ATE353108T1 - Bordotierte diamant und verfahren zu ihrer herstellung - Google Patents

Bordotierte diamant und verfahren zu ihrer herstellung

Info

Publication number
ATE353108T1
ATE353108T1 AT02790571T AT02790571T ATE353108T1 AT E353108 T1 ATE353108 T1 AT E353108T1 AT 02790571 T AT02790571 T AT 02790571T AT 02790571 T AT02790571 T AT 02790571T AT E353108 T1 ATE353108 T1 AT E353108T1
Authority
AT
Austria
Prior art keywords
board
production
doped diamonds
layer
diamonds
Prior art date
Application number
AT02790571T
Other languages
English (en)
Inventor
Geoffrey Alan Scarsbrook
Philip Maurice Martineau
Daniel James Twitchen
Andrew John Whitehead
Michael Andrew Cooper
Baerbel Susanne Charlotte Dorn
Original Assignee
Element Six Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Element Six Ltd filed Critical Element Six Ltd
Application granted granted Critical
Publication of ATE353108T1 publication Critical patent/ATE353108T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AT02790571T 2001-12-14 2002-12-13 Bordotierte diamant und verfahren zu ihrer herstellung ATE353108T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0130005.2A GB0130005D0 (en) 2001-12-14 2001-12-14 Boron doped diamond

Publications (1)

Publication Number Publication Date
ATE353108T1 true ATE353108T1 (de) 2007-02-15

Family

ID=9927671

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02790571T ATE353108T1 (de) 2001-12-14 2002-12-13 Bordotierte diamant und verfahren zu ihrer herstellung

Country Status (15)

Country Link
US (2) US7160617B2 (de)
EP (2) EP1780315B1 (de)
JP (2) JP5101792B2 (de)
KR (1) KR100847969B1 (de)
CN (1) CN1321227C (de)
AT (1) ATE353108T1 (de)
AU (1) AU2002366413A1 (de)
CA (1) CA2469150C (de)
DE (1) DE60217976T2 (de)
ES (1) ES2279897T3 (de)
GB (2) GB0130005D0 (de)
IL (2) IL162354A0 (de)
RU (1) RU2315826C2 (de)
WO (1) WO2003052174A2 (de)
ZA (1) ZA200404371B (de)

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GB2379451B (en) * 2000-06-15 2004-05-05 Element Six Thick single crystal diamond layer method for making it and gemstones produced from the layer
IL153380A0 (en) 2000-06-15 2003-07-06 Element Six Pty Ltd Single crystal diamond prepared by cvd
DE10153310A1 (de) * 2001-10-29 2003-05-22 Infineon Technologies Ag Photolithographisches Strukturierungsverfahren mit einer durch ein plasmaunterstützes Abscheideeverfahren hergestellten Kohlenstoff-Hartmaskenschicht diamantartiger Härte
GB0130005D0 (en) 2001-12-14 2002-02-06 Diamanx Products Ltd Boron doped diamond
GB0130004D0 (en) * 2001-12-14 2002-02-06 Diamanx Products Ltd Coloured diamond
AU2003259418A1 (en) * 2002-09-06 2004-03-29 Element Six Limited Coloured diamond
GB0221949D0 (en) * 2002-09-20 2002-10-30 Diamanx Products Ltd Single crystal diamond
GB0227261D0 (en) 2002-11-21 2002-12-31 Element Six Ltd Optical quality diamond material
AU2004303615A1 (en) * 2003-12-12 2005-07-07 Element Six Limited Method of incorporating a mark in CVD diamond
DE602004016394D1 (de) * 2003-12-12 2008-10-16 Element Six Ltd Verfahren zum einbringen einer markierung in einen cvd-diamanten
US20100297391A1 (en) * 2004-02-25 2010-11-25 General Nanotechnoloy Llc Diamond capsules and methods of manufacture
US7183548B1 (en) * 2004-02-25 2007-02-27 Metadigm Llc Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision
US9470485B1 (en) 2004-03-29 2016-10-18 Victor B. Kley Molded plastic cartridge with extended flash tube, sub-sonic cartridges, and user identification for firearms and site sensing fire control
GB0508889D0 (en) * 2005-04-29 2005-06-08 Element Six Ltd Diamond transistor and method of manufacture thereof
EP2400530A3 (de) * 2005-06-20 2012-04-18 Nippon Telegraph And Telephone Corporation Diamanthalbleiterbauelement und Herstellungsverfahren dafür
GB0512728D0 (en) * 2005-06-22 2005-07-27 Element Six Ltd High colour diamond
AU2006260656A1 (en) * 2005-06-22 2006-12-28 Element Six Limited High colour diamond layer
GB0513932D0 (en) 2005-07-08 2005-08-17 Element Six Ltd Single crystal diamond elements having spherical surfaces
US20090127565A1 (en) * 2005-08-09 2009-05-21 Chien-Min Sung P-n junctions on mosaic diamond substrates
US20070036896A1 (en) * 2005-08-09 2007-02-15 Chien-Min Sung Mosaic diamond substrates
EP1957689B1 (de) 2005-12-09 2011-04-20 Element Six Technologies (PTY) LTD Synthetischer diamant mit hoher kristalliner qualität
CN100390316C (zh) * 2006-01-19 2008-05-28 上海电机学院 n型CVD共掺杂金刚石薄膜的制备方法
ES2638115T3 (es) * 2006-09-05 2017-10-18 Element Six Technologies Limited Electrodo de diamante sólido
US7833581B2 (en) * 2006-09-11 2010-11-16 The Hong Kong University Of Science And Technology Method for making a highly stable diamond film on a substrate
GB0622483D0 (en) 2006-11-10 2006-12-20 Element Six Ltd Electrochemical apparatus having a forced flow arrangement
GB0622482D0 (en) 2006-11-10 2006-12-20 Element Six Ltd Diamond electrode
GB0700984D0 (en) 2007-01-18 2007-02-28 Element Six Ltd Polycrystalline diamond elements having convex surfaces
WO2008090513A2 (en) 2007-01-22 2008-07-31 Element Six Limited Diamond electronic devices including a surface and methods for their manufacture
US20110031213A1 (en) * 2007-07-27 2011-02-10 Yuri Konstantinovich Nizienko Method for Marking Valuable Articles
US20090260396A1 (en) * 2008-04-16 2009-10-22 Eitan Broukman Methods for processing ornamental diamonds and corresponding ornamental diamonds
US9023306B2 (en) * 2008-05-05 2015-05-05 Carnegie Institution Of Washington Ultratough single crystal boron-doped diamond
GB0813490D0 (en) * 2008-07-23 2008-08-27 Element Six Ltd Solid state material
GB0813491D0 (en) 2008-07-23 2008-08-27 Element Six Ltd Diamond Material
AU2009324921A1 (en) * 2008-11-25 2010-06-17 Carnegie Institution Of Washington Production of single crystal CVD diamond rapid growth rate
US9017632B2 (en) 2009-06-26 2015-04-28 Element Six Technologies Limited Diamond material
WO2010149777A1 (en) * 2009-06-26 2010-12-29 Element Six Limited Method for making fancy orange coloured single crystal cvd diamond and product obtained
SG179318A1 (en) * 2010-09-27 2012-04-27 Gemesis Company S Pte Ltd Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system
US8997900B2 (en) 2010-12-15 2015-04-07 National Oilwell DHT, L.P. In-situ boron doped PDC element
GB201021855D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave power delivery system for plasma reactors
GB201021870D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021865D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021853D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021913D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave plasma reactors and substrates for synthetic diamond manufacture
US9637838B2 (en) 2010-12-23 2017-05-02 Element Six Limited Methods of manufacturing synthetic diamond material by microwave plasma enhanced chemical vapor deposition from a microwave generator and gas inlet(s) disposed opposite the growth surface area
GB201021860D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for diamond synthesis
GB201104579D0 (en) * 2011-03-18 2011-05-04 Element Six Ltd Diamond based electrochemical sensors
GB201121642D0 (en) 2011-12-16 2012-01-25 Element Six Ltd Single crtstal cvd synthetic diamond material
GB201216697D0 (en) 2012-09-19 2012-10-31 Element Six Ltd Single crystal chemical vapour deposited synthetic diamond materials having uniform colour
US9921017B1 (en) 2013-03-15 2018-03-20 Victor B. Kley User identification for weapons and site sensing fire control
GB201320304D0 (en) 2013-11-18 2014-01-01 Element Six Ltd Methods of fabricating synthetic diamond materials using microwave plasma actived chemical vapour deposition techniques and products obtained using said
CN103938182B (zh) * 2014-04-08 2016-05-04 上海交通大学 硼氮共掺纳米基定向金刚石薄膜的制备方法
JP6631517B2 (ja) 2014-06-25 2020-01-15 住友電気工業株式会社 ダイヤモンド基板、及び、ダイヤモンド複合基板
JP6636239B2 (ja) * 2014-08-29 2020-01-29 国立大学法人電気通信大学 単結晶ダイヤモンドの製造方法、単結晶ダイヤモンド、単結晶ダイヤモンド基板の製造方法、単結晶ダイヤモンド基板及び半導体デバイス
EP3214208B1 (de) * 2014-10-29 2021-08-04 Sumitomo Electric Industries, Ltd. Einkristallines diamantmaterial und werkzeug, strahlungstemperaturmonitor und infrarot- und optische komponente mit besagtem diamantmaterial
JP2017010967A (ja) * 2015-06-16 2017-01-12 株式会社Flosfia 成膜方法
KR20170027112A (ko) 2015-09-01 2017-03-09 장상구 3차원 기공성 나노 다이아몬드를 담체로 하는 촉매의 제조방법
GB201516814D0 (en) 2015-09-23 2015-11-04 Element Six Technologies Ltd Method of fabricating a plurality of single crystal CVD synthetic diamonds
WO2017136647A1 (en) 2016-02-05 2017-08-10 Siemens Energy, Inc. Electrooxidation at elevated pressures
GB201620413D0 (en) 2016-12-01 2017-01-18 Element Six Tech Ltd Single crystal synthetic diamond material via chemical vapour deposition
EP3686321A4 (de) * 2017-09-19 2021-07-28 Sumitomo Electric Industries, Ltd. Monokristalliner diamant und herstellungsverfahren dafür
US20240175167A1 (en) * 2021-03-31 2024-05-30 Sumitomo Electric Industries, Ltd. Single-crystal diamond and method of manufacturing the same
AT525593B1 (de) * 2021-10-22 2024-07-15 Carboncompetence Gmbh Vorrichtung und Verfahren zur Herstellung dotierter Diamantschichten
CN116203720B (zh) * 2021-12-01 2026-02-24 港大科桥有限公司 用于使用金刚石的颜色空间相关的拉曼光谱的防伪系统的方法和设备
US12160533B2 (en) * 2022-04-20 2024-12-03 EllansaLabs Inc. System and method for etching internal surfaces of transparent gemstones with information pertaining to a blockchain
US11664986B2 (en) 2022-04-20 2023-05-30 EllansaLabs Inc. System and method for etching internal surfaces of transparent gemstones with information pertaining to a blockchain
CN114941173B (zh) * 2022-05-26 2023-10-10 曲阜师范大学 一种高相干金刚石氮空穴及金刚石压砧的制备与应用
CN115261984A (zh) * 2022-09-29 2022-11-01 北京芯美达科技有限公司 一种单晶金刚石晶格外延补偿方法
US11867637B2 (en) 2022-12-15 2024-01-09 EllansaLabs Inc. Systems for authentication and related devices and methods
US20230357024A1 (en) * 2023-03-15 2023-11-09 EllansaLabs Inc. Diamonds having artificially embedded inclusions
US12213295B2 (en) 2023-03-15 2025-01-28 EllansaLabs Inc. Diamond-based electromagnetic interference shield

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GB0130005D0 (en) 2001-12-14 2002-02-06 Diamanx Products Ltd Boron doped diamond
GB0130004D0 (en) 2001-12-14 2002-02-06 Diamanx Products Ltd Coloured diamond
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Also Published As

Publication number Publication date
ZA200404371B (en) 2005-06-03
EP1780315B1 (de) 2015-04-15
GB0130005D0 (en) 2002-02-06
DE60217976T2 (de) 2007-05-24
GB2400116B (en) 2005-06-22
US7160617B2 (en) 2007-01-09
CA2469150C (en) 2009-09-15
CN1612955A (zh) 2005-05-04
EP1780315A3 (de) 2010-02-24
RU2315826C2 (ru) 2008-01-27
CA2469150A1 (en) 2003-06-26
GB0415787D0 (en) 2004-08-18
ES2279897T3 (es) 2007-09-01
IL162354A (en) 2009-09-22
GB2400116A (en) 2004-10-06
KR20040077674A (ko) 2004-09-06
RU2004121782A (ru) 2005-06-10
US20070092647A1 (en) 2007-04-26
CN1321227C (zh) 2007-06-13
DE60217976D1 (de) 2007-03-22
IL162354A0 (en) 2005-11-20
EP1463849B1 (de) 2007-01-31
EP1780315A2 (de) 2007-05-02
JP5101792B2 (ja) 2012-12-19
JP2005512928A (ja) 2005-05-12
US20040180205A1 (en) 2004-09-16
AU2002366413A1 (en) 2003-06-30
KR100847969B1 (ko) 2008-07-22
HK1076644A1 (en) 2006-01-20
EP1463849A2 (de) 2004-10-06
WO2003052174A3 (en) 2003-10-02
JP2010222252A (ja) 2010-10-07
WO2003052174A2 (en) 2003-06-26

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