ATE433121T1 - Anordnung und verfahren zur prüfung von integrierten schaltungseinrichtungen - Google Patents
Anordnung und verfahren zur prüfung von integrierten schaltungseinrichtungenInfo
- Publication number
- ATE433121T1 ATE433121T1 AT97902776T AT97902776T ATE433121T1 AT E433121 T1 ATE433121 T1 AT E433121T1 AT 97902776 T AT97902776 T AT 97902776T AT 97902776 T AT97902776 T AT 97902776T AT E433121 T1 ATE433121 T1 AT E433121T1
- Authority
- AT
- Austria
- Prior art keywords
- testing
- integrated circuit
- circuit device
- circuit devices
- arrangement
- Prior art date
Links
- 238000012360 testing method Methods 0.000 title abstract 12
- 238000000034 method Methods 0.000 title abstract 2
- 230000003068 static effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
- G11C29/24—Accessing extra cells, e.g. dummy cells or redundant cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Test And Diagnosis Of Digital Computers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59597996A | 1996-02-06 | 1996-02-06 | |
| PCT/SE1997/000068 WO1997029384A1 (en) | 1996-02-06 | 1997-01-17 | Assembly and method for testing integrated circuit devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE433121T1 true ATE433121T1 (de) | 2009-06-15 |
Family
ID=24385505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT97902776T ATE433121T1 (de) | 1996-02-06 | 1997-01-17 | Anordnung und verfahren zur prüfung von integrierten schaltungseinrichtungen |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5996102A (de) |
| EP (1) | EP0882239B1 (de) |
| JP (1) | JP2000504830A (de) |
| KR (1) | KR19990082339A (de) |
| CN (1) | CN1084878C (de) |
| AT (1) | ATE433121T1 (de) |
| AU (1) | AU1678697A (de) |
| CA (1) | CA2245549C (de) |
| DE (1) | DE69739438D1 (de) |
| WO (1) | WO1997029384A1 (de) |
Families Citing this family (75)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6392448B1 (en) | 2000-02-03 | 2002-05-21 | Teradyne, Inc. | Common-mode detection circuit with cross-coupled compensation |
| US6300804B1 (en) | 2000-02-09 | 2001-10-09 | Teradyne, Inc. | Differential comparator with dispersion reduction circuitry |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6647513B1 (en) * | 2000-05-25 | 2003-11-11 | International Business Machines Corporation | Coverage-based test generation for microprocessor verification |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| DE20114544U1 (de) | 2000-12-04 | 2002-02-21 | Cascade Microtech, Inc., Beaverton, Oreg. | Wafersonde |
| AU2002327490A1 (en) | 2001-08-21 | 2003-06-30 | Cascade Microtech, Inc. | Membrane probing system |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| US7089463B1 (en) * | 2002-02-20 | 2006-08-08 | Cisco Technology Inc. | Test buffer design and interface mechanism for differential receiver AC/DC boundary scan test |
| JP2005527823A (ja) | 2002-05-23 | 2005-09-15 | カスケード マイクロテック インコーポレイテッド | デバイスのテスト用プローブ |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6990618B1 (en) * | 2002-12-03 | 2006-01-24 | Cypress Semiconductor Corporation | Boundary scan register for differential chip core |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US20050024220A1 (en) * | 2003-06-12 | 2005-02-03 | Shidla Dale John | Built-in circuitry and method to test connectivity to integrated circuit |
| US6933853B2 (en) * | 2003-06-12 | 2005-08-23 | Hewlett-Packard Development Company, L.P. | Apparatus and method for detecting and communicating interconnect failures |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| US7427868B2 (en) | 2003-12-24 | 2008-09-23 | Cascade Microtech, Inc. | Active wafer probe |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| US7307433B2 (en) * | 2004-04-21 | 2007-12-11 | Formfactor, Inc. | Intelligent probe card architecture |
| EP1754072A2 (de) | 2004-06-07 | 2007-02-21 | CASCADE MICROTECH, INC. (an Oregon corporation) | Thermische optische einspannvorrichtung |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| EP1766426B1 (de) | 2004-07-07 | 2013-09-11 | Cascade Microtech, Inc. | Tastkopf mit einem an der membran aufgehängten fühler |
| DE202005021435U1 (de) | 2004-09-13 | 2008-02-28 | Cascade Microtech, Inc., Beaverton | Doppelseitige Prüfaufbauten |
| US7818640B1 (en) | 2004-10-22 | 2010-10-19 | Cypress Semiconductor Corporation | Test system having a master/slave JTAG controller |
| US7305601B2 (en) * | 2004-11-17 | 2007-12-04 | Lsi Corporation | Method and test apparatus for testing integrated circuits using both valid and invalid test data |
| DE102004059506B3 (de) * | 2004-12-10 | 2006-08-17 | X-Fab Semiconductor Foundries Ag | Anordnung zum Test von eingebetteten Schaltungen mit Hilfe einer separaten Versorgungsspannung |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US7609080B2 (en) * | 2005-03-22 | 2009-10-27 | Formfactor, Inc. | Voltage fault detection and protection |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| EP1932003A2 (de) | 2005-06-13 | 2008-06-18 | Cascade Microtech, Inc. | Breitbandige aktiv-passiv-differenzsignalsonde |
| US7555670B2 (en) * | 2005-10-26 | 2009-06-30 | Intel Corporation | Clocking architecture using a bidirectional clock port |
| US8045353B2 (en) * | 2005-12-30 | 2011-10-25 | Stmicroelectronics Pvt. Ltd. | Integrated circuit capable of operating at different supply voltages |
| DE112007001399T5 (de) * | 2006-06-09 | 2009-05-07 | Cascade Microtech, Inc., Beaverton | Messfühler für differentielle Signale mit integrierter Symmetrieschaltung |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7382149B2 (en) * | 2006-07-24 | 2008-06-03 | International Business Machines Corporation | System for acquiring device parameters |
| JP2008250725A (ja) * | 2007-03-30 | 2008-10-16 | Nec Electronics Corp | インターフェース回路 |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| JP4874210B2 (ja) | 2007-10-16 | 2012-02-15 | 株式会社アドバンテスト | 試験装置 |
| US8112043B2 (en) * | 2008-04-11 | 2012-02-07 | Infineon Technologies Ag | Radio frequency communication devices and methods |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US8230281B2 (en) * | 2009-04-13 | 2012-07-24 | Altera Corporation | Techniques for boundary scan testing using transmitters and receivers |
| US9759772B2 (en) | 2011-10-28 | 2017-09-12 | Teradyne, Inc. | Programmable test instrument |
| US10776233B2 (en) | 2011-10-28 | 2020-09-15 | Teradyne, Inc. | Programmable test instrument |
| JP2013250250A (ja) * | 2012-06-04 | 2013-12-12 | Advantest Corp | テスターハードウェアおよびそれを用いた試験システム |
| US9606183B2 (en) * | 2012-10-20 | 2017-03-28 | Advantest Corporation | Pseudo tester-per-site functionality on natively tester-per-pin automatic test equipment for semiconductor test |
| CN103852709A (zh) * | 2012-11-28 | 2014-06-11 | 英业达科技有限公司 | 电路板上电子元件与电路板功能检测的系统及其方法 |
| US8839063B2 (en) * | 2013-01-24 | 2014-09-16 | Texas Instruments Incorporated | Circuits and methods for dynamic allocation of scan test resources |
| JP2014235127A (ja) * | 2013-06-04 | 2014-12-15 | 株式会社アドバンテスト | 試験システム、制御プログラム、コンフィギュレーションデータの書込方法 |
| US10073806B2 (en) * | 2015-05-13 | 2018-09-11 | Qualcomm Incorporated | Apparatus and methods for providing a reconfigurable bidirectional front-end interface |
| CN109061280A (zh) * | 2018-07-24 | 2018-12-21 | 北方电子研究院安徽有限公司 | 一种用于测试电流、电压的自动测试系统 |
| FR3093186B1 (fr) * | 2019-02-22 | 2021-11-26 | St Microelectronics Rousset | Procédé et dispositif de détection sur carte de défauts éventuels dans un système fixé sur ladite carte |
| KR102672086B1 (ko) * | 2019-07-25 | 2024-06-07 | 삼성디스플레이 주식회사 | 연결 기판을 포함하는 표시 장치 및 패드 접속 검사 방법 |
| US11456729B1 (en) | 2021-03-26 | 2022-09-27 | Analog Devices, Inc. | Deskew cell for delay and pulse width adjustment |
| US12241916B2 (en) | 2022-07-27 | 2025-03-04 | Snap-On Incorporated | Test device |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3761695A (en) * | 1972-10-16 | 1973-09-25 | Ibm | Method of level sensitive testing a functional logic system |
| US3833853A (en) * | 1973-04-13 | 1974-09-03 | Honeywell Inf Systems | Method and apparatus for testing printed wiring boards having integrated circuits |
| US4236246A (en) * | 1978-11-03 | 1980-11-25 | Genrad, Inc. | Method of and apparatus for testing electronic circuit assemblies and the like |
| US4348759A (en) * | 1979-12-17 | 1982-09-07 | International Business Machines Corporation | Automatic testing of complex semiconductor components with test equipment having less channels than those required by the component under test |
| US4639664A (en) * | 1984-05-31 | 1987-01-27 | Texas Instruments Incorporated | Apparatus for testing a plurality of integrated circuits in parallel |
| US4683569A (en) * | 1985-10-21 | 1987-07-28 | The Singer Company | Diagnostic circuit utilizing bidirectional test data comparisons |
| US4660197A (en) * | 1985-11-01 | 1987-04-21 | Teradyne, Inc. | Circuitry for synchronizing a multiple channel circuit tester |
| US4970454A (en) * | 1986-12-09 | 1990-11-13 | Texas Instruments Incorporated | Packaged semiconductor device with test circuits for determining fabrication parameters |
| US4862067A (en) * | 1987-06-24 | 1989-08-29 | Schlumberger Technologies, Inc. | Method and apparatus for in-circuit testing of electronic devices |
| EP0296884A3 (de) * | 1987-06-24 | 1991-01-16 | Schlumberger Technologies, Inc. | Methode zur In-Circuit-Prüfung von elektronischen Geräten |
| US4912709A (en) * | 1987-10-23 | 1990-03-27 | Control Data Corporation | Flexible VLSI on-chip maintenance and test system with unit I/O cell design |
| US5084874A (en) * | 1988-09-07 | 1992-01-28 | Texas Instruments Incorporated | Enhanced test circuit |
| US5168219A (en) * | 1988-10-31 | 1992-12-01 | Fujitsu Limited | Integrated circuit device having signal discrimination circuit and method of testing the same |
| US4875003A (en) * | 1989-02-21 | 1989-10-17 | Silicon Connections Corporation | Non-contact I/O signal pad scan testing of VLSI circuits |
| US4989209A (en) * | 1989-03-24 | 1991-01-29 | Motorola, Inc. | Method and apparatus for testing high pin count integrated circuits |
| US5070297A (en) * | 1990-06-04 | 1991-12-03 | Texas Instruments Incorporated | Full wafer integrated circuit testing device |
| US5260947A (en) * | 1990-12-04 | 1993-11-09 | Hewlett-Packard Company | Boundary-scan test method and apparatus for diagnosing faults in a device under test |
| US5155733A (en) * | 1990-12-26 | 1992-10-13 | Ag Communication Systems Corporation | Arrangement for testing digital circuit devices having bidirectional outputs |
| JP2535670B2 (ja) * | 1991-01-28 | 1996-09-18 | 株式会社東芝 | 双方向入出力端子用バウンダリスキャンセル |
| US5260948A (en) * | 1991-03-13 | 1993-11-09 | Ncr Corporation | Bidirectional boundary-scan circuit |
| US5323107A (en) * | 1991-04-15 | 1994-06-21 | Hitachi America, Ltd. | Active probe card |
| US5202625A (en) * | 1991-07-03 | 1993-04-13 | Hughes Aircraft Company | Method of testing interconnections in digital systems by the use of bidirectional drivers |
| US5196788A (en) * | 1991-07-03 | 1993-03-23 | The United States Of America As Represented By The Secretary Of The Navy | Self-contained functional test apparatus for modular circuit cards |
| TW253097B (de) * | 1992-03-02 | 1995-08-01 | At & T Corp | |
| US5457400A (en) * | 1992-04-10 | 1995-10-10 | Micron Technology, Inc. | Semiconductor array having built-in test circuit for wafer level testing |
| US5268639A (en) * | 1992-06-05 | 1993-12-07 | Rambus, Inc. | Testing timing parameters of high speed integrated circuit devices |
| US5450415A (en) * | 1992-11-25 | 1995-09-12 | Matsushita Electric Industrial Co., Ltd. | Boundary scan cell circuit and boundary scan test circuit |
| US5450418A (en) * | 1992-12-23 | 1995-09-12 | Advanced Micro Devices, Inc. | Pseudo master slave capture mechanism for scan elements |
| US5428624A (en) * | 1993-10-12 | 1995-06-27 | Storage Technology Corporation | Fault injection using boundary scan |
| US5513186A (en) * | 1993-12-07 | 1996-04-30 | Sun Microsystems, Inc. | Method and apparatus for interconnect testing without speed degradation |
-
1997
- 1997-01-17 KR KR1019980706069A patent/KR19990082339A/ko not_active Ceased
- 1997-01-17 EP EP97902776A patent/EP0882239B1/de not_active Expired - Lifetime
- 1997-01-17 WO PCT/SE1997/000068 patent/WO1997029384A1/en not_active Ceased
- 1997-01-17 CA CA002245549A patent/CA2245549C/en not_active Expired - Lifetime
- 1997-01-17 DE DE69739438T patent/DE69739438D1/de not_active Expired - Fee Related
- 1997-01-17 AT AT97902776T patent/ATE433121T1/de not_active IP Right Cessation
- 1997-01-17 JP JP9528440A patent/JP2000504830A/ja active Pending
- 1997-01-17 CN CN97193601A patent/CN1084878C/zh not_active Expired - Fee Related
- 1997-01-17 AU AU16786/97A patent/AU1678697A/en not_active Abandoned
- 1997-08-26 US US08/920,077 patent/US5996102A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US5996102A (en) | 1999-11-30 |
| CN1217062A (zh) | 1999-05-19 |
| CN1084878C (zh) | 2002-05-15 |
| EP0882239B1 (de) | 2009-06-03 |
| WO1997029384A1 (en) | 1997-08-14 |
| KR19990082339A (ko) | 1999-11-25 |
| DE69739438D1 (de) | 2009-07-16 |
| CA2245549A1 (en) | 1997-08-14 |
| CA2245549C (en) | 2003-04-08 |
| EP0882239A1 (de) | 1998-12-09 |
| AU1678697A (en) | 1997-08-28 |
| JP2000504830A (ja) | 2000-04-18 |
| HK1019930A1 (en) | 2000-03-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |