CA2469150C - Boron doped diamond - Google Patents
Boron doped diamond Download PDFInfo
- Publication number
- CA2469150C CA2469150C CA002469150A CA2469150A CA2469150C CA 2469150 C CA2469150 C CA 2469150C CA 002469150 A CA002469150 A CA 002469150A CA 2469150 A CA2469150 A CA 2469150A CA 2469150 C CA2469150 C CA 2469150C
- Authority
- CA
- Canada
- Prior art keywords
- diamond
- less
- layer
- layer according
- diamond layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 141
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 141
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title claims abstract description 101
- 229910052796 boron Inorganic materials 0.000 title claims abstract description 99
- 239000013078 crystal Substances 0.000 claims abstract description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 79
- 239000007789 gas Substances 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 61
- 238000005259 measurement Methods 0.000 claims description 43
- 229910052757 nitrogen Inorganic materials 0.000 claims description 40
- 230000007547 defect Effects 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 38
- 238000009826 distribution Methods 0.000 claims description 15
- 239000002019 doping agent Substances 0.000 claims description 14
- 238000001069 Raman spectroscopy Methods 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 9
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 5
- 239000010437 gem Substances 0.000 claims description 3
- 229910001751 gemstone Inorganic materials 0.000 claims description 3
- 239000003574 free electron Substances 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 description 30
- 239000000463 material Substances 0.000 description 20
- 230000008569 process Effects 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 125000004429 atom Chemical group 0.000 description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 229910052739 hydrogen Inorganic materials 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 11
- 238000004458 analytical method Methods 0.000 description 10
- 238000004817 gas chromatography Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 230000001419 dependent effect Effects 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 7
- 238000007792 addition Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000005136 cathodoluminescence Methods 0.000 description 6
- 238000011065 in-situ storage Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000013507 mapping Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000370 acceptor Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000010348 incorporation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000000155 isotopic effect Effects 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 1
- 101000993059 Homo sapiens Hereditary hemochromatosis protein Proteins 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 208000003251 Pruritus Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000005535 acoustic phonon Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- -1 argon ion Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000004148 curcumin Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001362 electron spin resonance spectrum Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004442 gravimetric analysis Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 229910001872 inorganic gas Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 230000005298 paramagnetic effect Effects 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Respiratory Apparatuses And Protective Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0130005.2A GB0130005D0 (en) | 2001-12-14 | 2001-12-14 | Boron doped diamond |
| GB0130005.2 | 2001-12-14 | ||
| PCT/IB2002/005324 WO2003052174A2 (en) | 2001-12-14 | 2002-12-13 | Boron doped diamond |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2469150A1 CA2469150A1 (en) | 2003-06-26 |
| CA2469150C true CA2469150C (en) | 2009-09-15 |
Family
ID=9927671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002469150A Expired - Lifetime CA2469150C (en) | 2001-12-14 | 2002-12-13 | Boron doped diamond |
Country Status (15)
| Country | Link |
|---|---|
| US (2) | US7160617B2 (de) |
| EP (2) | EP1780315B1 (de) |
| JP (2) | JP5101792B2 (de) |
| KR (1) | KR100847969B1 (de) |
| CN (1) | CN1321227C (de) |
| AT (1) | ATE353108T1 (de) |
| AU (1) | AU2002366413A1 (de) |
| CA (1) | CA2469150C (de) |
| DE (1) | DE60217976T2 (de) |
| ES (1) | ES2279897T3 (de) |
| GB (2) | GB0130005D0 (de) |
| IL (2) | IL162354A0 (de) |
| RU (1) | RU2315826C2 (de) |
| WO (1) | WO2003052174A2 (de) |
| ZA (1) | ZA200404371B (de) |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60135653D1 (de) * | 2000-06-15 | 2008-10-16 | Element Six Pty Ltd | Einkristalldiamant hergestellt durch cvd |
| JP4469552B2 (ja) * | 2000-06-15 | 2010-05-26 | エレメント シックス （プロプライエタリイ）リミテッド | 厚い単結晶ダイヤモンド層、それを造る方法及びその層から形成された宝石の原石 |
| DE10153310A1 (de) * | 2001-10-29 | 2003-05-22 | Infineon Technologies Ag | Photolithographisches Strukturierungsverfahren mit einer durch ein plasmaunterstützes Abscheideeverfahren hergestellten Kohlenstoff-Hartmaskenschicht diamantartiger Härte |
| GB0130004D0 (en) * | 2001-12-14 | 2002-02-06 | Diamanx Products Ltd | Coloured diamond |
| GB0130005D0 (en) | 2001-12-14 | 2002-02-06 | Diamanx Products Ltd | Boron doped diamond |
| RU2328563C2 (ru) * | 2002-09-06 | 2008-07-10 | Элемент Сикс Лимитед | Цветные алмазы |
| GB0221949D0 (en) | 2002-09-20 | 2002-10-30 | Diamanx Products Ltd | Single crystal diamond |
| GB0227261D0 (en) * | 2002-11-21 | 2002-12-31 | Element Six Ltd | Optical quality diamond material |
| KR101240785B1 (ko) * | 2003-12-12 | 2013-03-07 | 엘리멘트 식스 리미티드 | 화학적 증착 다이아몬드에 마크를 통합시키는 방법 |
| CA2548449C (en) * | 2003-12-12 | 2014-06-03 | Element Six Limited | Method of incorporating a mark in cvd diamond |
| US7309446B1 (en) | 2004-02-25 | 2007-12-18 | Metadigm Llc | Methods of manufacturing diamond capsules |
| US20100297391A1 (en) * | 2004-02-25 | 2010-11-25 | General Nanotechnoloy Llc | Diamond capsules and methods of manufacture |
| US9470485B1 (en) | 2004-03-29 | 2016-10-18 | Victor B. Kley | Molded plastic cartridge with extended flash tube, sub-sonic cartridges, and user identification for firearms and site sensing fire control |
| GB0508889D0 (en) * | 2005-04-29 | 2005-06-08 | Element Six Ltd | Diamond transistor and method of manufacture thereof |
| EP2400530A3 (de) | 2005-06-20 | 2012-04-18 | Nippon Telegraph And Telephone Corporation | Diamanthalbleiterbauelement und Herstellungsverfahren dafür |
| GB0512728D0 (en) * | 2005-06-22 | 2005-07-27 | Element Six Ltd | High colour diamond |
| KR101307032B1 (ko) * | 2005-06-22 | 2013-09-11 | 엘리멘트 식스 리미티드 | 고등급의 색을 갖는 다이아몬드 층 |
| GB0513932D0 (en) | 2005-07-08 | 2005-08-17 | Element Six Ltd | Single crystal diamond elements having spherical surfaces |
| US20090127565A1 (en) * | 2005-08-09 | 2009-05-21 | Chien-Min Sung | P-n junctions on mosaic diamond substrates |
| US20070036896A1 (en) * | 2005-08-09 | 2007-02-15 | Chien-Min Sung | Mosaic diamond substrates |
| US9133566B2 (en) | 2005-12-09 | 2015-09-15 | Element Six Technologies Limited | High crystalline quality synthetic diamond |
| CN100390316C (zh) * | 2006-01-19 | 2008-05-28 | 上海电机学院 | n型CVD共掺杂金刚石薄膜的制备方法 |
| ES2638115T3 (es) * | 2006-09-05 | 2017-10-18 | Element Six Technologies Limited | Electrodo de diamante sólido |
| US7833581B2 (en) * | 2006-09-11 | 2010-11-16 | The Hong Kong University Of Science And Technology | Method for making a highly stable diamond film on a substrate |
| GB0622482D0 (en) | 2006-11-10 | 2006-12-20 | Element Six Ltd | Diamond electrode |
| GB0622483D0 (en) | 2006-11-10 | 2006-12-20 | Element Six Ltd | Electrochemical apparatus having a forced flow arrangement |
| GB0700984D0 (en) | 2007-01-18 | 2007-02-28 | Element Six Ltd | Polycrystalline diamond elements having convex surfaces |
| JP5341774B2 (ja) | 2007-01-22 | 2013-11-13 | エレメント シックス リミテッド | ダイヤモンド表面のプラズマエッチング |
| EP2186649A4 (de) * | 2007-07-27 | 2011-04-06 | Valinmark Inc | Verfahren zur markierung von wertvollen artikeln |
| US20090260396A1 (en) * | 2008-04-16 | 2009-10-22 | Eitan Broukman | Methods for processing ornamental diamonds and corresponding ornamental diamonds |
| TWI457475B (zh) * | 2008-05-05 | 2014-10-21 | Carnegie Inst Of Washington | 超韌性單晶型摻硼鑽石 |
| GB0813490D0 (en) * | 2008-07-23 | 2008-08-27 | Element Six Ltd | Solid state material |
| GB0813491D0 (en) | 2008-07-23 | 2008-08-27 | Element Six Ltd | Diamond Material |
| WO2010068419A2 (en) * | 2008-11-25 | 2010-06-17 | Carnegie Institution Of Washington | Production of single crystal cvd diamond rapid growth rate |
| JP5874932B2 (ja) * | 2009-06-26 | 2016-03-02 | エレメント シックス リミテッド | ダイヤモンド材料の処理方法及び得られた製品 |
| US9017632B2 (en) * | 2009-06-26 | 2015-04-28 | Element Six Technologies Limited | Diamond material |
| SG179318A1 (en) * | 2010-09-27 | 2012-04-27 | Gemesis Company S Pte Ltd | Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
| US8997900B2 (en) | 2010-12-15 | 2015-04-07 | National Oilwell DHT, L.P. | In-situ boron doped PDC element |
| GB201021855D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave power delivery system for plasma reactors |
| GB201021913D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave plasma reactors and substrates for synthetic diamond manufacture |
| GB201021865D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| GB201021860D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for diamond synthesis |
| GB201021870D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| SG191220A1 (en) * | 2010-12-23 | 2013-07-31 | Element Six Ltd | Controlling doping of synthetic diamond material |
| GB201021853D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| GB201104579D0 (en) * | 2011-03-18 | 2011-05-04 | Element Six Ltd | Diamond based electrochemical sensors |
| GB201121642D0 (en) | 2011-12-16 | 2012-01-25 | Element Six Ltd | Single crtstal cvd synthetic diamond material |
| GB201216697D0 (en) | 2012-09-19 | 2012-10-31 | Element Six Ltd | Single crystal chemical vapour deposited synthetic diamond materials having uniform colour |
| US9921017B1 (en) | 2013-03-15 | 2018-03-20 | Victor B. Kley | User identification for weapons and site sensing fire control |
| GB201320304D0 (en) | 2013-11-18 | 2014-01-01 | Element Six Ltd | Methods of fabricating synthetic diamond materials using microwave plasma actived chemical vapour deposition techniques and products obtained using said |
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-
2001
- 2001-12-14 GB GBGB0130005.2A patent/GB0130005D0/en not_active Ceased
-
2002
- 2002-12-13 KR KR1020047009241A patent/KR100847969B1/ko not_active Expired - Lifetime
- 2002-12-13 IL IL16235402A patent/IL162354A0/xx unknown
- 2002-12-13 GB GB0415787A patent/GB2400116B/en not_active Expired - Lifetime
- 2002-12-13 EP EP06076850.4A patent/EP1780315B1/de not_active Expired - Lifetime
- 2002-12-13 ES ES02790571T patent/ES2279897T3/es not_active Expired - Lifetime
- 2002-12-13 CN CNB028267494A patent/CN1321227C/zh not_active Expired - Lifetime
- 2002-12-13 CA CA002469150A patent/CA2469150C/en not_active Expired - Lifetime
- 2002-12-13 AU AU2002366413A patent/AU2002366413A1/en not_active Abandoned
- 2002-12-13 RU RU2004121782/15A patent/RU2315826C2/ru active
- 2002-12-13 WO PCT/IB2002/005324 patent/WO2003052174A2/en not_active Ceased
- 2002-12-13 JP JP2003553040A patent/JP5101792B2/ja not_active Expired - Lifetime
- 2002-12-13 AT AT02790571T patent/ATE353108T1/de not_active IP Right Cessation
- 2002-12-13 EP EP02790571A patent/EP1463849B1/de not_active Expired - Lifetime
- 2002-12-13 DE DE60217976T patent/DE60217976T2/de not_active Expired - Lifetime
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2003
- 2003-09-03 US US10/653,419 patent/US7160617B2/en not_active Expired - Lifetime
-
2004
- 2004-06-03 ZA ZA200404371A patent/ZA200404371B/en unknown
- 2004-06-03 IL IL162354A patent/IL162354A/en active IP Right Grant
-
2006
- 2006-12-01 US US11/565,753 patent/US20070092647A1/en not_active Abandoned
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2010
- 2010-06-14 JP JP2010134951A patent/JP2010222252A/ja not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CA2469150A1 (en) | 2003-06-26 |
| EP1780315A2 (de) | 2007-05-02 |
| EP1780315B1 (de) | 2015-04-15 |
| CN1321227C (zh) | 2007-06-13 |
| EP1463849A2 (de) | 2004-10-06 |
| WO2003052174A3 (en) | 2003-10-02 |
| US7160617B2 (en) | 2007-01-09 |
| KR20040077674A (ko) | 2004-09-06 |
| JP2005512928A (ja) | 2005-05-12 |
| EP1463849B1 (de) | 2007-01-31 |
| RU2004121782A (ru) | 2005-06-10 |
| RU2315826C2 (ru) | 2008-01-27 |
| US20070092647A1 (en) | 2007-04-26 |
| CN1612955A (zh) | 2005-05-04 |
| AU2002366413A1 (en) | 2003-06-30 |
| GB0415787D0 (en) | 2004-08-18 |
| ES2279897T3 (es) | 2007-09-01 |
| GB2400116B (en) | 2005-06-22 |
| WO2003052174A2 (en) | 2003-06-26 |
| JP5101792B2 (ja) | 2012-12-19 |
| US20040180205A1 (en) | 2004-09-16 |
| DE60217976T2 (de) | 2007-05-24 |
| KR100847969B1 (ko) | 2008-07-22 |
| JP2010222252A (ja) | 2010-10-07 |
| DE60217976D1 (de) | 2007-03-22 |
| IL162354A0 (en) | 2005-11-20 |
| ZA200404371B (en) | 2005-06-03 |
| GB2400116A (en) | 2004-10-06 |
| ATE353108T1 (de) | 2007-02-15 |
| GB0130005D0 (en) | 2002-02-06 |
| EP1780315A3 (de) | 2010-02-24 |
| IL162354A (en) | 2009-09-22 |
| HK1076644A1 (en) | 2006-01-20 |
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