with nonplanar surfaces
JPS63107095A (ja) 1986-10-23 1988-05-12 富士通株式会社 多層セラミツク回路基板
US4833000A (en) 1986-10-31 1989-05-23 Gte Laboratories Incorporated Ceramic monolithic structure having an internal cavity contained therein and a method of preparing the same
US4806295A (en) 1986-10-31 1989-02-21 Gte Laboratories Incorporated Ceramic monolithic structure having an internal cavity contained therein and a method of preparing the same
JPS63239999A (ja) 1987-03-27 1988-10-05 日本碍子株式会社 セラミツク多層積層体の製造方法
JP2648918B2 (ja) 1987-09-11 1997-09-03 日東電工株式会社 コーティング方法
DE3888079T2 (de) 1987-10-22 1994-07-14 Asahi Optical Co Ltd Poröses keramisches Material.
JPH0611018B2 (ja) 1988-01-07 1994-02-09 株式会社村田製作所 セラミック生シートの積層方法
JPH065656B2 (ja) 1988-02-19 1994-01-19 株式会社村田製作所 セラミック積層体の製造方法
US5252294A (en) 1988-06-01 1993-10-12 Messerschmitt-Bolkow-Blohm Gmbh Micromechanical structure
JP2615477B2 (ja) 1988-10-27 1997-05-28 松下電器産業株式会社 積層磁器コンデンサの製造方法
JPH02129603A (ja) 1988-11-10 1990-05-17 Nec Corp 光アツテネータ
JPH02166793A (ja) 1988-12-20 1990-06-27 Fujitsu Ltd 多層セラミック回路基板の製造方法
JPH072327B2 (ja) 1989-02-22 1995-01-18 三菱マテリアル株式会社 セラミックグリーンシートの積層方法
US4935040A (en) 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
JPH07120603B2 (ja) 1989-10-30 1995-12-20 株式会社村田製作所 セラミックグリーンシートの積層方法および装置
JP2759223B2 (ja) 1989-11-02 1998-05-28 東レエンジニアリング株式会社 グリーンシートの積層方法
US5089071A (en) 1989-11-03 1992-02-18 Nitto Electrical Industrial Process for producing a multilayered ceramic structure using an adhesive film
US4991283A (en) 1989-11-27 1991-02-12 Johnson Gary W Sensor elements in multilayer ceramic tape structures
GB2244135B (en) 1990-05-04 1994-07-13 Gen Electric Co Plc Sensor devices
JPH0780171B2 (ja) 1990-05-11 1995-08-30 富士通株式会社 グリーンシートの積層装置
US5210455A (en) 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5340543A (en) * 1990-08-22 1994-08-23 The Foxboro Company Modular gas chromatography device
JPH04114961A (ja) 1990-08-31 1992-04-15 Mitsubishi Materials Corp ムライト―アルミナ系多層基板及びその製造方法
US5254191A (en) 1990-10-04 1993-10-19 E. I. Du Pont De Nemours And Company Method for reducing shrinkage during firing of ceramic bodies
JP2869901B2 (ja) 1990-11-30 1999-03-10 株式会社村田製作所 セラミック積層電子部品の製造方法
RU1794088C (ru) 1991-03-18 1993-02-07 Институт Молекулярной Биологии Ан@ Ссср Способ определени нуклеотидной последовательности ДНК и устройство дл его осуществлени
US5187096A (en) 1991-08-08 1993-02-16 Rensselaer Polytechnic Institute Cell substrate electrical impedance sensor with multiple electrode array
WO1993004998A1 (en) 1991-09-12 1993-03-18 The Dow Chemical Company Method of making co-fired, multilayer substrates
US5265327A (en) 1991-09-13 1993-11-30 Faris Sadeg M Microchannel plate technology
IL103674A0 (en) 1991-11-19 1993-04-04 Houston Advanced Res Center Method and apparatus for molecule detection
US5846708A (en) 1991-11-19 1998-12-08 Massachusetts Institiute Of Technology Optical and electrical methods and apparatus for molecule detection
US5176771A (en) 1991-12-23 1993-01-05 Hughes Aircraft Company Multilayer ceramic tape substrate having cavities formed in the upper layer thereof and method of fabricating the same by printing and delamination
JPH07118580B2 (ja) 1992-03-23 1995-12-18 日本碍子株式会社 多層配線セラミックス基板の製造方法
DE69300506T2 (de) 1992-04-06 1996-04-04 Nippon Electric Co Herstellungsverfahren von mehrlagigen keramischen Substraten.
US5587128A (en) * 1992-05-01 1996-12-24 The Trustees Of The University Of Pennsylvania Mesoscale polynucleotide amplification devices
US5498392A (en) 1992-05-01 1996-03-12 Trustees Of The University Of Pennsylvania Mesoscale polynucleotide amplification device and method
US5304487A (en) 1992-05-01 1994-04-19 Trustees Of The University Of Pennsylvania Fluid handling in mesoscale analytical devices
US5312674A (en) 1992-07-31 1994-05-17 Hughes Aircraft Company Low-temperature-cofired-ceramic (LTCC) tape structures including cofired ferromagnetic elements, drop-in components and multi-layer transformer
JP3310291B2 (ja) * 1992-08-13 2002-08-05 ザ・トラスティーズ・オブ・ザ・ユニバーシティ・オブ・ペンシルバニア 骨組織のｉｎ ｖｉｔｒｏ合成のための生物活性物質テンプレート
US5639423A (en) 1992-08-31 1997-06-17 The Regents Of The University Of Calfornia Microfabricated reactor
JPH06104572A (ja) 1992-09-18 1994-04-15 Hitachi Ltd セラミックス多層回路板用グリーンシート及びグリーンボディ
US5312527A (en) 1992-10-06 1994-05-17 Concordia University Voltammetric sequence-selective sensor for target polynucleotide sequences
JPH06152135A (ja) 1992-11-06 1994-05-31 Nippon Cement Co Ltd セラミックス多層基板の製造方法
JPH07289886A (ja) 1992-11-25 1995-11-07 Hokkaido Sogo Gijutsu Kenkyusho:Kk アパタイト高分散複合セラミックスおよびその製造方法
JP3225666B2 (ja) 1993-01-27 2001-11-05 株式会社村田製作所 キャビティ付きセラミック多層ブロックの製造方法
JPH06265447A (ja) 1993-03-16 1994-09-22 Hitachi Ltd 微量反応装置およびこれを使用する微量成分測定装置
US5534328A (en) 1993-12-02 1996-07-09 E. I. Du Pont De Nemours And Company Integrated chemical processing apparatus and processes for the preparation thereof
US5412499A (en) 1993-03-29 1995-05-02 At&T Corp. Spatial light modulator using quantum well material
JPH06290987A (ja) 1993-03-30 1994-10-18 Noritake Co Ltd セラミック多層板製造用シートおよびそれを用いたセラミック多層板の製造方法
JPH06334236A (ja) 1993-05-20 1994-12-02 Fujitsu Ltd 積層型圧電・電歪アクチュエータの製造方法
JP2998503B2 (ja) 1993-08-05 2000-01-11 株式会社村田製作所 積層セラミック電子部品の製造方法
JP3280799B2 (ja) 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5614053A (en) 1993-12-03 1997-03-25 Murata Manufacturing Co., Ltd. Method of press-molding ceramic green sheet laminate
US5591578A (en) 1993-12-10 1997-01-07 California Institute Of Technology Nucleic acid mediated electron transfer
RU95106478A (ru) 1994-04-29 1997-01-20 Моторола Устройство и способ для разложения химических соединений
US5595712A (en) 1994-07-25 1997-01-21 E. I. Du Pont De Nemours And Company Chemical mixing and reaction apparatus
US5478420A (en) 1994-07-28 1995-12-26 International Business Machines Corporation Process for forming open-centered multilayer ceramic substrates
US5611214A (en) 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
US5811062A (en) 1994-07-29 1998-09-22 Battelle Memorial Institute Microcomponent chemical process sheet architecture
US6001229A (en) 1994-08-01 1999-12-14 Lockheed Martin Energy Systems, Inc. Apparatus and method for performing microfluidic manipulations for chemical analysis
US5538582A (en) 1994-09-14 1996-07-23 International Business Machines Corporation Method for forming cavities without using an insert
JP3060849B2 (ja) 1994-09-27 2000-07-10 株式会社村田製作所 積層セラミックコンデンサの製造方法
JP2843264B2 (ja) 1994-10-07 1999-01-06 日本碍子株式会社 グリーンシートの積層方法および積層装置
US5985119A (en) 1994-11-10 1999-11-16 Sarnoff Corporation Electrokinetic pumping
US5632876A (en) 1995-06-06 1997-05-27 David Sarnoff Research Center, Inc. Apparatus and methods for controlling fluid flow in microchannels
US5585069A (en) 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US5603351A (en) 1995-06-07 1997-02-18 David Sarnoff Research Center, Inc. Method and system for inhibiting cross-contamination in fluids of combinatorial chemistry device
US5601673A (en) 1995-01-03 1997-02-11 Ferro Corporation Method of making ceramic article with cavity using LTCC tape
JPH08252920A (ja) 1995-03-16 1996-10-01 Brother Ind Ltd 積層型圧電素子の製造方法
JPH08267421A (ja) 1995-04-01 1996-10-15 Sumitomo Kinzoku Electro Device:Kk セラミック生シート積層体の製造方法
JPH08279631A (ja) 1995-04-05 1996-10-22 Brother Ind Ltd 積層型圧電素子の製造方法
DE19519015C1 (de) 1995-05-24 1996-09-05 Inst Physikalische Hochtech Ev Miniaturisierter Mehrkammer-Thermocycler
JP3320947B2 (ja) 1995-05-26 2002-09-03 日本碍子株式会社 微細貫通孔を有するセラミック部材
US5728244A (en) 1995-05-26 1998-03-17 Ngk Insulators, Ltd. Process for production of ceramic member having fine throughholes
CA2223166A1 (en) 1995-06-06 1996-12-12 Paul L. Braun Method of producing micro-electrical conduits
US5589136A (en) 1995-06-20 1996-12-31 Regents Of The University Of California Silicon-based sleeve devices for chemical reactions
US5856174A (en) 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
US6168948B1 (en) 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
US5583281A (en) 1995-07-07 1996-12-10 The Regents Of The University Of California Microminiature gas chromatograph
US5779833A (en) 1995-08-04 1998-07-14 Case Western Reserve University Method for constructing three dimensional bodies from laminations
US5849208A (en) 1995-09-07 1998-12-15 Microfab Technoologies, Inc. Making apparatus for conducting biochemical analyses
US6057149A (en) 1995-09-15 2000-05-02 The University Of Michigan Microscale devices and reactions in microscale devices
US5707476A (en) 1995-09-19 1998-01-13 International Business Machines Corporation Method for forming multiple cavity products
US6132580A (en) 1995-09-28 2000-10-17 The Regents Of The University Of California Miniature reaction chamber and devices incorporating same
US5746874A (en) 1995-09-29 1998-05-05 International Business Machines Corporation Apparatus and method for forming cavity substrates using flexible preform insert
US5821181A (en) 1996-04-08 1998-10-13 Motorola Inc. Ceramic composition
US6054277A (en) 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
US5795545A (en) 1996-05-20 1998-08-18 Motorola Inc. Integrated ceramic exhaust gas sensors
US5939291A (en) 1996-06-14 1999-08-17 Sarnoff Corporation Microfluidic method for nucleic acid amplification
US5785800A (en) 1996-06-21 1998-07-28 International Business Machines Corporation Apparatus for forming cavity structures using thermally decomposable surface layer
US5676788A (en) 1996-06-21 1997-10-14 International Business Machines Corporation Method for forming cavity structures using thermally decomposable surface layer
US5683535A (en) 1996-07-25 1997-11-04 Northrop Grumman Corporation Method and apparatus of producing cavities in LTCC substrates
US6136212A (en) 1996-08-12 2000-10-24 The Regents Of The University Of Michigan Polymer-based micromachining for microfluidic devices
US5906723A (en) 1996-08-26 1999-05-25 The Regents Of The University Of California Electrochemical detector integrated on microfabricated capillary electrophoresis chips
US5855803A (en) 1996-11-20 1999-01-05 Northrop Grumman Corporation Template type cavity-formation device for low temperature cofired ceramic (LTCC) sheets
US5971355A (en) 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US5795422A (en) * 1997-01-02 1998-08-18 Eastman Kodak Company Method for forming molded ceramic devices having embedded spiral coils
US5792379A (en) 1997-03-27 1998-08-11 Motorola Inc. Low-loss PZT ceramic composition cofirable with silver at a reduced sintering temperature and process for producing same
US5993750A (en) 1997-04-11 1999-11-30 Eastman Kodak Company Integrated ceramic micro-chemical plant
US5759320A (en) 1997-04-13 1998-06-02 International Business Machines Corporation Method of forming cavity substrates using compressive pads
WO1998053311A2 (en) 1997-05-23 1998-11-26 Gamera Bioscience Corporation Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system
DE19725948B4 (de) 1997-06-19 2007-04-26 Roosen, Andreas, Prof. Dr.-Ing. Verfahren zur Verbindung keramischer Grünkörper unter Verwendung eines Klebebandes
US5961932A (en) 1997-06-20 1999-10-05 Eastman Kodak Company Reaction chamber for an integrated micro-ceramic chemical plant
US5976472A (en) 1997-10-15 1999-11-02 Eastman Kodak Company Integrated micro-ceramic chemical plant with insertable catalytic reaction chambers
US5965092A (en) 1997-10-15 1999-10-12 Eastman Kodak Company Integrated micro-ceramic chemical plant with insertable micro-filters
US5961930A (en) * 1997-10-15 1999-10-05 Eastman Kodak Company Integrated micro-ceramic chemical plant with insertable reaction chambers and micro-filters
US5958694A (en) 1997-10-16 1999-09-28 Caliper Technologies Corp. Apparatus and methods for sequencing nucleic acids in microfluidic systems
IT1297288B1 (it) 1997-10-31 1999-09-01 Denis Robert Gemmani Struttura di grigliato metallico dentellato particolarmente per il completamento di manufatti ed opere edili ad uso civile od industriale
US5997746A (en) * 1998-05-29 1999-12-07 New Objective Inc. Evaporative packing of capillary columns
US6132685A (en) 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6203683B1 (en) 1998-11-09 2001-03-20 Princeton University Electrodynamically focused thermal cycling device
US6261431B1 (en) 1998-12-28 2001-07-17 Affymetrix, Inc. Process for microfabrication of an integrated PCR-CE device and products produced by the same
JP3148196B2 (ja) 1999-03-08 2001-03-19 信越化学工業株式会社 光ファイバ用多孔質母材の製造方法及び製造装置
WO2001035484A1 (en) * 1999-11-12 2001-05-17 The Trustees Of The University Of Pennsylvania Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology
AU2082701A (en) 1999-12-09 2001-06-18 Motorola, Inc. Multilayered microfluidic devices for analyte reactions

Also Published As

Publication number Publication date
US6984516B2 (en) 2006-01-10
US6527890B1 (en) 2003-03-04
ES2197681T3 (es) 2004-01-01
US6732567B2 (en) 2004-05-11
WO2000021659A9 (en) 2000-09-08
DE69906772T2 (de) 2004-03-11
EP1123157B1 (de) 2003-04-09
JP2002527254A (ja) 2002-08-27
DE69906772D1 (de) 2003-05-15
WO2000021659A1 (en) 2000-04-20
US20030118481A1 (en) 2003-06-26
US20030129646A1 (en) 2003-07-10
EP1123157A1 (de) 2001-08-16
US6572830B1 (en) 2003-06-03
US6544734B1 (en) 2003-04-08
CA2346059A1 (en) 2000-04-20
AU6418499A (en) 2000-05-01

Similar Documents

Publication Publication Date Title
ATE236719T1 (de) Verfahren zur herstellung integrierter vielschichtmikrofluidbauteile
Zhang et al. Single-molecule DNA amplification and analysis using microfluidics
CN105828945B (zh) 用于分子诊断的微流体盒、使用微流体盒的对接站、以及用于分析生物样品的方法
AU2014204426B2 (en) Integrated nucleic acid analysis
JP5700686B2 (ja) ２段階成形による極薄の壁を有するマイクロプレート
US20110244522A1 (en) Rotational pcr equipment and pcr method using the same
US20140186841A1 (en) Sensing and identifying biological samples on microfluidic devices
WO2001047638A3 (en) Integrated microfluidic disc
ITTO20120703A1 (it) Dispositivo microfluidico monouso, cartuccia includente il dispositivo microfluidico, apparecchio per eseguire una amplificazione di acido nucleico, metodo di fabbricazione del dispositivo microfluidico, e metodo di uso del dispositivo microfluidico
US20040043479A1 (en) Multilayerd microfluidic devices for analyte reactions
CN110846386A (zh) 核酸的多重特异性可视化检测方法及装置
CA2393690A1 (en) Multilayered microfluidic devices for analyte reactions
EP1464399A3 (de) Vorrichtung und Verfahren zur Nukleinsäure Amplifizierung
KR20110030415A (ko) 만능 샘플 제조 시스템 및 집적 분석 시스템에서의 용도
EP3283219A1 (de) Multiplexierte tröpfchenbasierte plattform mit kontinuierlichem fluss für genetischen hochdurchsatznachweis
EP3368221A1 (de) Dynamisches reagenzienabgabesystem mit hohem durchsatz
Tian et al. An integrated temporary negative pressure assisted microfluidic chip for DNA isolation and digital PCR detection
CN114733587B (zh) 荧光检测芯片、荧光检测系统、荧光检测方法及其应用
JP4705504B2 (ja) マイクロ流体チップ
KR101406347B1 (ko) 핵산 추출용 미세유동 칩, 이를 포함하는 핵산 추출 장치, 및 이를 이용하는 핵산 추출 방법
JP5987895B2 (ja) 核酸増幅反応用マイクロチップの製造方法
CN101200694A (zh) 闭环式聚合酶链反应系统及其制造方法
CN116218653A (zh) 一种离心式全集成高通量核酸检测微流控芯片及检测方法
US20050142597A1 (en) Integrated chemical microreactor with separated channels
Guevara‐Pantoja et al. Hybrid Opto‐Thermocycler for RT‐qPCR Detects SARS‐CoV‐2

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties