PL1627096T3 - Śluza uszczelniająca do urządzenia do liniowego powlekania próżniowego - Google Patents
Śluza uszczelniająca do urządzenia do liniowego powlekania próżniowegoInfo
- Publication number
- PL1627096T3 PL1627096T3 PL04728134T PL04728134T PL1627096T3 PL 1627096 T3 PL1627096 T3 PL 1627096T3 PL 04728134 T PL04728134 T PL 04728134T PL 04728134 T PL04728134 T PL 04728134T PL 1627096 T3 PL1627096 T3 PL 1627096T3
- Authority
- PL
- Poland
- Prior art keywords
- rollers
- covers
- line
- deposition apparatus
- detachable
- Prior art date
Links
- 230000008021 deposition Effects 0.000 title 1
- 238000007789 sealing Methods 0.000 title 1
- 229920001971 elastomer Polymers 0.000 abstract 2
- 239000000806 elastomer Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0025—Applying surface layers, e.g. coatings, decorative layers, printed layers, to articles during shaping, e.g. in-mould printing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Sealing Devices (AREA)
- Paints Or Removers (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP03447123A EP1479789A1 (fr) | 2003-05-23 | 2003-05-23 | Sas d'étanchéité pour ligne de dépôt sous vide sur produit plat |
| PCT/BE2004/000055 WO2004104264A1 (fr) | 2003-05-23 | 2004-04-19 | Sas d'etancheite pour ligne de depot sous vide sur produit plat |
| EP04728134A EP1627096B1 (fr) | 2003-05-23 | 2004-04-19 | Sas d'etancheite pour ligne de depot sous vide sur produit plat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL1627096T3 true PL1627096T3 (pl) | 2006-12-29 |
Family
ID=33041168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL04728134T PL1627096T3 (pl) | 2003-05-23 | 2004-04-19 | Śluza uszczelniająca do urządzenia do liniowego powlekania próżniowego |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US7931750B2 (pl) |
| EP (2) | EP1479789A1 (pl) |
| JP (1) | JP4536725B2 (pl) |
| CN (1) | CN1795288B (pl) |
| AT (1) | ATE331822T1 (pl) |
| BR (1) | BRPI0411157B1 (pl) |
| CA (1) | CA2524938C (pl) |
| DE (1) | DE602004001403T2 (pl) |
| ES (1) | ES2267064T3 (pl) |
| PL (1) | PL1627096T3 (pl) |
| PT (1) | PT1627096E (pl) |
| RU (1) | RU2335577C2 (pl) |
| WO (1) | WO2004104264A1 (pl) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE602007002782D1 (de) * | 2007-02-28 | 2009-11-26 | Applied Materials Inc | Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür |
| EP2132354B1 (de) | 2007-02-28 | 2013-04-10 | VON ARDENNE Anlagentechnik GmbH | Verfahren und vorrichtung zur behandlung bandförmigen substrates in einer vakuumbeschichtungsanlage |
| DE102007049669A1 (de) | 2007-10-17 | 2009-04-23 | Sms Demag Ag | Schleusenvorrichtung und Verfahren zum Öffnen der Schleusenvorrichtung |
| CN102666913B (zh) * | 2009-12-24 | 2014-09-03 | Posco公司 | 带传送装置、用带传送装置处理带表面的装置以及处理带表面的方法 |
| KR20160024882A (ko) | 2013-06-27 | 2016-03-07 | 피코순 오와이 | 원자층 증착 반응기 내 기판 웹 트랙의 형성 |
| US10317138B2 (en) | 2015-06-11 | 2019-06-11 | Westmill Industries Ltd. | Baffle systems and methods of replacing baffle seal strips |
| RU2651838C2 (ru) * | 2016-09-08 | 2018-04-24 | Акционерное общество "КВАРЦ" | Заслонка |
| CN113737149A (zh) * | 2020-05-28 | 2021-12-03 | 宝山钢铁股份有限公司 | 一种用于金属带材上的连续真空镀膜密封锁 |
| WO2024052712A1 (en) | 2022-09-05 | 2024-03-14 | Arcelormittal | Sealing airlock for deposition chamber |
| DE102024208547A1 (de) * | 2024-09-09 | 2026-03-12 | Sms Group Gmbh | Ein- und Ausschleusen eines Metallbands in eine und aus einer Behandlungskammer |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| LU36143A1 (pl) * | 1957-09-16 | |||
