ATE363454T1 - Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung - Google Patents

Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung

Info

Publication number
ATE363454T1
ATE363454T1 AT04726696T AT04726696T ATE363454T1 AT E363454 T1 ATE363454 T1 AT E363454T1 AT 04726696 T AT04726696 T AT 04726696T AT 04726696 T AT04726696 T AT 04726696T AT E363454 T1 ATE363454 T1 AT E363454T1
Authority
AT
Austria
Prior art keywords
producing
substrate
micromaterial
machining
membrane layer
Prior art date
Application number
AT04726696T
Other languages
English (en)
Inventor
Edwin Jager
Magnus Krogh
Original Assignee
Micromuscle Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromuscle Ab filed Critical Micromuscle Ab
Application granted granted Critical
Publication of ATE363454T1 publication Critical patent/ATE363454T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/724—Devices having flexible or movable element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147—Assembling terminal to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Catalysts (AREA)
  • Disintegrating Or Milling (AREA)
  • Laminated Bodies (AREA)
  • Glass Compositions (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT04726696T 2003-04-17 2004-04-08 Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung ATE363454T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0301144A SE526192C2 (sv) 2003-04-17 2003-04-17 Metod för att framställa en anordning

Publications (1)

Publication Number Publication Date
ATE363454T1 true ATE363454T1 (de) 2007-06-15

Family

ID=20291064

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04726696T ATE363454T1 (de) 2003-04-17 2004-04-08 Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung

Country Status (8)

Country Link
US (1) US7322100B2 (de)
EP (1) EP1620356B1 (de)
JP (1) JP2006523540A (de)
AT (1) ATE363454T1 (de)
DE (1) DE602004006742T2 (de)
ES (1) ES2287719T3 (de)
SE (1) SE526192C2 (de)
WO (1) WO2004092050A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004037128A1 (de) * 2004-07-30 2006-03-23 Robert Bosch Gmbh Laserbearbeitung von mikromechanischen Strukturen
DE102006017549A1 (de) * 2006-04-13 2007-10-18 Imi Intelligent Medical Implants Ag Verfahren zur Herstellung von Implantatstrukturen zur Kontaktierung oder Elektrostimulation von lebenden Gewebezellen oder Nerven
US9242073B2 (en) 2006-08-18 2016-01-26 Boston Scientific Scimed, Inc. Electrically actuated annelid
DE102012224284A1 (de) 2012-12-21 2014-06-26 Heraeus Precious Metals Gmbh & Co. Kg Dünne Metallmembran mit Träger
US11615979B2 (en) * 2019-12-18 2023-03-28 Disco Corporation Method of processing wafer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749460A (ja) * 1993-08-06 1995-02-21 Nippondenso Co Ltd 可変焦点ミラーおよびその製造方法
SE513975C2 (sv) * 1994-08-19 2000-12-04 Telia Ab Repeterare och metod för DECT-system
SE9500849D0 (sv) * 1995-03-10 1995-03-10 Pharmacia Ab Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods
JPH09293913A (ja) * 1996-04-25 1997-11-11 Casio Comput Co Ltd 機能性高分子素子
JPH11121900A (ja) * 1997-10-15 1999-04-30 Sumitomo Electric Ind Ltd 回路基板の製造方法
JPH11288863A (ja) * 1998-04-01 1999-10-19 Mitsubishi Electric Corp Ｘ線マスクおよびその製造方法
EP1181239A1 (de) * 1999-03-31 2002-02-27 Siemens Aktiengesellschaft Verfahren zur herstellung von freitragenden mikrostrukturen, von dünnen flachteilen oder von membranen und verwendung nach diesem verfahren hergestellter mikrostrukturen als widerstandsgitter in einer einrichtung zur messung schwacher gasströmungen
WO2001080286A2 (en) 2000-04-17 2001-10-25 The Penn State Research Foundation Deposited thin films and their use in separation and sarcrificial layer applications

Also Published As

Publication number Publication date
WO2004092050A1 (en) 2004-10-28
EP1620356A1 (de) 2006-02-01
JP2006523540A (ja) 2006-10-19
SE526192C2 (sv) 2005-07-26
DE602004006742T2 (de) 2008-01-31
ES2287719T3 (es) 2007-12-16
SE0301144L (sv) 2004-10-18
DE602004006742D1 (de) 2007-07-12
EP1620356B1 (de) 2007-05-30
US7322100B2 (en) 2008-01-29
US20070050969A1 (en) 2007-03-08
SE0301144D0 (sv) 2003-04-17

Similar Documents

Publication Publication Date Title
DE59903019D1 (de) Verfahren zur herstellung eines elektronischen bauelements, insbesondere eines mit akustischen oberflächenwellen arbeitenden ofw-bauelements
DE502005004631D1 (de) Verfahren zur herstellung eines buchartigen wertdokumentes sowie ein buchartiges wertdokument
ATE300406T1 (de) Verfahren und vorrichtung zur herstellung und behandlung von elastomeren verbundwerkstoffen, und durch das verfahren herstellbarer elastomerer verbundwerkstoff
DE50300607D1 (de) Verfahren zur erzeugung einer abdeckung, verfahren zum herstellen eines gehäusten bauelements
ATE408448T1 (de) Filterelement und verfahren zu dessen herstellung
DE60238735D1 (de) Vorrichtung zur Erfassung von Fingerabdrücken und Verfahren zu deren Herstellung sowie Gerät zum Herstellen einer Schutzschicht
EP1588989A3 (de) Verfahren zur Herstellung eines Masters, Master und Verfahren zur Herstellung von optischen Elementen sowie optisches Element
DE60212827D1 (de) Verfahren und vorrichtung zur herstellung von laminierten verbundwerkstoffen
DE60216108D1 (de) Vorrichtung zur herstellung von verbundstrukturen und verfahren zu deren herstellung
DE50108755D1 (de) Verfahren und vorrichtung zur herstellung von glasscheiben beliebiger kontur aus flachglas
ATE523881T1 (de) Verfahren bei der herstellung eines ferroelektrischen speicherbausteins
DE602004019160D1 (de) Verfahren zur Herstellung eines hohlen Bauteils durch Diffusionsschweissen und superplastisches Verformen
ATE491987T1 (de) Verfahren und vorrichtung zur erzeugung von zusammengesetzen benutzeroberflächen
DE102004007238B8 (de) Vorrichtung und Verfahren zur Herstellung von Sandwichplatten
ATE378141T1 (de) Verfahren und vorrichtung zur mehrschichtigen materialabtragung einer dreidimensionalen oberfläche mittels laser durch verwendung eines durch eine mathematische funktion beschriebenen polygonnetzes, das die oberfläche darstellt
ATE540813T1 (de) Verfahren zur herstellung eines perforierten retroreflektierenden besatzes
ATE527012T1 (de) Verfahren zur herstellung von medizinprodukten mit einer opferstruktur
DE60335337D1 (de) Vorrichtung und Verfahren zur Herstellung von dünnen Schichten
DE50311103D1 (de) Verfahren zur herstellung einer multilayerschicht und vorrichtung zur durchführung des verfahrens
ATE556337T1 (de) Verfahren zur herstellung einer funktionellen vorrichtung mit temperaturbehandelten abgeschiedenen schichten
ATE363454T1 (de) Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung
DE502005008085D1 (de) Verfahren und Vorrichtung zur Herstellung von flächigen Elementen, insbesondere Bodenelementen
DE60334991D1 (de) Verfahren zur herstellung von dentalmassen
ATE303978T1 (de) Verfahren zur herstellen von siliciumdioxyd durch zersetzung eines organosilans
DE60221915D1 (de) Verfahren zur herstellung eines solarpanels

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties