ATE447768T1 - Bipolartransistoren mit grabenstruktur - Google Patents

Bipolartransistoren mit grabenstruktur

Info

Publication number
ATE447768T1
ATE447768T1 AT02758689T AT02758689T ATE447768T1 AT E447768 T1 ATE447768 T1 AT E447768T1 AT 02758689 T AT02758689 T AT 02758689T AT 02758689 T AT02758689 T AT 02758689T AT E447768 T1 ATE447768 T1 AT E447768T1
Authority
AT
Austria
Prior art keywords
gate
drift region
bipolar transistors
trench structure
region
Prior art date
Application number
AT02758689T
Other languages
English (en)
Inventor
Raymond Hueting
Jan Slotboom
Petrus Magnee
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE447768T1 publication Critical patent/ATE447768T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/80Heterojunction BJTs
    • H10D10/821Vertical heterojunction BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/137Collector regions of BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/115Resistive field plates, e.g. semi-insulating field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/117Recessed field plates, e.g. trench field plates or buried field plates

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Element Separation (AREA)
  • Thyristors (AREA)
AT02758689T 2001-08-07 2002-08-05 Bipolartransistoren mit grabenstruktur ATE447768T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0119215.2A GB0119215D0 (en) 2001-08-07 2001-08-07 Trench bipolar transistor
PCT/IB2002/003289 WO2003015178A1 (en) 2001-08-07 2002-08-05 Trench bipolar transistor

Publications (1)

Publication Number Publication Date
ATE447768T1 true ATE447768T1 (de) 2009-11-15

Family

ID=9919936

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02758689T ATE447768T1 (de) 2001-08-07 2002-08-05 Bipolartransistoren mit grabenstruktur

Country Status (7)

Country Link
US (1) US6777780B2 (de)
EP (1) EP1417716B1 (de)
JP (1) JP4053497B2 (de)
AT (1) ATE447768T1 (de)
DE (1) DE60234259D1 (de)
GB (1) GB0119215D0 (de)
WO (1) WO2003015178A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3653087B2 (ja) * 2003-07-04 2005-05-25 三菱重工業株式会社 Dc/dcコンバータ
EP1771885B1 (de) * 2004-07-20 2011-12-28 Nxp B.V. Halbleitervorrichtung und verfahren zu deren hestellung
US20060049464A1 (en) 2004-09-03 2006-03-09 Rao G R Mohan Semiconductor devices with graded dopant regions
US7821033B2 (en) * 2007-02-15 2010-10-26 Infineon Technologies Austria Ag Semiconductor component comprising a drift zone and a drift control zone
US8739368B2 (en) * 2007-11-16 2014-06-03 H. Stetser Murphy, Jr. Eyeglass holder
US9944217B2 (en) 2013-02-11 2018-04-17 Ferno-Washington, Inc. Equipment mounting system
US20140347135A1 (en) 2013-05-23 2014-11-27 Nxp B.V. Bipolar transistors with control of electric field

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2543739B1 (fr) 1983-03-30 1986-04-18 Radiotechnique Compelec Procede de realisation d'un transistor bipolaire haute tension
US5539238A (en) 1992-09-02 1996-07-23 Texas Instruments Incorporated Area efficient high voltage Mosfets with vertical resurf drift regions
US5326711A (en) 1993-01-04 1994-07-05 Texas Instruments Incorporated High performance high voltage vertical transistor and method of fabrication
JPH0878668A (ja) 1994-08-31 1996-03-22 Toshiba Corp 電力用半導体装置
US5828101A (en) * 1995-03-30 1998-10-27 Kabushiki Kaisha Toshiba Three-terminal semiconductor device and related semiconductor devices
US6097063A (en) * 1996-01-22 2000-08-01 Fuji Electric Co., Ltd. Semiconductor device having a plurality of parallel drift regions
DE19848828C2 (de) 1998-10-22 2001-09-13 Infineon Technologies Ag Halbleiterbauelement mit kleiner Durchlaßspannung und hoher Sperrfähigkeit
EP1965431A2 (de) * 1999-06-22 2008-09-03 Matsushita Electric Industrial Co., Ltd. Heteroübergangsbipolartransistor und Verfahren zu dessen Herstellung
JP3971062B2 (ja) 1999-07-29 2007-09-05 株式会社東芝 高耐圧半導体装置
GB0003186D0 (en) 2000-02-12 2000-04-05 Koninkl Philips Electronics Nv A semiconductor device
GB0003184D0 (en) 2000-02-12 2000-04-05 Koninkl Philips Electronics Nv A semiconductor device and a method of fabricating material for a semiconductor device

Also Published As

Publication number Publication date
WO2003015178A1 (en) 2003-02-20
JP2004538647A (ja) 2004-12-24
EP1417716A1 (de) 2004-05-12
DE60234259D1 (de) 2009-12-17
JP4053497B2 (ja) 2008-02-27
GB0119215D0 (en) 2001-09-26
US6777780B2 (en) 2004-08-17
EP1417716B1 (de) 2009-11-04
US20030030488A1 (en) 2003-02-13

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Legal Events

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