| US3158507A (en) * | 1960-01-11 | 1964-11-24 | Continental Can Co | Floating roller seal |
| GB1126700A (en) * | 1965-01-08 | 1968-09-11 | United States Steel Corp | Roll seal for vacuum strip-treating chamber |
| US3367667A (en) * | 1965-07-16 | 1968-02-06 | United States Steel Corp | Roll seal for vacuum strip-treating chamber |
| GB1305746A (pl) * | 1970-08-05 | 1973-02-07 | ||
| BE792701A (pl) * | 1971-12-14 | 1973-03-30 | Arbed | |
| EP0130444B1 (en) * | 1983-06-17 | 1987-09-23 | Hitachi, Ltd. | Continuous vacuum treating apparatus |
| JPS60945A (ja) * | 1983-06-17 | 1985-01-07 | Hitachi Ltd | 真空連続処理装置 |
| JPS6442578A (en) * | 1987-08-07 | 1989-02-14 | Kobe Steel Ltd | Roll sealer in continuous treating device |
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
| SU1812244A1 (ru) * | 1991-03-20 | 1993-04-30 | Maloe Predpr Elmash | Вакуумный затвор |
| JPH0768620B2 (ja) | 1991-09-30 | 1995-07-26 | 中外炉工業株式会社 | 金属ストリップの表面清浄化装置 |
| JP3315238B2 (ja) * | 1994-02-10 | 2002-08-19 | 富士写真フイルム株式会社 | 感光材料用支持体の真空処理用シール方法及び装置 |
| JP2837367B2 (ja) * | 1995-02-16 | 1998-12-16 | 日新製鋼株式会社 | 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置 |
| RU2076293C1 (ru) * | 1995-08-16 | 1997-03-27 | Владимир Евгеньевич Супрутский | Вакуумный затвор |
| US6159300A (en) * | 1996-12-17 | 2000-12-12 | Canon Kabushiki Kaisha | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device |
| US6050446A (en) * | 1997-07-11 | 2000-04-18 | Applied Materials, Inc. | Pivoting lid assembly for a chamber |
| DK1004369T4 (da) * | 1998-11-26 | 2009-03-09 | Cockerill Rech & Dev | Forseglingssluse til et vakuumkammer |
-
2003
- 2003-05-23 EP EP03447123A patent/EP1479789A1/fr not_active Withdrawn
-
2004
- 2004-04-19 PT PT04728134T patent/PT1627096E/pt unknown
- 2004-04-19 DE DE602004001403T patent/DE602004001403T2/de not_active Expired - Lifetime
- 2004-04-19 PL PL04728134T patent/PL1627096T3/pl unknown
- 2004-04-19 BR BRPI0411157A patent/BRPI0411157B1/pt not_active IP Right Cessation
- 2004-04-19 CN CN2004800142219A patent/CN1795288B/zh not_active Expired - Lifetime
- 2004-04-19 WO PCT/BE2004/000055 patent/WO2004104264A1/fr not_active Ceased
- 2004-04-19 ES ES04728134T patent/ES2267064T3/es not_active Expired - Lifetime
- 2004-04-19 US US10/557,214 patent/US7931750B2/en not_active Expired - Lifetime
- 2004-04-19 JP JP2006527212A patent/JP4536725B2/ja not_active Expired - Lifetime
- 2004-04-19 EP EP04728134A patent/EP1627096B1/fr not_active Expired - Lifetime
- 2004-04-19 RU RU2005137556/02A patent/RU2335577C2/ru active
- 2004-04-19 CA CA2524938A patent/CA2524938C/en not_active Expired - Lifetime
- 2004-04-19 AT AT04728134T patent/ATE331822T1/de active
Also Published As
| Publication number | Publication date |
|---|---|
| US7931750B2 (en) | 2011-04-26 |
| JP2007501328A (ja) | 2007-01-25 |
| DE602004001403T2 (de) | 2006-12-28 |
| BRPI0411157A (pt) | 2006-07-11 |
| RU2005137556A (ru) | 2006-06-10 |
| US20060236942A1 (en) | 2006-10-26 |
| PT1627096E (pt) | 2006-11-30 |
| CN1795288B (zh) | 2010-05-12 |
| CA2524938A1 (en) | 2004-12-02 |
| DE602004001403D1 (de) | 2006-08-10 |
| CN1795288A (zh) | 2006-06-28 |
| CA2524938C (en) | 2012-06-19 |
| ES2267064T3 (es) | 2007-03-01 |
| EP1479789A1 (fr) | 2004-11-24 |
| EP1627096B1 (fr) | 2006-06-28 |
| EP1627096A1 (fr) | 2006-02-22 |
| RU2335577C2 (ru) | 2008-10-10 |
| JP4536725B2 (ja) | 2010-09-01 |
| WO2004104264A1 (fr) | 2004-12-02 |
| BRPI0411157B1 (pt) | 2016-01-26 |
| ATE331822T1 (de) | 2006-07-15 |
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