ATE330128T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE330128T1
ATE330128T1 AT02257645T AT02257645T ATE330128T1 AT E330128 T1 ATE330128 T1 AT E330128T1 AT 02257645 T AT02257645 T AT 02257645T AT 02257645 T AT02257645 T AT 02257645T AT E330128 T1 ATE330128 T1 AT E330128T1
Authority
AT
Austria
Prior art keywords
rotor
pump case
blades
vacuum pump
outer circumferential
Prior art date
Application number
AT02257645T
Other languages
English (en)
Inventor
Masayoshi Takaminie
Yasushi Maejima
Shinji Kawanishi
Yoshiyuki Sakaguchi
Satoshi Okudera
Kenji Kabata
Yutaka Inayoshi
Original Assignee
Boc Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Edwards Japan Ltd filed Critical Boc Edwards Japan Ltd
Application granted granted Critical
Publication of ATE330128T1 publication Critical patent/ATE330128T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/53—Building or constructing in particular ways by integrally manufacturing a component, e.g. by milling from a billet or one piece construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/21—Oxide ceramics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S416/00—Fluid reaction surfaces, i.e. impellers
    • Y10S416/50—Vibration damping features

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
AT02257645T 2001-11-16 2002-11-05 Vakuumpumpe ATE330128T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001352256A JP3974772B2 (ja) 2001-11-16 2001-11-16 真空ポンプ

Publications (1)

Publication Number Publication Date
ATE330128T1 true ATE330128T1 (de) 2006-07-15

Family

ID=19164462

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02257645T ATE330128T1 (de) 2001-11-16 2002-11-05 Vakuumpumpe

Country Status (6)

Country Link
US (1) US6890145B2 (de)
EP (1) EP1314891B1 (de)
JP (1) JP3974772B2 (de)
KR (1) KR100880504B1 (de)
AT (1) ATE330128T1 (de)
DE (1) DE60212301T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163171A1 (de) * 2001-12-21 2003-07-03 Solvay Fluor & Derivate Neue Verwendung für Legierungen
CA2413808A1 (en) * 2002-12-05 2004-06-05 Claude Fournier Method and system for protection against unauthorized distribution of copyrighted computer files over peer-to-peer networks
JP2005320905A (ja) * 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
JP4336295B2 (ja) * 2004-11-19 2009-09-30 日本ピラー工業株式会社 静圧形ノンコンタクトガスシール
US20060065288A1 (en) * 2004-09-30 2006-03-30 Darko Babic Supercritical fluid processing system having a coating on internal members and a method of using
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
JP5157842B2 (ja) * 2008-11-19 2013-03-06 株式会社島津製作所 ターボ分子ポンプおよび回転体の重心位置調整方法
US9638214B2 (en) * 2011-10-12 2017-05-02 Ebm-Papst Mulfingen Gmbh & Co. Kg Balancing weight for a fan wheel
US9759233B2 (en) * 2011-10-31 2017-09-12 Edwards Japan Limited Stator member and vacuum pump
TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
JP6190580B2 (ja) * 2012-09-13 2017-08-30 エドワーズ株式会社 真空ポンプの回転部及び真空ポンプ
EP2902636B1 (de) * 2012-09-26 2023-10-04 Edwards Japan Limited Rotor und vakuumpumpe mit dem rotor
DE102012110029A1 (de) * 2012-10-19 2014-04-24 Atlas Copco Energas Gmbh Turbomaschine zur Verdichtung eines gas- oder dampfförmigen Fluids
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
JP2018035684A (ja) 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
JP7108377B2 (ja) 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
JP6992569B2 (ja) * 2018-02-14 2022-01-13 株式会社島津製作所 真空ポンプおよびバランス調整方法
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP2021014834A (ja) * 2019-07-12 2021-02-12 エドワーズ株式会社 真空ポンプ、ロータ及び座金
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
JP7634372B2 (ja) 2021-01-20 2025-02-21 エドワーズ株式会社 真空ポンプ、回転体およびカバー部
TW202346719A (zh) 2022-04-01 2023-12-01 日商埃地沃茲日本有限公司 真空泵、真空泵用旋轉體、及真空泵用平衡修正元件
GB202209798D0 (en) 2022-04-01 2022-08-17 Edwards Japan Ltd Vacuum pump, rotating body for vacuum pump, and balance correction member for vacuum pump
KR102866448B1 (ko) * 2023-12-06 2025-10-02 (주)엘오티베큠 밸런싱 조절이 용이한 터보 분자 펌프 및 이의 밸런싱 방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873325U (ja) * 1981-11-06 1983-05-18 株式会社東芝 遠心分離機用回転体
JPS61226597A (ja) * 1985-03-30 1986-10-08 Shimadzu Corp タ−ボ分子ポンプ用ロ−タ
FR2612106B1 (fr) * 1987-03-09 1989-05-19 Alsthom Procede de pose d'un revetement protecteur sur une aube en alliage de titane et aube ainsi revetue
JPS63230989A (ja) * 1987-03-20 1988-09-27 Hitachi Ltd 真空ポンプ
JPH0166495U (de) * 1987-10-21 1989-04-27
JPH0195595U (de) * 1987-12-16 1989-06-23
JPH0515121A (ja) * 1991-06-28 1993-01-22 Sankyo Seiki Mfg Co Ltd 回転体のバランス調整法
DE4239391C2 (de) * 1991-11-27 1996-11-21 Electro Chem Eng Gmbh Gegenstände aus Aluminium, Magnesium oder Titan mit einer mit Fluorpolymeren gefüllten Oxidkeramikschicht und Verfahren zu ihrer Herstellung
JPH05321879A (ja) * 1992-05-22 1993-12-07 Hitachi Ltd 真空ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
JPH0783189A (ja) * 1993-09-17 1995-03-28 Hitachi Ltd ターボ真空ポンプ
KR970001491A (ko) * 1995-06-21 1997-01-24 한영재 내열 피막 조성물
KR970010510A (ko) * 1995-08-30 1997-03-27 김태구 겹판스프링 운반장치
JPH09169831A (ja) * 1995-12-19 1997-06-30 Yuka Shell Epoxy Kk エポキシ樹脂組成物
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
US6164945A (en) * 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same
JP3831110B2 (ja) * 1998-03-25 2006-10-11 大晃機械工業株式会社 真空ポンプのスクリューロータ
JP2000161291A (ja) * 1998-11-30 2000-06-13 Hitachi Ltd 電動送風機のバランス修正装置

Also Published As

Publication number Publication date
EP1314891B1 (de) 2006-06-14
EP1314891A3 (de) 2003-10-22
DE60212301D1 (de) 2006-07-27
EP1314891A8 (de) 2003-10-15
US20030095860A1 (en) 2003-05-22
EP1314891A1 (de) 2003-05-28
JP3974772B2 (ja) 2007-09-12
KR100880504B1 (ko) 2009-01-28
KR20030040181A (ko) 2003-05-22
JP2003148389A (ja) 2003-05-21
DE60212301T2 (de) 2006-11-02
US6890145B2 (en) 2005-05-10

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties