ATE401767T1 - Oberflächenbehandelte kupferfolie und ihre herstellung und kupferkaschiertes laminat daraus - Google Patents

Oberflächenbehandelte kupferfolie und ihre herstellung und kupferkaschiertes laminat daraus

Info

Publication number
ATE401767T1
ATE401767T1 AT01947017T AT01947017T ATE401767T1 AT E401767 T1 ATE401767 T1 AT E401767T1 AT 01947017 T AT01947017 T AT 01947017T AT 01947017 T AT01947017 T AT 01947017T AT E401767 T1 ATE401767 T1 AT E401767T1
Authority
AT
Austria
Prior art keywords
copper foil
copper
production
layer
surface treated
Prior art date
Application number
AT01947017T
Other languages
English (en)
Inventor
Masakazu Mitsuhashi
Takashi Kataoka
Naotomi Takahashi
Original Assignee
Mitsui Mining & Smelting Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining & Smelting Co filed Critical Mitsui Mining & Smelting Co
Application granted granted Critical
Publication of ATE401767T1 publication Critical patent/ATE401767T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/38—Chromatising
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/56—Electroplating: Baths therefor from solutions of alloys
    • C25D3/565—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of zinc
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2222/00—Aspects relating to chemical surface treatment of metallic material by reaction of the surface with a reactive medium
    • C23C2222/20—Use of solutions containing silanes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0307—Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703—Plating
    • H05K2203/0723—Electroplating, e.g. finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105—Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389—Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12431—Foil or filament smaller than 6 mils

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Chemical Treatment Of Metals (AREA)
AT01947017T 2000-01-28 2001-01-24 Oberflächenbehandelte kupferfolie und ihre herstellung und kupferkaschiertes laminat daraus ATE401767T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000020923A JP3670186B2 (ja) 2000-01-28 2000-01-28 プリント配線板用表面処理銅箔の製造方法

Publications (1)

Publication Number Publication Date
ATE401767T1 true ATE401767T1 (de) 2008-08-15

Family

ID=18547402

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01947017T ATE401767T1 (de) 2000-01-28 2001-01-24 Oberflächenbehandelte kupferfolie und ihre herstellung und kupferkaschiertes laminat daraus

Country Status (11)

Country Link
US (1) US6533915B2 (de)
EP (1) EP1185151B1 (de)
JP (1) JP3670186B2 (de)
KR (1) KR100437569B1 (de)
CN (1) CN1288945C (de)
AT (1) ATE401767T1 (de)
DE (1) DE60134823D1 (de)
HK (1) HK1047856A1 (de)
MY (1) MY138907A (de)
TW (1) TW488190B (de)
WO (1) WO2001056342A1 (de)

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US6740221B2 (en) 2001-03-15 2004-05-25 Applied Materials Inc. Method of forming copper interconnects
WO2003063067A1 (en) * 2002-01-24 2003-07-31 Chatterbox Systems, Inc. Method and system for locating positions in printed texts and delivering multimedia information
EP1481796B1 (de) * 2002-03-05 2015-08-19 Hitachi Chemical Co., Ltd. Metallfolie mit harz- und metallverkleidetes laminat und dieses verwendende leiterplatte sowie herstellungsverfahren dafür
US20030188974A1 (en) * 2002-04-03 2003-10-09 Applied Materials, Inc. Homogeneous copper-tin alloy plating for enhancement of electro-migration resistance in interconnects
JP4144711B2 (ja) 2002-06-04 2008-09-03 三井金属鉱業株式会社 低誘電性基材用表面処理銅箔及びそれを用いた銅張積層板並びにプリント配線板
US20040118699A1 (en) * 2002-10-02 2004-06-24 Applied Materials, Inc. Homogeneous copper-palladium alloy plating for enhancement of electro-migration resistance in interconnects
US7156904B2 (en) * 2003-04-30 2007-01-02 Mec Company Ltd. Bonding layer forming solution, method of producing copper-to-resin bonding layer using the solution, and layered product obtained thereby
US7029761B2 (en) * 2003-04-30 2006-04-18 Mec Company Ltd. Bonding layer for bonding resin on copper surface
JP2004363364A (ja) * 2003-06-05 2004-12-24 Hitachi Chem Co Ltd 金属表面処理方法、多層回路基板の製造方法、半導体チップ搭載基板の製造方法、半導体パッケージの製造方法及び半導体パッケージ
US20060275616A1 (en) * 2005-06-03 2006-12-07 Clough Robert S Silane-based coupling agent
KR100953464B1 (ko) * 2007-01-15 2010-04-16 엘에스엠트론 주식회사 동박 적층 구조체 및 동박 표면 처리 방법
JP5495002B2 (ja) * 2008-02-22 2014-05-21 日立化成株式会社 プリント配線板、およびその製造方法
EP2373134A1 (de) * 2008-12-26 2011-10-05 JX Nippon Mining & Metals Corporation Gewalzte kupferfolie oder elektrolyt-kupferfolie für elektronische schaltungen sowie verfahren zum aufbau einer elektronischen schaltung mit der gewalzten kupferfolie oder elektrolyt-kupferfolie
US20110300401A1 (en) 2009-01-29 2011-12-08 Jx Nippon Mining & Metals Corporation Rolled Copper Foil or Electrolytic Copper Foil for Electronic Circuit, and Method of Forming Electronic Circuit using same
JP2010006071A (ja) * 2009-08-21 2010-01-14 Furukawa Electric Co Ltd:The 表面処理銅箔、キャリア付き極薄銅箔、フレキシブル銅張積層板及びポリイミド系フレキシブルプリント配線板
JP5232823B2 (ja) * 2010-03-30 2013-07-10 Ｊｘ日鉱日石金属株式会社 エッチング性に優れたプリント配線板用銅箔及びそれを用いた積層体
JP5685061B2 (ja) * 2010-11-19 2015-03-18 株式会社Ｓｈカッパープロダクツ プリント配線板用銅箔、及びプリント配線板
EP2644754B1 (de) * 2010-11-22 2016-05-11 Mitsui Mining & Smelting Co., Ltd. Oberflächenbehandelte kupferfolie
JP5808114B2 (ja) * 2011-02-16 2015-11-10 Jx日鉱日石金属株式会社 プリント配線板用銅箔、積層体及びプリント配線板
JP2012172198A (ja) * 2011-02-22 2012-09-10 Jx Nippon Mining & Metals Corp 電解銅箔及びその製造方法
KR101669087B1 (ko) 2011-07-29 2016-10-25 후루카와 덴키 고교 가부시키가이샤 전해 동합금박, 그 제조 방법, 그것의 제조에 이용하는 전해액, 그것을 이용한 2차 전지용 음극 집전체, 2차 전지 및 그 전극
DE102011121799B4 (de) * 2011-12-21 2013-08-29 Umicore Galvanotechnik Gmbh Elektrolyt und Verfahren zur elektrolytischen Abscheidung von Cu-Zn-Sn-Legierungsschichten und Verfahren zur Herstellung einer Dünnschichtsolarzelle
CN104903495B (zh) * 2013-01-24 2016-12-07 古河电气工业株式会社 电解铜箔与其制造方法
JP5941959B2 (ja) * 2014-10-15 2016-06-29 Ｊｘ金属株式会社 電解銅箔及びその製造方法
JP6682516B2 (ja) * 2015-04-28 2020-04-15 三井金属鉱業株式会社 粗化処理銅箔及びプリント配線板
KR102691091B1 (ko) * 2016-11-15 2024-08-01 에스케이넥실리스 주식회사 말림이 최소화된 전해동박, 그것을 포함하는 전극, 그것을 포함하는 이차전지, 및 그것의 제조방법
JP7391678B2 (ja) * 2020-01-24 2023-12-05 大陽日酸株式会社 接合材
CN116083972B (zh) * 2022-12-09 2023-08-18 浙江花园新能源股份有限公司 一种具有低粗糙度、高剥离强度的反转铜箔的生产工艺及其产品和应用
CN116334704B (zh) * 2023-03-23 2026-02-17 江苏铭丰电子材料科技有限公司 一种电解铜箔的无铬防氧化方法
CN119615144B (zh) * 2025-02-07 2025-05-06 浙江聚领新材料有限公司 铜材料表面处理工艺及处理系统

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JP3199208B2 (ja) * 1994-03-24 2001-08-13 三井金属鉱業株式会社 有機防錆処理銅箔およびその製造方法
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JP3155920B2 (ja) * 1996-01-16 2001-04-16 三井金属鉱業株式会社 プリント配線板用電解銅箔及びその製造方法
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JPH10341066A (ja) * 1997-06-10 1998-12-22 Furukawa Electric Co Ltd:The 印刷回路用銅箔、前記銅箔を用いた印刷回路用樹脂接着剤付銅箔、および前記銅箔を用いた印刷回路用銅張り積層板

Also Published As

Publication number Publication date
JP3670186B2 (ja) 2005-07-13
US6533915B2 (en) 2003-03-18
EP1185151A1 (de) 2002-03-06
KR20010108414A (ko) 2001-12-07
DE60134823D1 (de) 2008-08-28
JP2001214299A (ja) 2001-08-07
MY138907A (en) 2009-08-28
CN1288945C (zh) 2006-12-06
WO2001056342A1 (en) 2001-08-02
EP1185151A4 (de) 2006-11-22
HK1047856A1 (zh) 2003-03-07
EP1185151B1 (de) 2008-07-16
KR100437569B1 (ko) 2004-07-02
TW488190B (en) 2002-05-21
US20010014408A1 (en) 2001-08-16
CN1358409A (zh) 2002-07-10

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