ATE480604T1 - Verfahren zur herstellung von filmen oder schichten - Google Patents

Verfahren zur herstellung von filmen oder schichten

Info

Publication number
ATE480604T1
ATE480604T1 AT99973059T AT99973059T ATE480604T1 AT E480604 T1 ATE480604 T1 AT E480604T1 AT 99973059 T AT99973059 T AT 99973059T AT 99973059 T AT99973059 T AT 99973059T AT E480604 T1 ATE480604 T1 AT E480604T1
Authority
AT
Austria
Prior art keywords
organic
layers
producing film
substrate
complex
Prior art date
Application number
AT99973059T
Other languages
English (en)
Inventor
Poopathy Kathirgamanathan
Original Assignee
Merck Patent Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Patent Gmbh filed Critical Merck Patent Gmbh
Application granted granted Critical
Publication of ATE480604T1 publication Critical patent/ATE480604T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent materials, e.g. electroluminescent or chemiluminescent
    • C09K11/06—Luminescent materials, e.g. electroluminescent or chemiluminescent containing organic luminescent materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • H10K85/351—Metal complexes comprising lanthanides or actinides, e.g. comprising europium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroluminescent Light Sources (AREA)
  • Formation Of Insulating Films (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
  • Liquid Crystal Substances (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Chemical Vapour Deposition (AREA)
AT99973059T 1998-12-02 1999-12-01 Verfahren zur herstellung von filmen oder schichten ATE480604T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9826405.4A GB9826405D0 (en) 1998-12-02 1998-12-02 Method for forming films or layers
PCT/GB1999/004030 WO2000032719A1 (en) 1998-12-02 1999-12-01 Method for forming films or layers

Publications (1)

Publication Number Publication Date
ATE480604T1 true ATE480604T1 (de) 2010-09-15

Family

ID=10843457

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99973059T ATE480604T1 (de) 1998-12-02 1999-12-01 Verfahren zur herstellung von filmen oder schichten

Country Status (14)

Country Link
US (1) US6605317B1 (de)
EP (1) EP1144544B1 (de)
JP (1) JP4704567B2 (de)
KR (1) KR20010081055A (de)
CN (1) CN1335880A (de)
AT (1) ATE480604T1 (de)
AU (1) AU757859B2 (de)
BR (1) BR9916924A (de)
CA (1) CA2352882A1 (de)
DE (1) DE69942748D1 (de)
GB (1) GB9826405D0 (de)
ID (1) ID29952A (de)
MX (1) MXPA01005538A (de)
WO (1) WO2000032719A1 (de)

Families Citing this family (34)

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GB9823761D0 (en) * 1998-11-02 1998-12-23 South Bank Univ Entpr Ltd Novel electroluminescent materials
GB9826407D0 (en) 1998-12-02 1999-01-27 South Bank Univ Entpr Ltd Novel electroluminescent materials
JP4211211B2 (ja) * 2000-09-29 2009-01-21 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンス素子および有機エレクトロルミネッセンス素子用金属錯体の形成方法
GB0028439D0 (en) * 2000-11-21 2001-01-10 South Bank Univ Entpr Ltd Elecroluminescent device
WO2002075820A1 (en) * 2001-03-16 2002-09-26 Elam-T Limited Electroluminescent devices
GB0109759D0 (en) * 2001-04-20 2001-06-13 Elam T Ltd Green light emitting electroluminescent material
GB0109758D0 (en) * 2001-04-20 2001-06-13 Elam T Ltd Mixed metal organic complexes
GB0109755D0 (en) 2001-04-20 2001-06-13 Elam T Ltd Devices incorporating mixed metal organic complexes
TWI303533B (en) * 2001-06-15 2008-11-21 Oled T Ltd Electroluminescent devices
GB0116644D0 (en) 2001-07-09 2001-08-29 Elam T Ltd Electroluminescent materials and devices
EP1414927A1 (de) 2001-08-04 2004-05-06 Elam-T Limited Elektrolumineszierende vorrichtung
GB0119729D0 (en) * 2001-08-14 2001-10-03 Qinetiq Ltd Triboluminescent materials and devices
GB0119727D0 (en) * 2001-08-14 2001-10-03 Qinetiq Ltd Photoluminescent compounds
JP2003147346A (ja) * 2001-11-15 2003-05-21 Kansai Tlo Kk 希土類錯体を用いた光機能材料及び発光装置
KR20030060011A (ko) * 2002-01-05 2003-07-12 삼성전자주식회사 헤테로 고리화합물을 포함하는 전구체
GB0202997D0 (en) * 2002-02-08 2002-03-27 Elam T Ltd Method for forming electroluminescent devices
GB0219253D0 (en) * 2002-08-19 2002-09-25 Elam T Ltd Electroluminescent materials and device
US20050129978A1 (en) * 2002-12-25 2005-06-16 Semiconductor Energy Laboratory Co., Ltd. Electroluminescent device and method of manufacturing thereof
JP3750682B2 (ja) * 2003-06-26 2006-03-01 セイコーエプソン株式会社 有機ｅｌ装置とその製造方法、並びに電子機器
DE10347856B8 (de) * 2003-10-10 2006-10-19 Colorado State University Research Foundation, Fort Collins Halbleiterdotierung
US7985492B2 (en) 2004-08-07 2011-07-26 Merck Patent Gmbh Electroluminescent materials and devices
EP1780816B1 (de) * 2005-11-01 2020-07-01 Novaled GmbH Methode zur Herstellung eines elektronischen Bauelements mit einer Schichtstruktur und elektronisches Bauelement
EP1798306B1 (de) * 2005-12-07 2008-06-11 Novaled AG Verfahren zum Abscheiden eines Aufdampfmaterials
US7977862B2 (en) * 2005-12-21 2011-07-12 Lg Display Co., Ltd. Organic light emitting devices
EP2008318B1 (de) * 2006-03-21 2013-02-13 Novaled AG Verfahren zur herstellung von dotierten organischen halbleitermaterialien
GB2440368A (en) * 2006-07-26 2008-01-30 Oled T Ltd Cathode coating for an electroluminescent device
WO2008111850A2 (en) * 2007-03-15 2008-09-18 Universitetet I Oslo Synthesis of molecular metalorganic compounds
JP4924138B2 (ja) * 2007-03-27 2012-04-25 コニカミノルタホールディングス株式会社 エレクトロルミネッセンス素子および色変換フィルター
DE102008027005A1 (de) * 2008-06-05 2009-12-10 Merck Patent Gmbh Organische elektronische Vorrichtung enthaltend Metallkomplexe
DE102008056391B4 (de) * 2008-09-26 2021-04-01 Osram Oled Gmbh Organisches elektronisches Bauelement und Verfahren zu dessen Herstellung
GB201306365D0 (en) 2013-04-09 2013-05-22 Kathirgamanathan Poopathy Heterocyclic compounds and their use in electro-optical or opto-electronic devices
KR102849214B1 (ko) * 2019-09-11 2025-08-21 크레독시스 게엠베하 세륨(iv) 착물 및 유기 전자공학에서의 용도
US20230422602A1 (en) * 2020-11-16 2023-12-28 Credoxys GmbH Cerium-ethylenediamine ketone-type and cerium-salen-type complexes and use thereof in organic electronics
JP2024508788A (ja) 2021-03-10 2024-02-28 クレドクシス ゲーエムベーハー 新規なセリウム（ｉｖ）複合体及びそれらの有機電子工学における使用

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JP2505244B2 (ja) 1988-04-07 1996-06-05 出光興産株式会社 薄膜ｅｌ素子
JP2672325B2 (ja) 1988-05-07 1997-11-05 出光興産株式会社 薄膜ｅｌ素子
US5128587A (en) 1989-12-26 1992-07-07 Moltech Corporation Electroluminescent device based on organometallic membrane
JP3069139B2 (ja) 1990-03-16 2000-07-24 旭化成工業株式会社 分散型電界発光素子
US5364654A (en) * 1990-06-14 1994-11-15 Idemitsu Kosan Co., Ltd. Process for production of a thin film electrode and an electroluminescence device
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JP4514841B2 (ja) 1998-02-17 2010-07-28 淳二 城戸 有機エレクトロルミネッセント素子

Also Published As

Publication number Publication date
KR20010081055A (ko) 2001-08-25
JP4704567B2 (ja) 2011-06-15
DE69942748D1 (de) 2010-10-21
WO2000032719A1 (en) 2000-06-08
AU757859B2 (en) 2003-03-06
GB9826405D0 (en) 1999-01-27
ID29952A (id) 2001-10-25
CA2352882A1 (en) 2000-06-08
CN1335880A (zh) 2002-02-13
BR9916924A (pt) 2001-11-06
US6605317B1 (en) 2003-08-12
MXPA01005538A (es) 2003-07-14
EP1144544B1 (de) 2010-09-08
EP1144544A1 (de) 2001-10-17
AU1400900A (en) 2000-06-19
JP2002531913A (ja) 2002-09-24

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties