ATE426913T1 - Manipulator zum drehen und verschieben eines probenhalters - Google Patents
Manipulator zum drehen und verschieben eines probenhaltersInfo
- Publication number
- ATE426913T1 ATE426913T1 AT08150440T AT08150440T ATE426913T1 AT E426913 T1 ATE426913 T1 AT E426913T1 AT 08150440 T AT08150440 T AT 08150440T AT 08150440 T AT08150440 T AT 08150440T AT E426913 T1 ATE426913 T1 AT E426913T1
- Authority
- AT
- Austria
- Prior art keywords
- sample holder
- manipulator
- moving
- rotating
- actuators
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20341—Power elements as controlling elements
- Y10T74/20348—Planar surface with orthogonal movement and rotation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Manipulator (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07100942 | 2007-01-22 | ||
| EP07106400 | 2007-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE426913T1 true ATE426913T1 (de) | 2009-04-15 |
Family
ID=39640319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT08150440T ATE426913T1 (de) | 2007-01-22 | 2008-01-21 | Manipulator zum drehen und verschieben eines probenhalters |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7884326B2 (de) |
| JP (1) | JP2008173766A (de) |
| AT (1) | ATE426913T1 (de) |
| DE (1) | DE602008000003D1 (de) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1953789A1 (de) * | 2007-02-05 | 2008-08-06 | FEI Company | Verfahren zum Abdünnen einer Probe und Probenträger zu Ausführung dieses Verfahrens |
| EP2051280A1 (de) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorisierter Manipulator zur Positionierung einer TEM-Probe |
| EP2131385A1 (de) * | 2008-06-05 | 2009-12-09 | FEI Company | Hybridphasenplatte |
| WO2010017065A2 (en) | 2008-08-04 | 2010-02-11 | The Regents Of The University Of California | Capacitance displacement and rotation sensor |
| EP2182544A1 (de) * | 2008-10-31 | 2010-05-05 | FEI Company | Teilchen Optisches System mit doppelter Proben-Einführmöglichkeit |
| US8063383B2 (en) * | 2008-11-04 | 2011-11-22 | Sergiy Pryadkin | Inertial positioner and an optical instrument for precise positioning |
| JP5250470B2 (ja) * | 2009-04-22 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | 試料ホールダ,該試料ホールダの使用法、及び荷電粒子装置 |
| JP5544946B2 (ja) * | 2010-03-12 | 2014-07-09 | 株式会社Ihi | ロボットハンド |
| CN101866804B (zh) * | 2010-04-14 | 2012-05-16 | 北京富纳特创新科技有限公司 | 透射电镜微栅 |
| DE102010041678B4 (de) * | 2010-09-29 | 2023-12-28 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlgerät mit einem Probenträger |
| KR101386602B1 (ko) * | 2011-02-10 | 2014-04-17 | 하이지트론, 인코포레이티드 | 나노기계 테스트 시스템 |
| JP5747129B2 (ja) * | 2012-06-26 | 2015-07-08 | 株式会社日立ハイテクノロジーズ | ステージ装置および試料観察装置 |
| JP5908357B2 (ja) * | 2012-07-17 | 2016-04-26 | 株式会社メルビル | ゴニオステージ、及び当該ゴニオステージを有する電子顕微鏡 |
| US9240304B2 (en) | 2012-07-17 | 2016-01-19 | Mel-Build Corporation | Specimen holder tip part, specimen holder having said specimen holder tip part, gonio stage, and electron microscope having said gonio stage |
| JP6137801B2 (ja) * | 2012-09-27 | 2017-05-31 | 株式会社メルビル | 試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダー |
| EP2765591B1 (de) * | 2013-02-08 | 2016-07-13 | FEI Company | Probenvorbereitungshalter |
| FR3002323A1 (fr) | 2013-02-20 | 2014-08-22 | Commissariat Energie Atomique | Procede d'imagerie en trois dimensions a resolution amelioree |
| DE102013103985B3 (de) * | 2013-04-19 | 2014-10-23 | Acquandas GmbH | Probenträger zum Halten von Proben für die Bearbeitung und/oder Untersuchung in einem Elektronenmikroskop; Verfahren zur Heilung derartiger Probenträger und Verfahren zur Lastbeaufschlagung von Proben |
| EP2811288B1 (de) | 2013-06-06 | 2016-08-10 | Fei Company | Verfahren zur Elektronentomographie |
| KR101505320B1 (ko) * | 2013-09-27 | 2015-03-23 | 현대제철 주식회사 | 시편 절단 장치 |
| DE102014002236A1 (de) * | 2014-02-21 | 2015-08-27 | Lpo Plan Gmbh | Objektträger für eine Vorrichtung zum Erfassen von dreidimensionalen Objekten, Vorrichtung mit eineam solchen Objektträger und Verfahren zum Erfassen von zumindest einem dreidimensionalen Objekt |
| JP6385899B2 (ja) | 2014-07-21 | 2018-09-05 | エフ・イ−・アイ・カンパニー | Tem試料取付け構造 |
| WO2016052776A1 (ko) * | 2014-09-30 | 2016-04-07 | 한국기초과학지원연구원 | 간단한 구조의 3축구동 전자현미경 홀더 |
| EP3038131A1 (de) * | 2014-12-22 | 2016-06-29 | FEI Company | Verbesserter Probenhalter für Ladungsträgerteilchenmikroskop |
| US9837244B2 (en) * | 2014-12-26 | 2017-12-05 | Industrial Technology Research Insitute | Sample holding device for studying light-driven reactions and sample analysis method using the same |
| US9627176B2 (en) | 2015-07-23 | 2017-04-18 | Fei Company | Fiducial formation for TEM/STEM tomography tilt-series acquisition and alignment |
| JP7052407B2 (ja) * | 2018-02-23 | 2022-04-12 | セイコーエプソン株式会社 | 制御装置、エンドエフェクター、ロボットおよび制御方法 |
| WO2020051708A1 (en) * | 2018-09-14 | 2020-03-19 | Proto Patents Ltd. | Ball-mapping system and method of operating the same |
| CZ309656B6 (cs) * | 2018-10-10 | 2023-06-21 | Tescan Brno, S.R.O. | Zařízení s alespoň jedním polohovatelným držákem vzorků a způsob změny úhlu náklonu držáku a způsob přípravy lamely |
| ES3016664T3 (en) | 2018-12-27 | 2025-05-09 | Nikki Universal Co Ltd | Catalyst for ammonia decomposition and exhaust gas treatment method |
| CN110253548B (zh) * | 2019-05-22 | 2021-05-04 | 浙江工业大学 | 一种三自由度可微调的自动抓取装置 |
| EP3843120A1 (de) * | 2019-12-23 | 2021-06-30 | University of Vienna | Probenhalter für elektronenbeugungsexperimente mit goniometer und kontaktkühlung |
| JP2021171874A (ja) * | 2020-04-24 | 2021-11-01 | セイコーエプソン株式会社 | ワーク処理方法 |
| JP7303944B2 (ja) * | 2020-05-27 | 2023-07-05 | 株式会社日立ハイテク | 核酸分析装置 |
| CZ309523B6 (cs) * | 2020-08-27 | 2023-03-22 | Tescan Brno, S.R.O. | Naklápěcí prvek manipulačního stolku |
| DE102020122517B4 (de) * | 2020-08-28 | 2022-06-09 | Helmholtz-Zentrum Berlin für Materialien und Energie Gesellschaft mit beschränkter Haftung | Vorrichtung zur Rotation einer Probe um zwei orthogonale Achsen |
| DE102020211249A1 (de) | 2020-09-08 | 2022-03-10 | Carl Zeiss Microscopy Gmbh | Vorrichtungen und Verfahren zum Stabilisieren und/oder Fixieren von Probenträgern für mikroskopische Proben |
| EP4068333A1 (de) * | 2021-03-31 | 2022-10-05 | FEI Company | Probenträger zur verwendung in einem mikroskop für geladene teilchen und verfahren zur verwendung eines solchen probenträgers in einem solchen mikroskop |
| EP4318543A1 (de) * | 2022-08-02 | 2024-02-07 | Leica Mikrosysteme GmbH | Probenhalter zum halten eines probenträgers, handhabungswerkzeug und entsprechende verfahren |
| EP4471820A1 (de) | 2023-06-01 | 2024-12-04 | FEI Company | Verfahren zur dreidimensionalen tomographie von länglichen proben |
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|---|---|---|---|---|
| AT239876B (de) * | 1963-07-03 | 1965-04-26 | Fritz Dr Grasenick | Vorrichtung zum Festhalten von Objektträgern |
| JPS4817423U (de) * | 1971-07-10 | 1973-02-27 | ||
| US4019109A (en) * | 1974-05-13 | 1977-04-19 | Hughes Aircraft Company | Alignment system and method with micromovement stage |
| US4507597A (en) * | 1983-06-10 | 1985-03-26 | The Perkin-Elmer Corporation | Electro-magnetic alignment assemblies |
| JPS62140788A (ja) * | 1985-12-16 | 1987-06-24 | 株式会社東芝 | 工業用ロボツトのハンド |
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| JPS62236692A (ja) | 1986-04-04 | 1987-10-16 | 株式会社東芝 | 工業用ロボツトのハンド |
| US4797261A (en) * | 1987-11-03 | 1989-01-10 | Gatan Inc. | Multiple specimen cryotransfer holder for electron microscopes |
| JPH01274987A (ja) * | 1988-04-28 | 1989-11-02 | Hitachi Ltd | グリッパ装置 |
| JPH0223987U (de) * | 1988-08-03 | 1990-02-16 | ||
| NL8902568A (nl) * | 1989-10-17 | 1991-05-16 | Philips Nv | Vacuuem systeem voorzien van een evacueerbaar huis, een objecthouder en een losneembaar daarmee gekoppelde objectdrager. |
| JPH03281188A (ja) | 1990-03-28 | 1991-12-11 | Agency Of Ind Science & Technol | 指に回転体を有するロボットの把持装置 |
| JP2934308B2 (ja) | 1990-11-30 | 1999-08-16 | 日本電子株式会社 | 透過電子顕微鏡用試料ホルダー |
| JPH05200638A (ja) | 1992-01-22 | 1993-08-10 | Mazda Motor Corp | 小物部品の組付方法および装置 |
| JPH05318373A (ja) * | 1992-05-21 | 1993-12-03 | Nippon Telegr & Teleph Corp <Ntt> | マイクロハンド機構 |
| JPH06143163A (ja) * | 1992-11-04 | 1994-05-24 | Toshiba Corp | 微小変位機構 |
| JPH06155355A (ja) * | 1992-11-12 | 1994-06-03 | Toshiba Corp | 把持装置 |
| JP3281188B2 (ja) | 1994-08-09 | 2002-05-13 | ヤマハ発動機株式会社 | 無人車 |
| JPH08106873A (ja) | 1994-10-04 | 1996-04-23 | Hitachi Ltd | 電子顕微鏡装置 |
| WO1996020495A2 (en) | 1994-12-28 | 1996-07-04 | Technische Universiteit Delft | Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope |
| IL113291A0 (en) * | 1995-04-06 | 1995-07-31 | Nanomotion Ltd | A multi-axis rotation device |
| JPH09236755A (ja) | 1996-02-29 | 1997-09-09 | Jeol Ltd | 顕微鏡の試料ステージの位置補正方法および試料ステージ |
| JPH09267278A (ja) * | 1996-04-01 | 1997-10-14 | Denso Corp | マイクロマニピュレータおよび圧電アクチュエータ製造方法 |
| EP1102304B1 (de) * | 1996-12-23 | 2010-02-24 | Fei Company | Partikel-optisches Gerät mit Niedertemperatur-Probenhalter |
| US6252333B1 (en) * | 1998-02-20 | 2001-06-26 | Seiko Instruments Inc. | Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage |
| US6457864B1 (en) | 1998-05-14 | 2002-10-01 | Massachusetts Institute Of Technology | Omni-directional high precision friction drive positioning stage |
| US6388262B1 (en) * | 1998-08-12 | 2002-05-14 | Gatan, Inc. | Double tilt and rotate specimen holder for a transmission electron microscope |
| US6246060B1 (en) * | 1998-11-20 | 2001-06-12 | Agere Systems Guardian Corp. | Apparatus for holding and aligning a scanning electron microscope sample |
| DE60032568T2 (de) * | 1999-12-01 | 2007-10-04 | Asml Netherlands B.V. | Positionierungsapparat und damit versehener lithographischer Apparat |
| GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
| JP4538883B2 (ja) * | 2000-02-25 | 2010-09-08 | 株式会社ニコン | 平面基板観察装置 |
| US6841788B1 (en) * | 2000-08-03 | 2005-01-11 | Ascend Instruments, Inc. | Transmission electron microscope sample preparation |
| GB2369489B (en) * | 2000-11-23 | 2004-03-10 | Khaled Karrai | Inertial rotation device |
| JP4726167B2 (ja) * | 2001-03-12 | 2011-07-20 | キヤノン株式会社 | 振動波駆動装置 |
| JP2002319364A (ja) | 2001-04-20 | 2002-10-31 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP2002334818A (ja) | 2001-05-08 | 2002-11-22 | Tokyo Electron Ltd | 半導体製造装置、および半導体装置の製造方法 |
| JP3719965B2 (ja) | 2001-08-29 | 2005-11-24 | 住友重機械工業株式会社 | 位置合わせ装置及び位置合わせ方法 |
| JP4061044B2 (ja) | 2001-10-05 | 2008-03-12 | 住友重機械工業株式会社 | 基板移動装置 |
| US6849989B2 (en) * | 2002-10-31 | 2005-02-01 | Andreas Schmid | Translation and rotation positioning motor |
| NL1022426C2 (nl) * | 2003-01-17 | 2004-07-26 | Fei Co | Werkwijze voor het vervaardigen en transmissief bestralen van een preparaat alsmede deeltjes optisch systeem. |
| JP2004223673A (ja) | 2003-01-24 | 2004-08-12 | Tsubakimoto Chain Co | ワーク把持装置 |
| JP2004245660A (ja) * | 2003-02-13 | 2004-09-02 | Seiko Instruments Inc | 小片試料の作製とその壁面の観察方法及びそのシステム |
| WO2004082830A2 (en) * | 2003-03-13 | 2004-09-30 | Ascend Instruments, Llc | Sample manipulation system |
| DE602004031073D1 (de) * | 2003-06-13 | 2011-03-03 | Fei Co | Verfahren und Vorrichtung zum Manipulieren von mikroskopischen Proben |
| NL1023717C2 (nl) * | 2003-06-20 | 2004-12-21 | Fei Co | Preparaatdrager voor het dragen van een met een elektronenbundel te doorstralen preparaat. |
| JP4381734B2 (ja) | 2003-07-02 | 2009-12-09 | 住友重機械工業株式会社 | ステージ装置及び電子ビーム近接露光装置 |
| GB0318134D0 (en) * | 2003-08-01 | 2003-09-03 | Gatan Uk | Specimen tip and tip holder assembly |
| US20060219919A1 (en) * | 2003-11-11 | 2006-10-05 | Moore Thomas M | TEM sample holder and method of forming same |
| US7381968B2 (en) * | 2004-04-16 | 2008-06-03 | Hitachi High-Technologies Corporation | Charged particle beam apparatus and specimen holder |
| US7511282B2 (en) * | 2006-05-25 | 2009-03-31 | Fei Company | Sample preparation |
| EP1868225A1 (de) | 2006-05-29 | 2007-12-19 | FEI Company | Probenträger und Probenhalter |
| EP1863066A1 (de) | 2006-05-29 | 2007-12-05 | FEI Company | Probenträger und Probenhalter |
| JP5266236B2 (ja) | 2006-10-20 | 2013-08-21 | エフ・イ−・アイ・カンパニー | サンプル抽出および取り扱いのための方法および装置 |
| JP5055594B2 (ja) * | 2007-03-13 | 2012-10-24 | エスアイアイ・ナノテクノロジー株式会社 | 荷電粒子ビーム装置における試料移設方法及び荷電粒子ビーム装置 |
| EP2051280A1 (de) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorisierter Manipulator zur Positionierung einer TEM-Probe |
-
2007
- 2007-09-26 US US11/861,721 patent/US7884326B2/en active Active
-
2008
- 2008-01-21 AT AT08150440T patent/ATE426913T1/de not_active IP Right Cessation
- 2008-01-21 JP JP2008010523A patent/JP2008173766A/ja active Pending
- 2008-01-21 DE DE602008000003T patent/DE602008000003D1/de active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20080173813A1 (en) | 2008-07-24 |
| US7884326B2 (en) | 2011-02-08 |
| JP2008173766A (ja) | 2008-07-31 |
| DE602008000003D1 (de) | 2009-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |