ATE331822T1 - Abgedichtete schleuse für eine in-line vakuumbeschichtungsanlage - Google Patents

Abgedichtete schleuse für eine in-line vakuumbeschichtungsanlage

Info

Publication number
ATE331822T1
ATE331822T1 AT04728134T AT04728134T ATE331822T1 AT E331822 T1 ATE331822 T1 AT E331822T1 AT 04728134 T AT04728134 T AT 04728134T AT 04728134 T AT04728134 T AT 04728134T AT E331822 T1 ATE331822 T1 AT E331822T1
Authority
AT
Austria
Prior art keywords
rollers
covers
coating system
vacuum coating
detachable
Prior art date
Application number
AT04728134T
Other languages
English (en)
Inventor
Stephane Coolen
Eric Silberberg
Didier Marneffe
Hondt Bernard D
Felice Claudio De
Original Assignee
Usinor
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Usinor filed Critical Usinor
Application granted granted Critical
Publication of ATE331822T1 publication Critical patent/ATE331822T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0025—Applying surface layers, e.g. coatings, decorative layers, printed layers, to articles during shaping, e.g. in-mould printing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Sealing Devices (AREA)
  • Paints Or Removers (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
AT04728134T 2003-05-23 2004-04-19 Abgedichtete schleuse für eine in-line vakuumbeschichtungsanlage ATE331822T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03447123A EP1479789A1 (de) 2003-05-23 2003-05-23 Abgedichtete Schleuse für eine in-line Vakuumbeschichtungsanlage

Publications (1)

Publication Number Publication Date
ATE331822T1 true ATE331822T1 (de) 2006-07-15

Family

ID=33041168

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04728134T ATE331822T1 (de) 2003-05-23 2004-04-19 Abgedichtete schleuse für eine in-line vakuumbeschichtungsanlage

Country Status (13)

Country Link
US (1) US7931750B2 (de)
EP (2) EP1479789A1 (de)
JP (1) JP4536725B2 (de)
CN (1) CN1795288B (de)
AT (1) ATE331822T1 (de)
BR (1) BRPI0411157B1 (de)
CA (1) CA2524938C (de)
DE (1) DE602004001403T2 (de)
ES (1) ES2267064T3 (de)
PL (1) PL1627096T3 (de)
PT (1) PT1627096E (de)
RU (1) RU2335577C2 (de)
WO (1) WO2004104264A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602007002782D1 (de) * 2007-02-28 2009-11-26 Applied Materials Inc Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür
EP2132354B1 (de) 2007-02-28 2013-04-10 VON ARDENNE Anlagentechnik GmbH Verfahren und vorrichtung zur behandlung bandförmigen substrates in einer vakuumbeschichtungsanlage
DE102007049669A1 (de) 2007-10-17 2009-04-23 Sms Demag Ag Schleusenvorrichtung und Verfahren zum Öffnen der Schleusenvorrichtung
CN102666913B (zh) * 2009-12-24 2014-09-03 Posco公司 带传送装置、用带传送装置处理带表面的装置以及处理带表面的方法
KR20160024882A (ko) 2013-06-27 2016-03-07 피코순 오와이 원자층 증착 반응기 내 기판 웹 트랙의 형성
US10317138B2 (en) 2015-06-11 2019-06-11 Westmill Industries Ltd. Baffle systems and methods of replacing baffle seal strips
RU2651838C2 (ru) * 2016-09-08 2018-04-24 Акционерное общество "КВАРЦ" Заслонка
CN113737149A (zh) * 2020-05-28 2021-12-03 宝山钢铁股份有限公司 一种用于金属带材上的连续真空镀膜密封锁
WO2024052712A1 (en) 2022-09-05 2024-03-14 Arcelormittal Sealing airlock for deposition chamber
DE102024208547A1 (de) * 2024-09-09 2026-03-12 Sms Group Gmbh Ein- und Ausschleusen eines Metallbands in eine und aus einer Behandlungskammer

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU36143A1 (de) * 1957-09-16
US3158507A (en) * 1960-01-11 1964-11-24 Continental Can Co Floating roller seal
GB1126700A (en) * 1965-01-08 1968-09-11 United States Steel Corp Roll seal for vacuum strip-treating chamber
US3367667A (en) * 1965-07-16 1968-02-06 United States Steel Corp Roll seal for vacuum strip-treating chamber
GB1305746A (de) * 1970-08-05 1973-02-07
BE792701A (de) * 1971-12-14 1973-03-30 Arbed
EP0130444B1 (de) * 1983-06-17 1987-09-23 Hitachi, Ltd. Apparat zur kontinuierlichen Vakuumbehandlung
JPS60945A (ja) * 1983-06-17 1985-01-07 Hitachi Ltd 真空連続処理装置
JPS6442578A (en) * 1987-08-07 1989-02-14 Kobe Steel Ltd Roll sealer in continuous treating device
KR920003591B1 (ko) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
SU1812244A1 (ru) * 1991-03-20 1993-04-30 Maloe Predpr Elmash Вакуумный затвор
JPH0768620B2 (ja) 1991-09-30 1995-07-26 中外炉工業株式会社 金属ストリップの表面清浄化装置
JP3315238B2 (ja) * 1994-02-10 2002-08-19 富士写真フイルム株式会社 感光材料用支持体の真空処理用シール方法及び装置
JP2837367B2 (ja) * 1995-02-16 1998-12-16 日新製鋼株式会社 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置
RU2076293C1 (ru) * 1995-08-16 1997-03-27 Владимир Евгеньевич Супрутский Вакуумный затвор
US6159300A (en) * 1996-12-17 2000-12-12 Canon Kabushiki Kaisha Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
US6050446A (en) * 1997-07-11 2000-04-18 Applied Materials, Inc. Pivoting lid assembly for a chamber
DK1004369T4 (da) * 1998-11-26 2009-03-09 Cockerill Rech & Dev Forseglingssluse til et vakuumkammer

Also Published As

Publication number Publication date
US7931750B2 (en) 2011-04-26
JP2007501328A (ja) 2007-01-25
DE602004001403T2 (de) 2006-12-28
BRPI0411157A (pt) 2006-07-11
RU2005137556A (ru) 2006-06-10
PL1627096T3 (pl) 2006-12-29
US20060236942A1 (en) 2006-10-26
PT1627096E (pt) 2006-11-30
CN1795288B (zh) 2010-05-12
CA2524938A1 (en) 2004-12-02
DE602004001403D1 (de) 2006-08-10
CN1795288A (zh) 2006-06-28
CA2524938C (en) 2012-06-19
ES2267064T3 (es) 2007-03-01
EP1479789A1 (de) 2004-11-24
EP1627096B1 (de) 2006-06-28
EP1627096A1 (de) 2006-02-22
RU2335577C2 (ru) 2008-10-10
JP4536725B2 (ja) 2010-09-01
WO2004104264A1 (fr) 2004-12-02
BRPI0411157B1 (pt) 2016-01-26

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