ATE375865T1 - Verfahren zur herstellung eines flüssigkeitsausstosskopfes, substrat für einen flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren - Google Patents

Verfahren zur herstellung eines flüssigkeitsausstosskopfes, substrat für einen flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren

Info

Publication number
ATE375865T1
ATE375865T1 AT02017857T AT02017857T ATE375865T1 AT E375865 T1 ATE375865 T1 AT E375865T1 AT 02017857 T AT02017857 T AT 02017857T AT 02017857 T AT02017857 T AT 02017857T AT E375865 T1 ATE375865 T1 AT E375865T1
Authority
AT
Austria
Prior art keywords
liquid discharge
discharge head
substrate
producing
associated production
Prior art date
Application number
AT02017857T
Other languages
English (en)
Inventor
Shuji Koyama
Teruo Ozaki
Shingo Nagata
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE375865T1 publication Critical patent/ATE375865T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT02017857T 2001-08-10 2002-08-08 Verfahren zur herstellung eines flüssigkeitsausstosskopfes, substrat für einen flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren ATE375865T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001244235 2001-08-10

Publications (1)

Publication Number Publication Date
ATE375865T1 true ATE375865T1 (de) 2007-11-15

Family

ID=19074202

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02017857T ATE375865T1 (de) 2001-08-10 2002-08-08 Verfahren zur herstellung eines flüssigkeitsausstosskopfes, substrat für einen flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren

Country Status (7)

Country Link
US (3) US6858152B2 (de)
EP (1) EP1284188B1 (de)
KR (1) KR100554999B1 (de)
CN (1) CN1195629C (de)
AT (1) ATE375865T1 (de)
DE (1) DE60222969T2 (de)
ES (1) ES2290220T3 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60222969T2 (de) * 2001-08-10 2008-07-24 Canon K.K. Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, Substrat für einen Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren
JP2003311982A (ja) * 2002-04-23 2003-11-06 Canon Inc 液体吐出ヘッド
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP4455282B2 (ja) * 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US20050236358A1 (en) * 2004-04-26 2005-10-27 Shen Buswell Micromachining methods and systems
US7560223B2 (en) * 2004-09-10 2009-07-14 Lexmark International, Inc. Fluid ejection device structures and methods therefor
US7470375B2 (en) * 2004-10-22 2008-12-30 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head, substrate for liquid ejection head, and liquid ejection head
KR20070087223A (ko) 2004-12-30 2007-08-27 후지필름 디마틱스, 인크. 잉크 분사 프린팅
KR20080060003A (ko) * 2006-12-26 2008-07-01 삼성전자주식회사 잉크젯 프린트 헤드의 제조방법
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8241510B2 (en) * 2007-01-22 2012-08-14 Canon Kabushiki Kaisha Inkjet recording head, method for producing same, and semiconductor device
CN101909893B (zh) * 2008-01-09 2012-10-10 惠普开发有限公司 流体喷出盒、其制造方法和流体喷出方法

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US4007464A (en) * 1975-01-23 1977-02-08 International Business Machines Corporation Ink jet nozzle
EP0244643A3 (de) 1986-05-08 1988-09-28 Hewlett-Packard Company Verfahren zur Herstellung von thermischen Tintenstrahldruckköpfen
US4789425A (en) 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
JPH03158242A (ja) * 1989-11-16 1991-07-08 Sharp Corp インクジェットプリンターヘッド
JP2763204B2 (ja) * 1991-02-21 1998-06-11 株式会社東芝 半導体基板及びその製造方法
US5479197A (en) 1991-07-11 1995-12-26 Canon Kabushiki Kaisha Head for recording apparatus
JP3103404B2 (ja) 1991-10-22 2000-10-30 キヤノン株式会社 インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置
WO1993022140A1 (fr) * 1992-04-23 1993-11-11 Seiko Epson Corporation Tete a jet de liquide et procede de production associe
JP3333560B2 (ja) * 1992-10-23 2002-10-15 リコーエレメックス株式会社 シリコン基板のエッチング方法
JP3343875B2 (ja) * 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
JPH1044406A (ja) * 1996-08-01 1998-02-17 Ricoh Co Ltd インクジェットヘッド及びその製造方法
DE69730667T2 (de) * 1996-11-11 2005-09-22 Canon K.K. Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes
JPH1110894A (ja) * 1997-06-19 1999-01-19 Canon Inc インクジェットヘッド及びその製造方法
JP3416468B2 (ja) 1997-06-20 2003-06-16 キヤノン株式会社 Ｓｉ異方性エッチング方法、インクジェットヘッド、及びその製造方法
JPH1178029A (ja) * 1997-09-04 1999-03-23 Canon Inc インクジェット記録ヘッド
JP2000043271A (ja) 1997-11-14 2000-02-15 Canon Inc インクジェット記録ヘッド、その製造方法及び該インクジェット記録ヘッドを具備する記録装置
JPH11227210A (ja) 1997-12-05 1999-08-24 Canon Inc 液体吐出ヘッド、該ヘッドの製造方法、ヘッドカートリッジおよび液体吐出装置
US6616270B1 (en) * 1998-08-21 2003-09-09 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
JP2000153613A (ja) * 1998-09-17 2000-06-06 Canon Inc インクジェット機能を有する半導体装置およびその製造方法、該半導体装置を使用するインクジェットヘッド、インクジェット記録装置、および情報処理システム
US6450621B1 (en) * 1998-09-17 2002-09-17 Canon Kabushiki Kaisha Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system
DE60222969T2 (de) * 2001-08-10 2008-07-24 Canon K.K. Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, Substrat für einen Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren
JP4530615B2 (ja) * 2002-01-22 2010-08-25 セイコーエプソン株式会社 圧電体素子および液体吐出ヘッド

Also Published As

Publication number Publication date
US6858152B2 (en) 2005-02-22
US20060085981A1 (en) 2006-04-27
KR20030014175A (ko) 2003-02-15
ES2290220T3 (es) 2008-02-16
US7001010B2 (en) 2006-02-21
CN1401485A (zh) 2003-03-12
EP1284188A2 (de) 2003-02-19
US20030038108A1 (en) 2003-02-27
CN1195629C (zh) 2005-04-06
US7255418B2 (en) 2007-08-14
EP1284188B1 (de) 2007-10-17
DE60222969D1 (de) 2007-11-29
US20050088478A1 (en) 2005-04-28
EP1284188A3 (de) 2003-05-28
KR100554999B1 (ko) 2006-02-24
DE60222969T2 (de) 2008-07-24

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