ATE533085T1 - Phasenänderungszusammensetzungen verwendende lithografieprozesse - Google Patents

Phasenänderungszusammensetzungen verwendende lithografieprozesse

Info

Publication number
ATE533085T1
ATE533085T1 AT05798639T AT05798639T ATE533085T1 AT E533085 T1 ATE533085 T1 AT E533085T1 AT 05798639 T AT05798639 T AT 05798639T AT 05798639 T AT05798639 T AT 05798639T AT E533085 T1 ATE533085 T1 AT E533085T1
Authority
AT
Austria
Prior art keywords
phase change
mold
lithography processes
optionally
change compositions
Prior art date
Application number
AT05798639T
Other languages
English (en)
Inventor
Wei Chen
Brian Harkness
Joan Sudbury-Holtschlag
Lenin Petroff
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Application granted granted Critical
Publication of ATE533085T1 publication Critical patent/ATE533085T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Silicon Polymers (AREA)
AT05798639T 2004-10-08 2005-09-23 Phasenänderungszusammensetzungen verwendende lithografieprozesse ATE533085T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61723304P 2004-10-08 2004-10-08
PCT/US2005/034044 WO2006041645A2 (en) 2004-10-08 2005-09-23 Lithography processes using phase change compositions

Publications (1)

Publication Number Publication Date
ATE533085T1 true ATE533085T1 (de) 2011-11-15

Family

ID=35660303

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05798639T ATE533085T1 (de) 2004-10-08 2005-09-23 Phasenänderungszusammensetzungen verwendende lithografieprozesse

Country Status (6)

Country Link
US (1) US8147742B2 (de)
EP (1) EP1807734B1 (de)
JP (1) JP4704434B2 (de)
KR (1) KR101226039B1 (de)
AT (1) ATE533085T1 (de)
WO (1) WO2006041645A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8101846B1 (en) * 2002-05-23 2012-01-24 Jon Murray Schroeder Solid state thermoelectric power converter
US9040090B2 (en) 2003-12-19 2015-05-26 The University Of North Carolina At Chapel Hill Isolated and fixed micro and nano structures and methods thereof
EP3242318A1 (de) 2003-12-19 2017-11-08 The University of North Carolina at Chapel Hill Monodisperses produkt von mikrostrukturen oder nanostrukturen
US20070269747A1 (en) * 2004-09-13 2007-11-22 Maneesh Bahadur Lithography Technique Using Silicone Molds
US20060144274A1 (en) * 2004-12-30 2006-07-06 Asml Netherlands B.V. Imprint lithography
TWI432904B (zh) * 2006-01-25 2014-04-01 Dow Corning 用於微影技術之環氧樹脂調配物
JP5438285B2 (ja) * 2008-05-23 2014-03-12 昭和電工株式会社 転写材料用硬化性組成物および微細パターン形成方法
US9099738B2 (en) * 2008-11-03 2015-08-04 Basvah Llc Lithium secondary batteries with positive electrode compositions and their methods of manufacturing
NL2005263A (en) * 2009-09-29 2011-03-30 Asml Netherlands Bv Imprint lithography.
US9470395B2 (en) 2013-03-15 2016-10-18 Abl Ip Holding Llc Optic for a light source
CA3015068C (en) 2013-05-10 2019-07-16 Abl Ip Holding Llc Silicone optics
US10497564B1 (en) * 2017-07-17 2019-12-03 Northrop Grumman Systems Corporation Nano-imprinting using high-pressure crystal phase transformations
JP7335217B2 (ja) * 2020-09-24 2023-08-29 信越化学工業株式会社 感光性樹脂組成物、パターン形成方法、硬化被膜形成方法、層間絶縁膜、表面保護膜、及び電子部品

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NL129346C (de) * 1966-06-23
US3989667A (en) * 1974-12-02 1976-11-02 Dow Corning Corporation Olefinic siloxanes as platinum inhibitors
US4087585A (en) * 1977-05-23 1978-05-02 Dow Corning Corporation Self-adhering silicone compositions and preparations thereof
JPS61225253A (ja) * 1985-03-29 1986-10-07 Toray Silicone Co Ltd 熱硬化性樹脂組成物
US4584361A (en) * 1985-06-03 1986-04-22 Dow Corning Corporation Storage stable, one part polyorganosiloxane compositions
US5036117A (en) * 1989-11-03 1991-07-30 Dow Corning Corporation Heat-curable silicone compositions having improved bath life
JPH04222871A (ja) 1990-12-25 1992-08-12 Toray Dow Corning Silicone Co Ltd 硬化性オルガノポリシロキサン組成物
JP3029680B2 (ja) * 1991-01-29 2000-04-04 東レ・ダウコーニング・シリコーン株式会社 オルガノペンタシロキサンおよびその製造方法
JP3270489B2 (ja) 1991-01-30 2002-04-02 東レ・ダウコーニング・シリコーン株式会社 硬化性オルガノポリシロキサン組成物
US5380527A (en) * 1991-08-26 1995-01-10 Dow Corning Corporation Alkylmethylsiloxane mixtures for skin care
JPH0580530A (ja) * 1991-09-24 1993-04-02 Hitachi Ltd 薄膜パターン製造方法
US5248715A (en) * 1992-07-30 1993-09-28 Dow Corning Corporation Self-adhering silicone rubber with low compression set
US5512131A (en) * 1993-10-04 1996-04-30 President And Fellows Of Harvard College Formation of microstamped patterns on surfaces and derivative articles
US5493041A (en) * 1995-07-21 1996-02-20 Dow Corning Corporation Lightly crosslinked poly(n-alkylmethylsiloxanes) and methods of producing same
US6039897A (en) * 1996-08-28 2000-03-21 University Of Washington Multiple patterned structures on a single substrate fabricated by elastomeric micro-molding techniques
US6344160B1 (en) * 1996-09-17 2002-02-05 Compcast Technologies, Llc Method for molding composite structural plastic and objects molded thereby
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US6921615B2 (en) 2000-07-16 2005-07-26 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods for imprint lithography
US20020130444A1 (en) * 2001-03-15 2002-09-19 Gareth Hougham Post cure hardening of siloxane stamps for microcontact printing
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US6815486B2 (en) * 2002-04-12 2004-11-09 Dow Corning Corporation Thermally conductive phase change materials and methods for their preparation and use
US6872439B2 (en) * 2002-05-13 2005-03-29 The Regents Of The University Of California Adhesive microstructure and method of forming same
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US20050038180A1 (en) * 2003-08-13 2005-02-17 Jeans Albert H. Silicone elastomer material for high-resolution lithography

Also Published As

Publication number Publication date
KR101226039B1 (ko) 2013-01-25
WO2006041645A2 (en) 2006-04-20
US20070290387A1 (en) 2007-12-20
US8147742B2 (en) 2012-04-03
WO2006041645A3 (en) 2006-07-20
JP4704434B2 (ja) 2011-06-15
KR20070102658A (ko) 2007-10-19
JP2008515664A (ja) 2008-05-15
EP1807734A2 (de) 2007-07-18
EP1807734B1 (de) 2011-11-09

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