ATE512462T1 - Mikroelektronische wärmeabfuhrgehäusung und deren herstellungsverfahren - Google Patents
Mikroelektronische wärmeabfuhrgehäusung und deren herstellungsverfahrenInfo
- Publication number
- ATE512462T1 ATE512462T1 AT02392016T AT02392016T ATE512462T1 AT E512462 T1 ATE512462 T1 AT E512462T1 AT 02392016 T AT02392016 T AT 02392016T AT 02392016 T AT02392016 T AT 02392016T AT E512462 T1 ATE512462 T1 AT E512462T1
- Authority
- AT
- Austria
- Prior art keywords
- chip
- heat dissipation
- enclosure
- production process
- cavities
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
- H10W40/73—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control for cooling by change of state
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0275—Arrangements for coupling heat-pipes together or with other structures, e.g. with base blocks; Heat pipe cores
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/01—Manufacture or treatment
- H10W70/02—Manufacture or treatment of conductive package substrates serving as an interconnection, e.g. of metal plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D2015/0225—Microheat pipes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
- Y10T29/49353—Heat pipe device making
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Powder Metallurgy (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31530601P | 2001-08-28 | 2001-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE512462T1 true ATE512462T1 (de) | 2011-06-15 |
Family
ID=23223806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02392016T ATE512462T1 (de) | 2001-08-28 | 2002-08-28 | Mikroelektronische wärmeabfuhrgehäusung und deren herstellungsverfahren |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US6935022B2 (de) |
| EP (1) | EP1296373B1 (de) |
| JP (1) | JP2003193114A (de) |
| AT (1) | ATE512462T1 (de) |
| ES (1) | ES2371726T3 (de) |
| SG (2) | SG152908A1 (de) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004077051A (ja) * | 2002-08-20 | 2004-03-11 | Sony Corp | 熱輸送装置およびその製造方法 |
| KR100609014B1 (ko) * | 2004-02-27 | 2006-08-03 | 삼성전자주식회사 | 박막 히트 스프레더 및 그의 제조 방법 |
| US7286359B2 (en) * | 2004-05-11 | 2007-10-23 | The U.S. Government As Represented By The National Security Agency | Use of thermally conductive vias to extract heat from microelectronic chips and method of manufacturing |
| JP4714434B2 (ja) * | 2004-07-20 | 2011-06-29 | 古河スカイ株式会社 | ヒートパイプヒートシンク |
| US20100229394A1 (en) * | 2004-12-31 | 2010-09-16 | Industrial Technology Research Institute | Method for fabricating wick microstructures in heat pipes |
| TWI276767B (en) * | 2004-12-31 | 2007-03-21 | Ind Tech Res Inst | Forming method for the micro wick structure inside the heat pipe |
| TWI288224B (en) * | 2005-04-08 | 2007-10-11 | Asustek Comp Inc | Manufacturing method of heat pipe |
| CN1329707C (zh) * | 2005-06-28 | 2007-08-01 | 杨洪武 | 集成热管散热器的内腔吸液支撑架 |
| TW200706100A (en) * | 2005-07-29 | 2007-02-01 | Hon Hai Prec Ind Co Ltd | Heat sink |
| TWI317414B (en) * | 2005-10-21 | 2009-11-21 | Foxconn Tech Co Ltd | Sintered heat pipe and method for manufacturing the same |
| US20080105413A1 (en) * | 2006-10-16 | 2008-05-08 | Yu-Huang Peng | Manufacturing Method of Water Block |
| JP5112101B2 (ja) * | 2007-02-15 | 2013-01-09 | 株式会社東芝 | 半導体パッケージ |
| US8356410B2 (en) * | 2007-06-13 | 2013-01-22 | The Boeing Company | Heat pipe dissipating system and method |
| US20100028192A1 (en) * | 2008-08-04 | 2010-02-04 | Foxconn Technology Co., Ltd. | Method for manufacturing a plate-type heat pipe |
| CN101754654A (zh) * | 2008-12-08 | 2010-06-23 | 富准精密工业(深圳)有限公司 | 传热基板及具有该传热基板的散热装置 |
| TW201113494A (en) * | 2009-10-08 | 2011-04-16 | Ying-Tung Chen | Heat dissipation structure and manufacturing method thereof |
| US8710526B2 (en) | 2011-08-30 | 2014-04-29 | Abl Ip Holding Llc | Thermal conductivity and phase transition heat transfer mechanism including optical element to be cooled by heat transfer of the mechanism |
| US8759843B2 (en) | 2011-08-30 | 2014-06-24 | Abl Ip Holding Llc | Optical/electrical transducer using semiconductor nanowire wicking structure in a thermal conductivity and phase transition heat transfer mechanism |
| US8723205B2 (en) | 2011-08-30 | 2014-05-13 | Abl Ip Holding Llc | Phosphor incorporated in a thermal conductivity and phase transition heat transfer mechanism |
| DE102012205590B4 (de) * | 2012-04-04 | 2023-11-02 | Robert Bosch Gmbh | Anordnung mit einem Leistungshalbleiter, einem Schaltungsträger, einem kapillaren und/oder porösen Körper und einer Wärmesenke, Verfahren zur Herstellung einer Anordnung und Verfahren zum Betrieb einer Kühlung eines Leistungshalbleiters mittels eines Wärmetransportmediums |
| CN103415192B (zh) * | 2013-08-20 | 2015-09-23 | 南京理工大学 | 蒸汽腔热管/微通道冷板复合结构均温装置 |
| US9903275B2 (en) | 2014-02-27 | 2018-02-27 | Pratt & Whitney Canada Corp. | Aircraft components with porous portion and methods of making |
| US9517507B2 (en) | 2014-07-17 | 2016-12-13 | Pratt & Whitney Canada Corp. | Method of shaping green part and manufacturing method using same |
| US11397057B2 (en) * | 2014-09-26 | 2022-07-26 | Asia Vital Components Co., Ltd. | Vapor chamber structure |
| WO2016071324A1 (en) * | 2014-11-03 | 2016-05-12 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Hermetically sealed heat pipe structure synthesized with support structure and method for producing it |
| US20160263656A1 (en) | 2015-03-12 | 2016-09-15 | Pratt & Whitney Canada Corp. | Method of forming a component from a green part |
| CN105157460A (zh) * | 2015-08-24 | 2015-12-16 | 东华大学 | 一种以氨水为介质,不锈钢为材质的脉动热管换热器 |
| BE1024200B1 (fr) * | 2016-05-13 | 2017-12-12 | Centre De Recherches Metallurgiques Asbl - Centrum Voor Research In De Metallurgie Vzw | Système de contrôle thermique dynamique par matériaux à changement de phase |
| CN112191842B (zh) * | 2020-09-10 | 2023-09-29 | 安徽德诠新材料科技有限公司 | 一种可多管烧结的导热管烧结模 |
| CN114054749B (zh) * | 2021-11-09 | 2024-06-18 | 深圳市长盈精密技术股份有限公司 | 填粉机 |
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-
2002
- 2002-08-28 US US10/229,831 patent/US6935022B2/en not_active Expired - Fee Related
- 2002-08-28 AT AT02392016T patent/ATE512462T1/de active
- 2002-08-28 SG SG200602209-9A patent/SG152908A1/en unknown
- 2002-08-28 JP JP2002248965A patent/JP2003193114A/ja active Pending
- 2002-08-28 SG SG200205231A patent/SG120884A1/en unknown
- 2002-08-28 ES ES02392016T patent/ES2371726T3/es not_active Expired - Lifetime
- 2002-08-28 EP EP02392016A patent/EP1296373B1/de not_active Expired - Lifetime
-
2005
- 2005-06-01 US US11/141,886 patent/US20060000584A1/en not_active Abandoned
- 2005-06-01 US US11/141,885 patent/US20050284616A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US6935022B2 (en) | 2005-08-30 |
| EP1296373A2 (de) | 2003-03-26 |
| EP1296373B1 (de) | 2011-06-08 |
| SG152908A1 (en) | 2009-06-29 |
| US20050284616A1 (en) | 2005-12-29 |
| US20030042006A1 (en) | 2003-03-06 |
| ES2371726T3 (es) | 2012-01-09 |
| SG120884A1 (en) | 2006-04-26 |
| JP2003193114A (ja) | 2003-07-09 |
| US20060000584A1 (en) | 2006-01-05 |
| EP1296373A3 (de) | 2006-10-04 |
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| Date | Code | Title | Description |
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| UEP | Publication of translation of european patent specification |
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